公开(公告)号：US06940609B2

公开(公告)日：2005-09-06

申请号：US10214462

申请日：2002-08-08

Applicant: David Scheiner

Inventor： David Scheiner

IPC: G01B11/25 ,  G01B11/30

CPC classification number: G01B11/254

Abstract: An imaging method and system are presented for detecting the topography of a sample surface. Illuminating light is directed to the sample by sequentially passing the illuminating light through a grating and an objective lens arrangement The grating has a pattern formed by spaced-apart transparent regions spaced by non-transparent regions, and is specifically oriented with respect to the optical axis of the objective lens arrangement. Light, specularly reflected from the sample, is collected by the same objective lens arrangement and is directed to an imaging detector through the same grating, thereby enabling creation of an image of the illuminated sample indicative of the topography of the sample surface.

Abstract translation: 提出了一种用于检测样品表面的形貌的成像方法和系统。 照明光通过依次使照明光通过光栅和物镜布置而被引导到样品。光栅具有由不透明区域隔开的间隔开的透明区域形成的图案，并且相对于光轴具体定向 的物镜布置。 从样品镜面反射的光通过相同的物镜布置被收集，并通过相同的光栅被引导到成像检测器，从而能够创建指示样品表面的形貌的照明样品的图像。