公开(公告)号：US06461790B1

公开(公告)日：2002-10-08

申请号：US09658604

申请日：2000-09-08

申请人： Jun Hatakeyama ,  Jun Watanabe ,  Yuji Harada ,  Mutsuo Nakashima ,  Masaru Sasago ,  Shinji Kishimura

发明人： Jun Hatakeyama ,  Jun Watanabe ,  Yuji Harada ,  Mutsuo Nakashima ,  Masaru Sasago ,  Shinji Kishimura

IPC分类号： G03F7039

CPC分类号： G03F7/0046 ,  G03F7/0045 ,  G03F7/0382 ,  G03F7/0392 ,  Y10S430/106

摘要： Polymers comprising fluorinated vinyl phenol units and having acid labile groups partially introduced are novel. Using such polymers, resist compositions featuring transparency to excimer laser and alkali solubility are obtained.

摘要翻译： 包含氟化乙烯基苯酚单元和部分引入酸不稳定基团的聚合物是新颖的。 使用这种聚合物，获得具有对准分子激光的透明度和碱溶性的抗蚀剂组合物。

公开(公告)号：US06461789B1

公开(公告)日：2002-10-08

申请号：US09643969

申请日：2000-08-23

申请人： Jun Hatakeyama ,  Jun Watanabe ,  Yuji Harada

发明人： Jun Hatakeyama ,  Jun Watanabe ,  Yuji Harada

IPC分类号： G03F7038

CPC分类号： G03F7/0382 ,  G03F7/0046 ,  G03F7/0392 ,  G03F7/0397 ,  Y10S430/106 ,  Y10S430/108

摘要： Polymers comprising fluorinated vinyl alcohol units and having acid labile groups partially introduced are novel. Using such polymers, resist compositions featuring transparency to excimer laser light and alkali solubility are obtained.

摘要翻译： 包含氟化乙烯醇单元和部分引入酸不稳定基团的聚合物是新颖的。 使用这种聚合物，获得具有对准分子激光的透明度和碱溶性的抗蚀剂组合物。

公开(公告)号：US06861197B2

公开(公告)日：2005-03-01

申请号：US10084828

申请日：2002-02-28

申请人： Yuji Harada ,  Jun Watanabe ,  Jun Hatakeyama ,  Yoshio Kawai ,  Masaru Sasago ,  Masayuki Endo ,  Shinji Kishimura ,  Michitaka Ootani ,  Satoru Miyazawa ,  Kentaro Tsutsumi ,  Kazuhiko Maeda

发明人： Yuji Harada ,  Jun Watanabe ,  Jun Hatakeyama ,  Yoshio Kawai ,  Masaru Sasago ,  Masayuki Endo ,  Shinji Kishimura ,  Michitaka Ootani ,  Satoru Miyazawa ,  Kentaro Tsutsumi ,  Kazuhiko Maeda

IPC分类号： C08F220/22 ,  G03F7/004 ,  G03F7/039

CPC分类号： C08F220/22 ,  G03F7/0046 ,  G03F7/0397 ,  Y10S430/108 ,  Y10S430/126 ,  Y10S430/168

摘要： A base polymer having incorporated an ester group having a fluorinated alicyclic unit is provided. A resist composition comprising the polymer is sensitive to high-energy radiation, and has excellent sensitivity at a wavelength of less than 200 nm, significantly improved transparency by virtue of the fluorinated alicyclic units incorporated as well as satisfactory plasma etching resistance. The resist composition has a low absorption at the exposure wavelength of a F2 laser and is ideal as a micropatterning material in VLSI fabrication.

摘要翻译： 提供了具有含有氟化脂环族单元的酯基的基础聚合物。 包含聚合物的抗蚀剂组合物对高能量辐射敏感，并且在小于200nm的波长下具有优异的灵敏度，由于所掺入的氟化脂环族单元以及令人满意的等离子体耐蚀刻性而显着提高了透明度。 抗蚀剂组合物在F2激光的曝光波长处具有低吸收，并且在VLSI制造中是理想的微图案材料。

公开(公告)号：US06623909B2

公开(公告)日：2003-09-23

申请号：US09870745

申请日：2001-06-01

申请人： Jun Hatakeyama ,  Toshiaki Takahashi ,  Toshinobu Ishihara ,  Jun Watanabe ,  Tohru Kubota ,  Yoshio Kawai

发明人： Jun Hatakeyama ,  Toshiaki Takahashi ,  Toshinobu Ishihara ,  Jun Watanabe ,  Tohru Kubota ,  Yoshio Kawai

IPC分类号： G03F7038

CPC分类号： C08G77/24 ,  G03F7/0045 ,  G03F7/0757 ,  Y10S430/106 ,  Y10S430/108

摘要： Polymers comprising recurring units of formula (1) are provided wherein R1 is a straight, branched or cyclic divalent C1-20 hydrocarbon group or a bridged cyclic hydrocarbon group, R is hydrogen atom or an acid labile group, 0≦m≦3, 0≦n≦3 and 0≦m+n≦6. Using the polymers, chemical amplification positive resist compositions featuring low absorption of F2 excimer laser light are obtained.

摘要翻译： 提供了包含式（1）的重复单元的聚合物，其中R 1是直链，支链或环状二价C 1-20烃基或桥连环烃基，R是氢原子或酸不稳定基团，0≤m <= 3,0 <= n <= 3，0 <= m + n <= 6。使用聚合物，获得具有F2受激准分子激光的低吸收性的化学放大阳性抗蚀剂组合物。

公开(公告)号：US06582880B2

公开(公告)日：2003-06-24

申请号：US09947765

申请日：2001-09-07

申请人： Yuji Harada ,  Jun Watanabe ,  Jun Hatakeyama ,  Yoshio Kawai ,  Masaru Sasago ,  Masayuki Endo ,  Shinji Kishimura ,  Michitaka Ootani ,  Satoru Miyazawa ,  Kentaro Tsutsumi ,  Kazuhiko Maeda

发明人： Yuji Harada ,  Jun Watanabe ,  Jun Hatakeyama ,  Yoshio Kawai ,  Masaru Sasago ,  Masayuki Endo ,  Shinji Kishimura ,  Michitaka Ootani ,  Satoru Miyazawa ,  Kentaro Tsutsumi ,  Kazuhiko Maeda

IPC分类号： G03F7004

CPC分类号： G03F7/0392 ,  C08F220/22 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0397 ,  Y10S430/108 ,  Y10S430/111

摘要： An acrylate resin containing fluorinated alkyl groups in ester side chains has high transmittance to VUV radiation. A resist composition using the resin as a base polymer is sensitive to high-energy radiation, has excellent sensitivity and resolution, and is suited for lithographic microprocessing.

公开(公告)号：US06333436B1

公开(公告)日：2001-12-25

申请号：US09688365

申请日：2000-10-12

申请人： Matsuo Nakashima ,  Jun Hatakeyama ,  Jun Watanabe ,  Yuji Harada

发明人： Matsuo Nakashima ,  Jun Hatakeyama ,  Jun Watanabe ,  Yuji Harada

IPC分类号： C07C4122

CPC分类号： C07C43/313 ,  C07C43/225 ,  C07C69/017 ,  C07C69/712 ,  C07C69/96 ,  C07F7/1804 ,  Y02P20/55

摘要： Styrene derivatives of formula (1) are novel wherein R1 is H, F, C1-20 alkyl or fluorinated C1-20 alkyl, R2 in cis or trans conformation is F, C1-20 alkyl or fluorinated C1-20 alkyl, R3 is a phenol protecting group, p, q and r are integers in the range of 0≦p

摘要翻译： 式（1）的苯乙烯衍生物是新的，其中R 1是H，F，C 1-20烷基或氟化C 1-20烷基，R 2在顺式或反式构象中是F，C 1-20烷基或氟化C 1-20烷基，R 3是 苯酚保护基，p，q和r为0 <= p <5,0 <= q <5,0

公开(公告)号：US10534112B2

公开(公告)日：2020-01-14

申请号：US16230497

申请日：2018-12-21

申请人： Kohji Sakai ,  Miho Higuchi ,  Jun Watanabe

发明人： Kohji Sakai ,  Miho Higuchi ,  Jun Watanabe

IPC分类号： G02B3/00 ,  G02B27/48 ,  G02B27/01 ,  B60K35/00 ,  G03B29/00 ,  G03B21/625 ,  H04N9/31 ,  G03B21/20 ,  G03B21/00

摘要： A microlens array includes N lenses ranging from a 1st lens to an Nth lens and a lens arrangement area. N is a positive integer. The lens arrangement area has the N lenses arranged in array. The lens arrangement area receives light emitted from a light source. An ith (i being 1st to Nth) lens satisfies a conditional expression below: −20°≤θ≤20° where θ denotes an angle formed by a main-axis orientation of double refraction and a reference orientation.

公开(公告)号：US10203431B2

公开(公告)日：2019-02-12

申请号：US15719213

申请日：2017-09-28

申请人： Kohji Sakai ,  Miho Higuchi ,  Jun Watanabe

发明人： Kohji Sakai ,  Miho Higuchi ,  Jun Watanabe

IPC分类号： G02B3/00 ,  G03B29/00 ,  G02B27/01 ,  G02B27/48 ,  B60K35/00 ,  G03B21/20 ,  G03B21/00

摘要： A microlens array includes N lenses ranging from a 1st lens to an Nth lens and a lens arrangement area. N is a positive integer. The lens arrangement area has the N lenses arranged in array. The lens arrangement area receives light emitted from a light source. An ith (i being 1st to Nth) lens satisfies a conditional expression below: −20°≤θ≤20° where θ denotes an angle formed by a main-axis orientation of double refraction and a reference orientation.

公开(公告)号：US20180250948A1

公开(公告)日：2018-09-06

申请号：US15904480

申请日：2018-02-26

申请人： Yasunari Harada ,  Jun Watanabe ,  Tetsuyoshi Nakata ,  Hideaki Iijima ,  Toshiaki Hosokawa ,  Shunsuke Shitaoka

发明人： Yasunari Harada ,  Jun Watanabe ,  Tetsuyoshi Nakata ,  Hideaki Iijima ,  Toshiaki Hosokawa ,  Shunsuke Shitaoka

IPC分类号： B41J2/21 ,  B41J2/155 ,  B41J2/165

摘要： A liquid droplet discharging apparatus includes a plurality of nozzles to discharge a liquid droplet onto a medium and a liquid droplet discharging controller to receive image data. The liquid droplet discharging controller controls each of the nozzles to discharge the liquid droplet in an amount defined by the image data onto a target discharging position on the medium, which corresponds to a pixel position defined by the image data. The liquid droplet discharging controller controls at least one of the nozzles to discharge the liquid droplet for a controlled number of times smaller than a number of times N representing an integer not smaller than 2 in an amount greater than the amount defined by the image data onto the target discharging position on the medium. A frequency recorder records the controlled number of times of discharging for each of the at least one of the nozzles.

公开(公告)号：US20160107467A1

公开(公告)日：2016-04-21

申请号：US14847636

申请日：2015-09-08

申请人： Tetsuyoshi NAKATA ,  Yasunari Harada ,  Jun Watanabe ,  Tomoko Fukasawa ,  Ryuuichi Satoh ,  Hiroki Tanaka ,  Toshiaki Hosokawa

发明人： Tetsuyoshi NAKATA ,  Yasunari Harada ,  Jun Watanabe ,  Tomoko Fukasawa ,  Ryuuichi Satoh ,  Hiroki Tanaka ,  Toshiaki Hosokawa

IPC分类号： B41J29/38

CPC分类号： B41J29/38 ,  B41J2/2135 ,  B41J3/39

摘要： A printer including an optical moving amount calculator, an angle calculator, and a moving amount corrector is provided. The optical moving amount calculator calculates a moving amount of the printer or an object to be irradiated after a movement thereof, based on a difference in image data generated before and after the movement. The image data is generated by emitting light to the print medium or the object and receiving light reflected therefrom. The angle calculator calculates a deviation angle of an installation angle of the optical moving amount calculator installed in the printer, based on a calibration moving amount of the printer or the object after a calibration movement thereof that is a parallel translation. The moving amount corrector corrects the moving amount of the printer after the movement thereof, based on the calculated deviation angle of the optical moving amount calculator.

摘要翻译： 提供一种包括光学移动量计算器，角度计算器和移动量校正器的打印机。 光学移动量计算器基于移动之前和之后产生的图像数据的差异来计算打印机或其移动后的被照射物体的移动量。 通过向打印介质或物体发射光并接收从其反射的光来产生图像数据。 角度计算器基于打印机或对象在其平行翻译的校准移动之后的校准移动量来计算安装在打印机中的光学移动量计算器的安装角度的偏离角度。 移动量校正器基于所计算的光学移动量计算器的偏差角度来校正其移动之后的打印机的移动量。