公开(公告)号：US4643576A

公开(公告)日：1987-02-17

申请号：US724397

申请日：1985-04-18

申请人： Toshio Kanoh ,  Taira Kouchiwa

发明人： Toshio Kanoh ,  Taira Kouchiwa

IPC分类号： G01B9/02 ,  G01J9/02 ,  G01B11/00

CPC分类号： G01B9/02098 ,  G01J9/0215 ,  G01M11/005

摘要： A fringe scanning shearing interferometer includes a converter lens for converting a wavefront reflected by an object under test illuminated with light into an approximately parallel wavefront, a beam splitter for dividing the approximately parallel wavefront into first and second wavefronts travelling in two directions, a pair of first and second prisms disposed respectively adjacent to the beam splitter in equally spaced relation thereto, a displacement mechanism for displacing the first prism in a direction normal to the direction in which the first wavefront falls on the first prism, a shearing device for slightly displacing the second prism in the same direction as that in which the second wavefront falls on the second prism, a photodetector, and a focusing lens for focusing the first and second wavefronts having passed respectively through the first and second prism, on the photodetector to produce interference fringes thereon.

摘要翻译： 边缘扫描剪切干涉仪包括：转换器透镜，用于将由被照射的被测物体反射的波前转换为近似平行的波前;分束器，用于将近似平行的波前划分为在两个方向上行进的第一和第二波前;一对 第一和第二棱镜以与其分开的等距间隔分布的相邻的分光器分别设置，用于使第一棱镜沿垂直于第一波阵面落在第一棱镜上的方向移动的位移机构，用于稍微移位的剪切装置 第二棱镜与第二波前面落在第二棱镜上的方向相同的方向上，光电检测器和聚焦透镜，用于将分别通过第一和第二棱镜的第一和第二波前聚焦在光电检测器上，以产生干涉条纹 上。

公开(公告)号：US4504147A

公开(公告)日：1985-03-12

申请号：US287676

申请日：1981-07-28

申请人： Cheng-Chung Huang

发明人： Cheng-Chung Huang

IPC分类号： G01B11/26 ,  G01J9/02 ,  G01B9/02

CPC分类号： G01J9/0215 ,  G01B11/26

摘要： A sensor for measuring angular deviations of a radiation beam relative to a reference plane. The sensor comprises a shearing interferometer block formed of a beamsplitter cube having a first reflecting device on one face of the cube for forming a first exit beam and a second reflecting device on the opposite face of the cube for forming a second exit beam. The first device can be a corner cube or a flat block mirror. The second device can be a right angle prism for one dimensional measurements and a 90.degree. pyramid prism for two-dimensional measurements. A photo-detector unit is adjacent to and spaced from the beam splitter cube and has a number of detector members across the path of travel of the wavefronts of the exit beams. The detector members provide output signals which can be used to calculate the angular deviation of the incoming beam from a normal to the reference plane. The optical path difference between the two arms of the interferometer block are equal substantially to odd multiples of one-fourth the wavelength of the incoming radiation. The sensor is accurate to better than 0.001 arc seconds of angular measurements for a photodetector unit whose maximum transverse dimension is 2.5 cm.

摘要翻译： 用于测量辐射束相对于参考平面的角度偏差的传感器。 传感器包括由分束器立方体形成的剪切干涉仪块，该分束器立方体在立方体的一个面上具有用于形成第一出射光束的第一反射装置，以及用于形成第二出射光束的立方体的相对面上的第二反射装置。 第一个装置可以是角立方体或平面块镜。 第二装置可以是用于一维测量的直角棱镜和用于二维测量的90°棱锥棱镜。 光检测器单元与分束器立方体相邻并间隔开，并且在出射光束的波前的行进路径上具有多个检测器构件。 检测器构件提供可用于计算入射光束与基准平面的角度偏差的输出信号。 干涉仪块的两个臂之间的光程差基本上等于入射辐射波长四分之一的奇数倍。 对于最大横向尺寸为2.5厘米的光电检测器单元，该传感器的精度要好于0.001弧秒的角度测量。

公开(公告)号：US3923400A

公开(公告)日：1975-12-02

申请号：US43045674

申请日：1974-01-03

申请人： ITEK CORP

发明人： HARDY JOHN W

IPC分类号： G01J9/02 ,  G02B26/06 ,  G01B9/02 ,  G02B5/23

CPC分类号： G01J9/0215 ,  G02B26/06

摘要： An optical imaging system having the capability of detecting and eliminating in real-time phase distortions in a wavefront being imaged by the optical system. The resolution of ground based telescopes is severely limited by random wavefront phase changes and tilts produced by atmospheric turbulence. The disclosed invention was designed to overcome this problem. In the disclosed invention, an AC, lateral shearing interferometer measures in real-time the relative phase differences of the wavefront being imaged by the optical system. Phase differences measured by the shearing interferometer are directed to an analog data processor which, in combination with other circuitry, generates a plurality of electrical signals proportional to the required phase corrections at different areas of the wavefront. The electrical signals are applied to a phase corrector upon which the wavefront is incident to change the relative phase at various locations of the wavefront to achieve a wavefront in which the phase distortion is removed. In one embodiment the phase correction device consists of a mirror having an array of piezoelectric elements which function to selectively deform the mirror to correct phase distortions in the wavefront. In a second embodiment the phase correction device consists of a refractive device which has the capability of having its index of refraction selectively changed in different areas to correct phase distortions in the wavefront.

摘要翻译： 具有检测和消除由光学系统成像的波前的实时相位失真的能力的光学成像系统。 地面望远镜的分辨率受到随机波前相位变化和大气湍流产生的倾斜的严重限制。 所公开的发明旨在克服这个问题。 在所公开的发明中，AC侧向剪切干涉仪实时测量由光学系统成像的波前的相对相位差。 通过剪切干涉仪测量的相位差被引导到模拟数据处理器，其与其他电路组合产生与波前不同区域上的所需相位校正成比例的多个电信号。 电信号被施加到波前入射的相位校正器，以改变波阵面的各个位置处的相对相位，以实现去除相位失真的波前。 在一个实施例中，相位校正装置包括具有压电元件阵列的反射镜，其具有选择性地使反射镜变形以校正波前的相位失真。 在第二实施例中，相位校正装置由折射装置组成，折射装置具有在不同区域中选择性地改变其折射率的能力，以校正波前的相位失真。

公开(公告)号：US3825349A

公开(公告)日：1974-07-23

申请号：US30979872

申请日：1972-11-27

申请人： ANVAR

发明人： NOMARSKI G

IPC分类号： G01B9/02 ,  G01B11/30 ,  G01J9/02 ,  G02B21/00 ,  G02B21/06

CPC分类号： G01J9/0215 ,  G01B9/02024

摘要： The invention relates to improvements to point reference interferometry. These improvements are characterized by the fact that within an optical circuit derived from the Sagnac interferometer and comprising a beam splitter M and a series of plane mirrors (M1, M2) sending the beam coming from the beam splitter (M) back to the same beam splitter, an object having a phase Omega 1 is placed inside the circuit so compared. A refracting or diffracting transparent element causes an important change in the direction of the light rays traversing it at a point conjugated with itself or self-conjugated with respect to said beam splitter M. The invention applies both to microscopy and macroscopy.

公开(公告)号：US09921111B2

公开(公告)日：2018-03-20

申请号：US15209535

申请日：2016-07-13

申请人： RAM Photonics, LLC

发明人： Seung-Whan Bahk

IPC分类号： G01B9/02 ,  G01J9/02 ,  G03F7/20 ,  G01J9/00

CPC分类号： G01J9/0215 ,  G01B9/02 ,  G01J9/02 ,  G01J2009/002 ,  G03F7/706

摘要： A method for performing optical wavefront sensing includes providing an amplitude transmission mask having a light input side, a light output side, and an optical transmission axis passing from the light input side to the light output side. The amplitude transmission mask is characterized by a checkerboard pattern having a square unit cell of size Λ. The method also includes directing an incident light field having a wavelength λ to be incident on the light input side and propagating the incident light field through the amplitude transmission mask. The method further includes producing a plurality of diffracted light fields on the light output side and detecting, at a detector disposed a distance L from the amplitude transmission mask, an interferogram associated with the plurality of diffracted light fields. The relation 0

公开(公告)号：US09719859B2

公开(公告)日：2017-08-01

申请号：US14565703

申请日：2014-12-10

申请人： Lasertec Corporation

发明人： Haruhiko Kusunose ,  Kiwamu Takehisa

IPC分类号： G01B9/02 ,  G01J9/02 ,  G01N21/45 ,  G03F1/26 ,  G03F1/84

CPC分类号： G01J9/02 ,  G01B9/02041 ,  G01B9/02049 ,  G01B9/02098 ,  G01B2290/30 ,  G01J9/0215 ,  G01J2009/0219 ,  G01N21/45 ,  G03F1/26 ,  G03F1/84

摘要： The present invention is directed to the provision of an interferometer and a phase shift amount measuring apparatus that can precisely operate in the EUV region. The interferometer according to the invention comprises an illumination source for generating an illumination beam, an illumination system for projecting the illumination beam emitted from the illumination source onto a sample, and an imaging system for directing the reflected beam by the sample onto a detector. The illumination system includes a first diffraction grating for producing a first and second diffraction beams which respectively illuminate two areas on the sample where are shifted from each other by a given distance, and the imaging system includes a second grating for diffracting the first and second diffraction beams reflected by the sample to produce a third and fourth diffraction beams which are shifted from each other by a given distance.

公开(公告)号：US20170199083A1

公开(公告)日：2017-07-13

申请号：US15331036

申请日：2016-10-21

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Junji OKUMA ,  Yasunori IGASAKI ,  Yasunaga NARA

IPC分类号： G01J9/02

CPC分类号： G01J9/0215 ,  G01J2009/0223 ,  G01J2009/0234

摘要： A collimation evaluation device includes a first reflection member, a second reflection member, a screen, and a housing. A first reflection surface of the first reflection member and a first reflection surface of the second reflection member face each other and are parallel to each other. Further, interference fringes are formed on the screen by light L12 reflected on the first reflection surface of the first reflection member and a second reflection surface of the second reflection member and light L21 reflected on a second reflection surface of the first reflection member and the first reflection surface of the second reflection member, and collimation of incident light is evaluated on the basis of a direction of the interference fringes.

公开(公告)号：US09658162B2

公开(公告)日：2017-05-23

申请号：US14642655

申请日：2015-03-09

申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

发明人： H. Kumar Wickramasinghe

IPC分类号： G01N21/65 ,  G01J3/44 ,  G01J3/45 ,  G01Q30/02

CPC分类号： G01N21/65 ,  G01J3/0224 ,  G01J3/44 ,  G01J3/45 ,  G01J3/453 ,  G01J9/0215 ,  G01J2009/0261 ,  G01N2021/655 ,  G01Q30/02

摘要： An apparatus and method for measuring amplitude and/or phase of a molecular vibration uses a polarization modulated pump beam and a stimulating Stokes beam on a probe of a scanning probe microscope to detect a Raman scattered Stokes beam from the sample. The detected Raman scattered Stokes beam is used to derive at least one of the amplitude and the phase of the molecular vibration.

公开(公告)号：US09226665B2

公开(公告)日：2016-01-05

申请号：US13900671

申请日：2013-05-23

申请人： The General Hospital Corporation

发明人： Guillermo J. Tearney ,  Nicusor Iftimia ,  Brett Eugene Bouma

IPC分类号： G01B9/02 ,  A61B5/00 ,  G01N21/47 ,  G02B27/48 ,  G01J9/02 ,  G02B26/10

CPC分类号： A61B5/0066 ,  A61B5/0059 ,  A61B5/6852 ,  G01B9/02028 ,  G01B9/02082 ,  G01B9/02087 ,  G01B9/02091 ,  G01J9/0215 ,  G01N21/4795 ,  G02B26/105 ,  G02B27/48

摘要： Accordingly, exemplary embodiments of an apparatus obtaining information associated with a structure can be provided. For example, with a first arrangement, it is possible to separate at least one first electro-magnetic radiation into a first radiation and a second radiation forwarded to the structure, with the first and second radiations having different path lengths. Using a second arrangement, it is possible to receive third and fourth radiations from the structure associated with the first and second radiations and a fifth radiation received from a reference. Further, with a third arrangement, it is possible to generate data corresponding to an amount of a ranging depth within the structure associated with the second arrangement. For example, a difference between the path lengths of the first and second radiations is equal or greater than the ranging depth.

摘要翻译： 因此，可以提供获得与结构相关联的信息的装置的示例性实施例。 例如，通过第一布置，可以将至少一个第一电磁辐射分离成第一辐射和转发到结构的第二辐射，其中第一和第二辐射具有不同的路径长度。 使用第二布置，可以从与第一和第二辐射相关联的结构接收第三和第四辐射以及从参考接收的第五辐射。 此外，利用第三布置，可以生成与第二布置相关联的结构内的测距深度的量相对应的数据。 例如，第一和第二辐射的路径长度之间的差值等于或大于测距深度。

公开(公告)号：US09046466B2

公开(公告)日：2015-06-02

申请号：US13641966

申请日：2011-05-20

申请人： Chidane Ouchi

发明人： Chidane Ouchi

IPC分类号： G03H5/00 ,  G01N23/20 ,  G01B9/021 ,  G03H1/10 ,  G01N23/04 ,  G01J9/02 ,  A61B6/00 ,  G02B5/18 ,  G01J9/00 ,  G21K1/06 ,  G01B11/25

CPC分类号： G01N23/04 ,  A61B6/4291 ,  A61B6/484 ,  G01B11/2527 ,  G01J9/00 ,  G01J9/0215 ,  G01N2223/1016 ,  G01N2223/32 ,  G02B5/18 ,  G02B5/1814 ,  G02B5/1838 ,  G02B5/1842 ,  G02B5/1871 ,  G02B5/189 ,  G21K1/06 ,  G21K2201/06 ,  G21K2207/005

摘要： Provided is an X-ray imaging apparatus having simple configuration and obtaining differential phase contrast images in two directions crossing each other without rotating the diffraction grating and the masking grating. The apparatus including: a diffraction grating diffracting X-rays; a masking grating masking portions rays and transmitting portions are two-dimensionally arranged to partially mask bright zones of the interference pattern; a moving device changing the relative position between the interference pattern and the masking grating; a detector detecting the intensity distribution of the X-rays transmitted through the masking grating; and a calculator calculating a differential phase contrast image or a phase contrast image of a subject, the calculator being configured to calculate the differential phase contrast image or the phase contrast image in each of two mutually crossing directions on the basis of results of detection performed a plurality of times by the detector.

摘要翻译： 本发明提供一种具有简单结构的X射线成像设备，并且在不旋转衍射光栅和掩蔽光栅的情况下彼此交叉的两个方向获得差分相位差图像。 该装置包括衍射光栅衍射X射线; 屏蔽光栅遮蔽部分光线和透射部分被二维布置以部分地掩蔽干涉图案的亮区; 移动装置改变干涉图案和掩蔽光栅之间的相对位置; 检测器，其检测透过所述掩蔽光栅的X射线的强度分布; 以及计算器，其计算对象的差分相位差图像或相位对比图像，所述计算器被配置为基于检测结果a计算两个相互交叉方向中的每一个中的差分相位对比图像或相位对比图像 多次由检测器。