公开(公告)号：US20070062296A1

公开(公告)日：2007-03-22

申请号：US11604324

申请日：2006-11-27

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L7/10

CPC分类号： G01L9/0075 ,  G01L9/0072 ,  G01L9/125

摘要： A pressure sensor (30) for environments with wide ranging temperatures such as vehicle tires. The sensor has a conductive sensor membrane (53) exposed to the fluid pressure to be sensed, and a similarly conductive reference membrane subject to a predetermined pressure difference. Both membranes are connected to circuitry that converts the deflection in the sensor membrane into an output signal indicative of the pressure difference across the sensor membrane, and converts the deflection of the reference membrane into a thermal expansion compensation value used to adjust the output signal in response to temperature variations in the pressure sensor's environment.

摘要翻译： 用于具有宽范围温度的环境的压力传感器（30），例如车辆轮胎。 传感器具有暴露于要感测的流体压力的导电传感器膜（53）和经受预定压力差的类似导电的参考膜。 两个膜连接到将传感器膜中的偏转转换成表示传感器膜上的压力差的输出信号的电路，并将参考膜的偏转转换成用于响应于调整输出信号的热膨胀补偿值 对压力传感器环境的温度变化。

公开(公告)号：US20060288792A1

公开(公告)日：2006-12-28

申请号：US11514158

申请日：2006-09-01

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L9/00

CPC分类号： B60C23/0408 ,  G01L9/0047 ,  G01L9/0073 ,  G01L9/125 ,  G01L15/00 ,  G01L19/0636

摘要： A pressure sensor for sensing a fluid pressure in a high acceleration environment. The sensor has a chamber partially defined by a non-planar membrane, the chamber containing a fluid at a reference pressure, such that the non-planar membrane deflects due to pressure differentials between the reference pressure and the fluid pressure. The deflection is converted into an output signal indicative of the fluid pressure by associated circuitry. By keeping the area of the membrane exposed to the fluid in the chamber to less than 0.1 grams, the acceleration forces have minimal affect on the amount that membrane flexes.

摘要翻译： 一种用于感测高加速环境中的流体压力的压力传感器。 传感器具有由非平面膜部分地限定的室，该室包含在参考压力下的流体，使得非平面膜由于参考压力和流体压力之间的压力差而偏转。 偏转被转换为指示相关电路的流体压力的输出信号。 通过将膜暴露于腔室中的流体的面积保持在小于0.1克，加速力对薄膜弯曲量的影响最小。

公开(公告)号：US20060248956A1

公开(公告)日：2006-11-09

申请号：US11478593

申请日：2006-07-03

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L7/10

CPC分类号： G01L9/0075 ,  G01L9/0072 ,  G01L9/125

摘要： A pressure sensor (30) for environments with wide ranging temperature variations such as vehicle tires. The sensor has a sensor membrane (53) exposed to the fluid pressure to be sensed, and a reference membrane subject to a predetermined pressure difference. Both membranes are conductive and connected to circuitry that converts the deflection in the sensor membrane into an output signal indicative of the pressure difference across the sensor membrane, and converts the deflection of the reference membrane into a temperature compensation value used to adjust the output signal into a temperature compensated signal indicate of the fluid pressure to be sensed.

摘要翻译： 用于具有宽范围温度变化的环境的压力传感器（30），例如车辆轮胎。 传感器具有暴露于待感测的流体压力的传感器膜（53）和经受预定压力差的参考膜。 两个膜是导电的并且连接到电路，其将传感器膜中的偏转转换成表示传感器膜上的压力差的输出信号，并将参考膜的偏转转换成用于将输出信号调整为的温度补偿值 温度补偿信号指示要感测的流体压力。

公开(公告)号：US20060225494A1

公开(公告)日：2006-10-12

申请号：US11442177

申请日：2006-05-30

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01M17/02

CPC分类号： G01L9/0075 ,  B60C23/0408 ,  G01L9/0072 ,  G01L9/0073 ,  G01L9/125 ,  G01L13/00 ,  G01L17/00 ,  G01L19/04

摘要： A pressure sensor (30) for sensing a fluid pressure in harsh environments such as the air pressure in a tire, by using a chamber (58) partially defined by a flexible membrane (50), the flexible membrane (50) is a laminate having at least two layers wherein at least one of the layers is at least partially formed from conductive material, and the chamber (58) containing a fluid at a reference pressure, such that the flexible membrane (50) deflects from any pressure difference between the reference pressure and the fluid pressure; and, associated circuitry (34) for converting deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. Forming the membrane from a number of separately deposited layers alleviates internal stress in the membrane (50). The layers can be different materials specifically selected to withstand harsh environments.

摘要翻译： 一种压力传感器（30），用于通过使用部分地由柔性膜（50）限定的腔室（58）来感测恶劣环境（例如轮胎中的气压）中的流体压力，所述柔性膜（50）是具有 至少两个层，其中至少一个层至少部分地由导电材料形成，并且所述室（58）在参考压力下包含流体，使得柔性膜（50）从参考压力之间的任何压力差偏转 压力和流体压力; 以及用于将柔性膜（50）的偏转转换成指示流体压力的输出信号的相关电路（34）。 从多个单独沉积的层形成膜缓解膜（50）中的内部应力。 这些层可以是特定选择以承受恶劣环境的不同材料。

公开(公告)号：US20060081058A1

公开(公告)日：2006-04-20

申请号：US10965928

申请日：2004-10-18

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L7/10

CPC分类号： G01L9/0075 ,  B60C23/0408 ,  G01L9/0042 ,  G01L9/0072 ,  G01L9/125

摘要： A pressure sensor (30) for harsh environments such as vehicle tires, formed from a chamber (58) partially defined by a flexible membrane (50), the chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects from any pressure difference between the reference pressure and the fluid pressure. The membrane (50) being at least partially formed from conductive material so that associated circuitry (34) converts the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. The flexible membrane is less than 3 microns thick to allow the use of a high yield strength membrane material. A thinner membrane also allows the area of the membrane to be reduced. Reducing the area of the membrane reduces the power consumption and the overall size of the sensor. A high yield strength material is better able to withstand the extreme conditions within the tire and a compact design can be installed in restricted spaces such as the valve stem.

摘要翻译： 一种用于恶劣环境（例如车辆轮胎）的压力传感器（30），其由由柔性膜（50）部分限定的腔室（58）形成，所述腔室（58）包含参考压力的流体。 在使用中，柔性膜（50）从参考压力和流体压力之间的任何压力差偏转。 膜（50）至少部分地由导电材料形成，使得相关联的电路（34）将柔性膜（50）的偏转转换成指示流体压力的输出信号。 柔性膜的厚度小于3微米，以允许使用高屈服强度的膜材料。 更薄的膜还允许减小膜的面积。 降低膜面积可以降低传感器的功耗和整体尺寸。 高屈服强度材料能够更好地承受轮胎内的极端条件，并且紧凑的设计可以安装在诸如阀杆的限制空间中。

公开(公告)号：US20060081057A1

公开(公告)日：2006-04-20

申请号：US10965922

申请日：2004-10-18

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L7/10

CPC分类号： G01L9/0075 ,  G01L9/0072 ,  G01L9/125

摘要： A pressure sensor (30) for harsh environments such as vehicle tires, the sensor having a chamber (58) partially defined by a flexible membrane (50), the chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure, so that, associated circuitry (34) can convert the deflection of the flexible membrane into an output signal indicative of the fluid pressure. The sensor is a MEMS device whereby the recess, the flexible membrane and the associated circuitry are formed using lithographically masked etching and deposition techniques. MEMS fabrication techniques can produce the sensor in such high volumes that the unit cost of each sensor is very low. The MEMS sensor is so small that it can be installed in very restricted areas such as the stem of the tire valve.

公开(公告)号：US20060248950A1

公开(公告)日：2006-11-09

申请号：US11480956

申请日：2006-07-06

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01F3/14

CPC分类号： B60C23/0408 ,  G01L9/0073 ,  G01L9/0075

摘要： A pressure sensor (30) for harsh environments such as vehicle tires, the sensor having a chamber (58) partially defined by a flexible membrane (50), the chamber containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure, so that, associated circuitry (34) can convert the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. The sensor is a MEMS device whereby the recess, the flexible membrane and the associated circuitry are formed using lithographically masked etching and deposition techniques. MEMS fabrication techniques can produce the sensor in such high volumes that the unit cost of each sensor is very low. The MEMS sensor is so small that it can be installed in very restricted areas such as the stem of the tire valve.

摘要翻译： 一种用于诸如车辆轮胎的恶劣环境的压力传感器（30），所述传感器具有由柔性膜（50）部分限定的室（58），所述室包含参考压力下的流体。 在使用中，柔性膜（50）由于参考压力和流体压力之间的压差而偏转，使得相关联的电路（34）可以将柔性膜（50）的偏转转换成指示流体的输出信号 压力。 该传感器是MEMS器件，借此使用光刻掩模的蚀刻和沉积技术形成凹槽，柔性膜和相关电路。 MEMS制造技术可以以如此高的体积产生传感器，使得每个传感器的单位成本非常低。 MEMS传感器非常小，可以安装在非常有限的区域，如轮胎阀杆。

公开(公告)号：US20060081053A1

公开(公告)日：2006-04-20

申请号：US11074775

申请日：2005-03-09

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L9/12

CPC分类号： B81B7/0029 ,  B60C23/0408 ,  B81B2201/0264 ,  G01L9/0047 ,  G01L9/0073 ,  G01L9/125 ,  G01L15/00 ,  G01L19/0636

摘要： A pressure sensor (30) for harsh environments such as vehicle tires, formed from a chamber (58) partially defined by a flexible membrane (50), the chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure, the membrane being at least partially formed from conductive material. A conductive layer (36) is deposited within the chamber (58) spaced from the flexible membrane (50) such that they form opposing electrodes of a capacitor. Associated circuitry (34) is also deposited for converting the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. The membrane (50) is at least partially formed from a transition metal nitride because transition metal nitrides are a metal ceramics with high yield strength and metallic bonding that makes it suitable for use in extreme environments. They can also readily include an oxidizing component such as aluminium so that the membrane form a passivating surface oxide layer to protect it from oxidative failure.

公开(公告)号：US20070295096A1

公开(公告)日：2007-12-27

申请号：US11829944

申请日：2007-07-29

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L9/12

CPC分类号： B60C23/0408 ,  G01L9/0073 ,  G01L9/0075

摘要： The present invention relates to a pressure sensor. The pressure sensor includes a substrate assembly. The substrate assembly defines closed channels and includes a conductive layer. A conductive membrane extends from the substrate assembly and is spaced from the conductive layer. The conductive membrane defines a plurality of apertures. A cap extends from the substrate assembly to cover the membrane.

摘要翻译： 本发明涉及压力传感器。 压力传感器包括基板组件。 衬底组件限定闭合通道并且包括导电层。 导电膜从衬底组件延伸并与导电层隔开。 导电膜限定多个孔。 帽从衬底组件延伸以覆盖膜。

公开(公告)号：US20070266794A1

公开(公告)日：2007-11-22

申请号：US11829943

申请日：2007-07-29

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L9/00

CPC分类号： G01L9/0075 ,  B60C23/0408 ,  G01L9/0042 ,  G01L9/0072 ,  G01L9/125

摘要： The present invention relates to a pressure sensor. The pressure sensor includes a substrate assembly. The substrate assembly defines sealed channels and includes a conductive layer. A conductive membrane extends from the substrate assembly and is spaced from the conductive layer to form a sealed reference chamber. A cap defines apertures. The cap extends from the substrate assembly to cover the membrane and thereby form an apertured chamber.

摘要翻译： 本发明涉及压力传感器。 压力传感器包括基板组件。 衬底组件限定密封通道并且包括导电层。 导电膜从衬底组件延伸并且与导电层间隔开以形成密封的参考室。 盖子限定孔。 盖从衬底组件延伸以覆盖膜，从而形成有孔室。