摘要:
There is provided a semiconductor etching apparatus which removes particles remaining on the upper surface of an electro static chuck (ESC) during an etching process, thereby preventing a chucking force from decreasing and minimizing a leak of helium. To prevent a failure of the etching process due to a wafer chucking failure, by preventing polymers from falling down on the upper part of the ESC when a wafer is dechucked or transferred, the semiconductor etching apparatus comprises: an ESC selectively holding a wafer to be entered and positioned inside a chamber, and including a lower electrode part to which RF power is applied; parts positioned at a stepped portion of the ESC and respectively surrounding a side of the ESC; and a gas flow blocking part blocking a gas flow in a vacuum path formed between the ESC and the parts.
摘要:
The present invention relates to a bioreactor for sewage and wastewater treatment, which is capable of agitating and supplying oxygen simultaneously. A bioreactor of the present invention, comprises a culture drum in which microorganisms are cultured; a supplier for supplying a culture solution, and organic and inorganic media to the culture drum, the supplier including a supply tube connected to an upper side of the culture drum, and a pump connected to the supply tube for supplying the culture solution to the culture drum; an agitator for agitating the culture solution by spraying air into the culture solution in the culture drum, the air being supplied from an air blower; and a thermostatic controller for controlling a temperature of the culture solution and disinfecting the interior of the culture drum.
摘要:
A novel antifouling paint composition is disclosed. The antifouling paint composition comprises a resin of 5 to 20 wt %, a solvent of 3 to 30 wt %; a polyhexamethyleneguanidine salt of the following chemical formula 1 of 0.05 to 20 wt %, a pigment of 1 to 50 wt %; and cuprous oxide of 22 to 75 wt % and/or zinc pyrithione of the following chemical formula 2 of 0.05 to 20 wt %; wherein in chemical formula 1, X can be the same or different, and at least one of X is an inorganic acid salt or an organic acid salt; R1 can be the same or different, and is a linear or branched alkyl group containing from 1 to 20 carbon atoms, a phenyl group, a chlorophenyl group, a bromophenyl group, an iodophenyl group, a benzyl group, a chlorobenzyl group, a bromobenzyl group, a iodobenzyl group, a phenethyl group, a naphthyl group or a hydrogen; and n is an integer of 1 or more.
摘要翻译:公开了一种新型防污涂料组合物。 防污涂料组合物包含5至20重量%的树脂,3至30重量%的溶剂; 以下化学式1的聚六亚甲基胍盐为0.05〜20重量%,颜料为1〜50重量% 和22〜75重量%的氧化亚铜和/或以下化学式2的吡啶硫酮锌为0.05〜20重量% 其中在化学式1中,X可以相同或不同,X中的至少一个是无机酸盐或有机酸盐; R 1可以相同或不同,为含有1〜20个碳原子的直链或支链烷基,苯基,氯苯基,溴苯基,碘苯基,苄基 基团,氯苄基,溴苄基,碘苄基,苯乙基,萘基或氢; n为1以上的整数。
摘要:
A novel antifouling paint composition is disclosed. The antifouling paint composition comprises a resin of 5 to 20 weight %; a solvent of 3 to 30 weight %; polyhexamethyleneguanidine salt of the following chemical formula 1 of 0.05 to 20 weight %; a pigment of 1 to 50 weight %; and cuprous oxide of 22 to 75 weight % and/or zinc pyrithione of the following chemical formula 2 of 0.05 to 20 weight %. [Chemical formula 1] [Chemical formula 2] In chemical formula 1, at least one of X is an inorganic acid salt or an organic acid salt; R1 is an alkyl group, a phenyl group, a benzyl group, a phenethyl group, a naphthyl group or hydrogen, and n is an integer of 1 or more.
摘要:
A method for manufacturing a semiconductor device may include: forming a main magnetic field having an axis, and forming a subsidiary magnetic field substantially parallel to the axis; applying an alternating current along a path between the main and the subsidiary magnetic fields; allowing a gas to flow along a flow path along the path of the current so that a gas plasma is generated from the gas; providing the gas plasma into a chamber separated from a position where the gas plasma is generated; and performing a process for manufacturing a semiconductor device by employing the gas plasma.
摘要:
The present invention relates to an isothiazolone composition and a method for stabilizing the same, and particularly to an isothiazolone composition that does not comprise alkali earth metal salt of a divalent metal such as magnesium chloride, which causes salt shock, and thus that can be stably used as a sterilizer in a dispersion or emulsion such as paint acrylate or latex, therefore effectively preventing growth of microorganisms, and that has superior storage stability due to its low precipitation formation rate because it comprises a precipitation-preventing agent, and a method for stabilizing the same.
摘要:
An apparatus and method for connecting to one of different types of access networks in a heterogeneous network system in which the access networks overlap each other. The apparatus and method include attempting to connect to one of said one or more access networks according to a preset priority and receiving a communication service through the access network when a connection to the access network is successful; and attempting to connect to an access network having a next priority according to the preset priority when the connection to the access network is unsuccessful.
摘要:
An apparatus and method for seamlessly providing voice and data services to a user through an access terminal in a mobile communication system including a heterogeneous service & mobility gateway (HSMG) for an interworking service between a circuit network and a packet network, and various access networks overlapping each other. The access terminal notifies the HSMG that a voice call is received, if the access terminal that accessed a packet network receives a voice call. The HSMG sends a direction request to a circuit network upon receiving the notification indicating that the voice call is received. The access terminal directs to the circuit network and registers a new location upon receiving the direction request. The HSMG sets up an incoming voice call to the access terminal after the registration of a new location.
摘要:
An apparatus for matching the impedance of an RF generator to the impedance of an RF load, for use in manufacturing semiconductor devices by using a plasma. The apparatus includes a variable inductor coupled to a variable capacitor and an invariable capacitor, the variable inductor having two inductors coupled electrically with each other in series and disposed adjacent to each other. At least one of the two inductors is disposed movably to make the magnetic flux of the one inductor interfere with the magnetic flux of the other inductor, thereby to control the inductance of the variable inductor. In the case of a plasma enhanced semiconductor wafer processing system, the apparatus can reduce the time necessary to achieve an RF match between the RF generator and the RF load, thereby increasing the life of the apparatus.
摘要:
A method of load reduction on buried culvert using an EPS block is disclosed. A culvert foundation is constructed at a place where a culvert will be buried, and the culvert is put on the foundation, and then, both sides of the culvert are banked with filling earth. EPS blocks are paved in multiple layers on the top surface of the culvert, or geosynthetics and an ESP block are paved on the culvert, and then, filling earth is banked on the geosynthetics or the ESP block and a final ground level is compacted. As a result, compression occurs from the EPS block, deformation of the inside earth is caused artificially, and arching is generated. Accordingly, the method has vertical earth pressure reduction effect, thereby preventing an increase in the section of the culvert due to overburden of the banked earth and an increase in vertical load due to a settlement amount of the culvert buried on the weak ground and a relative settlement difference of surrounding earth, and improving durability of the buried culvert.