Method of fabricating a semiconductor IC DRAM device enjoying enhanced
focus margin
    33.
    发明授权
    Method of fabricating a semiconductor IC DRAM device enjoying enhanced focus margin 失效
    制造具有增强的聚焦余量的半导体IC DRAM器件的方法

    公开(公告)号:US5670409A

    公开(公告)日:1997-09-23

    申请号:US511810

    申请日:1995-08-07

    CPC分类号: H01L27/10844 H01L27/1052

    摘要: A method of fabricating a semiconductor integrated circuit device includes: recessing a second surface portion of a semiconductor substrate; forming elements of a first circuit region capable of performing a first function at a first surface portion of the semiconductor substrate and elements of a second circuit region capable of performing a second function at the recessed second surface portion of the semiconductor substrate, the elements of the first circuit region and those of the second circuit region having relatively small and large sizes as generally measured in a direction perpendicular to the surface portions of the semiconductor substrate, respectively; forming an insulating film to cover the first and second circuit regions, with a result that a level difference is caused between first and second portions of the insulating film on the first and second circuit regions at a relatively lower level and at a relatively higher level, respectively; effecting chemical-mechanical planarization of the insulating film to suppress the level difference in the insulating film for enhancing a focus margin for successive photolithographic steps; and forming wiring conductors on the insulating film with the suppressed level difference, enjoying the enhanced focus margin.

    摘要翻译: 一种制造半导体集成电路器件的方法包括:使半导体衬底的第二表面部分凹陷; 形成能够在半导体衬底的第一表面部分处执行第一功能的第一电路区域的元件和能够在半导体衬底的凹入的第二表面部分执行第二功能的第二电路区域的元件, 第一电路区域和第二电路区域的第一电路区域分别具有通常在垂直于半导体衬底的表面部分的方向上测量的相对较小和大的尺寸; 形成绝缘膜以覆盖第一和第二电路区域,结果是在第一和第二电路区域上的绝缘膜的第一和第二部分之间在相对较低的电平和相对较高的水平上产生电平差, 分别; 实现绝缘膜的化学机械平面化,以抑制绝缘膜中的水平差,以提高连续光刻步骤的聚焦余量; 并且在绝缘膜上形成具有抑制的电平差的布线导体,享受增强的聚焦余量。

    Radiation resistant bipolar memory
    34.
    发明授权
    Radiation resistant bipolar memory 失效
    耐辐射双极记忆

    公开(公告)号:US4956688A

    公开(公告)日:1990-09-11

    申请号:US374570

    申请日:1989-06-27

    IPC分类号: H01L27/102 H01L29/732

    CPC分类号: H01L27/1025 H01L29/7327

    摘要: A bipolar memory of a construction having high immunity from soft error attributable to alpha rays is provided. The transistors of a flip flop, i.e., the essential circuit of the memory cell, are inverted, and the load device thereof has a shielding arrangement for shielding the flip flop from the noise produced within the substrate. Either pnp type transistors or Schottky barrier diodes are employed as the load devices. A buried layer (ordinarily, an n type layer) and a doped layer of the reverse conductivity type (ordinarily the p type) are formed in the region where the device is provided. A reverse bias is applied across the buried layer and the doped layer to shut off the noise produced within the substrate.

    摘要翻译: 提供了具有高抗免除由α射线引起的软误差的结构的双极记忆。 触发器的晶体管,即存储单元的基本电路被反转,并且其负载装置具有用于屏蔽触发器与基板内产生的噪声的屏蔽装置。 采用pnp型晶体管或肖特基势垒二极管作为负载器件。 在设置有器件的区域中形成掩埋层(通常为n型层)和反向导电型(通常为p型)的掺杂层。 跨越掩埋层和掺杂层施加反向偏压,以切断衬底内产生的噪声。

    Radiation resistant bipolar memory
    35.
    发明授权
    Radiation resistant bipolar memory 失效
    耐辐射双极记忆

    公开(公告)号:US4858184A

    公开(公告)日:1989-08-15

    申请号:US42698

    申请日:1987-04-27

    IPC分类号: G11C11/411

    CPC分类号: G11C11/4113 G11C11/4116

    摘要: A bipolar memory of a construction having high immunity to soft error attributable to alpha rays is provided. The transistors of a flip flop, i.e., the essential circuitry of the memory cell, are inverted and the load device thereof has shielding means for shielding the flip flop from the noise produced within the substrate. Bipolar transistors and Schottky barrier diodes are employed as the load devices. A buried layer (ordinarily, an n type layer) and a doped layer of the reverse conductivity type (ordinarily the p type) are formed in a region where the device is provided, and a reverse bias is applied across the buried layer and the doped layer to shut off the noise produced within the substrate.

    摘要翻译: 提供了具有对由α射线引起的软误差具有高免疫性的结构的双极记忆。 触发器的晶体管,即存储器单元的基本电路被反转,并且其负载装置具有屏蔽装置,用于屏蔽触发器与衬底内产生的噪声。 采用双极晶体管和肖特基势垒二极管作为负载器件。 在设置器件的区域中形成掩埋层(通常为n型层)和反向导电型(通常为p型)的掺杂层,并且跨越掩埋层施加反向偏压,并且掺杂 以切断衬底内产生的噪音。

    Circuit for generating scanning pulses
    38.
    发明授权
    Circuit for generating scanning pulses 失效
    用于产生扫描脉冲的电路

    公开(公告)号:US4295055A

    公开(公告)日:1981-10-13

    申请号:US46028

    申请日:1979-06-06

    摘要: A circuit for generating scanning pulses comprising a plurality of stages of basic circuits connected in series, said each basic circuit comprising first, second and third insulated gate field-effect transistors (MISTs) each of which has first and second terminals each being either of source and drain terminals and a gate terminal, said first terminal of said first MIST being used as a clock pulse-applying terminal, said gate terminal of said first MIST being used as an input terminal, said second terminal of said first MIST and said first terminal and said gate terminal of said second MIST being connected and used as a scanning pulse output terminal, said second terminal of said second MIST and said first terminal of said third MIST being connected and used as an output terminal, said second terminal of said third MIST being used as a ground terminal, said gate terminal of said third MIST being used as a feedback input terminal.

    摘要翻译: 一种用于产生扫描脉冲的电路,包括串联连接的多级基本电路,所述每个基本电路包括第一,第二和第三绝缘栅极场效应晶体管(MIST),每个绝缘栅场效应晶体管的第一和第二端子均为源极 所述第一MIST的所述第一端子用作时钟脉冲施加端子,所述第一MIST的所述栅极端子用作输入端子,所述第一MIST的所述第二端子和所述第一端子的所述第一端子 并且所述第二MIST的所述栅极端子被连接并用作扫描脉冲输出端子,所述第二MIST的所述第二端子和所述第三MIST的所述第一端子被连接并用作输出端子,所述第三MIST的所述第二端子 被用作接地端子,所述第三MIST的所述栅极端子用作反馈输入端子。

    Tri-state type driver circuit
    39.
    发明授权
    Tri-state type driver circuit 失效
    三态驱动电路

    公开(公告)号:US4280065A

    公开(公告)日:1981-07-21

    申请号:US969269

    申请日:1978-12-14

    摘要: This invention relates to a tri-state type driver circuit in which any one of the three possible output signals of "float", "on", or "off" is produced at high speed even when an output terminal is accompanied with a great load. The tri-state type driver circuit comprises an output inverter circuit which employs a bipolar transistor as a load thereof and a MOS-FET as a driver thereof, a first logical circuit which is coupled to an input terminal of the bipolar transistor, which first logical circuit is made up of a C-MOS circuit receiving an external select signal and a C-MOS circuit having an input signal transmitted thereto and whose output can be specified by the external select signal, and a second logical circuit which is coupled to an input terminal of the MOS-FET, which second logical circuit is made up of a C-MOS circuit receiving the external select signal and a C-MOS circuit having the input signal transmitted thereto. The state of the external select signal will determine whether the driver circuit output will be "float" (regardless of the input to the driver circuit) or "on" or "off" (in correspondence with the input to the driver circuit).

    摘要翻译: 本发明涉及一种三态型驱动电路,其中即使输出端子伴随着大的负载,也可以高速度地产生“浮动”,“接通”或“断开”的三个可能的输出信号中的任何一个 。 三态型驱动器电路包括采用双极晶体管作为其负载的输出反相器电路和作为其驱动器的MOS-FET,耦合到双极晶体管的输入端的第一逻辑电路,第一逻辑 电路由接收外部选择信号的C-MOS电路和具有传输的输入信号的C-MOS电路组成,其输出可由外部选择信号指定,第二逻辑电路耦合到输入端 MOS-FET的端子,该第二逻辑电路由接收外部选择信号的C-MOS电路和传输了该输入信号的C-MOS电路组成。 外部选择信号的状态将决定驱动器电路输出是否为“浮动”(不管驱动电路的输入)还是“开”或“关”(与驱动电路的输入相对应)。

    Solid-state imaging device having a clamping circuit for drawing out
excess charge
    40.
    发明授权
    Solid-state imaging device having a clamping circuit for drawing out excess charge 失效
    具有用于抽出多余电荷的钳位电路的固态成像装置

    公开(公告)号:US4267469A

    公开(公告)日:1981-05-12

    申请号:US066880

    申请日:1979-08-16

    摘要: In a solid-state imaging device having on an identical semiconductor substrate a plurality of photodiodes which are arrayed in two dimensions, vertical and horizontal switching MOSFETs which select the positions of the photodiodes, and vertical and horizontal scanning circuits which provide scanning pulses for controlling the operations of the vertical and horizontal switching MOSFETs; the improvement therein comprising a clamping circuit which is made up of a diode, a MOSFET or the like and which is disposed between the photodiode and a vertical scanning line of the succeeding stage, so that excess charges overflowing the photodiode are drawn out from the vertical scanning line through the clamping circuit, whereby the blooming can be prevented.

    摘要翻译: 在具有相同半导体衬底的固态成像器件中,排列有二维排列的多个光电二极管,选择光电二极管的位置的垂直和水平开关MOSFET以及提供扫描脉冲的垂直和水平扫描电路,用于控制 垂直和水平开关MOSFET的工作; 其改进在于包括由二极管,MOSFET等组成并且设置在光电二极管和后级的垂直扫描线之间的钳位电路,使得溢出光电二极管的过量电荷从垂直线 扫描线通过钳位电路,从而可以防止起霜。