公开(公告)号：US20060138929A1

公开(公告)日：2006-06-29

申请号：US11294352

申请日：2005-12-06

申请人： Hyung-Seok Oh ,  Jong-Heon Kim

发明人： Hyung-Seok Oh ,  Jong-Heon Kim

IPC分类号： H01J29/80

CPC分类号： H01J29/07

摘要： A shadow mask for a cathode ray tube is formed with a curved surface such that a radius of curvature corresponding to a perpendicular axis which passes through the center of the shadow mask decreases monotonely along the perpendicular axis from the center of the shadow mask and a radius of curvature corresponding to a parallel axis which passes through the center of the shadow mask decreases monotonely along the parallel axis from the center of the shadow mask. The curved surface satisfies the following condition, [0.1 RVmin+0.9RVmax, 0.9RVmin+0.1RVmax]⊂[RHmin, RHmax]. RVmin and RVmax respectively represent the minimum and the maximum value of the minimum radius of curvature corresponding to the perpendicular axis, and RHmin and RHmax respectively represent the minimum and the maximum value of the minimum radius of curvature corresponding to the parallel axis.

摘要翻译： 阴极射线管的阴罩形成有弯曲表面，使得与通过荫罩中心的垂直轴相对应的曲率半径从阴影中心沿垂直轴线单调减小，半径 对应于通过荫罩中心的平行轴的曲率从荫罩的中心沿着平行轴线单调减小。 弯曲表面满足以下条件：[0.1 RV + 0.9RV最大值，0.9RV分钟+ 0.1RV最大值/ SUB>]⊂[RH ，RH最大]。 RV 分别表示与垂直轴对应的最小曲率半径的最小值和最大值，RH < / SUB>和RH 分别表示对应于平行轴的最小曲率半径的最小值和最大值。

公开(公告)号：US09512515B2

公开(公告)日：2016-12-06

申请号：US13492144

申请日：2012-06-08

申请人： Seok-Rak Chang ,  Myeng-Woo Nam ,  Hee-Cheol Kang ,  Jong-Heon Kim ,  Jong-Won Hong ,  Uno Chang

发明人： Seok-Rak Chang ,  Myeng-Woo Nam ,  Hee-Cheol Kang ,  Jong-Heon Kim ,  Jong-Won Hong ,  Uno Chang

IPC分类号： B65G35/00 ,  C23C14/12 ,  C23C14/50 ,  H01L21/67 ,  H01L21/677 ,  H01L21/683

CPC分类号： C23C14/12 ,  B05B12/20 ,  B05B12/22 ,  B05B13/0221 ,  B05D1/60 ,  C23C14/042 ,  C23C14/24 ,  C23C14/50 ,  H01L21/67173 ,  H01L21/67709 ,  H01L21/6776 ,  H01L21/67784 ,  H01L21/6831 ,  H01L27/3244 ,  H01L27/3246 ,  H01L51/56

摘要： An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyer unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyer unit passes through inside the chamber, and the first conveyer unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.

摘要翻译： 有机层沉积装置以及使用有机层沉积装置的有机发光显示装置的制造方法。 有机层沉积装置包括：静电卡盘，其固定地支撑作为沉积靶的基板; 包括保持真空的室的沉积单元和用于在由静电卡盘固定地支撑的基板上沉积有机层的有机层沉积组件; 以及第一输送单元，用于将固定地支撑所述基板的所述静电卡盘移动到所述沉积单元中，其中所述第一输送单元穿过所述室内部，并且所述第一输送单元包括导向单元，所述引导单元具有用于支撑所述静电卡盘的接收构件 可沿方向移动

公开(公告)号：US09450140B2

公开(公告)日：2016-09-20

申请号：US12869830

申请日：2010-08-27

申请人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

发明人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

IPC分类号： B05D5/06 ,  C23C16/00 ,  B05D1/32 ,  H01L21/00 ,  H01L33/00 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  C23C14/56 ,  H01L21/67 ,  H01L21/683 ,  H01L51/00 ,  H01L51/56 ,  H01L27/32

CPC分类号： H01L33/005 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  C23C14/246 ,  C23C14/568 ,  H01L21/67173 ,  H01L21/67225 ,  H01L21/67236 ,  H01L21/6831 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/56

摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus includes a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.

摘要翻译： 一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元 卡盘 沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，其将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中所述第一循环单元在通过所述沉积单元时通过所述室。

公开(公告)号：US08859043B2

公开(公告)日：2014-10-14

申请号：US13468835

申请日：2012-05-10

申请人： Dong-Kyu Lee ,  Mu-Hyun Kim ,  Young-Rok Song ,  Sang-Pil Lee ,  Jung-Bae Song ,  Jong-Heon Kim ,  Byung-Su Kim ,  Yun-Mi Lee ,  Jae-Kwang Ryu

发明人： Dong-Kyu Lee ,  Mu-Hyun Kim ,  Young-Rok Song ,  Sang-Pil Lee ,  Jung-Bae Song ,  Jong-Heon Kim ,  Byung-Su Kim ,  Yun-Mi Lee ,  Jae-Kwang Ryu

IPC分类号： C23C16/00 ,  H01L33/08 ,  C23C14/12 ,  C23C14/04 ,  C23C14/24

CPC分类号： C23C14/042 ,  C23C14/12 ,  C23C14/243

摘要： An organic layer deposition apparatus for forming an organic layer on a substrate includes: a deposition source configured to discharge a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles; and a patterning slit sheet facing the deposition source nozzle unit and including a plurality of patterning slits and at least one spacer arranged between a pair of adjacent patterning slits of the plurality of patterning slits, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction, and the substrate is spaced apart from the organic layer deposition apparatus by a predetermined distance, and at least one of the substrate or the organic layer deposition apparatus is movable relative to the other.

摘要翻译： 用于在基板上形成有机层的有机层沉积装置包括：沉积源，其被配置为排出沉积材料; 沉积源喷嘴单元，布置在沉积源的一侧并且包括多个沉积源喷嘴; 以及与所述沉积源喷嘴单元相对并且包括多个图案化狭缝的图案化缝隙片和布置在所述多个图案化缝隙的一对相邻图案化缝隙之间的至少一个间隔件，所述图案化缝隙片材至少在所述衬底上至少 垂直于第一方向的第一方向或第二方向之一，并且基板与有机层沉积装置间隔预定距离，并且基板或有机层沉积装置中的至少一个可相对于 其他。

公开(公告)号：US20130298829A1

公开(公告)日：2013-11-14

申请号：US13943221

申请日：2013-07-16

申请人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

发明人： Chang-Mog Jo ,  Jong-Heon Kim ,  Yong-Sup Choi ,  Sang-Soo Kim ,  Hee-Cheol Kang ,  Young-Mook Choi

IPC分类号： H01L33/00

CPC分类号： H01L33/005 ,  C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  C23C14/246 ,  C23C14/568 ,  H01L21/67173 ,  H01L21/67225 ,  H01L21/67236 ,  H01L21/6831 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/56

摘要： A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus inclues a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.

摘要翻译： 一种薄膜沉积装置，用于大规模制造大型基板并允许高分辨率图案化，以及制造使用其的有机发光显示装置的方法，该装置包括将基板固定在静电上的装载单元 卡盘 沉积单元，其包括保持在真空状态的室和设置在所述室中的薄膜沉积组件，其与所述基板隔开预定距离，以在固定在所述静电卡盘上的所述基板上沉积薄膜; 从所述静电卡盘将分离完成了沉积处理的基板的卸载单元; 顺序地将固定有基板的静电卡盘移动到加载单元，沉积单元和卸载单元的第一循环单元; 以及第二循环单元，将从所述基板分离的所述静电卡盘从所述卸载单元返回到所述装载单元，其中，所述第一循环单元在通过所述沉积单元时通过所述室。

公开(公告)号：US08383983B2

公开(公告)日：2013-02-26

申请号：US12731410

申请日：2010-03-25

申请人： Hyun-Chul Lee ,  Cheol-Lee Roh ,  Gyoo-Wan Han ,  Seung-Ho Myoung ,  Jong-Heon Kim ,  Joon-Hyung Kim ,  Sung-Gon Kim ,  Yong-Jin Lee

发明人： Hyun-Chul Lee ,  Cheol-Lee Roh ,  Gyoo-Wan Han ,  Seung-Ho Myoung ,  Jong-Heon Kim ,  Joon-Hyung Kim ,  Sung-Gon Kim ,  Yong-Jin Lee

IPC分类号： B23K26/14 ,  B23K26/16 ,  B23K26/00

CPC分类号： C03B33/091 ,  H01L51/56 ,  H01L2251/566 ,  H05K3/0029 ,  H05K3/0052 ,  H05K2203/1121

摘要： A substrate cutting apparatus including: a stage to support a substrate; a laser generator to emit a laser beam; a beam oscillator to oscillate the laser beam onto a cutting line of the substrate, to heat the substrate; and a cooling unit to cool the heated substrate.

摘要翻译： 一种基板切割装置，包括：支撑基板的台; 激光发生器发射激光束; 光束振荡器，用于将激光束振荡到衬底的切割线上，以加热衬底; 以及用于冷却加热的基板的冷却单元。

公开(公告)号：US20130009177A1

公开(公告)日：2013-01-10

申请号：US13492144

申请日：2012-06-08

申请人： Seok-Rak Chang ,  Myeng-Woo Nam ,  Hee-Cheol Kang ,  Jong-Heon Kim ,  Jong-Won Hong ,  Uno Chang

发明人： Seok-Rak Chang ,  Myeng-Woo Nam ,  Hee-Cheol Kang ,  Jong-Heon Kim ,  Jong-Won Hong ,  Uno Chang

IPC分类号： H01L51/56 ,  B05C11/00 ,  B05C13/00 ,  H01L51/52 ,  B05C15/00

CPC分类号： C23C14/12 ,  B05B12/20 ,  B05B12/22 ,  B05B13/0221 ,  B05D1/60 ,  C23C14/042 ,  C23C14/24 ,  C23C14/50 ,  H01L21/67173 ,  H01L21/67709 ,  H01L21/6776 ,  H01L21/67784 ,  H01L21/6831 ,  H01L27/3244 ,  H01L27/3246 ,  H01L51/56

摘要： An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyer unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyer unit passes through inside the chamber, and the first conveyer unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.

摘要翻译： 有机层沉积装置以及使用有机层沉积装置的有机发光显示装置的制造方法。 有机层沉积装置包括：静电卡盘，其固定地支撑作为沉积靶的基板; 包括保持真空的室的沉积单元和用于在由静电卡盘固定地支撑的基板上沉积有机层的有机层沉积组件; 以及第一输送单元，用于将固定地支撑所述基板的所述静电卡盘移动到所述沉积单元中，其中所述第一输送单元穿过所述室内部，并且所述第一输送单元包括导向单元，所述引导单元具有用于支撑所述静电卡盘的接收构件 可沿方向移动

公开(公告)号：US20120100282A1

公开(公告)日：2012-04-26

申请号：US13015357

申请日：2011-01-27

申请人： Yun-Mi Lee ,  Hyun-Sook Park ,  Jong-Heon Kim ,  Seok-Rak Chang

发明人： Yun-Mi Lee ,  Hyun-Sook Park ,  Jong-Heon Kim ,  Seok-Rak Chang

IPC分类号： B05B15/04 ,  B05D5/06

CPC分类号： C23C14/243 ,  B05D5/06 ,  C23C14/042 ,  C23C14/12 ,  H01L51/0011 ,  H01L51/56

摘要： An organic film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit located at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet spaced apart from the deposition source nozzle unit and having a plurality of patterning slits arranged in a second direction perpendicular to the first direction; a first blocking member between the substrate and the deposition source and movable together with the substrate to be positioned to screen at least a part of the substrate; and a second blocking member between the first blocking member and the substrate and fixedly held relative to the deposition source, wherein the substrate is spaced apart from the organic film deposition apparatus and at least one of the substrate or the organic film deposition apparatus moves relative to the other.

摘要翻译： 有机膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，位于沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 与沉积源喷嘴单元间隔开并且具有沿垂直于第一方向的第二方向布置的多个图案化狭缝的图案化缝隙片; 在所述基板和所述沉积源之间的第一阻挡构件，并与所述基板一起移动以被定位以筛选所述基板的至少一部分; 以及在所述第一阻挡构件和所述基板之间并相对于所述沉积源固定地保持的第二阻挡构件，其中所述基板与所述有机膜沉积装置间隔开，并且所述基板或所述有机膜沉积装置中的至少一个相对于 另一个。

公开(公告)号：US20110165320A1

公开(公告)日：2011-07-07

申请号：US12820355

申请日：2010-06-22

申请人： Yong-Sup CHOI ,  Hee-Cheol Kang ,  Young-Mook Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

发明人： Yong-Sup CHOI ,  Hee-Cheol Kang ,  Young-Mook Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

IPC分类号： B05D5/06 ,  C23C16/00 ,  C23C16/44

CPC分类号： C23C14/243 ,  C23C14/12 ,  H01L51/0008 ,  H01L51/56

摘要： A deposition source, a thin film deposition apparatus, and a method of manufacturing an organic light-emitting display apparatus, the deposition source including: a crucible to hold a deposition material; a heater to heat the deposition material; a nozzle unit disposed at a side of the crucible; a first connector disposed between the crucible and the nozzle unit; a first valve disposed on the first connector to control the flow of the deposition material to the nozzle unit; a deposition material recovery unit to collect the deposition material; a second connector to connect the first connector to the deposition material recovery unit; and a second valve to control the flow of the deposition material through the second connector.

摘要翻译： 沉积源，薄膜沉积设备和制造有机发光显示设备的方法，所述沉积源包括：用于保持沉积材料的坩埚; 用于加热沉积材料的加热器; 布置在所述坩埚的一侧的喷嘴单元; 设置在所述坩埚和所述喷嘴单元之间的第一连接器; 设置在所述第一连接器上以控制所述沉积材料流到所述喷嘴单元的第一阀; 沉积材料回收单元，用于收集沉积材料; 将第一连接器连接到沉积材料回收单元的第二连接器; 以及第二阀，以控制通过第二连接器的沉积材料的流动。

公开(公告)号：US20110053300A1

公开(公告)日：2011-03-03

申请号：US12862125

申请日：2010-08-24

申请人： Jae-Kwang RYU ,  Hyun-Sook Park ,  Yun-Mi Lee ,  Jong-Heon Kim ,  Sang-Soo Kim ,  Ji-Sook Oh

发明人： Jae-Kwang RYU ,  Hyun-Sook Park ,  Yun-Mi Lee ,  Jong-Heon Kim ,  Sang-Soo Kim ,  Ji-Sook Oh

IPC分类号： H01L51/56 ,  B05B17/00

CPC分类号： C23C14/243 ,  C23C14/042 ,  C23C14/12 ,  C23C14/562 ,  H01L27/3244 ,  H01L51/0011 ,  H01L51/56

摘要： A thin film deposition apparatus that can be applied to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.

摘要翻译： 可以应用于大规模制造大尺寸显示装置并提高制造成品率的薄膜沉积装置，以及通过使用薄膜沉积装置制造有机发光显示装置的方法。