Semiconductor etching apparatus
    31.
    发明授权
    Semiconductor etching apparatus 有权
    半导体蚀刻装置

    公开(公告)号:US07764483B2

    公开(公告)日:2010-07-27

    申请号:US11709400

    申请日:2007-02-22

    IPC分类号: H02N13/00

    CPC分类号: H01L21/68735 H01L21/6831

    摘要: There is provided a semiconductor etching apparatus which removes particles remaining on the upper surface of an electro static chuck (ESC) during an etching process, thereby preventing a chucking force from decreasing and minimizing a leak of helium. To prevent a failure of the etching process due to a wafer chucking failure, by preventing polymers from falling down on the upper part of the ESC when a wafer is dechucked or transferred, the semiconductor etching apparatus comprises: an ESC selectively holding a wafer to be entered and positioned inside a chamber, and including a lower electrode part to which RF power is applied; parts positioned at a stepped portion of the ESC and respectively surrounding a side of the ESC; and a gas flow blocking part blocking a gas flow in a vacuum path formed between the ESC and the parts.

    摘要翻译: 提供了一种半导体蚀刻装置,其在蚀刻过程中除去静电卡盘(ESC)的上表面上残留的颗粒,从而防止夹紧力降低并使氦泄漏最小化。 为了防止由于晶片夹紧故障引起的蚀刻工艺的故障,通过在晶片脱扣或转印时防止聚合物落下于ESC的上部,半导体蚀刻装置包括:选择性地保持晶片的ESC 进入并定位在室内,并且包括施加RF功率的下电极部分; 位于ESC的阶梯部分并分别围绕ESC的一侧的部件; 以及阻塞在ESC和部件之间形成的真空路径中的气流的气流阻塞部。

    Bioreactor for sewage and wastewater treatment
    32.
    发明授权
    Bioreactor for sewage and wastewater treatment 有权
    污水和污水处理生物反应器

    公开(公告)号:US07329539B2

    公开(公告)日:2008-02-12

    申请号:US10343673

    申请日:2002-06-03

    摘要: The present invention relates to a bioreactor for sewage and wastewater treatment, which is capable of agitating and supplying oxygen simultaneously. A bioreactor of the present invention, comprises a culture drum in which microorganisms are cultured; a supplier for supplying a culture solution, and organic and inorganic media to the culture drum, the supplier including a supply tube connected to an upper side of the culture drum, and a pump connected to the supply tube for supplying the culture solution to the culture drum; an agitator for agitating the culture solution by spraying air into the culture solution in the culture drum, the air being supplied from an air blower; and a thermostatic controller for controlling a temperature of the culture solution and disinfecting the interior of the culture drum.

    摘要翻译: 本发明涉及一种用于污水和废水处理的生物反应器,其能够同时搅动和供应氧气。 本发明的生物反应器包括其中培养微生物的培养桶; 用于向培养鼓供应培养溶液的供应商和有机和无机介质,供应商包括连接到培养桶上侧的供应管,以及连接到供应管的泵,用于将培养溶液提供给培养物 鼓; 用于通过将空气喷入培养筒中的培养液中来搅拌培养液的搅拌器,从鼓风机供给的空气; 以及用于控制培养液温度并对培养筒内部进行消毒的恒温控制器。

    Antifouling paint composition
    33.
    发明授权
    Antifouling paint composition 失效
    防污漆组成

    公开(公告)号:US07108741B2

    公开(公告)日:2006-09-19

    申请号:US10529463

    申请日:2003-10-23

    IPC分类号: C09D5/16 A01N33/00

    CPC分类号: C09D5/1637

    摘要: A novel antifouling paint composition is disclosed. The antifouling paint composition comprises a resin of 5 to 20 wt %, a solvent of 3 to 30 wt %; a polyhexamethyleneguanidine salt of the following chemical formula 1 of 0.05 to 20 wt %, a pigment of 1 to 50 wt %; and cuprous oxide of 22 to 75 wt % and/or zinc pyrithione of the following chemical formula 2 of 0.05 to 20 wt %; wherein in chemical formula 1, X can be the same or different, and at least one of X is an inorganic acid salt or an organic acid salt; R1 can be the same or different, and is a linear or branched alkyl group containing from 1 to 20 carbon atoms, a phenyl group, a chlorophenyl group, a bromophenyl group, an iodophenyl group, a benzyl group, a chlorobenzyl group, a bromobenzyl group, a iodobenzyl group, a phenethyl group, a naphthyl group or a hydrogen; and n is an integer of 1 or more.

    摘要翻译: 公开了一种新型防污涂料组合物。 防污涂料组合物包含5至20重量%的树脂,3至30重量%的溶剂; 以下化学式1的聚六亚甲基胍盐为0.05〜20重量%,颜料为1〜50重量% 和22〜75重量%的氧化亚铜和/或以下化学式2的吡啶硫酮锌为0.05〜20重量% 其中在化学式1中,X可以相同或不同,X中的至少一个是无机酸盐或有机酸盐; R 1可以相同或不同,为含有1〜20个碳原子的直链或支链烷基,苯基,氯苯基,溴苯基,碘苯基,苄基 基团,氯苄基,溴苄基,碘苄基,苯乙基,萘基或氢; n为1以上的整数。

    ANTIFOULING PAINT COMPOSITION
    34.
    发明申请
    ANTIFOULING PAINT COMPOSITION 失效
    防油漆组合物

    公开(公告)号:US20060137566A1

    公开(公告)日:2006-06-29

    申请号:US10529463

    申请日:2003-10-23

    IPC分类号: C09D5/14

    CPC分类号: C09D5/1637

    摘要: A novel antifouling paint composition is disclosed. The antifouling paint composition comprises a resin of 5 to 20 weight %; a solvent of 3 to 30 weight %; polyhexamethyleneguanidine salt of the following chemical formula 1 of 0.05 to 20 weight %; a pigment of 1 to 50 weight %; and cuprous oxide of 22 to 75 weight % and/or zinc pyrithione of the following chemical formula 2 of 0.05 to 20 weight %. [Chemical formula 1] [Chemical formula 2] In chemical formula 1, at least one of X is an inorganic acid salt or an organic acid salt; R1 is an alkyl group, a phenyl group, a benzyl group, a phenethyl group, a naphthyl group or hydrogen, and n is an integer of 1 or more.

    摘要翻译: 公开了一种新型防污涂料组合物。 防污漆组合物包含5〜20重量%的树脂; 3〜30重量%的溶剂; 以下化学式1的聚六亚甲基胍盐为0.05〜20重量%; 1〜50重量%的颜料; 和22〜75重量%的氧化亚铜和/或以下化学式2的吡啶硫酮锌为0.05〜20重量%。 [化学式1] [化学式2]在化学式1中,X中的至少一个是无机酸盐或有机酸盐; R1是烷基,苯基,苄基,苯乙基,萘基或氢,n是1以上的整数。

    Isothiazolone composition and method for stabilizing isothiazolone
    36.
    发明申请
    Isothiazolone composition and method for stabilizing isothiazolone 审中-公开
    异噻唑酮组合物和稳定异噻唑酮的方法

    公开(公告)号:US20050165073A1

    公开(公告)日:2005-07-28

    申请号:US10515851

    申请日:2003-05-28

    CPC分类号: C07D275/03 C07D275/06

    摘要: The present invention relates to an isothiazolone composition and a method for stabilizing the same, and particularly to an isothiazolone composition that does not comprise alkali earth metal salt of a divalent metal such as magnesium chloride, which causes salt shock, and thus that can be stably used as a sterilizer in a dispersion or emulsion such as paint acrylate or latex, therefore effectively preventing growth of microorganisms, and that has superior storage stability due to its low precipitation formation rate because it comprises a precipitation-preventing agent, and a method for stabilizing the same.

    摘要翻译: 本发明涉及异噻唑酮组合物及其稳定化方法,特别涉及不含有二氯甲烷等二价金属的碱土金属盐的异噻唑酮组合物,其可引起盐碱冲击,因此可稳定地 用作分散体或乳液如丙烯酸漆或胶乳中的灭菌器,因此有效地防止了微生物的生长,并且由于其具有降水形成速率而具有优异的储存稳定性,因为它包含防沉降剂,以及稳定化方法 一样。

    Access network selection apparatus and method in a heterogeneous system
    37.
    发明申请
    Access network selection apparatus and method in a heterogeneous system 审中-公开
    异构系统中的接入网络选择装置和方法

    公开(公告)号:US20050070280A1

    公开(公告)日:2005-03-31

    申请号:US10948201

    申请日:2004-09-24

    CPC分类号: H04W48/18 H04W88/06

    摘要: An apparatus and method for connecting to one of different types of access networks in a heterogeneous network system in which the access networks overlap each other. The apparatus and method include attempting to connect to one of said one or more access networks according to a preset priority and receiving a communication service through the access network when a connection to the access network is successful; and attempting to connect to an access network having a next priority according to the preset priority when the connection to the access network is unsuccessful.

    摘要翻译: 一种用于连接到其中接入网络彼此重叠的异构网络系统中的不同类型的接入网络之一的装置和方法。 所述装置和方法包括:当与所述接入网络的连接成功时,根据预设优先级尝试连接到所述一个或多个接入网络之一并通过所述接入网络接收通信服务; 并且当与接入网络的连接不成功时,尝试根据预设优先级连接到具有下一优先级的接入网络。

    RF matching unit
    39.
    发明授权
    RF matching unit 有权
    射频匹配单元

    公开(公告)号:US06816029B2

    公开(公告)日:2004-11-09

    申请号:US09935582

    申请日:2001-08-24

    IPC分类号: H03H738

    摘要: An apparatus for matching the impedance of an RF generator to the impedance of an RF load, for use in manufacturing semiconductor devices by using a plasma. The apparatus includes a variable inductor coupled to a variable capacitor and an invariable capacitor, the variable inductor having two inductors coupled electrically with each other in series and disposed adjacent to each other. At least one of the two inductors is disposed movably to make the magnetic flux of the one inductor interfere with the magnetic flux of the other inductor, thereby to control the inductance of the variable inductor. In the case of a plasma enhanced semiconductor wafer processing system, the apparatus can reduce the time necessary to achieve an RF match between the RF generator and the RF load, thereby increasing the life of the apparatus.

    摘要翻译: 一种用于将RF发生器的阻抗与RF负载的阻抗相匹配的装置,用于通过使用等离子体制造半导体器件。 该装置包括耦合到可变电容器和不变电容器的可变电感器,该可变电感器具有串联并彼此相邻布置的彼此电耦合的两个电感器。 两个电感器中的至少一个被可移动地设置,以使一个电感器的磁通量与另一个电感器的磁通量相互干扰,从而控制可变电感器的电感。 在等离子体增强半导体晶片处理系统的情况下,该装置可以减少在RF发生器和RF负载之间实现RF匹配所需的时间,从而延长设备的使用寿命。

    Method of load reduction on buried culvert using EPS block and/or geosynthetics
    40.
    发明授权
    Method of load reduction on buried culvert using EPS block and/or geosynthetics 失效
    使用EPS块和/或土工合成材料对埋涵体进行减载的方法

    公开(公告)号:US06764250B2

    公开(公告)日:2004-07-20

    申请号:US10307254

    申请日:2002-11-29

    IPC分类号: F16L5700

    CPC分类号: E01F5/005 F16L1/11 F16L57/02

    摘要: A method of load reduction on buried culvert using an EPS block is disclosed. A culvert foundation is constructed at a place where a culvert will be buried, and the culvert is put on the foundation, and then, both sides of the culvert are banked with filling earth. EPS blocks are paved in multiple layers on the top surface of the culvert, or geosynthetics and an ESP block are paved on the culvert, and then, filling earth is banked on the geosynthetics or the ESP block and a final ground level is compacted. As a result, compression occurs from the EPS block, deformation of the inside earth is caused artificially, and arching is generated. Accordingly, the method has vertical earth pressure reduction effect, thereby preventing an increase in the section of the culvert due to overburden of the banked earth and an increase in vertical load due to a settlement amount of the culvert buried on the weak ground and a relative settlement difference of surrounding earth, and improving durability of the buried culvert.

    摘要翻译: 公开了一种使用EPS块进行掩埋式减载的方法。 涵洞基础建在埋葬涵洞的地方,涵洞被置于基础之上,然后,涵洞的两侧都用填土填埋。 EPS块在涵洞的上表面铺设多层,或者将土工合成材料和ESP块铺在涵洞上,然后将填充土堆积在土工合成材料或ESP块上,并最终压实。 因此,EPS块的压缩发生,人造地进行内部地球的变形,产生拱形。 因此,该方法具有垂直的地面压力降低效果,从而防止由于埋藏在弱地面上的涵洞的沉降量而导致的由于堤坝的覆盖层引起的涵洞部分的增加和垂直载荷的增加, 周围地球的沉降差异,提高了涵洞的耐久性。