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公开(公告)号:US20090151478A1
公开(公告)日:2009-06-18
申请号:US12301596
申请日:2007-05-15
IPC分类号: G01L1/14
摘要: In an array type capacitance sensor (1), a slit (2b) is provided between each pair of adjacent ones of multiple movable electrodes (6) on a movable-electrode-side substrate (2) so as to extend in parallel with the movable electrodes (6). This allows providing an array type capacitance sensor capable of being produced inexpensively and measuring pressure precisely and stably even on a curved surface.
摘要翻译: 在阵列型电容传感器(1)中,在可动电极侧基板(2)上的每对相邻的多个可动电极(6)之间设置狭缝(2b),以与可动电极侧基板 电极(6)。 这允许提供一种能够廉价地生产并且甚至在弯曲表面上精确且稳定地测量压力的阵列式电容式传感器。