公开(公告)号：US5025926A

公开(公告)日：1991-06-25

申请号：US602670

申请日：1990-10-24

申请人： Barry Gregerson ,  Larry Dressen

发明人： Barry Gregerson ,  Larry Dressen

IPC分类号： H01L21/673

CPC分类号： H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386

摘要： A sealable contamination proof container package bottom and top for storing and transporting a plurality of substrate or wafers in a robotic wafer carrier. The package bottom includes four sides, a continuous vertical surface for tape sealing surrounding the four sides, a lip positioned on a vertical edge, opposing hook latches on opposing sides, opposing hand grip recesses on the opposing sides and a raised bottom surface for package stacking. The package top includes four sides, a continuous vertical surface for tape sealing surrounding the four sides, a lip positioned on the vertical surface, opposing hook catches on the opposing side, a top surface with raised stacking surfaces, and two rows of wafer support springs positioned on bars on the underside of the top surface. The package top and bottom halves provide that the robotic wafer carrier mates between the package top and package bottom with the wafers or substrates in the carrier. The package top and bottom mate with the upper lip engaged with the lower lip, and the catches of the top engage with the latches of the bottom. The package halves are designed in such a fashion as to prevent wafer or substrate damage upon opening, in that the top package half is moved in a direction coinciding to the plane of the wafers or substrates with respect to positioning of the catches and latches on the package side. Appropriate sides of the package top and bottom are plumb with each other providing for a flush perimeter for ease of taping. The raised top portion of the top package half and the recessed bottom of the bottom package half provides for stacking of like packages. In an alternative embodiment, opposing rows of articulated cantilevered horizontal arms with centering V grooves on each end for engaging a wafer, disk or substrate extend inwardly from the edges of an arced top surface in the package top.

摘要翻译： 一种可密封的防污染容器包装底部和顶部，用于在机器人晶片载体中存储和运输多个基板或晶片。 包装底部包括四个侧面，用于围绕四个侧面的带密封件的连续垂直表面，位于垂直边缘上的唇缘，相对侧上的相对的钩闩锁，相对侧上的相对的手柄凹部和用于包装堆叠的凸起的底部表面 。 封装顶部包括四个侧面，用于围绕四个侧面的带密封件的连续垂直表面，位于垂直表面上的唇缘，相对侧上的相对的钩扣，具有凸起堆叠表面的顶表面和两排晶片支撑弹簧 位于顶部表面下侧的杆上。 封装顶部和底部半部提供机器人晶片载体在封装顶部和封装底部之间与载体中的晶片或衬底配合。 包装顶部和底部配合上唇与下唇接合，并且顶部的卡扣与底部的闩锁接合。 封装半部被设计成防止在打开时晶片或基板损坏，因为顶部封装半部分在相对于晶片或基板的平面的方向上相对于捕获器和闩锁在 包装边。 包装顶部和底部的适当侧面彼此相互垂直，提供平齐的周边以便于胶带。 顶部封装半部的凸起顶部和底部封装半部的凹入底部提供了类似封装的堆叠。 在替代实施例中，相对排的铰接悬臂水平臂在每个端部上具有定心V形槽，用于接合晶片，盘或衬底，从封装顶部的弧形顶表面的边缘向内延伸。

公开(公告)号：US4838422A

公开(公告)日：1989-06-13

申请号：US124285

申请日：1987-11-23

申请人： Barry Gregerson

发明人： Barry Gregerson

IPC分类号： G11B33/04

CPC分类号： G11B33/0416

摘要： An open-ended data storage container for the storage of a disk cartridge, such as an optical disk or magnetic disk with data stored thereon. Two engaging members form an enclosure with a spring like retainer member for containment or ejection of a disk cartridge from the data storage container. Mating rails on the top and bottom surfaces of the data storage container allow for engaged stacking of like data storage containers horizontally or vertically.

摘要翻译： 一种开放式数据存储容器，用于存储具有存储在其上的数据的诸如光盘或磁盘的盘盒。 两个接合构件形成具有弹簧状保持构件的外壳，用于从数据存储容器收容或弹出盘盒。 在数据存储容器的顶面和底面上的配合轨道可以水平或垂直地进行相似数据存储容器的堆叠。

公开(公告)号：US4759442A

公开(公告)日：1988-07-26

申请号：US108071

申请日：1987-10-15

申请人： Barry Gregerson ,  Larry Dressen

发明人： Barry Gregerson ,  Larry Dressen

IPC分类号： E05B73/00 ,  B65D85/672

CPC分类号： E05B73/0023 ,  Y10S206/807

摘要： Security package including a handle structure secured to a rectangular encompassing structure for encompassing about an audio or visual cassette box or a compact disk jewel box. Retainer bars in the rectangular encompassing structure provide for retaining either an audio cassette or a video cassette box, or a compact disk box within the rectangular encompassing structure. A retainer box including a pin is pushed through a hole in the encompassing structure, and is in frictional secure engagement which provides for retaining of the box within the rectangular encompassing structure. The retaining bar-pin can be removed with common hand tools or, in the alternative, end retainer bars can be cut for separation of the ends of the rectangular encompassing structure for removing the box from the encompassing security package.

摘要翻译： 安全包，其包括固定到矩形包围结构的手柄结构，用于围绕音频或视频盒式磁带盒或小型磁盘宝石盒。 矩形包围结构中的保持杆支撑在矩形包围结构内保留音频盒式磁带或盒式磁带盒或紧凑型磁盘盒。 包括销的保持盒被推动通过包围结构中的孔，并且处于摩擦牢固的接合中，其提供将盒保持在矩形包围结构内。 可以使用普通的手动工具移除固定杆销，或者替代地，可以切割端部固定杆以分离矩形包围结构的端部，以将箱子从包围的安全包中移出。

公开(公告)号：US09673075B2

公开(公告)日：2017-06-06

申请号：US13880948

申请日：2011-10-19

申请人： Barry Gregerson ,  Matthew A. Fuller ,  Michael S. Adams

发明人： Barry Gregerson ,  Matthew A. Fuller ,  Michael S. Adams

IPC分类号： B65D85/00 ,  H01L21/673

CPC分类号： H01L21/67376 ,  H01L21/67369 ,  H01L21/67373

摘要： A wafer container that reduces or alleviates one or more of the problems associated with excessive container wall deflection due to loading and excessive particulate generation, particularly as those problems are experienced with containers for 450 mm diameter and larger wafers. The container has an enclosure and door with interlocking features to enable transfer of tension load to the door to minimize deflection of container surfaces. The container may include a gasketing arrangement compatible with the interlock feature. The container may include a removable door guide that improves centering of the door during door installation, and that is made of low particle generating material to reduce particulates.

公开(公告)号：US20130056389A1

公开(公告)日：2013-03-07

申请号：US13583886

申请日：2011-03-11

申请人： Barry Gregerson ,  Jason Steffens ,  Russ V. Raschke

发明人： Barry Gregerson ,  Jason Steffens ,  Russ V. Raschke

IPC分类号： B65D85/00 ,  B65B1/04

CPC分类号： H01L21/67369 ,  H01L21/67383 ,  H01L21/67386

摘要： An improved wafer support mechanism in a wafer container useful for carrying a plurality of axially aligned thin mostly circular wafer substrates. The container includes a cassette that has a plurality of adjacently disposed teeth for receiving the substrates, wherein each rib member is continuous from the cassette open top to the cassette open bottom, a removable top cover portion, a removable bottom cover portion, a cushion assembly removably attached to the container top cover and another cushion assembly removably located in the container bottom cover and held in place by the weight of the wafer cassette. The top cushions are formed of individual segments having an extended lead-in feature at the end of each segment, spring sections in each segment and each segment has a V-shaped cross section to receive the wafer edge. The top and bottom cushions are installed in the top and bottom container covers respectively, and extend the wafer support to approximately the entire circumference of each wafer.

摘要翻译： 晶片容器中的改进的晶片支撑机构，其用于承载多个轴向排列的薄的大多圆形晶片基板。 容器包括具有多个相邻设置的用于接收基板的齿的盒，其中每个肋构件从盒开口顶部连续到盒开口底部，可移除顶盖部分，可移除底盖部分，衬垫组件 可移除地附接到容器顶盖和可移除地位于容器底盖中的另一个缓冲组件，并通过晶片盒的重量保持在适当位置。 顶部衬垫由在每个段的末端处具有延伸的引入特征的每个段形成，每个段中的弹簧部分和每个段具有用于接收晶片边缘的V形横截面。 顶部和底部底座分别安装在顶部和底部容器盖中，并且将晶片支撑件延伸到每个晶片的大致整个圆周。

公开(公告)号：USD668865S1

公开(公告)日：2012-10-16

申请号：US29377267

申请日：2010-10-19

申请人： Barry Gregerson

设计人： Barry Gregerson

公开(公告)号：US20110005967A1

公开(公告)日：2011-01-13

申请号：US12812729

申请日：2009-01-13

申请人： Barry Gregerson ,  Michael Shawn Adams ,  Jason Todd Steffens

发明人： Barry Gregerson ,  Michael Shawn Adams ,  Jason Todd Steffens

IPC分类号： H01L21/673

CPC分类号： B65D25/103 ,  B65D25/28 ,  B65D43/02 ,  B65D85/70 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67763

摘要： A front opening semiconductor wafer container for large diameter wafers includes a container portion and a door. The container portion includes a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers. The door is attachable to the container portion to close the open front and selectively latchable to the container portion. The container portion includes a means for accommodating large diameter wafers, particularly 450 mm wafers. Optimized sag control is provided as well as enhanced structural rigidity, and wafer seating features.

摘要翻译： 用于大直径晶片的前开口半导体晶片容器包括容器部分和门。 容器部分包括左封闭侧，右封闭侧，闭合背部，开放前部和包括用于接收和容纳晶片的多个狭槽的开放内部。 门可附接到容器部分以封闭敞开的前部，并可选择性地闩锁到容器部分。 容器部分包括用于容纳大直径晶片的装置，特别是450mm的晶片。 提供优化的下垂控制以及增强的结构刚度和晶片座位功能。

公开(公告)号：US07216655B2

公开(公告)日：2007-05-15

申请号：US10282924

申请日：2002-10-29

申请人： David L. Halbmaier ,  Barry Gregerson

发明人： David L. Halbmaier ,  Barry Gregerson

IPC分类号： B08B3/02

CPC分类号： H01L21/67051 ,  B08B3/02 ,  B08B9/08 ,  B08B9/093 ,  Y10S134/902

摘要： A semi-conductor handling equipment cleaning method and apparatus are configured for use with wafer carriers. The cleaning apparatus comprises a base portion having first and second apertures and configured to support the wafer carrier in sealing contact about the first aperture. A first fluidic circuit introduces a first cleaning fluid to the inner surface of the carrier and a second fluidic circuit introduces a second cleaning fluid to the outer surface of the carrier. The carrier forms a barrier with the base so that the cleaning media is isolated so as to substantially prevent the second fluid from communicating with the first fluid. An optional door cleaning assembly comprises a rotational housing, a shaft disposed in the housing and a door receiving assembly rotatably disposed on the shaft and within the housing and securably receives the door and forms a fluid-tight seal between the door and the door receiving assembly.

摘要翻译： 半导体处理设备清洁方法和设备被配置为与晶片载体一起使用。 清洁装置包括具有第一和第二孔的基部，并且构造成支撑晶片载体围绕第一孔密封接触。 第一流体回路将第一清洗流体引入载体的内表面，第二流体回路将第二清洗流体引入载体的外表面。 载体与基底形成屏障，使得清洁介质被隔离，以便基本上防止第二流体与第一流体连通。 可选的门清洁组件包括旋转壳体，设置在壳体中的轴和可旋转地设置在轴上并在壳体内的门接收组件，并且可安全地容纳门并在门和门接收组件之间形成流体密封 。

公开(公告)号：US06644477B2

公开(公告)日：2003-11-11

申请号：US10317006

申请日：2002-12-11

申请人： Gregory Bores ,  Michael Zabka ,  Barry Gregerson

发明人： Gregory Bores ,  Michael Zabka ,  Barry Gregerson

IPC分类号： B65D8530

CPC分类号： H01L21/67369

摘要： A wafer container having a container portion with an open front for receiving and removal of wafers includes a door with a cushion system that utilizes a unique wafer restraint system and structural features to provide maximum protection for the wafers and preventing rotation of said wafers. A feature of the door is that the front of the door covers have a pair of latch cavities on the outwardly facing side of the door. The latch cavities for receiving two latch mechanisms with latch members that extend out the upper and lower peripheral edge of the door. The latch mechanisms are covered by a pair of door panels that utilize hooks that attach to the peripheral edge of the door and further attach with posts near the vertical midsection. The latch cover at the peripheral side edge and at the vertical midsection of the door provides stiffness and resistance to bending of the door. In a preferred embodiment, the attachment of the door panel at the peripheral edge utilizes hook members on the door panel that extend through slots on the peripheral side. Press fit connectors and aperture combinations are preferably utilized to connect the edge of the latch panel approximate the mid-portion of the door.

摘要翻译： 具有容器部分的容器部分的具有用于接收和移除晶片的开放前部的晶片容器包括具有缓冲系统的门，其利用独特的晶片约束系统和结构特征来为晶片提供最大的保护并防止所述晶片的旋转。 门的特征在于门盖的前部在门的向外侧面上具有一对闩锁腔。 用于接收具有延伸出门的上周边和下周边的闩锁构件的两个闩锁机构的闩锁腔。 闩锁机构由一对门板覆盖，门板利用连接到门的外围边缘的钩子，并进一步附加在垂直中央部分附近的柱子。 门的周边侧边缘和垂直中央处的锁盖提供刚度和抵抗门弯曲的能力。 在一个优选实施例中，门板在周边边缘处的连接利用门板上的钩构件延伸穿过周边的槽。 压配合连接器和孔组合优选地用于将闩锁板的边缘接近门的中部。

公开(公告)号：US5803269A

公开(公告)日：1998-09-08

申请号：US913225

申请日：1997-09-09

申请人： Robert Jacoby ,  Barry Gregerson

发明人： Robert Jacoby ,  Barry Gregerson

IPC分类号： B65D25/10 ,  B65D81/107 ,  B65D85/58 ,  B65D85/90

CPC分类号： B65D25/107 ,  B65D81/107 ,  B65D85/58

摘要： A container (10) for shipping items, such as silicon wafers, rigid memory disks, photo masks, liquid crystal displays and flat panel displays, is disclosed. The container has a bottom (20) and a removable top (30). Mounted to the inside of the container are three cushions (50, 51, 52). When the cover (30) is in place, the cushions are centered on support lines (60) which are 120.degree. from each other. When so arranged, the cushions securely hold a plurality of items in a parallel, spaced-apart registration.

摘要翻译： PCT No.PCT / US95 / 12514 Sec。 371日期1997年9月9日 102（e）1997年9月9日PCT PCT 1995年10月13日PCT公布。 公开号WO97 / 13708 日期1997年04月17日公开了用于运输物品的容器（10），例如硅晶片，刚性存储盘，光掩模，液晶显示器和平板显示器。 容器具有底部（20）和可移除顶部（30）。 安装在容器内部的是三个垫子（50,51,52）。 当盖（30）就位时，垫子以彼此为120°的支撑线（60）为中心。 当这样布置时，垫子以平行的，间隔开的配准将多个物品牢固地保持在一起。