摘要:
In an ink-jet type recording head including a nozzle plate provided with nozzle openings, a spacer provided with partitions for partitioning pressure generating chambers, ink supply ports and reservoirs, and a plate member sandwiched and fixed together. Displacement of the plate member is produced by piezoelectric vibrators to thereby generate ink droplets. The spacer is formed by anisotropic etching of a silicon single crystal substrate so that the pressure generating chambers, the ink supply ports and the reservoirs are formed as through-holes communicated with each other. Accordingly, etching conditions for the respective through-holes are made equal to each other. In different embodiments, the spacer includes chamfered portions or a plurality of fine planes and steps along which adhesive spreads during assembly of the head. In a further embodiment, the spacer includes different length partitions are between the pressure generating chambers.
摘要:
An ink jet printer head includes a spacer including pressure generating chambers continuous to nozzle openings, ink supply paths, and reservoirs, a cover member for covering the pressure generating chambers in a sealing fashion, and pressure generating means for generating pressure in the pressure generating chambers in accordance with print data. In processing a silicon single-crystal substrate vertically oriented in (110) by anisotropic etching process, one of the walls of a path hole for forming a pressure generating chamber is aligned with one of the walls of a path hole for forming a reservoir. Walls defining the path hole for forming a pressure generating chamber, which are located in the vicinity of a nozzle opening, are connected to each other at an obtuse angle. As a result, the ink supply path serving as a narrow path for ink flow and the pressure generating chamber are formed as smooth flow paths. The walls in an area in the vicinity of the nozzle opening where ink tends to stay are substantially equally distanced from the nozzle opening. A smooth flow of ink is ensured.
摘要:
Provided are a piezoelectric material without using lead or an alkali metal, the piezoelectric material having a stable crystal structure in a wide temperature range, high insulation property, and high piezoelectric property, and a piezoelectric element using the piezoelectric material, in which the piezoelectric material is made of a metal oxide having a tetragonal crystal structure and expressed by Ba(SixGeyTiz)O3 (here, 0≦x≦1, 0≦y≦1, and 0≦z≦0.5), the piezoelectric element includes the piezoelectric material and a pair of electrodes sandwiching the piezoelectric material, and at least one of the pair of electrodes is made of SrRuO3 or Ni.
摘要翻译:提供一种不使用铅或碱金属的压电材料,压电材料在宽温度范围内具有稳定的晶体结构,高绝缘性和高压电性,以及使用压电材料的压电元件,其中压电材料 由具有四方晶体结构并由Ba(SixGeyTiz)O 3(这里,0 <= x <= 1,0 <= y <= 1,0 <= z <= 0.5)表示的金属氧化物制成,压电 元件包括压电材料和夹着压电材料的一对电极,并且该对电极中的至少一个由SrRuO 3或Ni制成。
摘要:
Provided are a piezoelectric material without using lead or an alkali metal, the piezoelectric material having a stable crystal structure in a wide temperature range, high insulation property, and high piezoelectric property, and a piezoelectric element using the piezoelectric material, in which the piezoelectric material is made of a metal oxide having a tetragonal crystal structure and expressed by Ba(SixGeyTiz)O3 (here, 0≦x≦1, 0≦y≦1, and 0≦z≦0.5), the piezoelectric element includes the piezoelectric material and a pair of electrodes sandwiching the piezoelectric material, and at least one of the pair of electrodes is made of SrRuO3 or Ni.
摘要:
Provided are a piezoelectric element that can effectively utilize a piezoelectric constant d15 to increase a deflection displacement of a vibrating plate, and devices using the piezoelectric element. The piezoelectric element includes: a first electrode; a second electrode; a vibrating plate that is in contact with the first electrode; a piezoelectric film provided between the first electrode and the second electrode; at least one recess formed on the second electrode side of the piezoelectric film; and a third electrode formed on an inner side wall of the at least one recess, in which the third electrode is connected to the second electrode.
摘要:
A nozzle plate is manufactured by providing a material plate and a punch. The material plate is punched by the punch to form a provisional nozzle orifice hole on the material plate. The punching is repeated such that the provisional holes formed by a given punch are arranged in line. A bulged portion which is bulged on a back side of the material plate is removed to form the completed nozzle orifice.
摘要:
An ink jet printer head includes a spacer including pressure generating chambers continuous to nozzle openings, ink supply paths, and reservoirs, a cover member for covering the pressure generating chambers in a sealing fashion, and pressure generating means for generating pressure in the pressure generating chambers in accordance with print data. In processing a silicon single-crystal substrate vertically oriented in (110) by anisotropic etching process, one of the walls of a path hole for forming a pressure generating chamber is aligned with one of the walls of a path hole for forming a reservoir. Walls defining the path hole for forming a pressure generating chamber, which are located in the vicinity of a nozzle opening, are connected to each other at an obtuse angle. As a result, the ink supply path serving as a narrow path for ink flow and the pressure generating chamber are formed as smooth flow paths. The walls in an area in the vicinity of the nozzle opening where ink tends to stay are substantially equally distanced from the nozzle opening. A smooth flow of ink is ensured.