公开(公告)号：US20080135527A1

公开(公告)日：2008-06-12

申请号：US11736594

申请日：2007-04-18

Applicant: Yu-Fu Kang

Inventor： Yu-Fu Kang

IPC: H05B1/00 ,  C23C14/04

CPC classification number: H05B3/265 ,  C23C14/185

Abstract: A superalloy micro-heating apparatus includes a substrate, an isolation layer on a front surface of the substrate, a patterned heating resistor, and a contact electrode on the heating resistor. The material of the heating resistor includes superalloy material that has the advantages of corrosion-resistance, high-resistance, rapid-thermal increase, and high-temperature resistance. For these reasons, the superalloy micro-heating resistor has an improved reliability and yield.

Abstract translation: 超合金微加热装置包括基板，衬底前表面上的隔离层，图案化加热电阻器和加热电阻器上的接触电极。 加热电阻器的材料包括具有耐腐蚀性，高电阻，快速热增加和耐高温性的优点的超合金材料。 由于这些原因，超级合金微加热电阻器的可靠性和产率提高了。