公开(公告)号：US5995334A

公开(公告)日：1999-11-30

申请号：US941

申请日：1997-12-30

Applicant: Long-Sheng Fan ,  Toshiki Hirano

Inventor： Long-Sheng Fan ,  Toshiki Hirano

IPC: G11B5/55 ,  H02N1/00 ,  H01G7/00

CPC classification number: H02N1/008 ,  G11B5/5552

Abstract: A rotary microactuator that includes a stationary structure formed on a substrate and a movable structure attached to the stationary structure by a flexure. The stationary structure has at least one branch, with each branch of the stationary structure having at least one electrode finger. The movable structure has at least one branch and a center of rotation about which the movable structure rotates. Each branch of the movable structure has at least one electrode finger. Each branch of the movable structure is separated from an adjacent branch of the stationary structure by a minimum-required distance along the branch of the movable structure. The minimum-required distance is based on an electrostatic attractive force generated between the branch of the movable structure and a branch of the stationary structure that is adjacent to the branch of the movable structure and is located in a direction from the branch of the movable structure that is opposite to a direction that the branch of the movable structure is driven. Additionally, the minimum-required distance is based on a minimum length of the fingers of a branch of the movable structure and of a branch of the stationary structure that is necessary for producing a position-independent electrostatic force. Each finger is attached to a branch of the movable structure at a proximal end of the finger at an angle that is substantially perpendicular to a straight line between the proximal end of the finger and the center of rotation.

Abstract translation: 一种旋转微型致动器，其包括形成在基板上的固定结构和通过挠曲件附接到固定结构的可移动结构。 固定结构具有至少一个分支，固定结构的每个分支具有至少一个电极指。 可移动结构具有至少一个分支和旋转中心，可动结构围绕其旋转。 可移动结构的每个分支具有至少一个电极指。 可移动结构的每个分支与静止结构的相邻分支沿着可移动结构的分支具有最小要求的距离。 最小所需距离基于在可移动结构的分支和静止结构的分支之间产生的静电吸引力，其与可移动结构的分支相邻并且位于从可移动结构的分支的方向 其与可移动结构的分支被驱动的方向相反。 另外，最小要求距离是基于可移动结构的分支的指状物和固定结构的分支的最小长度，其是产生与位置无关的静电力所必需的。 每个手指以大致垂直于手指的近端和旋转中心之间的直线的角度附接到手指的近端处的可移动结构的分支。

公开(公告)号：US5959808A

公开(公告)日：1999-09-28

申请号：US000958

申请日：1997-12-30

Applicant: Long-Sheng Fan ,  Toshiki Hirano

Inventor： Long-Sheng Fan ,  Toshiki Hirano

IPC: G11B5/55

CPC classification number: G11B5/5552

Abstract: A rotary microactuator includes a plurality of stationary electrodes formed on a substrate, an electrically conducting bottom layer formed on the substrate that is electrically isolated from the stationary electrodes, a plurality of movable electrode, and an electrically conducting top layer attached to the movable electrodes. The top layer is electrically connected to the bottom layer, the movable electrodes, and to a signal common that is preferably a ground potential. The top layer prevents vibration modes of the microactuator caused by vibrations of individual electrodes of the plurality of movable electrodes. The top layer, the bottom layer and the movable electrodes surround the stationary electrodes and contain an electric field generated between the stationary electrodes and the movable electrodes. An edge structure is formed on the substrate surrounding the plurality of stationary electrodes, and is electrically connected to the top layer, the bottom layer and the plurality of movable electrodes.

Abstract translation: 旋转微型致动器包括形成在基板上的多个固定电极，形成在与固定电极电隔离的基板上的导电底层，多个可动电极和连接到可动电极的导电顶层。 顶层电连接到底层，可移动电极以及优选为地电位的信号。 顶层防止由多个可动电极的各个电极的振动引起的微致动器的振动模式。 顶层，底层和可动电极围绕固定电极并且包含在固定电极和可动电极之间产生的电场。 在围绕多个固定电极的基板上形成边缘结构，并且电连接到顶层，底层和多个可移动电极。