公开(公告)号：US07123345B2

公开(公告)日：2006-10-17

申请号：US10897120

申请日：2004-07-23

申请人： Shinji Sugihara ,  Riki Ogawa ,  Toru Tojo

发明人： Shinji Sugihara ,  Riki Ogawa ,  Toru Tojo

IPC分类号： G03B27/42

CPC分类号： G03F9/7088 ,  G03F7/70725 ,  G03F9/7003 ,  G03F9/7026 ,  G03F9/7034

摘要： An automatic focusing apparatus comprises a stage holding a substrate, an objective lens disposed facing the substrate surface, an illumination optics illuminating the substrate surface with a spotted light beam from an oblique direction, a photodetector detecting reflected light from the substrate surface, a position detection circuit detecting a vertical position of the substrate surface from an electric signal obtained from the photodetector to output a position signal, a correction circuit monitoring the position signal in real time and subtracting a surplus exceeding a signal change corresponding to a surface shape change of the substrate from the position signal, when a change amount per unit time of the position signal exceeds a predetermined level and outputting a corrected position signal, and a stage control circuit controlling the vertical position of the stage based on the corrected position signal.

摘要翻译： 一种自动对焦装置，包括：保持基板的台阶，与基板面对面配置的物镜;从倾斜方向用点状光束照射基板表面的照明光学元件;检测来自基板面的反射光的光电检测器;位置检测 检测从光电检测器获得的电信号的基板表面的垂直位置以输出位置信号，校正电路实时监控位置信号，并减去超过与基板的表面形状变化相对应的信号变化的剩余量 当位置信号的每单位时间的变化量超过预定值并输出校正的位置信号时，根据位置信号，以及基于校正位置信号控制舞台的垂直位置的舞台控制电路。

公开(公告)号：US20060018530A1

公开(公告)日：2006-01-26

申请号：US11175360

申请日：2005-07-07

申请人： Junji Oaki ,  Shinji Sugihara ,  Ikunao Isomura ,  Toru Tojo

发明人： Junji Oaki ,  Shinji Sugihara ,  Ikunao Isomura ,  Toru Tojo

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30148

摘要： The present invention is to allow rapid detection of such a defect as buried in a pixel positional deviation, expansion/contraction noise or sensing noise on an image. A relationship between an inspection reference pattern image and a pattern image to be inspected is identified during inspection to construct a mathematical model obtained by absorbing (applying fitting on) a pixel positional deviation, expansion/contraction noise or sensing noise on an image, and a defect is detected by comparing a new inspection reference pattern image (model image) obtained by simulating the mathematical model and a pattern image to be inspected.

公开(公告)号：US06883160B2

公开(公告)日：2005-04-19

申请号：US10252718

申请日：2002-09-24

申请人： Hideo Tsuchiya ,  Shinji Sugihara ,  Kyoji Yamashita ,  Toshiyuki Watanabe ,  Kazuhiro Nakashima

发明人： Hideo Tsuchiya ,  Shinji Sugihara ,  Kyoji Yamashita ,  Toshiyuki Watanabe ,  Kazuhiro Nakashima

IPC分类号： G01B11/00 ,  G01B11/24 ,  G01N21/956 ,  G03F1/84 ,  G06T7/00 ,  G06F17/50

CPC分类号： G03F1/26 ,  G03F1/84 ,  G06T7/001 ,  G06T2207/30148

摘要： A pattern inspection apparatus determines a difference of the measured dislocation of respective alignment marks of an opaque pattern and a phase shifting pattern (measurement difference), in addition to a difference between the both alignment mark positions in design (design difference). A difference between the measurement difference and the design difference is set as a difference in alignment mark position between the opaque pattern and the phase shifting pattern in a reference pattern which is later used in inspection. In this manner, by correcting one pattern data with respect to the other pattern data in the reference pattern, the displacement generated in the both patterns can be reflected, and the reference pattern data regarding an image of a sample which is actually observed can be created.

摘要翻译： 除了设计中的两个对准标记位置（设计差异）之外，图案检查装置还确定不透明图案的各个对准标记的测量位错与相移图案（测量差异）之间的差异。 测量差异和设计差异之间的差异被设置为稍后在检查中使用的参考图案中的不透明图案和相移图案之间的对准标记位置的差异。 以这种方式，通过相对于参考图案中的其他图案数据校正一个图案数据，可以反映两种图案中产生的位移，并且可以创建关于实际观察到的样本的图像的参考图案数据 。

公开(公告)号：US5684371A

公开(公告)日：1997-11-04

申请号：US501188

申请日：1995-07-11

申请人： Jun Tarui ,  Shinji Sugihara ,  Akira Furukawa

发明人： Jun Tarui ,  Shinji Sugihara ,  Akira Furukawa

IPC分类号： F16K31/06 ,  G01R31/42 ,  H01F7/18 ,  H02H7/08 ,  H02P7/00 ,  H02K23/00

CPC分类号： H02H7/0838 ,  G01R31/42 ,  H02P7/04

摘要： A normal-direction mode which switches on first and fourth switches and in a mutually diagonal relationship of an H-type bridge circuit and switches off second and third switches also in a mutually diagonal relationship of the bridge circuit is executed for an on-duty time of an opening-degree command signal, and a reverse-direction mode which switches off the first and fourth switches and switches off the second and third switches is executed for an off-duty time of the opening-degree command signal. During normal operation, conduction of current to the H-type bridge circuit 70 and a coil is constantly performed irrespective of a degree of opening of a valve to be adjusted, and in a case where conduction is interrupted, it can be presumed that a broken wire has occurred in the H-type bridge circuit or coil, and determination of a broken wire can be made.

摘要翻译： 开启H型桥接电路的第一和第四开关以及相互斜对角关系的正常方式也在桥电路的相互对角线关系中断开第二和第三开关，以执行占空比时间 开启度指令信号的断开时间和开关次数指令信号的截止时间的逆向模式，并且关闭第一和第四开关并切断第二和第三开关的反向模式。 在正常操作期间，与H型桥式电路70和线圈的电流导通不断地进行调节的阀的打开程度，并且在导通被中断的情况下，可以推定为断开 在H型桥式电路或线圈中发生了线，并且可以确定断线。

公开(公告)号：US08549896B2

公开(公告)日：2013-10-08

申请号：US12965963

申请日：2010-12-13

申请人： Mitsuyuki Kobayashi ,  Tomohiro Itoh ,  Shinji Sugihara

发明人： Mitsuyuki Kobayashi ,  Tomohiro Itoh ,  Shinji Sugihara

IPC分类号： G01M3/20

CPC分类号： F02M25/0836 ,  F01C21/10 ,  F04C2/344 ,  F04C2240/805 ,  F04C2250/00

摘要： A vane pump has an upper casing, a lower casing, a rotor and a motor. First to fourth points are defined on an outer peripheral end of a lower flat surface of the lower casing. The first point is farthest from an intersection between an axis of a shaft of the motor and the lower flat surface. A suction passage passing through the third point and a discharge passage passing through the second point are formed between the upper casing and the lower casing. The fourth point is defined in a range from the third point to the first point. The lower flat surface is provided to incline with respect to the axis of the shaft of the motor such that the fourth point is farthest from a motor case of the motor among points on the outer peripheral end.

摘要翻译： 叶片泵具有上壳体，下壳体，转子和马达。 第一至第四点限定在下壳体的下平坦表面的外周端上。 第一点与电机的轴的轴线和下平面之间的交点最远。 通过第三点的抽吸通道和穿过第二点的排出通道形成在上壳体和下壳体之间。 第四点定义在从第三点到第一点的范围内。 下平面设置成相对于电动机的轴的轴线倾斜，使得第四点在外周端上的点之间离马达的马达外壳最远。

公开(公告)号：US20120047999A1

公开(公告)日：2012-03-01

申请号：US13210731

申请日：2011-08-16

申请人： Tomohiro ITOH ,  Mitsuyuki Kobayashi ,  Shinji Sugihara

发明人： Tomohiro ITOH ,  Mitsuyuki Kobayashi ,  Shinji Sugihara

IPC分类号： F04B49/06 ,  G01M3/00

CPC分类号： F04C18/344 ,  F02M25/0818 ,  F04C2240/81 ,  F04C2270/07 ,  F04C2270/18 ,  F04C2270/86

摘要： An ECU determines whether condensed water is present at a rotor and vanes based on an electric current, which flows in an electric motor that drives the rotor. When the condensed water is determined to be present, the ECU drives the motor for a predetermined time period. When the condensed water is determined to be absent, the ECU stores a pressure, which is sensed through a pressure sensor, as a first pressure. The ECU is adapted to sense an abnormality in a pump characteristic based on a value of the first pressure.

摘要翻译： ECU基于在驱动转子的电动机中流动的电流来确定冷凝水是否存在于转子和叶片上。 当冷凝水被确定存在时，ECU将马达驱动预定的时间段。 当冷凝水被确定为不存在时，ECU存储通过压力传感器感测的压力作为第一压力。 ECU适于基于第一压力的值感测泵特性中的异常。

公开(公告)号：US20110123372A1

公开(公告)日：2011-05-26

申请号：US12941125

申请日：2010-11-08

申请人： Tomohiro Itoh ,  Mitsuyuki Kobayashi ,  Shinji Sugihara

发明人： Tomohiro Itoh ,  Mitsuyuki Kobayashi ,  Shinji Sugihara

IPC分类号： F04B35/04 ,  G01M3/20

CPC分类号： F04B35/04 ,  F02M25/0809 ,  F02M25/0818 ,  F04C18/3441 ,  F04C27/003 ,  F04C2240/30

摘要： An upper casing and a lower casing cooperate together to define a pump chamber, in which a rotor is rotatably received. A surface of the lower casing, which is opposed to one end surface of the rotor in an axial direction of the rotor, has a recess that is recessed for a predetermined amount away from the rotor in the axial direction of the rotor. A surface of a plate portion of the upper casing, which is opposed to the other end surface of the rotor in the axial direction of the rotor, has a recess that is recessed for a predetermined amount away from the rotor in the axial direction of the rotor. An outer peripheral edge of each of the recesses is placed radially inward of an outer peripheral edge of the rotor in an axial view of the rotor.

摘要翻译： 上壳体和下壳体配合在一起以限定泵室，其中转子被可旋转地接收。 下壳体的与转子的轴向方向上的一个端面相对的表面具有在转子的轴向上从转子远离预定量凹陷的凹部。 上壳体的与转子的轴向方向的另一端面相对的板部的表面具有凹部，该凹部在转子的轴向方向上从转子凹入预定量 转子。 每个凹部的外周缘沿着转子的轴向视图放置在转子的外周边缘的径向内侧。

公开(公告)号：US07572844B2

公开(公告)日：2009-08-11

申请号：US11363954

申请日：2006-03-01

申请人： Koichi Sato ,  Ikuo Nakazawa ,  Sakae Suda ,  Masayuki Ikegami ,  Sadahito Aoshima ,  Shinji Sugihara

发明人： Koichi Sato ,  Ikuo Nakazawa ,  Sakae Suda ,  Masayuki Ikegami ,  Sadahito Aoshima ,  Shinji Sugihara

IPC分类号： C09D11/00

CPC分类号： C09D11/30 ,  C08F271/02

摘要： The present invention relates to a stimuli-responsive composition that comprises a polymer, a solvent and a substance having a predetermined function. One embodiment of the present invention is a composition comprising a block polymer, a solvent and a substance having a predetermined function. The present invention also relates to an ink composition containing the composition, an image-forming method and an image-forming apparatus using the composition, and a recording medium applying the composition. Further, the present invention relates to an ABC type block polymer compound wherein the polymer is an ABC type triblock polymer, and wherein at least one of the blocks in the triblock polymer changes in nature from solvophilic to solvophobic or from solvophobic to solvophilic in response to stimuli, and more preferably, the A component, then the B component, and finally the C component respond to the stimuli.

摘要翻译： 本发明涉及包含聚合物，溶剂和具有预定功能的物质的刺激响应组合物。 本发明的一个实施方案是包含嵌段聚合物，溶剂和具有预定功能的物质的组合物。 本发明还涉及含有该组合物的油墨组合物，使用该组合物的图像形成方法和图像形成装置，以及施加该组合物的记录介质。 此外，本发明涉及一种ABC型嵌段聚合物化合物，其中聚合物是ABC型三嵌段聚合物，并且其中三嵌段聚合物中的至少一个嵌段在性质上从溶剂型变为疏乳剂或从溶剂型至溶剂型响应于 刺激，更优选A组分，然后B组分，最后C成分对刺激作出反应。

公开(公告)号：US07551273B2

公开(公告)日：2009-06-23

申请号：US12081852

申请日：2008-04-22

申请人： Akihiko Sekine ,  Ikunao Isomura ,  Toshiyuki Watanabe ,  Shinji Sugihara ,  Riki Ogawa

发明人： Akihiko Sekine ,  Ikunao Isomura ,  Toshiyuki Watanabe ,  Shinji Sugihara ,  Riki Ogawa

IPC分类号： G01N21/00

CPC分类号： G03F1/84 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2021/95676

摘要： The mask defect inspection apparatus including an illumination optical system for illuminating a mask on which a pattern is formed; an objective lens facing the mask; at least a pair of detection optical systems having a detection sensor for obtaining an image of the pattern, respectively, and which receive illumination light from illumination areas different from each other through the objective lens, respectively; and focusing changing means for changing a position of focusing between sites of the pattern in a film-thickness direction of the mask and the pattern images obtained by the detection sensors, such that the pattern images obtained by the detection sensors are changed corresponding to the film-thickness direction of the mask.

摘要翻译： 掩模缺陷检查装置包括用于照亮其上形成有图案的掩模的照明光学系统; 面对面罩的物镜; 至少一对检测光学系统，具有分别用于获得图案的图像的检测传感器，并分别通过物镜从彼此不同的照明区域接收照明光; 以及聚焦改变装置，用于改变在掩模的膜厚度方向上的图案的位置之间的聚焦位置和由检测传感器获得的图案图像，使得由检测传感器获得的图案图像相应地变化 面膜方向。

公开(公告)号：US20060222233A1

公开(公告)日：2006-10-05

申请号：US11386744

申请日：2006-03-23

申请人： Shinji Sugihara ,  Junji Oaki

发明人： Shinji Sugihara ,  Junji Oaki

IPC分类号： G06K9/00

CPC分类号： G03F1/84 ,  G06T7/001 ,  G06T7/70 ,  G06T2207/30148

摘要： An image correction method employable in a pattern inspection method for emitting light falling onto a workpiece with a pattern formed thereon and for inspecting a pattern image resulting from the pickup of an optical image of the workpiece by comparing it to a corresponding fiducial pattern image is disclosed. The method includes the step of generating a system of equations describing therein an input/output relation using a 2D linear prediction model(s) with respect to the pattern image being tested and the fiducial pattern image. Then, estimate the equation system by least-squares methods to thereby obtain a parameter of the equation system. Next obtain a centroid of the parameter. Then perform interpolation using the value of the centroid, thereby to generate a corrected image. A pattern defect inspection method using the image correction method is also disclosed.

摘要翻译： 公开了一种图像校正方法，该图案校正方法可用于发射落在工件上的光，图案形成在其上，并且用于通过将其与对应的基准图案图像进行比较来检测由工件的光学图像拾取产生的图案图像 。 该方法包括以下步骤：使用关于被测试的图案图像和基准图案图像的2D线性预测模型来生成其中描述的输入/输出关系的方程式。 然后，通过最小二乘法估计方程组，从而获得方程式的参数。 接下来获得参数的质心。 然后使用质心的值进行插值，从而生成校正图像。 还公开了使用图像校正方法的图案缺陷检查方法。