Tunable-wavelength optical filter and method of manufacturing the same
    21.
    发明申请
    Tunable-wavelength optical filter and method of manufacturing the same 有权
    可调谐波长光学滤波器及其制造方法

    公开(公告)号:US20050157392A1

    公开(公告)日:2005-07-21

    申请号:US11045554

    申请日:2005-01-27

    摘要: An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.

    摘要翻译: 公开了一种具有法布里 - 珀罗结构的有源型可调谐波长滤光器。 一种可调波长滤光器,包括下反射镜,其中硅膜和氧化物膜顺次层叠在多层中,并且硅膜层压在最高部分上; 其中硅膜和氧化物膜顺次层叠在多层中并且硅膜层压在最高部分上并且与下反射镜间隔预定距离的上反射镜; 用于将下反射镜和上反射镜连接和支撑到半导体基板的连接装置; 以及用于通过静电力控制下反射镜和上反射镜之间的间隙的电极焊盘及其制造方法。 由此,通过利用静电力微细地驱动由硅膜和氧化膜构成的上反射镜和下反射镜,可以有选择地发射透射光相对于入射光的波长。