公开(公告)号：US06698287B2

公开(公告)日：2004-03-02

申请号：US10285886

申请日：2002-11-01

申请人： Randall L. Kubena ,  Richard Joyce ,  Robert Thomas M'Closkey ,  A. Dorian Challoner

发明人： Randall L. Kubena ,  Richard Joyce ,  Robert Thomas M'Closkey ,  A. Dorian Challoner

IPC分类号： G01C1900

CPC分类号： G01C19/5719 ,  G01P2015/084

摘要： The present invention discloses methods of manufacturing mechanical resonator microgyroscopes using focused ion beam machining and the mechanical resonator gyroscopes produced therefrom. An exemplary method of tuning a mechanical resonator gyroscope, includes the steps of mounting a mechanical resonator gyroscope in a vacuum chamber with a controllable focused ion beam where the gyroscope includes exciting and sensing elements for measuring a resonant frequency of the gyroscope. The exciting and sensing elements are activated to measure the resonant frequency of the mechanical resonator gyroscope and the resonant frequency of the gyroscope is adjusted to a desired resonant frequency value by controlling the focused ion beam to remove material of the gyroscope.

摘要翻译： 本发明公开了使用聚焦离子束加工和由其制造的机械谐振器陀螺仪制造机械谐振器微型光学器件的方法。 调谐机械谐振器陀螺仪的示例性方法包括以下步骤：将机械谐振器陀螺仪安装在具有可控聚焦离子束的真空室中，其中陀螺仪包括用于测量陀螺仪的谐振频率的激励和感测元件。 激励和感测元件被激活以测量机械谐振器陀螺仪的谐振频率，并且通过控制聚焦离子束以去除陀螺仪的材料，将陀螺仪的谐振频率调整到期望的谐振频率值。

公开(公告)号：US06621460B2

公开(公告)日：2003-09-16

申请号：US09862882

申请日：2001-05-21

申请人： A. Dorian Challoner

发明人： A. Dorian Challoner

IPC分类号： H01Q300

CPC分类号： H01Q1/125 ,  G01C19/42 ,  G01C21/16

摘要： An apparatus and method, for determining an instrument boresight heading. The apparatus comprises an instrument having a boresight, an elevation positioner for positioning the elevation of the instrument boresight having an elevation axis, an azimuth positioner for positioning the azimuth of the instrument boresight having an azimuth axis and a sensor including a gyro having a sensitive axis. The method comprises recording a first output of a gyro of an azimuth positioner having an instrument boresight azimuth heading in a first position, rotating the azimuth positioner to a second position, recording a second output of the gyro and rotating the azimuth positioner to a third position, recording a third output of the gyro and determining the azimuth heading relative to true north from the first, second and third output.

公开(公告)号：US5383359A

公开(公告)日：1995-01-24

申请号：US984146

申请日：1992-12-02

申请人： A. Dorian Challoner ,  Arthur C. Or

发明人： A. Dorian Challoner ,  Arthur C. Or

IPC分类号： B64G1/40 ,  G01F23/00 ,  G01F23/22 ,  G01F23/296

CPC分类号： G01F23/2966 ,  B64G1/402 ,  G01F23/00 ,  G01F23/22

摘要： A method and apparatus of determining the fill fraction of a liquid in a spacecraft in weightless space is disclosed. A small motion is introduced about the center of mass of the spacecraft undergoing steady spin and/or thrust, and resulting spacecraft oscillations are sensed. The measured frequency, amplitude and phase of the spacecraft oscillations are compared with counterpart values predicted for possible liquid quantities by a nonempirically computed model of spacecraft dynamics.

摘要翻译： 公开了一种在无重力空间中确定航天器中的液体的填充分数的方法和装置。 介绍了关于经历稳定旋转和/或推力的航天器的质心的小动作，并且感测到所产生的航天器振荡。 将航天器振荡的测量频率，振幅和相位与通过非经典计算的航天器动力学模型与可能的液体量预测的对应值进行比较。

公开(公告)号：US08393212B2

公开(公告)日：2013-03-12

申请号：US12416911

申请日：2009-04-01

申请人： Howard H. Ge ,  A. Dorian Challoner

发明人： Howard H. Ge ,  A. Dorian Challoner

IPC分类号： G01C19/56

CPC分类号： G01C19/5684 ,  Y10T156/10

摘要： Micromachined disc resonator gyroscopes (DRGs) are disclosed designed to be virtually immune to external temperature and stress effects. The DRG is a vibratory gyroscope that measures angular rate which is designed to have reduced sensitivity to external thermal and mechanical stress. The DRG features an integrated isolator that may be fabricated on the same wafer as the electrode wafer forming a plurality of integrated isolator beams. In addition, the DRG may include a wafer level hermetical vacuum seal, flip chip ball grid array (BGA), and vertical electrical feedthrough to improve reliability and to reduce manufacturing cost. An additional carrier layer may be used with shock stops, vertical electrical feedthrough, and the flip chip BGA. A pyrex or quartz cap with embedded getter and shock stops can be employed.

摘要翻译： 公开了微加工的盘式谐振器陀螺仪（DRG），其被设计为实际上不受外部温度和应力影响的影响。 DRG是一种振动陀螺仪，用于测量角速率，该速率被设计为降低对外部热和机械应力的敏感性。 DRG具有集成隔离器，其可以与形成多个集成隔离器梁的电极晶片在同一晶片上制造。 此外，DRG可以包括晶片级密封真空密封，倒装芯片球栅阵列（BGA）和垂直电馈电，以提高可靠性并降低制造成本。 可以使用附加的载体层，具有减震器，垂直电馈通和倒装芯片BGA。 可以使用具有嵌入式吸气剂和冲击停止剂的发烟或石英盖。

公开(公告)号：US08327526B2

公开(公告)日：2012-12-11

申请号：US12473084

申请日：2009-05-27

申请人： Howard H. Ge ,  A. Dorian Challoner

发明人： Howard H. Ge ,  A. Dorian Challoner

IPC分类号： H05B3/00

CPC分类号： G01C19/5712 ,  B81B7/0048 ,  B81B7/0096 ,  B81B2201/0242 ,  G01C25/00 ,  Y10T29/49007 ,  Y10T29/4902 ,  Y10T29/49083 ,  Y10T29/49105

摘要： A micromachined thermal and mechanical isolator for MEMS die that may include two layers, a first layer with an active temperature regulator comprising a built-in heater and temperature sensor and a second layer having mechanical isolation beams supporting the die. The isolator may be inserted between a MEMS die of a disc resonator gyroscope (DRG) chip and the leadless chip carrier (LCC) package to isolate the die from stress and temperature gradients. Thermal and mechanical stress to the DRG can be significantly reduced in addition to mitigating temperature sensitivity of the DRG chip. The small form can drastically reduce cost and power consumption of the MEMS inertial sensor and enable new applications such as smart munitions, compact and integrated space navigation solutions, with significant potential cost savings over the existing inertial systems.

摘要翻译： 一种用于MEMS管芯的微加工热和机械隔离器，其可以包括两层，具有主动温度调节器的第一层，其包括内置的加热器和温度传感器，以及具有支撑所述管芯的机械隔离梁的第二层。 隔离器可以插入在盘式谐振器陀螺仪（DRG）芯片的MEMS管芯和无引线芯片载体（LCC）封装之间，以将管芯与应力和温度梯度隔离。 除了降低DRG芯片的温度敏感性之外，DRG的热和机械应力可以显着降低。 这种小型化可以大大降低MEMS惯性传感器的成本和功耗，并实现了诸如智能弹药，紧凑型和集成的空间导航解决方案等新应用，相比现有的惯性系统具有显着的潜在成本。

公开(公告)号：US07836765B2

公开(公告)日：2010-11-23

申请号：US11831822

申请日：2007-07-31

申请人： A. Dorian Challoner ,  David Whelan

发明人： A. Dorian Challoner ,  David Whelan

IPC分类号： G01P9/04

CPC分类号： G01P15/14 ,  G01C19/5684 ,  G01P15/097 ,  G01P15/18

摘要： Sensing motion of multiple degrees of freedom for an integral inertial measurement unit provided through the operation of a single centrally mounted planar disc resonator having a single driven mode in a single vacuum enclosure is disclosed. The resonator comprises a circumferentially slotted disc having multiple internal capacitive electrodes within the slots in order to excite a single in-plane driven vibration and sense in-plane vibration modes or motion of the resonator. In addition, vertical electrodes disposed below and/or above the resonator may also be used to sense out-of-plane vibration or motion. Acceleration sensing in three orthogonal axes can be obtained by sensing two lateral modes of the disc resonator in the plane of the disc from the internal electrodes and a vertical mode from the vertical electrodes.

摘要翻译： 公开了通过在单个真空外壳中具有单个驱动模式的单个中心安装的平面盘式共振器的操作提供的整体惯性测量单元的多个自由度的感测运动。 谐振器包括在槽内具有多个内部电容电极的周向开槽的盘，以便激发单个面内驱动振动并感测谐振器的平面内振动模式或运动。 此外，设置在谐振器下方和/或上方的垂直电极也可用于感测平面外的振动或运动。 可以通过从内部电极感测盘的平面中的盘式谐振器的两个横向模式和来自垂直电极的垂直模式来获得三个正交轴中的加速度感测。

公开(公告)号：US20090301193A1

公开(公告)日：2009-12-10

申请号：US12481247

申请日：2009-06-09

申请人： David M. Schwartz ,  Dong-Joon Kim ,  Robert T. M'Closkey ,  A. Dorian Challoner

发明人： David M. Schwartz ,  Dong-Joon Kim ,  Robert T. M'Closkey ,  A. Dorian Challoner

IPC分类号： G01C19/56

CPC分类号： G01C19/5684

摘要： Techniques for reducing the frequency split between the Coriolis-coupled modes in disc resonator gyroscopes (DRGs) by perturbing the mass distribution on the disc resonator based on an identified model are disclosed. A model-identification method of tuning a resonator comprises perturbing the mass and measuring a frequency response matrix of the resonator. The frequency response matrix includes a plurality of inputs and a plurality of outputs and the resonator has a plurality of coupled resonance modes. A reduced structural mechanics matrix model of the resonator in sensor and actuator coordinates is identified from the measured frequency response matrix and analyzed to determine generalized eigenvectors of the structural mechanics model and their variations due to selected mass perturbations which is then estimated to improve degeneracy of the plurality of coupled resonance modes based on the generalized eigenvectors of the mass and the stiffness.

摘要翻译： 公开了通过基于识别的模型扰动盘式共振器上的质量分布来减小盘式谐振器陀螺仪（DRG）中的科里奥利耦合模式之间的频率分裂的技术。 调谐谐振器的模型识别方法包括扰动质量并测量谐振器的频率响应矩阵。 频率响应矩阵包括多个输入和多个输出，并且谐振器具有多个耦合谐振模式。 从测量的频率响应矩阵中确定传感器和执行器坐标中谐振器的结构力学矩阵模型，并进行分析，以确定结构力学模型的广义特征向量及其由于选定的质量扰动引起的变化， 基于质量和刚度的广义特征向量的多个耦合谐振模式。

公开(公告)号：US07159441B2

公开(公告)日：2007-01-09

申请号：US10843139

申请日：2004-05-11

申请人： A. Dorian Challoner ,  Roman C. Gutierrez ,  Tony K. Tang

发明人： A. Dorian Challoner ,  Roman C. Gutierrez ,  Tony K. Tang

IPC分类号： G01C19/00

CPC分类号： G01C19/5719 ,  G01C19/56 ,  G01C25/00 ,  G01P2015/084 ,  G01P2015/0842

摘要： A micro-gyroscope (10) having closed loop output operation by a control voltage (Vty), that is demodulated by a drive axis (x-axis) signal Vthx of the sense electrodes (S1, S2), providing Coriolis torque rebalance to prevent displacement of the micro-gyroscope (10) on the output axis (y-axis) Vthy˜0. Closed loop drive axis torque, Vtx maintains a constant drive axis amplitude signal, Vthx. The present invention provides independent alignment and tuning of the micro-gyroscope by using separate electrodes and electrostatic bias voltages to adjust alignment and tuning. A quadrature amplitude signal, or cross-axis transfer function peak amplitude is used to detect misalignment that is corrected to zero by an electrostatic bias voltage adjustment. The cross-axis transfer function is either Vthy/Vty or Vtnx/Vtx. A quadrature signal noise level, or difference in natural frequencies estimated from measurements of the transfer functions is used to detect residual mistuning, that is corrected to zero by a second electrostatic bias voltage adjustment.

摘要翻译： 具有通过驱动轴（x轴）信号V S x S X解调的控制电压（V SUB）的闭环输出操作的微型陀螺仪（10） 的感测电极（S1，S2），提供科里奥利扭矩重新平衡以防止微陀螺仪（10）在输出轴（y轴）上的位移。 闭环驱动轴转矩V 维持恒定的驱动轴振幅信号V thxx。 本发明通过使用单独的电极和静电偏置电压来提供微陀螺仪的独立对准和调谐，以调整对准和调谐。 使用正交幅度信号或交叉轴传递函数峰值振幅来检测通过静电偏置电压调整校正为零的未对准。 交叉轴传递函数是V / T / T / T / T或T VX。 使用正交信号噪声电平或由传递函数的测量估计的固有频率的差异来检测残余失谐，其通过第二静电偏置电压调整被校正为零。

公开(公告)号：US06735524B1

公开(公告)日：2004-05-11

申请号：US10315872

申请日：2002-12-10

申请人： A. Dorian Challoner ,  James M. Bornholdt

发明人： A. Dorian Challoner ,  James M. Bornholdt

IPC分类号： G01C2100

CPC分类号： G01C21/16 ,  G01S5/0268 ,  G01S5/12 ,  G01S13/876

摘要： A method and apparatus for radio navigation and location is disclosed. The method uses an autonomous, on-board micro-inertial navigation system to propagate the state of a station, and an angularly resolvable antenna to measure relative orientation and relative range and to receive estimated state information from one or more companion stations. Optimally estimated state information is used to permit operation in environments that are otherwise hostile to communications between stations.

摘要翻译： 公开了一种用于无线电导航和定位的方法和装置。 该方法使用自主的车载微惯性导航系统来传播站的状态，以及角度可分辨的天线来测量相对取向和相对范围，并且从一个或多个伴随站接收估计的状态信息。 最佳估计的状态信息用于允许在站点之间通信的环境中操作。

公开(公告)号：US06360601B1

公开(公告)日：2002-03-26

申请号：US09488425

申请日：2000-01-20

申请人： A. Dorian Challoner ,  Roman C. Gutierrez ,  Tony K. Tang ,  Donald R. Cargille

发明人： A. Dorian Challoner ,  Roman C. Gutierrez ,  Tony K. Tang ,  Donald R. Cargille

IPC分类号： G01P904

CPC分类号： G01C19/5719 ,  G01P2015/084 ,  G01P2015/0842

摘要： A micro-gyroscope (10) having closed loop operation by a control voltage (VTY), that is demodulated by an output signal of the sense electrodes (S1, S2), providing Coriolis torque rebalance to prevent displacement of the micro-gyroscope (10) on the output axis (y-axis). The present invention provides wide-band, closed-loop operation for a micro-gyroscope (10) and allows the drive frequency to be closely tuned to a high Q sense axis resonance. A differential sense signal (S1−S2) is compensated and fed back by differentially changing the voltage on the drive electrodes to rebalance Coriolis torque. The feedback signal is demodulated in phase with the drive axis signal (K&ohgr;⊖x) to produce a measure of the Coriolis force.

摘要翻译： 一种具有通过感测电极（S1，S2）的输出信号解调的控制电压（VTY）的闭环操作的微型陀螺仪（10），提供科里奥利扭矩重新平衡以防止微型陀螺仪（10）的位移 ）在输出轴（y轴）上。 本发明为微型陀螺仪（10）提供宽带，闭环操作，并允许将驱动频率紧密地调谐到高Q感测轴共振。 差分感测信号（S1-S2）被补偿并通过差动地改变驱动电极上的电压进行反馈，以重新平衡科里奥利扭矩。 反馈信号与驱动轴信号（Komega⊖x）同相解调，以产生科里奥利力的量度。