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105 条记录 (耗时 0.037 秒)

    Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems
    41.
    发明授权
    Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems 有权
    飞行移动式机载椭圆仪，偏振计，反射计等系统

    公开(公告)号：US07746471B1

    公开(公告)日：2010-06-29

    申请号：US11890391

    申请日：2007-08-05

    申请人： Blaine D. Johs ,  Ping He ,  Martin M. Liphardt ,  Christopher A. Goeden ,  John A. Woollam ,  James D. Welch

    发明人： Blaine D. Johs ,  Ping He ,  Martin M. Liphardt ,  Christopher A. Goeden ,  John A. Woollam ,  James D. Welch

    IPC分类号： G01J4/00

    CPC分类号： G01N21/21 ,  G01N21/55 ,  G01N2021/151 ,  G01N2021/212 ,  G01N2021/214 ,  G01N2201/021 ,  G01N2201/0693

    摘要： A substantially self-contained “on-board” material system investigation system for effecting relative translational and rotational motion between a source and detector of electromagnetic radiation and a sample, which system is functionally mounted on a three dimensional locational system to enable positioning at desired locations on, and distances from, the surface of a sample, including the capability to easily and conveniently effect rotation and/or to change the angle-of-incidence of a beam of electromagnetic radiation onto a sample surface and/or to provide gas flow confined in a mini-chamber near the surface of a sample, at a location at which a beam having UV, VUV, IR and/or NIR wavelengths of electromagnetic radiation is caused to be impinged thereupon.

    摘要翻译： 一种基本上独立的“车载”材料系统调查系统，用于实现电磁辐射源和检测器之间的相对平移和旋转运动，以及样品，该系统功能地安装在三维位置系统上，以便能够定位在所需位置 包括能够容易且方便地影响旋转和/或将电磁辐射束的入射角改变到样品表面上和/或提供气流限制的能力 在具有UV，VUV，IR和/或NIR波长的电磁辐射的光束的位置处，在样品表面附近的微型室中被引入。

    Rotating compensator ellipsometer system with spatial filter equivalent
    43.
    发明授权
    Rotating compensator ellipsometer system with spatial filter equivalent 有权
    具有空间滤波器等效旋转补偿器椭偏仪系统

    公开(公告)号：US07468794B1

    公开(公告)日：2008-12-23

    申请号：US11204929

    申请日：2005-08-15

    申请人： Martin M. Liphardt ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He

    发明人： Martin M. Liphardt ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He

    IPC分类号： G01J4/00

    CPC分类号： G01N21/211 ,  G01N21/55

    摘要： Application of a spatial filter equivalent constructed from a converging lens and an optical fiber in rotating compensator ellipsometer systems, after a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular content, so that electromagnetic beam intensity is caused to quickly decay to zero as a function of radius.

    摘要翻译： 在采样系统之后，将由会聚透镜和光纤构成的空间滤波器等效应用于旋转补偿器椭偏仪系统中。 目的是消除呈现低强度水平不规则内容的大致任意轮廓波束的径向外环，使电磁波强度作为半径的函数快速衰减为零。

    Method of reducing the effect of noise in determining the value of a dependent variable
    44.
    发明授权
    Method of reducing the effect of noise in determining the value of a dependent variable 有权
    降低噪声影响因素确定因变量值的方法

    公开(公告)号：US07307724B1

    公开(公告)日：2007-12-11

    申请号：US10794204

    申请日：2004-03-05

    申请人： Martin M. Liphardt ,  Blaine D. Johs

    发明人： Martin M. Liphardt ,  Blaine D. Johs

    IPC分类号： G01J4/00

    CPC分类号： G01N21/211 ,  G01N2021/213

    摘要： A method of reducing the effect of systematic and/or random noise during determination of dependent variable values, (eg. pseudo “n” and “k” and/or ellipsometric PSI and DELTA or mathematical equivalent vs. wavelength or angle of incidence), involving selecting a mathematical function and an independent variable subset range combination so that a square error best fit with total summed square error over the independent variable subset range being minimized, zero or within an acceptable range near zero, are achieved.

    摘要翻译： 在确定因变量值（例如伪“n”和“k”和/或椭偏PSI和DELTA或数学等效对波长或入射角的确定期间减少系统和/或随机噪声的影响的方法） 包括选择数学函数和独立的可变子集范围组合，使得与独立变量子集范围之间的总和平方误差最佳匹配的平方误差最小化，零或在接近零的可接受范围内。

    Discrete polarization state spectroscopic ellipsometer system and method of use
    49.
    发明授权
    Discrete polarization state spectroscopic ellipsometer system and method of use 有权
    离散偏振态光谱椭偏仪系统及其使用方法

    公开(公告)号：US07075650B1

    公开(公告)日：2006-07-11

    申请号：US10613118

    申请日：2003-07-07

    申请人： Blaine D. Johs ,  Martin M. Liphardt ,  Ping He ,  Jeffrey S. Hale

    发明人： Blaine D. Johs ,  Martin M. Liphardt ,  Ping He ,  Jeffrey S. Hale

    IPC分类号： G01J4/00

    CPC分类号： G01N21/211 ,  G01N21/274 ,  G01N2021/213

    摘要： A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The prefered spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.

    摘要翻译： 一种分光椭偏仪系统，包括多个单独的光源，所述多个单独的光源被依次通电以提供不同极化状态的每一个光束序列，但是沿公共轨迹朝向样品。 优选的光谱椭偏仪系统在数据收集期间没有移动的部分，并且其提供顺序的多个顺序离散而不是连续变化的偏振状态。