Flash memory device utilizing nanocrystals embedded in polymer
    32.
    发明申请
    Flash memory device utilizing nanocrystals embedded in polymer 有权
    闪存器件利用嵌入聚合物的纳米晶体

    公开(公告)号:US20070034933A1

    公开(公告)日:2007-02-15

    申请号:US11540991

    申请日:2006-09-28

    IPC分类号: H01L29/76

    摘要: A flash memory device with a nanoscale floating gate and a method of manufacturing thereof are disclosed. At least one embodiment of the present invention provides a much simpler and easier method of manufacturing nanocrystals (or nanocrystallines) for the flash memory device than the conventional method. Since the nanocrystals are homogeneously dispersed as a polymer layer without agglomeration, size and density of the nanoparticles may be controlled. Additionally, one embodiment of the present invention provides memory devices with nanoscale floating gates, and related methods of manufacture, of high efficiency and cost effectiveness by employing electrically and chemically more stable nanosacle floating gates compared to conventional ones.

    摘要翻译: 公开了一种具有纳米级浮动栅极的闪存器件及其制造方法。 本发明的至少一个实施例提供了制造用于闪速存储器件的纳米晶体(或纳米晶体)的方法比常规方法简单和容易的方法。 由于纳米晶体作为聚合物层均匀分散而没有附聚,因此可以控制纳米颗粒的尺寸和密度。 此外,本发明的一个实施例通过采用电化学和化学更稳定的纳米级浮动栅极提供具有纳米级浮动栅极的存储器件以及相关的制造方法,其具有高效率和成本效益。