公开(公告)号：US20100194235A1

公开(公告)日：2010-08-05

申请号：US12761123

申请日：2010-04-15

申请人： Osamu TSUBOI ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

发明人： Osamu TSUBOI ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

IPC分类号： H02N11/00

CPC分类号： B81B3/0086 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  G02B26/0841

摘要： A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X1) of the present invention includes a movable portion including a first driving electrode, a second driving electrode for generating electrostatic attraction between the first driving electrode and the second driving electrode, a first conductor portion (22c) electrically connected to the first driving electrode, a second conductor portion (22b) electrically connected to the second driving electrode, and a third conductor portion (21a) which is not electrically connected to the first and the second driving electrodes and which is bonded to the first conductor portion (22c) via an insulating film (23) and bonded to the second conductor portion (22b) via the insulating film (23).

摘要翻译： 提供一种适用于抑制驱动特性的劣化的微型可移动装置，以及包括这种微型可移动装置的微型可移动装置阵列。 本发明的微型可移动装置（X1）包括可动部，包括第一驱动电极，用于在第一驱动电极和第二驱动电极之间产生静电吸引力的第二驱动电极，第一导体部分（22c），电连接到 第一驱动电极，与第二驱动电极电连接的第二导体部分（22b）和不与第一和第二驱动电极电连接并且连接到第一导体部分的第三导体部分（21a） （22c）经由绝缘膜（23）经由绝缘膜（23）与第二导体部（22b）接合。

公开(公告)号：US07701155B2

公开(公告)日：2010-04-20

申请号：US12453099

申请日：2009-04-29

申请人： Osamu Tsuboi ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Mi Xiaoyu ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

发明人： Osamu Tsuboi ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Mi Xiaoyu ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

IPC分类号： H02N1/00 ,  G02B26/08 ,  G02B26/10

CPC分类号： H02N1/008

摘要： A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.

摘要翻译： 微振荡元件包括可移动主体部分，第一框架和第二框架，以及第一连接部分，其连接可移动主体部分和第一框架，并且限定第一旋转轴线用于可移动主体的第一旋转操作 相对于第一帧的截面。 元件还包括第二连接部分，其连接第一框架和第二框架并且限定第二旋转轴线用于第一框架和可移动主体部分相对于第二框架的第二旋转操作。 第一驱动机构被提供用于产生用于第一旋转操作的驱动力。 提供第二驱动机构用于产生用于第二旋转操作的驱动力。 第一旋转轴线和第二旋转轴线不正交。

公开(公告)号：US07262541B2

公开(公告)日：2007-08-28

申请号：US10791787

申请日：2004-03-04

申请人： Mi Xiaoyu ,  Satoshi Ueda ,  Hisao Okuda ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Norinao Kouma ,  Ippei Sawaki ,  Yoshitaka Nakamura

发明人： Mi Xiaoyu ,  Satoshi Ueda ,  Hisao Okuda ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Norinao Kouma ,  Ippei Sawaki ,  Yoshitaka Nakamura

IPC分类号： H02N1/00 ,  G02B26/10

CPC分类号： G02B26/0841

摘要： A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.

摘要翻译： 微振荡元件包括振荡部和框架。 振荡部分设有镜面，通过梯形的第一和第二弹簧与框架相连。 振荡部分位于第一弹簧和第二弹簧之间。 第一弹簧和第二弹簧中的每一个与振荡部的振动一起是可变形的。

公开(公告)号：US06969629B2

公开(公告)日：2005-11-29

申请号：US10791903

申请日：2004-03-04

申请人： Norinao Kouma ,  Osamu Tsuboi ,  Hisao Okuda ,  Hiromitsu Soneda ,  Mi Xiaoyu ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

发明人： Norinao Kouma ,  Osamu Tsuboi ,  Hisao Okuda ,  Hiromitsu Soneda ,  Mi Xiaoyu ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

IPC分类号： B81C1/00 ,  B81B3/00 ,  H01L21/00 ,  H01L29/84

CPC分类号： B81C1/00626 ,  B81B2201/0235 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/04

摘要： A method for manufacturing a micro-structural unit is provided. By the method, micro-machining is performed on a material substrate including first through third conductive layers and two insulating layers, one of which is interposed between the first and the second conductive layers, and the other between the second and the third conductive layers. The method includes several etching steps performed on the layers of the material substrate that are different in thickness.

公开(公告)号：US07161274B2

公开(公告)日：2007-01-09

申请号：US10790762

申请日：2004-03-03

申请人： Osamu Tsuboi ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Mi Xiaoyu ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

发明人： Osamu Tsuboi ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Mi Xiaoyu ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

IPC分类号： H02N1/00 ,  G02B26/08

CPC分类号： H02N1/008

摘要： A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.

摘要翻译： 微振荡元件包括可移动主体部分，第一框架和第二框架，以及第一连接部分，其连接可移动主体部分和第一框架，并且限定第一旋转轴线用于可移动主体的第一旋转操作 相对于第一帧的截面。 元件还包括第二连接部分，其连接第一框架和第二框架并且限定第二旋转轴线用于第一框架和可移动主体部分相对于第二框架的第二旋转操作。 第一驱动机构被提供用于产生用于第一旋转操作的驱动力。 提供第二驱动机构用于产生用于第二旋转操作的驱动力。 第一旋转轴线和第二旋转轴线不正交。

公开(公告)号：US07038830B2

公开(公告)日：2006-05-02

申请号：US10926053

申请日：2004-08-26

申请人： Osamu Tsuboi ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

发明人： Osamu Tsuboi ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

IPC分类号： G02B26/08 ,  G02B26/00

CPC分类号： G02B26/0841

摘要： A micro-oscillation element includes a frame, a movable functional part, a driving mechanism, a beam extending from the functional part to the driving mechanism, and a torsion connector for connecting the frame and the beam to each other. The connector defines a rotational axis about which the functional part rotates. The rotational axis crosses the longitudinal direction of the beam. The beam is shorter than the functional part in the longitudinal direction of the rotational axis.

摘要翻译： 微振荡元件包括框架，可动功能部件，驱动机构，从功能部件延伸到驱动机构的梁，以及用于将框架和梁彼此连接的扭转连接器。 连接器限定了功能部件绕其旋转的旋转轴线。 旋转轴线与梁的纵向方向交叉。 光束比旋转轴的纵向方向上的功能部分短。

公开(公告)号：US20050277217A1

公开(公告)日：2005-12-15

申请号：US11207871

申请日：2005-08-22

申请人： Norinao Kouma ,  Osamu Tsuboi ,  Hisao Okuda ,  Hiromitsu Soneda ,  Mi Xiaoyu ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

发明人： Norinao Kouma ,  Osamu Tsuboi ,  Hisao Okuda ,  Hiromitsu Soneda ,  Mi Xiaoyu ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

IPC分类号： B81C1/00 ,  B81B3/00 ,  H01L21/00 ,  H01L29/84

CPC分类号： B81C1/00626 ,  B81B2201/0235 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/04

摘要： A method for manufacturing a micro-structural unit is provided. By the method, micro-machining is performed on a material substrate including first through third conductive layers and two insulating layers, one of which is interposed between the first and the second conductive layers, and the other between the second and the third conductive layers. The method includes several etching steps performed on the layers of the material substrate that are different in thickness.

公开(公告)号：US20050046504A1

公开(公告)日：2005-03-03

申请号：US10791787

申请日：2004-03-04

申请人： Mi Xiaoyu ,  Satoshi Ueda ,  Hisao Okuda ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Norinao Kouma ,  Ippei Sawaki ,  Yoshitaka Nakamura

发明人： Mi Xiaoyu ,  Satoshi Ueda ,  Hisao Okuda ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Norinao Kouma ,  Ippei Sawaki ,  Yoshitaka Nakamura

IPC分类号： G02B26/08 ,  G02B26/10 ,  H04N1/028 ,  H04N1/036 ,  H01S3/10 ,  H03B5/30

CPC分类号： G02B26/0841

摘要： A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.

摘要翻译： 微振荡元件包括振荡部和框架。 振荡部分设有镜面，通过梯形的第一和第二弹簧与框架相连。 振荡部分位于第一弹簧和第二弹簧之间。 第一弹簧和第二弹簧中的每一个与振荡部的振动一起是可变形的。

公开(公告)号：US07833430B2

公开(公告)日：2010-11-16

申请号：US11256959

申请日：2005-10-25

申请人： Xiaoyu Mi ,  Norinao Kouma ,  Osamu Tsuboi ,  Masafumi Iwaki ,  Hisao Okuda ,  Hiromitsu Soneda ,  Satoshi Ueda ,  Ippei Sawaki

发明人： Xiaoyu Mi ,  Norinao Kouma ,  Osamu Tsuboi ,  Masafumi Iwaki ,  Hisao Okuda ,  Hiromitsu Soneda ,  Satoshi Ueda ,  Ippei Sawaki

IPC分类号： B44C1/22

CPC分类号： B81C1/00547 ,  B81B2201/042 ,  B81B2203/0136 ,  B81C2201/0132 ,  B81C2201/0133 ,  G01P15/0802 ,  G02B26/0841

摘要： A method of making a microstructure with thin wall portions (T1-T3) includes a step of performing a first etching process to a material substrate having a laminate structure including a first conductive layer (11) and a second conductive layer (12) having a thickness of the thin wall portions (T1-T3), where the etching is performed from the side of the first conductive layer (11) thereby forming in the second conductive layer (12) pre thin wall portions (T1′-T3′) which has a pair of side surfaces apart from each other in an in-plane direction of the second conductive layer (12) and contact the first conductive layer (11). The method also includes a step of performing a second etching process from the side of the first conductive layer (11) for removing part of the first conductive layer (11) contacting the pre thin wall portions (T1′-T3′) to form the thin wall portions.

摘要翻译： 一种制造具有薄壁部分（T1-T3）的微结构的方法包括对具有包括第一导电层（11）和第二导电层（12）的层压结构的材料基板进行第一蚀刻工艺的步骤，所述第一导电层（11）和第二导电层（12） 从第一导电层（11）侧进行蚀刻从而在第二导电层（12）中形成预薄壁部分（T1'-T3'）的薄壁部分（T1-T3）的厚度， 具有在第二导电层（12）的面内方向上彼此分开的一对侧表面，并与第一导电层（11）接触。 该方法还包括从第一导电层（11）侧进行第二蚀刻处理以去除与预薄壁部分（T1'-T3'）接触的第一导电层（11）的一部分的步骤，以形成 薄壁部分。

公开(公告)号：US20090218909A1

公开(公告)日：2009-09-03

申请号：US12453099

申请日：2009-04-29

申请人： Osamu Tsuboi ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Mi Xiaoyu ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

发明人： Osamu Tsuboi ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Mi Xiaoyu ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

IPC分类号： H02N11/00

CPC分类号： H02N1/008

摘要： A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.

摘要翻译： 微振荡元件包括可移动主体部分，第一框架和第二框架，以及第一连接部分，其连接可移动主体部分和第一框架，并且限定第一旋转轴线用于可移动主体的第一旋转操作 相对于第一帧的截面。 元件还包括第二连接部分，其连接第一框架和第二框架并且限定第二旋转轴线用于第一框架和可移动主体部分相对于第二框架的第二旋转操作。 第一驱动机构被提供用于产生用于第一旋转操作的驱动力。 提供第二驱动机构用于产生用于第二旋转操作的驱动力。 第一旋转轴线和第二旋转轴线不正交。