METHOD OF MECHANICAL SEPARATION FOR A DOUBLE LAYER TRANSFER
    31.
    发明申请
    METHOD OF MECHANICAL SEPARATION FOR A DOUBLE LAYER TRANSFER 审中-公开
    双层传递的机械分离方法

    公开(公告)号:US20160358805A1

    公开(公告)日:2016-12-08

    申请号:US15170532

    申请日:2016-06-01

    Applicant: Soitec

    Abstract: The present disclosure relates to a method for mechanically separating layers, in particular in a double layer transfer process. The present disclosure relates more in particular to a method for mechanically separating layers, comprising the steps of providing a semiconductor compound comprising a layer of a handle substrate and an active layer with a front main side and a back main side opposite the front main side, wherein the layer of the handle substrate is attached to the front main side of the active layer, then providing a layer of a carrier substrate onto the back main side of the active layer, and then initiating mechanical separation of the layer of the handle substrate, wherein the layer of the handle substrate and the layer of the carrier substrate are provided with a substantially symmetrical mechanical structure.

    Abstract translation: 本公开涉及用于机械分离层的方法,特别是在双层转移工艺中。 本公开更具体地涉及用于机械分离层的方法,包括以下步骤:提供包括手柄衬底层和活性层的半导体化合物,其具有与前主侧相对的前主侧和后主侧, 其中所述手柄基板的所述层附着到所述有源层的前主侧,然后在所述有源层的所述后主侧上提供载体基板层,然后开始所述手柄基板的所述层的机械分离, 其中所述手柄基板的层和所述载体基板的层设置有基本对称的机械结构。

    RADIOFREQUENCY HIGH-OUTPUT DEVICE
    32.
    发明申请
    RADIOFREQUENCY HIGH-OUTPUT DEVICE 有权
    无线电高输出设备

    公开(公告)号:US20160336255A1

    公开(公告)日:2016-11-17

    申请号:US15044622

    申请日:2016-02-16

    Abstract: A radiofrequency high-output device includes: a base plate having a mount portion and a flange portion; a frame joined to an upper surface of the mount portion; and a semiconductor chip mounted on the upper surface of the mount portion in the frame, wherein a cut or an aperture in which a screw is inserted to fix the base plate is provided in the flange portion, and a groove is provided between the mount portion and the flange portion of the base plate.

    Abstract translation: 射频高输出装置包括:具有安装部分和凸缘部分的基板; 连接到所述安装部的上表面的框架; 以及安装在框架中的安装部的上表面上的半导体芯片,其中,在凸缘部设置有用于固定基板的螺钉插入的切口或孔,并且在安装部之间设置有槽 和基板的凸缘部分。

    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    34.
    发明申请
    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 审中-公开
    制造半导体器件的方法

    公开(公告)号:US20160233176A1

    公开(公告)日:2016-08-11

    申请号:US15009015

    申请日:2016-01-28

    Inventor: Kunihito Kato

    Abstract: A method for manufacturing a semiconductor device includes attaching a semiconductor substrate to a support substrate in a heated state, and processing the semiconductor substrate attached to the support substrate. The support substrate has a linear coefficient different from that of the semiconductor substrate. In an overlap region in which the support substrate overlaps the semiconductor substrate attached to the support substrate, a plurality of through-holes penetrating the support substrate from a front surface to a rear surface is provided. A straight line drawn on the front surface of the support substrate in any direction intersects with at least one of the through holes as long as the straight line is drawn through a center of the overlap region.

    Abstract translation: 一种半导体装置的制造方法,其特征在于,在加热状态下,将半导体基板附着在支撑基板上,对所述支撑基板的半导体基板进行加工。 支撑衬底具有与半导体衬底的线性系数不同的线性系数。 在支撑基板与安装在支撑基板上的半导体基板重叠的重叠区域中,设置有从前表面到后表面贯穿支撑基板的多个通孔。 只要直线通过重叠区域的中心,在支撑基板的前表面上以任何方向绘制的直线与至少一个通孔相交。

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