Exposure method, exposure apparatus, photomask and method for manufacturing photomask
    31.
    发明授权
    Exposure method, exposure apparatus, photomask and method for manufacturing photomask 有权
    曝光方法,曝光装置,光掩模和制造光掩模的方法

    公开(公告)号:US08654310B2

    公开(公告)日:2014-02-18

    申请号:US12848748

    申请日:2010-08-02

    申请人: Masaki Kato

    发明人: Masaki Kato

    IPC分类号: G03B27/42

    摘要: There is disclosed an exposure method is a method of projecting patterns (M1, M2) of a mask (M) onto a substrate to effect exposure thereof, through a plurality of projection optical units each having an enlargement magnification, and the exposure method comprises: placing the mask (M) having first pattern regions (M1) arranged discontinuously in a positional relation corresponding to the enlargement magnification, and second pattern regions (M2) provided at least in part between the first pattern regions (M1), on the object plane side of the projection optical units; projecting enlarged images of either of the first pattern regions (M1) and the second pattern regions (M2) onto the substrate disposed on the image plane side of the projection optical units to effect exposure thereof; and then projecting enlarged images of the other pattern regions onto the substrate to effect exposure thereof.

    摘要翻译: 公开了曝光方法是通过多个具有放大倍数的投影光学单元将掩模(M)的图案(M1,M2)投影到基板上以进行曝光的方法,并且曝光方法包括: 将具有第一图案区域(M1)的掩模(M)放置在与放大倍率对应的位置关系中,以及至少部分地设置在第一图案区域(M1)之间的物平面上的第二图案区域(M2) 投影光学单元的一侧; 将第一图案区域(M1)和第二图案区域(M2)中的任一个的放大图像投影到设置在投影光学单元的像面侧的基板上以进行曝光; 然后将其他图案区域的放大图像投影到基板上以进行曝光。

    ROTATOR EXTERNAL TO PHOTONIC INTEGRATED CIRCUIT
    32.
    发明申请
    ROTATOR EXTERNAL TO PHOTONIC INTEGRATED CIRCUIT 有权
    旋转器外部到光电集成电路

    公开(公告)号:US20140001347A1

    公开(公告)日:2014-01-02

    申请号:US13537805

    申请日:2012-06-29

    IPC分类号: G02B5/30 G01J1/04 G02B5/32

    摘要: An optical system may include a polarization beam splitter having an input that receives multiple optical signals, a first output and a second output. The first output may provide components of the multiple optical signals having a first polarization. The second output may provide components of the multiple optical signals having a second polarization. The optical system may include a rotator having an input that receives the components to rotate the first polarization such that each of the components has the second polarization, and an output to supply components as rotated components.The optical system may also include an optical circuit including a substrate. The rotator may be separate from the substrate. The optical circuit may include an optical demultiplexer circuit provided on the substrate to receive the rotated components and the components.

    摘要翻译: 光学系统可以包括具有接收多个光信号,第一输出和第二输出的输入的偏振分束器。 第一输出可以提供具有第一偏振的多个光信号的分量。 第二输出可以提供具有第二偏振的多个光信号的分量。 光学系统可以包括旋转器,其具有接收组件以旋转第一偏振的输入,使得每个组件具有第二偏振,以及输出以将组件提供为旋转分量。 光学系统还可以包括包括衬底的光学电路。 旋转体可以与基底分开。 光电路可以包括设置在基板上以接收旋转的部件和部件的光解复用器电路。

    Ink-jet head and ink-jet recording apparatus
    33.
    发明授权
    Ink-jet head and ink-jet recording apparatus 有权
    喷墨头和喷墨记录装置

    公开(公告)号:US08602530B2

    公开(公告)日:2013-12-10

    申请号:US13396830

    申请日:2012-02-15

    IPC分类号: B41J2/14

    摘要: An ink-jet head includes a nozzle plate having nozzles, a vibrating plate on the nozzle plate, liquid chambers formed of spaces partitioned by division walls, a piezoelectric element having a common electrode, a piezoelectric body and an individual electrode layered in this order on a surface of the vibrating plate, a first insulator film having a first opening and a second insulator film having a second opening layered in this order on the first surface, a first wire drawn from the individual electrode via the first opening and the second opening, a third insulator film having a third opening on the first wire; and a second wire drawn via the third opening, where the third insulator film is formed in a first region of the second insulator film and is not formed in a second region excluding a region including the first wire formed above the liquid chamber.

    摘要翻译: 喷墨头包括具有喷嘴的喷嘴板,喷嘴板上的振动板,由分隔壁隔开的空间形成的液体室,具有公共电极的压电元件,压电体和单独的电极,按此顺序分层 所述振动板的表面,具有第一开口的第一绝缘膜和在所述第一表面上依次层叠的第二开口的第二绝缘膜,经由所述第一开口和所述第二开口从所述单独电极拉出的第一电线, 第三绝缘膜,在第一导线上具有第三开口; 以及经由所述第三开口拉出的第二导线,其中所述第三绝缘体膜形成在所述第二绝缘膜的第一区域中,并且不形成在除了在所述液体室之上形成的所述第一线的区域之外的第二区域中。

    Apparatus and method for black bar detection in digital TVs and set-top boxes
    34.
    发明授权
    Apparatus and method for black bar detection in digital TVs and set-top boxes 有权
    数字电视机顶盒黑条检测装置及方法

    公开(公告)号:US08547481B2

    公开(公告)日:2013-10-01

    申请号:US12973241

    申请日:2010-12-20

    IPC分类号: H04N5/46 H04N5/21

    摘要: This invention is a preprocessor apparatus and method algorithm facilitating black bar detection in video frames or fields. The preprocessing marks a sharp discontinuity between pixels a predetermined distance apart on each line. On first detection of this discontinuity the location and pixel value is stored. The location and pixel value is also stored for the last discontinuity in the line. This data enables software to detect top horizontal bars, bottom horizontal bars, left vertical bars and right vertical bars.

    摘要翻译: 本发明是一种促进视频帧或场中的黑条检测的预处理装置和方法。 预处理标记在每条线上间隔预定距离的像素之间的尖锐的不连续性。 在首次检测到该不连续性时,存储位置和像素值。 位置和像素值也存储在行中的最后一个不连续点。 该数据使软件能够检测顶部水平条,底部水平条,左垂直条和右垂直条。

    INKJET RECORDING APPARATUS
    35.
    发明申请
    INKJET RECORDING APPARATUS 有权
    喷墨记录装置

    公开(公告)号:US20130070021A1

    公开(公告)日:2013-03-21

    申请号:US13609897

    申请日:2012-09-11

    IPC分类号: B41J23/14

    CPC分类号: B41J25/34

    摘要: An inkjet recording apparatus includes a recording head; a carriage to which the recording head is detachably mounted; and a first head protection member that is arranged on the carriage; wherein the recording head is positioned with respect to the carriage in a relative movement direction by moving the recording head relative to the carriage until a first position reference plane of the recording head and a second position reference plane of the carriage come into contact; the first head protection member is arranged at both sides in the relative movement direction of a nozzle face of the recording head and protrudes further than the nozzle face; and the first head protection member is movable with respect to the carriage in the relative movement direction and moves along with the recording head when the recording head moves relative to the carriage.

    摘要翻译: 喷墨记录装置包括记录头; 记录头可拆卸地安装到的托架; 以及布置在所述托架上的第一头部保护构件; 其中所述记录头通过相对于所述托架移动所述记录头直到所述记录头的第一位置参考平面和所述托架的第二位置参考平面接触而相对于所述滑架相对于所述托架定位; 第一头部保护构件布置在记录头的喷嘴面的相对运动方向的两侧,并且比喷嘴面更突出; 并且第一头部保护构件相对于托架在相对移动方向上可移动,并且当记录头相对于托架移动时与记录头一起移动。

    Reflective, refractive and projecting optical system; reflective, refractive and projecting device; scanning exposure device; and method of manufacturing micro device
    36.
    发明授权
    Reflective, refractive and projecting optical system; reflective, refractive and projecting device; scanning exposure device; and method of manufacturing micro device 有权
    反光,折射和投影光学系统; 反射,折射和投影设备; 扫描曝光装置; 微型器件的制造方法

    公开(公告)号:US08274638B2

    公开(公告)日:2012-09-25

    申请号:US12201972

    申请日:2008-08-29

    申请人: Masaki Kato

    发明人: Masaki Kato

    IPC分类号: G03B27/42

    摘要: A scanning exposure apparatus of the present invention is one for transferring a pattern of a first object onto a second object while projecting an image of the first object placed on a first plane, onto the second object placed on a second plane and changing a positional relation between the image of the first object and the second object in a scanning direction. The scanning exposure apparatus has a first projection optical system having a first field of view on the first plane and adapted to project an enlargement image of a portion of the first object in a first projection region on the second plane, based on light from the first field of view, and a second projection optical system having a second field of view on the first plane and adapted to project an enlargement image of a portion of the first object in a second projection region on the second plane, based on light from the second field of view. The scanning exposure apparatus satisfies the relation of Dp=β×Dm, where Dm is a first interval being an interval along the scanning direction on the first plane between the first field of view and the second field of view, Dp is a second interval being an interval along the scanning direction on the second plane between the first projection region and the second projection region, and β is a magnification of the first and second projection optical systems.

    摘要翻译: 本发明的扫描曝光装置是将第一物体的图案投影到第二物体上,同时将放置在第一平面上的第一物体的图像投影到放置在第二平面上的第二物体上,并且改变位置关系 在扫描方向上在第一物体的图像和第二物体之间。 扫描曝光装置具有第一投影光学系统,该第一投影光学系统在第一平面上具有第一视场,并且适于在第二平面上的第一投影区域中基于来自第一平面的光投影第一物体的一部分的放大图像 以及第二投影光学系统,其具有在第一平面上的第二视场,并且适于在第二平面上的第二投影区域中基于来自第二平面的光投射第一物体的一部分的放大图像 视野 扫描曝光装置满足Dp =&bgr;×Dm的关系,其中Dm是在第一视场和第二视场之间的第一平面上沿着扫描方向的间隔的第一间隔,Dp是第二间隔 在第一投影区域和第二投影区域之间的第二平面上沿着扫描方向的间隔,并且bgr; 是第一和第二投影光学系统的放大率。

    INKJET HEAD, INKJET RECORDING APPARATUS, LIQUID DROPLET EJECTING APPARATUS, AND IMAGE FORMING APPARATUS
    37.
    发明申请
    INKJET HEAD, INKJET RECORDING APPARATUS, LIQUID DROPLET EJECTING APPARATUS, AND IMAGE FORMING APPARATUS 有权
    喷墨头,喷墨记录装置,液体喷射装置和图像形成装置

    公开(公告)号:US20120236083A1

    公开(公告)日:2012-09-20

    申请号:US13422136

    申请日:2012-03-16

    IPC分类号: B41J2/045

    摘要: An inkjet head is disclosed. In the inkjet head a vibrating plate is formed on a liquid chamber substrate on which multiple dedicated liquid chambers are aligned; a first insulating film and a second insulating film are formed between a dedicated electrode wiring and a lower electrode in an area in which the dedicated electrode wiring and the lower electrode overlap; a third insulating film and a fourth insulating film are stacked in an area which includes a forming area of the dedicated electrode wiring; in at least a portion of a forming area of the dedicated liquid chamber, there is provided a non-film forming area; and, in an area including a piezoelectric element forming section, either the first insulating film and the fourth insulating film are formed in the non-film forming area, or the fourth insulating film is formed in the non-film forming area.

    摘要翻译: 公开了一种喷墨头。 在喷墨头中,在多个专用液体室对准的液体室基板上形成振动板; 在专用电极布线和下电极重叠的区域中,在专用电极布线和下电极之间形成第一绝缘膜和第二绝缘膜; 在包括专用电极布线的形成区域的区域中堆叠第三绝缘膜和第四绝缘膜; 在专用液体室的形成区域的至少一部分中,设置有非成膜区域; 并且在包括压电元件形成部的区域中,在非成膜区域中形成第一绝缘膜和第四绝缘膜,或者在非成膜区域中形成第四绝缘膜。

    INKJET HEAD AND INKJET PLOTTER
    38.
    发明申请
    INKJET HEAD AND INKJET PLOTTER 有权
    喷墨头和喷墨打印机

    公开(公告)号:US20120229573A1

    公开(公告)日:2012-09-13

    申请号:US13408073

    申请日:2012-02-29

    IPC分类号: B41J2/14

    摘要: A disclosed inkjet head includes a liquid chamber formed by a space between a vibrating plate and a nozzle substrate and separated by partitions; a piezoelectric element formed by sequentially laminating a common electrode, a piezoelectric substance and an individual electrode over the space; first to fourth insulating films respectively having first to fourth openings; and a first wiring connected to the individual electrode and pulled through the first and second openings over the common electrode, wherein the first wiring passes through the third opening over the third insulating film, the first wiring is exposed from the fourth opening so as to be externally connected, and the third insulating film and the fourth insulating film are not partly formed above the liquid chamber and formed above the first wiring.

    摘要翻译: 所公开的喷墨头包括由振动板和喷嘴基板之间的空间形成并由分隔件分隔的液体室; 通过在该空间上依次层叠公共电极,压电体和单个电极而形成的压电元件; 分别具有第一至第四开口的第一至第四绝缘膜; 以及第一布线,其连接到所述单独电极并且在所述公共电极上被拉动通过所述第一和第二开口,其中所述第一布线穿过所述第三绝缘膜上的所述第三开口,所述第一布线从所述第四开口露出, 外部连接,并且第三绝缘膜和第四绝缘膜不部分地形成在液体室的上方并形成在第一布线的上方。

    Dual output laser source
    39.
    发明授权
    Dual output laser source 有权
    双输出激光源

    公开(公告)号:US08233510B2

    公开(公告)日:2012-07-31

    申请号:US12363826

    申请日:2009-02-02

    IPC分类号: H01S3/10

    摘要: A dual output laser source provided on a substrate outputs light from a first and second output. A portion of the light generated by the laser is supplied to a first modulator via the first output. A second portion of the light generated by the laser is supplied to a second modulator via the second output. The first modulator is provided on the substrate and generates a first modulated signal. The second modulator is also provided on the substrate and generates a second modulated signal. Each output of the laser is used to provide continuous wave light sources to components on photonic integrated circuit.

    摘要翻译: 设置在基板上的双输出激光源输出来自第一和第二输出的光。 由激光产生的光的一部分经由第一输出被提供给第一调制器。 由激光产生的光的第二部分经由第二输出提供给第二调制器。 第一调制器设置在衬底上并产生第一调制信号。 第二调制器也设置在衬底上并产生第二调制信号。 激光器的每个输出用于向光子集成电路上的组件提供连续波光源。