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21.发明申请公开(公告)号：US20130062710A1
公开(公告)日：2013-03-14
申请号：US13230264
申请日：2011-09-12
申请人： Alfons Dehe
发明人： Alfons Dehe
CPC分类号： H04R7/125 , B81B2201/0257 , B81B2203/0127 , B81C1/00158 , B81C1/00476 , B81C2201/0167 , G01L9/0016 , H04R1/005 , H04R7/14 , H04R7/24 , H04R19/005 , H04R31/003 , H04R2201/003 , H04R2440/05
摘要： A micro electrical mechanical system includes a membrane structure and a backplate structure. The backplate structure includes a backplate material and at least one pre-tensioning element mechanically connected to the backplate material. The at least one pre-tensioning element causes a mechanical tension on the backplate material for a bending deflection of the backplate structure in a direction away from the membrane structure.
摘要翻译： 微电气机械系统包括膜结构和背板结构。 背板结构包括背板材料和机械地连接到背板材料的至少一个预张紧元件。 所述至少一个预张紧元件在所述背板材料上引起机械张力，以使所述背板结构沿远离所述膜结构的方向弯曲偏转。
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公开(公告)号：US20130047734A1
公开(公告)日：2013-02-28
申请号：US13593311
申请日：2012-08-23
CPC分类号： G01L9/0016 , G01L9/0045
摘要： A resonant pressure sensor including one or more resonant-type strain gauges arranged on a diaphragm may include a sensor substrate made of silicon and including one surface on which one or more resonant-type strain gauge elements are arranged and the other surface which is polished to have a thickness corresponding to the diaphragm, a base substrate made of silicon and including one surface directly bonded with the other surface of the sensor substrate, a concave portion formed in a portion of the base substrate bonding with the sensor substrate, substantially forming the diaphragm in the sensor substrate, and including a predetermined gap that does not restrict a movable range of the diaphragm due to foreign substances and suppresses vibration of the diaphragm excited by vibration of the resonant-type strain gauge elements, one or more conducting holes, and a fluid.
摘要翻译： 包括设置在隔膜上的一个或多个谐振型应变计的共振压力传感器可以包括由硅制成的传感器基板，并且包括一个表面，一个表面上布置有一个或多个谐振型应变计元件，另一个表面抛光到 具有对应于隔膜的厚度，由硅制成的基底基板，其包括与传感器基板的另一表面直接接合的一个表面;凹部，形成在与传感器基板接合的基底部分的一部分中，基本上形成隔膜 并且包括预定的间隙，其不会由于异物而限制隔膜的可移动范围，并且抑制由共振型应变计元件的振动激励的隔膜的振动，一个或多个导电孔和 流体。
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公开(公告)号：US20120067125A1
公开(公告)日：2012-03-22
申请号：US13321980
申请日：2010-05-26
IPC分类号： G01H13/00
CPC分类号： G01L9/0016 , G01L1/162
摘要： A physical quantity sensor includes a beam-like vibrating body and a fixing part supporting both ends of the beam-like vibrating body. A driving element is formed on a central portion of the beam-like vibrating body, and feedback elements are formed on both ends. A physical quantity acting on the beam-like vibrating body is detected by causing natural vibration in the beam-like vibrating body and detecting a natural frequency of the vibrating body. This enables reliable detection of a physical quantity, such as a strain or load, acting on an object.
摘要翻译： 物理量传感器包括梁状振动体和支撑梁状振动体两端的固定部。 驱动元件形成在梁状振动体的中心部分上，反馈元件形成在两端。 通过在梁状振动体中引起固有振动并检测振动体的固有频率来检测作用在梁状振动体上的物理量。 这使得能够可靠地检测作用在物体上的物理量，例如应变或负载。
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24.发明申请Method and Apparatus for Determining at Least One Measured Variable of a Medium 审中-公开用于确定介质的最小一个测量变量的方法和装置公开(公告)号：US20100030486A1
公开(公告)日：2010-02-04
申请号：US12086644
申请日：2006-11-24
申请人： Sergej Lopatin , Helmut Pfeiffer
发明人： Sergej Lopatin , Helmut Pfeiffer
CPC分类号： G01N29/022 , G01L9/0016 , G01L9/0022 , G01N29/036 , G01N2291/02872
摘要： A method for determining and/or monitoring at least one measured variable of an at least partially gaseous medium with at least one mechanically oscillatable unit, which is excited to execute mechanical oscillations, and whose mechanical oscillations are received and evaluated. At least one characteristic curve is stored, which describes for at least one gas or a gas mixture at least the dependence of at least one characteristic variable of the mechanical oscillations of the mechanically oscillatable unit on pressure; at least the characteristic variable of the mechanical oscillations of the mechanically oscillatable unit is determined; the determined characteristic variable is compared with the stored characteristic curve; and, starting from the comparison of the determined characteristic variable with the stored characteristic curve, the measured variable of the medium is determined. Further, an apparatus for determining and/or monitoring the measured variable is envisioned.
摘要翻译： 一种用至少一个机械振荡单元来确定和/或监测至少一个测量的至少部分气体介质的变量的方法，所述至少一个机械振荡单元被激励以执行机械振荡，并且其机械振荡被接收和评估。 存储至少一个特性曲线，其至少描述了至少一种气体或气体混合物，至少一个机械振荡单元的机械振荡的至少一个特征变量对压力的依赖性; 至少确定机械振荡单元的机械振荡的特征变量; 将确定的特征变量与存储的特性曲线进行比较; 并且从确定的特征变量与存储的特性曲线的比较开始，确定介质的测量变量。 此外，设想了用于确定和/或监视测量变量的装置。
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公开(公告)号：US5569855A
公开(公告)日：1996-10-29
申请号：US492833
申请日：1995-06-19
申请人： Werner Schomburg , Richard Rapp , Klaus Kadel
发明人： Werner Schomburg , Richard Rapp , Klaus Kadel
CPC分类号： F04B43/043 , G01L7/082 , G01L9/0016 , G03F7/00
摘要： In a method of manufacturing frame-mounted membranes, a first membrane layer is formed on a substrate and openings are formed in this membrane layer which are then covered by a second membrane layer, a frame structure is formed on the membrane layers around the openings and the membrane layers with the frame structure are separated from the substrate to provide the frame-mounted membranes.
摘要翻译： 在框架安装膜的制造方法中，在基板上形成第一膜层，在该膜层上形成开口，然后被第二膜层覆盖，在开口周围的膜层上形成框架结构， 具有框架结构的膜层与衬底分离以提供框架安装的膜。
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公开(公告)号：US5142912A
公开(公告)日：1992-09-01
申请号：US538956
申请日：1990-06-15
申请人： Richard H. Frische
发明人： Richard H. Frische
CPC分类号： G01L9/0016 , G01L9/0019 , G01L9/06
摘要： Pressure sensor having a silicon diaphragm chip. The diaphragm in the chip is less than 200 mils in diameter and has an ultrasonic resonant frequency that varies with pressure exerted on it. The chip has resistors with values that change with fluctuation of the chip. The changing resistor values are fed to a supporting electronics that detect the resonant frequency of the diaphragm and indicate measurement of the pressure exerted on the diaphragm. The supporting electronics feed back a signal corresponding to the detected resonant frequency for a sensed pressure to a piezoelectric device that drives the diaphragm to sustain its vibration.
摘要翻译： 压力传感器具有硅膜片芯片。 芯片中的隔膜的直径小于200密耳，并且具有随着施加的压力而变化的超声共振频率。 该芯片具有随着芯片波动而变化的值的电阻。 改变的电阻值被馈送到检测隔膜的谐振频率的支撑电子装置，并指示施加在隔膜上的压力的测量。 辅助电子装置将检测到的谐振频率对应于感测到的压力的信号反馈到驱动隔膜以维持其振动的压电装置。
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公开(公告)号：US4098133A
公开(公告)日：1978-07-04
申请号：US797223
申请日：1977-05-16
CPC分类号： G01L9/0016
摘要： A fluid pressure responsive transducer is disclosed of the kind having a thin flat vibrating diaphragm serving as a wall of a continuous pressure chamber for converting a variable fluid pressure magnitude directly into a variable frequency electrical signal. The thin flat diaphragm, secured only at its periphery to the chamber, becomes progressively stiffer as it is progressively deformed by fluid pressure loading more and more from its flat or unstressed position. A dual cavity configuration of the pressure chamber is formed by a rigid divider wall with a restricted passage therethrough. The effects of disturbing acoustic waves which might otherwise be generated interior of the fluid chamber or within pneumatic lines coupled thereto are thus suppressed.
摘要翻译： 公开了一种具有用作将可变流体压力幅度直接转换为可变频率电信号的连续压力室的壁的薄平面振动膜的液压响应传感器。 只有在其周边固定到腔室上的薄平膜片随着流体压力的增加而逐渐变硬，从而使其平坦或不受应力的位置越来越多。 压力室的双腔结构由具有限制通道的刚性分隔壁形成。 因此抑制了可能在液体室内部或与其连接的气动管路中产生的干扰声波的影响。
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公开(公告)号：US3762223A
公开(公告)日：1973-10-02
申请号：US3762223D
申请日：1971-09-10
申请人： CONRAC CORP
CPC分类号： G01L9/0016
摘要： Fluid pressure is sensed by applying it differentially to a diaphragm, causing the diaphragm to vibrate at a natural frequency, and sensing the stressing of the diaphragm in terms of the resulting change in the natural frequency. The frequency of vibration is measured essentially by counting cycles and offsetting the count to introduce a reference pressure. Improved accuracy is obtained by forming the diaphragm of preferred magnetic materials having low temperature dependence of elasticity.
摘要翻译： 通过将其差分地施加到隔膜来感测流体压力，导致隔膜以固有频率振动，并且根据所产生的固有频率的变化感测隔膜的应力。 振动的频率基本上通过计数循环和偏移计数来引入参考压力来测量。 通过形成具有低的弹性温度依赖性的优选磁性材料的隔膜来获得提高的精度。
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公开(公告)号：US3727463A
公开(公告)日：1973-04-17
申请号：US3727463D
申请日：1971-03-18
申请人： KOLLSMAN INSTR CORP
发明人： INTRAUB J
CPC分类号： G01L9/0016
摘要： A pressure measuring system utilizes an aneroid capsule as the frequency determining mechanical feedback element of an electrical oscillator, the capsule having closely spaced diaphragm walls, each carrying a separate electromagnetic element cooperating with a separate magnetic yoke assembly. Each electromagnetic element is a copper sleeve defining a shorted turn at its free end that is axially movable in an annular gap defined by the magnetic yoke. Each yoke assembly includes a soft iron core section projecting through a cylindrical pole face to define a radial flux field in the annular gap for coupling with the shorted turn.
摘要翻译： 压力测量系统利用无气囊作为电振荡器的频率确定机械反馈元件，该胶囊具有紧密隔开的隔膜壁，每个隔膜壁承载与单独的磁轭组件配合的单独的电磁元件。 每个电磁元件是铜套筒，其在其自由端限定短路匝，其可在由磁轭限定的环形间隙中轴向移动。 每个轭组件包括柔性铁芯部分，其突出通过圆柱形极面以在环形间隙中限定径向通量场，用于与短路匝耦合。
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公开(公告)号：US09719877B2
公开(公告)日：2017-08-01
申请号：US14634806
申请日：2015-02-28
发明人： Robert J. Ferran
CPC分类号： G01L9/0072 , G01L9/0016 , G01L9/12 , G01L27/005
摘要： A system and method mitigate the effects of these external vibrations on a capacitance diaphragm gauge by sensing the motion of the diaphragm at the first natural frequency of the diaphragm of the CDG. The presence of the natural frequency signals superimposed on the pressure signal is determined by sensing variations in the output of a sensor at or near the known natural frequency of the diaphragm and filtering that known low frequency from the output. The filtered signal is used in a feedback circuit to impose electrostatic forces on the diaphragm. The imposed electrostatic forces oppose the motion created by the external vibration to suppress the effects of the vibration on the pressure measured by the CDG.
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