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公开(公告)号：US08691371B2
公开(公告)日：2014-04-08
申请号：US11828543
申请日：2007-07-26
申请人： Tae Won Kim , Min Yan , Ahmet Gun Erlat , Thomas Bert Gorczyca , Christian Maria Anton Heller , Paul Alan McConnelee , Marc Schaepkens
发明人： Tae Won Kim , Min Yan , Ahmet Gun Erlat , Thomas Bert Gorczyca , Christian Maria Anton Heller , Paul Alan McConnelee , Marc Schaepkens
IPC分类号： B32B7/02
CPC分类号： B32B27/30 , B32B27/08 , B32B27/20 , B32B27/38 , H01L51/5256 , Y10T428/24975 , Y10T428/265 , Y10T428/31504 , Y10T428/31507 , Y10T428/31667 , Y10T428/31678 , Y10T428/31786 , Y10T428/31855
摘要： A barrier coating for a composite article is provided. The barrier coating includes an organic zone; an inorganic zone; and an interface zone between the organic zone and the inorganic zone.
摘要翻译： 提供了用于复合制品的阻隔涂层。 阻隔涂层包括有机区域; 无机区; 以及有机区域和无机区域之间的界面区域。
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公开(公告)号：US08605862B2
公开(公告)日：2013-12-10
申请号：US12891016
申请日：2010-09-27
申请人： Paul Richard Granfors , John Robert Lamberty , Richard Gordon Cronce , Ping Xue , Marc Schaepkens , Aaron Judy Couture , Douglas Albagli
发明人： Paul Richard Granfors , John Robert Lamberty , Richard Gordon Cronce , Ping Xue , Marc Schaepkens , Aaron Judy Couture , Douglas Albagli
CPC分类号： H01L27/14658 , H01L27/14623 , H04N5/32 , H04N5/35563
摘要： In one embodiment, a digital X-ray detector is provided with a plurality of pixel regions. Each pixel region includes a first photodiode having a first area and a second photodiode having a second area equal to or smaller than the first area. The digital X-ray detector also includes a shielding structure that overlies the first and second photodiodes of each pixel region with the shielding structure shielding proportionally less of the first photodiode than of the second photodiode to provide the first photodiode with a first sensitivity and the second photodiode with a second sensitivity lower than the first sensitivity.
摘要翻译： 在一个实施例中，数字X射线检测器设置有多个像素区域。 每个像素区域包括具有第一区域的第一光电二极管和具有等于或小于第一区域的第二区域的第二光电二极管。 数字X射线检测器还包括覆盖每个像素区域的第一和第二光电二极管的屏蔽结构，屏蔽结构屏蔽第一光电二极管比第二光电二极管成比例地少，以提供第一光敏二极管的第一灵敏度，而第二光电二极管 光电二极管的灵敏度低于第一灵敏度。
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33.发明申请Low thermal conductivity low density pyrolytic boron nitride material, method of making, and articles made therefrom 审中-公开低热导率低密度热解氮化硼材料，制造方法和由其制成的制品公开(公告)号：US20090169781A1
公开(公告)日：2009-07-02
申请号：US12006206
申请日：2007-12-31
IPC分类号： C01B21/064 , C23C16/34 , B32B1/08
CPC分类号： C23C16/342 , C23C16/01 , C30B11/002 , C30B25/00 , C30B29/403 , C30B35/002 , Y10T428/131
摘要： A pyrolytic boron-nitride material is disclosed having an in-plane thermal conductivity of no more than about 30 W/m-K and a through-plane thermal conductivity of no more than about 2 W/m-K. The density is less than 1.85 g/cc.
摘要翻译： 公开了一种热分解氮化硼材料，其面内导热率不超过约30W / m-K，通孔热导率不超过约2W / m-K。 密度小于1.85g / cc。
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公开(公告)号：US07449246B2
公开(公告)日：2008-11-11
申请号：US10879468
申请日：2004-06-30
CPC分类号： H01L51/5256 , Y10T428/31504 , Y10T428/31667 , Y10T428/31928
摘要： A barrier coating of organic-inorganic composition, the barrier coating having optical properties that are substantially uniform along an axis of light transmission, said axis oriented substantially perpendicular to the surface of the coating.
摘要翻译： 有机 - 无机组合物的阻挡涂层，所述阻挡涂层具有沿着光透射轴线基本均匀的光学性质，所述轴线基本上垂直于所述涂层的表面定向。
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35.发明申请公开(公告)号：US20080202414A1
公开(公告)日：2008-08-28
申请号：US11678215
申请日：2007-02-23
申请人： Min Yan , Ahmet Gun Erlat , Marc Schaepkens , Tae Won Kim , Paul Alan McConnelee , Matthew Aaron Pellow
发明人： Min Yan , Ahmet Gun Erlat , Marc Schaepkens , Tae Won Kim , Paul Alan McConnelee , Matthew Aaron Pellow
IPC分类号： B05B5/12
CPC分类号： C23C16/045 , B05D1/60 , B05D7/02 , B05D7/227 , C23C16/45578 , C23C16/507
摘要： Methods and devices for coating an interior surface of a container using ICPECVD are provided. In one embodiment, a method of coating an interior surface of a container comprises: depositing a barrier film on the interior surface of the container using inductively coupled plasma-enhanced chemical-vapor deposition.
摘要翻译： 提供了使用ICPECVD涂覆容器内表面的方法和装置。 在一个实施例中，涂覆容器的内表面的方法包括：使用电感耦合等离子体增强化学气相沉积将阻挡膜沉积在容器的内表面上。
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36.发明授权Diffusion barrier coatings having graded compositions and devices incorporating the same 有权具有分级组成的扩散阻隔涂层和包含其的装置公开(公告)号：US07397183B2
公开(公告)日：2008-07-08
申请号：US11398724
申请日：2006-04-06
CPC分类号： H01L51/5268 , B82Y20/00 , B82Y30/00 , C23C16/30 , G02F1/133305 , G02F2201/50 , H01L51/5036 , H01L51/5253 , H01L2251/5338 , H01L2251/5346 , H01L2251/5369 , Y10T428/12021 , Y10T428/1321 , Y10T428/1352 , Y10T428/24802 , Y10T428/31667
摘要： A composite article comprises a substrate having at least a substrate surface and a graded-composition coating disposed on a substrate surface. The composition of the coating material varies substantially continuously across its thickness. The coating reduces the transmission rates of oxygen, water vapor, and other chemical species through the substrate such that the composite article can be used effectively as a diffusion barrier to protect chemically sensitive devices or materials. An organic light-emitting device incorporates such a composite article to provide an extended life thereto.
摘要翻译： 复合制品包括至少具有基底表面的基底和设置在基底表面上的渐变组合物涂层。 涂层材料的组成在其厚度上基本连续地变化。 涂层通过基底降低了氧气，水蒸气和其他化学物质的透过率，使得复合制品可以有效地用作扩散阻挡层，以保护化学敏感的装置或材料。 有机发光装置结合了这种复合制品以延长使用寿命。
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公开(公告)号：US20070181065A1
公开(公告)日：2007-08-09
申请号：US11550785
申请日：2006-10-18
申请人： Akinobu Otaka , Takeshi Higuchi , Sridhar Ramaprasad Prasad , Wei Fan , Marc Schaepkens , Douglas A. Longworth
发明人： Akinobu Otaka , Takeshi Higuchi , Sridhar Ramaprasad Prasad , Wei Fan , Marc Schaepkens , Douglas A. Longworth
IPC分类号： C23C16/00
CPC分类号： C23C16/4581 , C23C16/46 , H01L21/67103
摘要： An etch resistant heater for use in a wafer processing assembly with an excellent ramp rate of at least 20° C. per minute. The heater is coated with a protective overcoating layer allowing the heater to have a radiation efficiency above 70% at elevated heater temperatures of >1500° C., and an etch rate in NF3 at 600° C. of less than 100 A/min.
摘要翻译： 用于晶片加工组件的耐蚀刻加热器，具有至少20℃/分钟的优异的斜坡速率。 加热器涂覆有保护性外涂层，允许加热器在升高的加热器温度> 1500℃时具有高于70％的辐射效率，并且在600℃下具有NF 3 N的蚀刻速率。 小于100A / min。
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公开(公告)号：US20060185591A1
公开(公告)日：2006-08-24
申请号：US11344854
申请日：2006-02-01
申请人： Lakshmipathy Muralidharan , Demetrius Sarigiannis , Patricia Hubbard , Marc Schaepkens , Atul Pant
发明人： Lakshmipathy Muralidharan , Demetrius Sarigiannis , Patricia Hubbard , Marc Schaepkens , Atul Pant
IPC分类号： C23C16/00
CPC分类号： C23C16/342 , C23C16/452 , C23C16/45514 , C23C16/45578 , C23C16/4558
摘要： Embodiments for an apparatus and method for depositing one or more layers onto a substrate or a freestanding shape inside a reaction chamber operating at a temperature of at least 700° C. and 100 torr are provided. The apparatus is provided with a feeding system having injection means for differential pre-reactions and/or pre-treating of a plurality of gases or gas mixtures, tailoring the distribution of a plurality of gas-phase species, yielding a deposit that is substantially uniform in thickness and chemical composition along the substrate surface. In one embodiment, the apparatus further comprises a sacrificial substrate that further helps achieving thickness and chemical uniformity on the substrate, by imitating a continuous surface to deposit on and thus preventing any disturbances in the flow pattern especially towards the edge of the substrate.
摘要翻译： 提供了一种用于在至少700℃和100托的温度下操作的反应室内将一个或多个层沉积到基底或独立形状上的装置和方法的实施例。 该装置设置有具有用于差分预反应和/或预处理多种气体或气体混合物的注射装置的进料系统，调整多种气相物质的分布，产生基本均匀的沉积物 沿着基板表面的厚度和化学成分。 在一个实施例中，该设备还包括牺牲衬底，其进一步有助于实现衬底上的厚度和化学均匀性，通过模仿连续表面沉积在衬底上，从而防止流动图案中的任何干扰，特别是朝向衬底的边缘。
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公开(公告)号：US20060003189A1
公开(公告)日：2006-01-05
申请号：US10879468
申请日：2004-06-30
申请人： Tae Kim , Christian Heller , Marc Schaepkens , Ahmet Erlat , Min Yan
发明人： Tae Kim , Christian Heller , Marc Schaepkens , Ahmet Erlat , Min Yan
CPC分类号： H01L51/5256 , Y10T428/31504 , Y10T428/31667 , Y10T428/31928
摘要： A barrier coating of organic-inorganic composition, the barrier coating having optical properties that are substantially uniform along an axis of light transmission, said axis oriented substantially perpendicular to the surface of the coating.
摘要翻译： 有机 - 无机组合物的阻挡涂层，所述阻挡涂层具有沿着光透射轴线基本均匀的光学性质，所述轴线基本上垂直于所述涂层的表面定向。
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公开(公告)号：US20050202250A1
公开(公告)日：2005-09-15
申请号：US11125208
申请日：2005-05-10
IPC分类号： C23C16/40 , C23C16/513 , B32B9/00
CPC分类号： C23C16/513 , C23C16/405 , Y10T428/265 , Y10T428/31507 , Y10T428/31855
摘要： There is provided a structure. The structure comprises a substrate, and a titanium oxide layer disposed over the substrate. There is also provided a method of forming a titanium oxide coating on a substrate. The method includes generating a plasma; providing a first reactant, comprising titanium, and a second reactant, comprising oxygen, into the plasma stream extending to the substrate; and forming the titanium oxide coating on the substrate.
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