公开(公告)号：US07653985B1

公开(公告)日：2010-02-02

申请号：US11823443

申请日：2007-06-27

申请人： David T. Chang ,  James H. Schaffner ,  Tsung-Yuan Hsu ,  Adele E. Schmitz

发明人： David T. Chang ,  James H. Schaffner ,  Tsung-Yuan Hsu ,  Adele E. Schmitz

IPC分类号： H01H11/00 ,  H01H65/00

CPC分类号： H01H59/0009 ,  H01H2001/0068 ,  Y10T29/49105 ,  Y10T29/49117 ,  Y10T29/49155 ,  Y10T29/49204

摘要： Disclosed are methods for fabricating a micro-electro-mechanical switch. The switch has a cantilever arm disposed on a substrate that can be moved in orthogonal directions for latching and unlatching. For latching, the cantilever arm is moved back by a comb-drive actuator and then pulled down by electrodes disposed on the substrate and the cantilever arm. The comb-drive actuator switch is then released and the cantilever arm moves forward to be captured by a dove-tail structure on the substrate. When the voltage is removed, the cantilever arm is held in place by the dove-tail structure. The switch is unlatched by actuating the comb-drive actuator to move the cantilever arm away from the dove-tail structure. The cantilever arm will then pop up once it is released from the dove-tail structure.

摘要翻译： 公开了用于制造微机电开关的方法。 开关具有设置在基板上的悬臂，该悬臂可以沿正交方向移动以锁定和解锁。 为了锁定，悬臂由梳驱动致动器向后移动，然后由设置在基板和悬臂上的电极拉下。 然后梳梳驱动致动器开关被释放，并且悬臂臂向前移动以通过基板上的鸽尾结构捕获。 当电压被去除时，悬臂由鸠尾结构保持在适当位置。 通过启动梳齿驱动执行机构将悬臂移动离开鸽尾结构，开关被解锁。 一旦从鸽尾结构中释放出来，悬臂就会弹出。

公开(公告)号：US08912711B1

公开(公告)日：2014-12-16

申请号：US12820761

申请日：2010-06-22

申请人： David T. Chang ,  Tsung-Yuan Hsu

发明人： David T. Chang ,  Tsung-Yuan Hsu

IPC分类号： H01L41/053 ,  H03H9/02

CPC分类号： H03H9/02102 ,  H01P1/127 ,  H01P7/082 ,  H03H9/02377 ,  H03H9/19

摘要： In an embodiment, a thermal stress resistant resonator is disclosed. The thermal stress resistant resonator may include or comprise a piezoelectric member having one or more non-linear piezoelectric support members extending there from.

摘要翻译： 在一个实施例中，公开了一种耐热应力谐振器。 耐热应力谐振器可以包括或包括具有从其延伸的一个或多个非线性压电支撑构件的压电构件。

公开(公告)号：US08242865B1

公开(公告)日：2012-08-14

申请号：US12352914

申请日：2009-01-13

申请人： David T. Chang ,  Tsung-Yuan Hsu

发明人： David T. Chang ,  Tsung-Yuan Hsu

IPC分类号： H01H51/22

CPC分类号： H01H55/00

摘要： A micromachined switch is provided including a base substrate, a bond pad on the base substrate, a cantilever arm connected to the bond pad, the cantilever arm having a conductive via from the bond pad, a first actuation electrode on the base substrate, and a second actuation electrode on the cantilever arm connected to the bond pad by way of the conductive via, positioned such that an actuation voltage applied between the first actuation electrode and the second actuation electrode will deform the cantilever arm, wherein the first actuation electrode is facing a side of the cantilever arm opposite the second actuation electrode.

摘要翻译： 提供一种微加工开关，包括基底基板，基底基板上的接合焊盘，连接到接合焊盘的悬臂，悬臂臂具有来自接合焊盘的导电通孔，基底基板上的第一致动电极和 悬臂上的第二致动电极通过导电通孔连接到接合焊盘，定位成使得施加在第一致动电极和第二致动电极之间的致动电压将使悬臂变形，其中第一致动电极面向 悬臂的一侧与第二致动电极相对。

公开(公告)号：US07994877B1

公开(公告)日：2011-08-09

申请号：US12268309

申请日：2008-11-10

申请人： Randall L. Kubena ,  David T. Chang

发明人： Randall L. Kubena ,  David T. Chang

IPC分类号： H03H9/02 ,  H03H9/05 ,  H03H9/15 ,  H03H9/54 ,  H03H7/00

CPC分类号： H03H9/542 ,  H03H9/0542

摘要： An integrated Micro-Electro-Mechanical Systems (MEMS) filter includes an insulating substrate bonded to a base substrate such that at least a portion of the insulating substrate is separated from the base substrate by a gap, the insulating substrate having a first side and a second side, an inductive element having a coil, wherein the coil of the inductive element is on the insulating substrate, and a capacitive element having two conductive plates, wherein one of the two conductive plates is on the insulating substrate.

摘要翻译： 集成的微电子机械系统（MEMS）滤波器包括与基底基板接合的绝缘基板，使得绝缘基板的至少一部分通过间隙与基底基板分离，绝缘基板具有第一面和 第二侧，具有线圈的电感元件，其中电感元件的线圈在绝缘基板上，以及具有两个导电板的电容元件，其中两个导电板中的一个位于绝缘基板上。

公开(公告)号：US07647688B1

公开(公告)日：2010-01-19

申请号：US12189617

申请日：2008-08-11

申请人： David T. Chang ,  Randall L. Kubena ,  Frederic P. Stratton ,  Pamela R. Patterson

发明人： David T. Chang ,  Randall L. Kubena ,  Frederic P. Stratton ,  Pamela R. Patterson

IPC分类号： H04R31/00

CPC分类号： H04R31/00 ,  H04R19/005 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/4908

摘要： A method for fabricating a low frequency quartz resonator includes metalizing a top-side of a quartz wafer with a metal etch stop, depositing a first metal layer over the metal etch stop, patterning the first metal layer to form a top electrode, bonding the quartz wafer to a silicon handle, thinning the quartz wafer to a desired thickness, depositing on a bottom-side of the quartz wafer a hard etch mask, etching the quartz wafer to form a quartz area for the resonator and to form a via through the quartz wafer, removing the hard etch mask without removing the metal etch stop, forming on the bottom side of the quartz wafer a bottom electrode for the low frequency quartz resonator, depositing metal for a substrate bond pad onto a host substrate wafer, bonding the quartz resonator to the substrate bond pad, and removing the silicon handle.

摘要翻译： 一种用于制造低频石英谐振器的方法包括用金属蚀刻停止器将石英晶片的顶侧金属化，在金属蚀刻停止器上沉积第一金属层，图案化第一金属层以形成顶部电极，将石英 将晶片细化到硅手柄，将石英晶片细化到所需厚度，在石英晶片的底侧上沉积硬蚀刻掩模，蚀刻石英晶片以形成用于谐振器的石英区域，并通过石英形成通孔 晶片，去除硬蚀刻掩模而不去除金属蚀刻停止，在石英晶片的底侧上形成用于低频石英谐振器的底部电极，将用于衬底接合焊盘的金属沉积到主衬底晶片上，将石英谐振器 到基板接合焊盘，并且移除硅手柄。

公开(公告)号：US07581443B2

公开(公告)日：2009-09-01

申请号：US11458911

申请日：2006-07-20

申请人： Randall L. Kubena ,  David T. Chang

发明人： Randall L. Kubena ,  David T. Chang

IPC分类号： G01P9/04

CPC分类号： G01C19/5684

摘要： Embodiments of the present invention are directed to apparatuses and methods of making a micromachined resonator gyroscope, e.g. a disc resonator gyro (DRG), including one or more of the following novel features. Embodiments of the invention may comprise a triple-wafer stack gyroscope with an all fused quartz (or all silicon) construction for an electrical baseplate, resonator and vacuum cap. This can yield superior thermal stability over prior art designs. A typical resonator embodiment may include a centrally anchored disc with high aspect-ratio in-plane electrostatic drive and sense electrodes to create large capacitance. A silicon sacrificial layer may be employed for attaching a quartz resonator wafer to a quartz handle wafer for high aspect-ratio etching. In addition, embodiments of the invention may comprise a low thermal stress, wafer-level vacuum packaged gyroscope with on-chip getter. An ultra-thin conductive layer deposited on the quartz resonator may also be utilized for high Q.

摘要翻译： 本发明的实施例涉及制造微加工谐振器陀螺仪的装置和方法，例如， 盘谐振器陀螺仪（DRG），其包括以下新颖特征中的一个或多个。 本发明的实施例可以包括具有用于电气基板，谐振器和真空盖的全熔融石英（或全硅）结构的三晶片堆叠陀螺仪。 这可以比现有技术的设计产生优异的热稳定性。 典型的谐振器实施例可以包括具有高纵横比面内静电驱动的中心锚定盘和感测电极以产生大的电容。 可以使用硅牺牲层将石英谐振器晶片连接到用于高纵横比蚀刻的石英处理晶片。 此外，本发明的实施例可以包括具有片上吸气剂的低热应力晶片级真空包装陀螺仪。 沉积在石英谐振器上的超薄导电层也可用于高Q值。

公开(公告)号：US07559130B2

公开(公告)日：2009-07-14

申请号：US11800289

申请日：2007-05-04

申请人： Randall L. Kubena ,  David T. Chang ,  Jinsoo Kim

发明人： Randall L. Kubena ,  David T. Chang ,  Jinsoo Kim

IPC分类号： H04R31/00

CPC分类号： H03H9/19 ,  H03H3/04 ,  H03H2003/0414 ,  H03H2009/241 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/4908 ,  Y10T29/49128 ,  Y10T29/49165

摘要： A method for fabricating a quartz nanoresonator which can be integrated on a substrate, along with other electronics is disclosed. In this method a quartz substrate is bonded to a base substrate. The quartz substrate is metallized so that a bias voltage is applied to the resonator, thereby causing the quartz substrate to resonate at resonant frequency greater than 100 MHz. The quartz substrate can then be used to drive other electrical elements with a frequency equal to its resonant frequency. The quartz substrate also contains tuning pads to adjust the resonant frequency of the resonator. Additionally, a method for accurately thinning a quartz substrate of the resonator is provided. The method allows the thickness of the quartz substrate to be monitored while the quartz substrate is simultaneously thinned.

摘要翻译： 公开了一种用于制造可集成在基底上的石英纳米谐振器的方法以及其它电子器件。 在该方法中，将石英基板接合到基底基板。 石英衬底被金属化，使得偏置电压被施加到谐振器，从而使得石英衬底在大于100MHz的谐振频率下谐振。 石英衬底然后可用于以等于其谐振频率的频率驱动其它电气元件。 石英衬底还包含调谐垫以调节谐振器的谐振频率。 此外，提供了一种用于精确稀薄谐振器的石英衬底的方法。 该方法允许在石英衬底同时变薄的同时监测石英衬底的厚度。

公开(公告)号：US07459099B2

公开(公告)日：2008-12-02

申请号：US11043378

申请日：2005-01-25

申请人： Randall L. Kubena ,  David T. Chang ,  Jinsoo Kim

发明人： Randall L. Kubena ,  David T. Chang ,  Jinsoo Kim

IPC分类号： H01L21/00

CPC分类号： H03H9/19 ,  H03H3/04 ,  H03H2003/0414 ,  H03H2009/241 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/4908 ,  Y10T29/49128 ,  Y10T29/49165

摘要： A method for fabricating a quartz nanoresonator which can be integrated on a substrate, along with other electronics is disclosed. In this method a quartz substrate is bonded to a base substrate. The quartz substrate is metallized so that a bias voltage is applied to the resonator, thereby causing the quartz substrate to resonate at resonant frequency greater than 100 MHz. The quartz substrate can then be used to drive other electrical elements with a frequency equal to its resonant frequency. The quartz substrate also contains tuning pads to adjust the resonant frequency of the resonator. Additionally, a method for accurately thinning a quartz substrate of the resonator is provided. The method allows the thickness of the quartz substrate to be monitored while the quartz substrate is simultaneously thinned.

摘要翻译： 公开了一种用于制造可集成在基底上的石英纳米谐振器的方法以及其它电子器件。 在该方法中，将石英基板接合到基底基板。 石英衬底被金属化，使得偏置电压被施加到谐振器，从而使得石英衬底在大于100MHz的谐振频率下谐振。 石英衬底然后可用于以等于其谐振频率的频率驱动其它电气元件。 石英衬底还包含调谐垫以调节谐振器的谐振频率。 此外，提供了一种用于精确稀薄谐振器的石英衬底的方法。 该方法允许在石英衬底同时变薄的同时监测石英衬底的厚度。

公开(公告)号：US20080258829A1

公开(公告)日：2008-10-23

申请号：US11881461

申请日：2007-07-27

申请人： Randall L. Kubena ,  David T. Chang

发明人： Randall L. Kubena ,  David T. Chang

IPC分类号： H03B5/36 ,  H01L41/22

CPC分类号： H04R17/10 ,  B81B2201/0271 ,  B81B2207/012 ,  B81C1/00253 ,  H04R31/00 ,  Y10T29/42

摘要： An oscillator having a quartz resonator, and a base wafer containing active electronics, wherein the quartz resonator is bonded directly to the base wafer and subsequently hermetically capped.

摘要翻译： 具有石英谐振器的振荡器和包含有源电子器件的基底晶片，其中所述石英谐振器直接接合到所述基底晶片并随后密封。

公开(公告)号：US06975009B2

公开(公告)日：2005-12-13

申请号：US10853848

申请日：2004-05-25

申请人： Randall L. Kubena ,  David T. Chang

发明人： Randall L. Kubena ,  David T. Chang

IPC分类号： B81B3/00 ,  B81C1/00 ,  G01C19/5656 ,  G01P15/08 ,  H01L29/82

CPC分类号： B81C1/0015 ,  B81B2201/0242 ,  B81C2201/014 ,  B81C2201/0191 ,  B81C2203/036 ,  G01C19/5656 ,  G01P15/0802 ,  G01P15/0894

摘要： A MEM tunneling gyroscope assembly includes (1) a beam structure, and a mating structure defined on a first substrate or wafer; and (2) at least one contact structure, and a mating structure defined on a second substrate or wafer, the mating structure on the second substrate or wafer being of a complementary shape to the mating structure on the first substrate or wafer; and (3) a bonding layer is disposed on at least one of said mating structures for bonding the mating structure defined on the first substrate or wafer to the mating structure on the second substrate or wafer.

摘要翻译： MEM隧道陀螺仪组件包括（1）梁结构和限定在第一衬底或晶片上的配合结构; 以及（2）至少一个接触结构以及限定在第二衬底或晶片上的配合结构，所述第二衬底或晶片上的所述配合结构与所述第一衬底或晶片上的配合结构互补形状; 和（3）粘合层设置在至少一个所述配合结构上，用于将限定在第一衬底或晶片上的配合结构接合到第二衬底或晶片上的配合结构。