公开(公告)号：US08460565B2

公开(公告)日：2013-06-11

申请号：US12768616

申请日：2010-04-27

申请人： Kim Y Lee ,  Hong Ying Wang ,  Nobuo Kurataka ,  Christopher Formato ,  David S Kuo ,  Dieter K Weller

发明人： Kim Y Lee ,  Hong Ying Wang ,  Nobuo Kurataka ,  Christopher Formato ,  David S Kuo ,  Dieter K Weller

IPC分类号： B44C1/22

CPC分类号： G11B5/855 ,  G11B5/667 ,  G11B5/732

摘要： A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.

摘要翻译： 一种制造图案化磁记录介质的方法，包括以下步骤：（a）提供包括最上面的非磁性中间层的层堆叠; （b）在所述中间层上形成抗蚀剂层; （c）形成第一图案，其包括延伸穿过抗蚀剂层的第一组凹槽，并暴露出中间层的第一组间隔开的表面部分; （d）用一层硬掩模材料填充第一组凹槽; （e）选择性地去除所述抗蚀剂层以形成第二图案，所述第二图案包括延伸穿过所述硬掩模层并暴露所述中间层的第二组间隔开的表面部分的第二组凹部; 和（f）用形成磁记录层的磁性硬质材料层填充第二组凹部。

公开(公告)号：US08230582B2

公开(公告)日：2012-07-31

申请号：US12685455

申请日：2010-01-11

申请人： Christian Rene Bonhote ,  Jila Tabib ,  Dennis Richard Mckean ,  Daniel Wayne Bedell ,  Jyh-Shuey Lo ,  Heiu Lam ,  Kim Y Lee

发明人： Christian Rene Bonhote ,  Jila Tabib ,  Dennis Richard Mckean ,  Daniel Wayne Bedell ,  Jyh-Shuey Lo ,  Heiu Lam ,  Kim Y Lee

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49048 ,  Y10T29/49052

摘要： One preferred method for use in making a device structure with use of the resist channel shrinking solution includes the steps of forming a first pedestal portion within a channel of a patterned resist; applying a resist channel shrinking solution comprising a resist channel shrinking film and corrosion inhibitors within the channel of the patterned resist; baking the resist channel shrinking solution over the patterned resist to thereby reduce a width of the channel of the patterned resist; removing the resist channel shrinking solution; and forming a second pedestal portion within the reduced-width channel of the patterned resist. Advantageously, the oxide layer and the corrosion inhibitors of the resist channel shrinking solution reduce corrosion in the pedestal during the act of baking the resist channel shrinking solution.

摘要翻译： 用于制造使用抗蚀剂通道收缩溶液的器件结构的一种优选方法包括在图案化抗蚀剂的通道内形成第一基座部分的步骤; 在图案化的抗蚀剂的通道内施加包含抗蚀剂通道收缩膜和腐蚀抑制剂的抗蚀剂通道收缩溶液; 在图案化的抗蚀剂上烘烤抗蚀剂通道收缩溶液，从而减小图案化抗蚀剂的通道的宽度; 去除抗蚀剂通道收缩溶液; 以及在所述图案化抗蚀剂的所述减小宽度的通道内形成第二基座部分。 有利地，抗蚀剂通道收缩溶液的氧化物层和腐蚀抑制剂在烘烤抗蚀剂通道收缩溶液的作用下降低了基座中的腐蚀。

公开(公告)号：US08213132B2

公开(公告)日：2012-07-03

申请号：US11938677

申请日：2007-11-12

申请人： David Eugene Heim ,  Kim Y. Lee ,  Tsann Lin ,  Jih-Shiuan Luo

发明人： David Eugene Heim ,  Kim Y. Lee ,  Tsann Lin ,  Jih-Shiuan Luo

IPC分类号： G11B5/39

CPC分类号： B82Y10/00 ,  G11B5/3163 ,  Y10T29/49048 ,  Y10T403/58

摘要： A narrow track-width magnetoresistive sensor by defining a trench formed between first and second hard bias layers and depositing the sensor into the trench. The sensor can include a sensor stack sandwiched between first and second electrically conductive lead layers. First and second electrically insulating side walls are formed at either side of the sensor stack. First and second hard bias layers extend from the sides of the sensor stack, being separated from the sensor stack by the first and second electrically insulating side walls. First and second physically hard insulation layers are provided over each of the hard bias layers.

摘要翻译： 通过限定形成在第一和第二硬偏置层之间的沟槽并将传感器沉积到沟槽中的窄轨道宽度磁阻传感器。 传感器可以包括夹在第一和第二导电引线层之间的传感器堆叠。 第一和第二电绝缘侧壁形成在传感器堆叠的任一侧。 第一和第二硬偏压层从传感器堆叠的侧面延伸，通过第一和第二电绝缘侧壁与传感器堆叠分离。 第一和第二物理硬绝缘层设置在每个硬偏压层上。

公开(公告)号：US07742258B2

公开(公告)日：2010-06-22

申请号：US11707524

申请日：2007-02-12

申请人： Tsung Yuan Chen ,  David Patrick Druist ,  Quang Le ,  Kim Y. Lee ,  Chun-Ming Wang ,  Howard Gordon Zolla

发明人： Tsung Yuan Chen ,  David Patrick Druist ,  Quang Le ,  Kim Y. Lee ,  Chun-Ming Wang ,  Howard Gordon Zolla

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49032

摘要： A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited; then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.

摘要翻译： 描述了制造具有梯形极片尖端的磁头的方法。 主极片的主体被沉积; 然后沉积用于极片尖端的一个或多个层。 床材料沉积在极片末端材料上。 在用于极片尖端的区域上的床材料中形成空隙。 空隙填充有耐离子碾磨材料，例如氧化铝，优选使用原子层沉积或原子层化学气相沉积。 除去过量的抗离子碾磨材料和床料。 结果是在极片尖端的区域上形成离子铣削掩模。 然后使用离子铣削去除极片末端层中的未掩模材料，并且在主极片上形成斜面极片末端，并且优选地形成斜面。

公开(公告)号：US07612964B2

公开(公告)日：2009-11-03

申请号：US11228783

申请日：2005-09-15

申请人： Daniel Wayne Bedell ,  Hieu Lam ,  Kim Y. Lee ,  Jyh-Shuey Lo

发明人： Daniel Wayne Bedell ,  Hieu Lam ,  Kim Y. Lee ,  Jyh-Shuey Lo

IPC分类号： G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/3163

摘要： A magnetic write head and method of manufacture thereof that has a first pole structure having a notched structure configured with a steep shoulder portion and a narrow vertical notch portion extending from the top of the steep shoulder portion. The write head also includes a second pole structure (P2) that has a very narrow width (track width) and that is self aligned with the narrow vertical notch structure of the first pole structure. The write head provides excellent magnetic properties including a very narrow track width and minimal side writing, while avoiding magnetic saturation of the poles.

摘要翻译： 一种磁写头及其制造方法，其具有第一极结构，其具有构造为具有陡峭肩部的切口结构和从陡峭肩部的顶部延伸的窄垂直切口部。 写头还包括具有非常窄的宽度（轨道宽度）并且与第一极结构的窄垂直切口结构自对准的第二极结构（P2）。 写头提供优异的磁性，包括非常窄的轨道宽度和最小的侧面写入，同时避免极点的磁饱和。

公开(公告)号：US07396636B2

公开(公告)日：2008-07-08

申请号：US10928038

申请日：2004-08-27

申请人： Cherngye Hwang ,  Kim Y. Lee ,  Dennis R. McKean ,  Gary Suzuki

发明人： Cherngye Hwang ,  Kim Y. Lee ,  Dennis R. McKean ,  Gary Suzuki

IPC分类号： G03F7/00

CPC分类号： G11B5/6005 ,  G11B5/3163 ,  G11B5/3173

摘要： A method for creating segmented resist islands for photolithography on single sliders is disclosed. The method includes ramping the temperature of a number of single sliders, to a temperature that is below a proper softbake temperature. The single sliders reside in a divider and the single sliders and walls of the divider have a layer of resist deposited on them. Coarse lithography is then performed to remove the resist from above portions of the walls of the divider; and the temperature of the single sliders, the resist and the divider is then ramped to a proper softbake temperature.

摘要翻译： 公开了一种用于在单个滑块上创建用于光刻的分割的抗蚀岛的方法。 该方法包括将多个单个滑块的温度升高到低于适当的软烘烤温度的温度。 单个滑块位于分隔器中，分隔器的单个滑块和壁具有沉积在其上的抗蚀剂层。 然后进行粗光刻以从分隔器的壁的上部的部分去除抗蚀剂; 然后将单个滑块，抗蚀剂和分隔器的温度倾斜到适当的软烘烤温度。

公开(公告)号：US20080112090A1

公开(公告)日：2008-05-15

申请号：US11595186

申请日：2006-11-09

申请人： James Mac Freitag ,  David Eugene Heim ,  Kuok San Ho ,  Wipul Pemsiri Jayasekara ,  Kim Y. Lee ,  Tsann Lin ,  Jyh-Shuey Lo ,  Mustafa Michael Pinarbasi ,  Ching Hwa Tsang

发明人： James Mac Freitag ,  David Eugene Heim ,  Kuok San Ho ,  Wipul Pemsiri Jayasekara ,  Kim Y. Lee ,  Tsann Lin ,  Jyh-Shuey Lo ,  Mustafa Michael Pinarbasi ,  Ching Hwa Tsang

IPC分类号： G11B5/33

CPC分类号： G11B5/3932 ,  B82Y10/00 ,  B82Y25/00 ,  G11B2005/3996

摘要： A lead overlay design of a magnetic sensor is described with sensor and free layer dimensions such that the free layer is stabilized by the large demagnetization field due to the shape anisotropy. In one embodiment the giant magnetoresistive (GMR) effect under the leads is destroyed by removing the antiferromagnetic (AFM) and pinned layers above the free layer. The overlaid lead pads are deposited on the exposed spacer layer at the sides of the mask that defines the active region. In other embodiment a layer of electrically insulating material is deposited over the sensor to encapsulate it and thereby insulate it from contact with the hardbias structures. Various embodiments with self-aligned leads are also described. In a variation of the encapsulation embodiment, the insulating material is also deposited under the lead pads so the electrical current is channeled through the active region of the sensor and sidewall deposited lead pads.

摘要翻译： 用传感器和自由层尺寸描述磁传感器的引线覆盖设计，使得由于形状各向异性，自由层由大的退磁场稳定。 在一个实施例中，引线下的巨磁阻（GMR）效应通过去除自由层上方的反铁磁（AFM）和固定层而被破坏。 覆盖的引线焊盘沉积在限定有源区的掩模侧面上的暴露间隔层上。 在另一个实施例中，电绝缘材料层沉积在传感器上以将其封装并由此使其与硬质合金结构的接触绝缘。 还描述了具有自对准引线的各种实施例。 在封装实施例的变型中，绝缘材料也沉积在引线焊盘下方，使得电流通过传感器的有源区域和侧壁沉积的引线焊盘。

公开(公告)号：US07344330B2

公开(公告)日：2008-03-18

申请号：US10815447

申请日：2004-03-31

申请人： David Eugene Heim ,  Kim Y. Lee ,  Tsann Lin ,  Jih-Shiuan Luo

发明人： David Eugene Heim ,  Kim Y. Lee ,  Tsann Lin ,  Jih-Shiuan Luo

IPC分类号： G11B5/127

CPC分类号： B82Y10/00 ,  G11B5/3163 ,  Y10T29/49048 ,  Y10T403/58

摘要： A method of constructing a small trackwidth magnetorsesistive sensor by defining a trench between first and second hard bias layers and depositing the sensor into the trench.

摘要翻译： 一种通过在第一和第二硬偏置层之间限定沟槽并将传感器沉积到沟槽中来构造小轨道磁体主动传感器的方法。

公开(公告)号：US20080000076A1

公开(公告)日：2008-01-03

申请号：US11478787

申请日：2006-06-29

申请人： Kim Y. Lee ,  Jyh-Shury Lo

发明人： Kim Y. Lee ,  Jyh-Shury Lo

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/3163 ,  Y10T29/49021 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method is presented for fabricating a write pole for a magnetic recording head, wherein a photoresist layer is formed on a wafer stack. A target P2 pole configuration is provided, and a photomask having a pattern is produced, and the pattern is transferred to the photoresist to create a patterned photoresist having at least one photoresist channel. A layer of photoresist channel shrinking film used to produce a reduced width photoresist channel in an expanded photoresist. A P2 pole tip is formed within the reduced width photoresist channel. The P2 pole tip is then compared to the target P2 pole configuration to identify distortions, which are then used to produce a distortion-corrected photomask. The distortion-corrected photomask is then used to produce a distortion-corrected expanded photoresist, which is then used to produce a distortion-corrected P2 pole tip.

摘要翻译： 提出了一种用于制造用于磁记录头的写极的方法，其中在晶片叠层上形成光致抗蚀剂层。 提供目标P 2极结构，并且产生具有图案的光掩模，并且将图案转移到光致抗蚀剂以产生具有至少一个光致抗蚀剂通道的图案化光致抗蚀剂。 用于在扩展的光致抗蚀剂中产生减小宽度的光致抗蚀剂通道的光致抗蚀剂通道收缩膜层。 P 2极尖端形成在减小宽度的光致抗蚀剂通道内。 然后将P 2极尖与目标P 2极配置进行比较，以识别失真，然后将其用于产生失真校正光掩模。 然后使用失真校正的光掩模来产生失真校正的扩展光致抗蚀剂，然后将其用于产生失真校正的P 2极端。

公开(公告)号：US07194796B2

公开(公告)日：2007-03-27

申请号：US10617908

申请日：2003-07-10

申请人： Kim Y. Lee ,  Jih-Shiuan Luo

发明人： Kim Y. Lee ,  Jih-Shiuan Luo

IPC分类号： G11B5/127 ,  G11B5/33 ,  B44C1/22

CPC分类号： G11B5/3912 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T29/49147

摘要： A magnetic head and method for forming the same. Leads are added to a wafer stack having a free layer, a bias layer, and a spacer layer between the free layer and bias layer. A gap is formed between the leads. A protective layer is added to the wafer stack such that the gap is covered, as well as facing ends of the leads. Material is removed from at least one side area of the wafer stack using the protective layer as a mask. The protective layer is removed. A portion of the bias layer below the gap is processed for reducing a magnetic moment of the bias layer in the portion of the bias layer below the gap for forming a sensor in which magnetic moments of end portions of the free layer are pinned by magnetic moments of end portions of the bias layer, and preferably antiparallel thereto.

摘要翻译： 一种磁头及其形成方法。 将引线添加到在自由层和偏置层之间具有自由层，偏置层和间隔层的晶片堆叠中。 导线之间形成间隙。 将保护层添加到晶片堆叠中，使得间隙被覆盖，以及面向引线的端部。 使用保护层作为掩模，从晶片堆叠的至少一个侧面区域去除材料。 保护层被去除。 对间隙下方的偏压层的一部分进行处理，以减少偏压层在间隙下方的部分中的偏置层的磁矩，以形成传感器，其中自由层的端部的磁矩由磁矩固定 的偏置层的端部，优选地与其平行。