Selective stress-inducing implant and resulting pattern distortion in amorphous carbon patterning
    31.
    发明授权
    Selective stress-inducing implant and resulting pattern distortion in amorphous carbon patterning 失效
    选择性应力诱导植入物和无定形碳图案化导致的图案变形

    公开(公告)号:US06825114B1

    公开(公告)日:2004-11-30

    申请号:US10424675

    申请日:2003-04-28

    IPC分类号: H01L2144

    摘要: A method of forming a fuse for use in an integrated circuit using an amorphous carbon mask includes providing a mask material layer comprising amorphous carbon over a conductive layer. The mask material layer is doped with nitrogen, and an anti-reflective coating (ARC) feature is formed over the mask layer. A portion of the mask material layer is removed according to the ARC feature to form a mask, and the ARC feature is removed to form a warped mask. The conductive layer is patterned according to the warped mask, the warped mask is removed, and a silicide layer is provided over the patterned conductive layer.

    摘要翻译: 使用非晶碳掩模形成用于集成电路的熔丝的方法包括在导电层上提供包含无定形碳的掩模材料层。 掩模材料层掺杂有氮,并且在掩模层上形成抗反射涂层(ARC)特征。 根据ARC特征去除掩模材料层的一部分以形成掩模,并且去除ARC特征以形成翘曲的掩模。 根据翘曲的掩模对导电层进行图案化,去除翘曲的掩模,并且在图案化的导电层上提供硅化物层。

    Semiconductor-on-insulator device with thermoelectric cooler on surface
    32.
    发明授权
    Semiconductor-on-insulator device with thermoelectric cooler on surface 有权
    具有表面热电冷却器的绝缘体上半导体器件

    公开(公告)号:US06674128B1

    公开(公告)日:2004-01-06

    申请号:US10135008

    申请日:2002-04-29

    申请人: Philip A. Fisher

    发明人: Philip A. Fisher

    IPC分类号: H01L2701

    CPC分类号: H01L27/1203 H01L21/84

    摘要: A semiconductor-on-insulator (SOI) device includes a thermoelectric cooler on a back side of the device. The thermoelectric cooler is formed on a thinned portion of a deep bulk semiconductor layer of the SOI device. The thermoelectric device includes a plurality of pairs of opposite conductivity semiconductor material blocks formed on a metal layer deposited on the thinned portion. The thinning of the thinned portion may be accomplished in multiple etching steps of the deep silicon layer, such as a fast etching down to an etch stop and a slower, more controlled etch to the desired thickness for the thinned portion.

    摘要翻译: 绝缘体上半导体(SOI)器件包括位于器件背面的热电冷却器。 热电冷却器形成在SOI器件的深体积半导体层的减薄部分上。 热电装置包括形成在沉积在薄化部分上的金属层上的多对相对的导电半导体材料块。 可以在深硅层的多个蚀刻步骤中实现减薄部分的变薄,例如到蚀刻停止的快速蚀刻以及用于变薄部分的期望厚度的较慢的,更受控制的蚀刻。

    Method of pinhole decoration and detection
    33.
    发明授权
    Method of pinhole decoration and detection 失效
    针孔装饰和检测方法

    公开(公告)号:US06596553B1

    公开(公告)日:2003-07-22

    申请号:US10180141

    申请日:2002-06-26

    IPC分类号: H01L2166

    CPC分类号: H01L22/24

    摘要: An exemplary embodiment relates to a method of pinhole decoration and detection. The method can include providing a material layer above an amorphous carbon layer where the material layer has a pinhole, providing a film over the material layer where the film has a substantially planar surface except above the pinhole, and detecting the pinhole by detecting a non-planar location on the substantially planar surface of the film.

    摘要翻译: 示例性实施例涉及针孔装饰和检测的方法。 该方法可以包括在无定形碳层上方提供材料层,其中材料层具有针孔,在材料层上提供膜,其中膜具有除了针孔之外的基本平坦的表面,并且通过检测非针状孔来检测针孔, 在薄膜的基本平坦的表面上的平面位置。

    Method for concentrating &bgr;-glucan
    34.
    发明授权
    Method for concentrating &bgr;-glucan 有权
    浓缩β-葡聚糖的方法

    公开(公告)号:US06323338B1

    公开(公告)日:2001-11-27

    申请号:US09252356

    申请日:1999-02-17

    IPC分类号: C08B3700

    CPC分类号: C08B37/0024 C08B37/0003

    摘要: An entirely aqueous method for concentrating beta-glucan from a beta-glucan source, such as milled cereal bran, grain or distiller's dried grain. The method comprises providing an alkaline aqueous extract of a beta-glucan source; acidifying or neutralizing the extract and heating the extract to between about 60° C. and 100° C.; cooling the extract, whereby a flocculate is formed; acidifing the cooled extract if the extract was neutralized; and removing the flocculate from the aqueous solution to form an intermediate solution. The intermediate solution may be subjected to ultrafiltration for further purification of beta-glucan, or may be evaporated, resulting in formation of a solid film enriched in beta-glucan. Beta-glucan has cholesterol-lowering properties and is a topical immunostimulant.

    摘要翻译: 用于从β-葡聚糖来源浓缩β-葡聚糖的完全水性方法,例如磨碎的谷类麸,谷物或蒸馏酒的干粮。 该方法包括提供β-葡聚糖源的碱性水提取物; 酸化或中和提取物并将提取物加热至约60℃至100℃; 冷却提取物,由此形成絮凝物; 如果提取物被中和,则将冷却的提取物酸化; 并从水溶液中除去絮凝物以形成中间溶液。 可以对中间溶液进行超滤以进一步纯化β-葡聚糖,或者可以蒸发,从而形成富含β-葡聚糖的固体膜。 β-葡聚糖具有降胆固醇的特性,是局部免疫刺激剂。