公开(公告)号：US08561470B2

公开(公告)日：2013-10-22

申请号：US13084850

申请日：2011-04-12

申请人： Richard Martin ,  Robert Gardner ,  Adam Kane ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Richard Martin ,  Robert Gardner ,  Adam Kane

IPC分类号： G01L9/06

CPC分类号： G01L7/022 ,  G01L9/06

摘要： A single pressure sensing capsule has a reference pressure ported to the rear side of a silicon sensing die. The front side of the silicon sensing die receives a main pressure at another port. The difference between the main and reference pressure results in the sensor providing an differential pressure output. The reference pressure or main pressure may be derived from a pump pressure which is being monitored. The pump pressure output is subjected to a pump ripple or a sinusoidally varying pressure. In order to compensate for pump ripple, a coiled tube or an adjustable dampening chamber comprising a spiral inlet tube and a volume cavity can be used. The tube length is selected to suppress the pump ripple as applied to the sensor die. In this manner, the pump ripple cannot cause resonance which would result in pressure amplification and which pressure amplification would destroy the sensor.

摘要翻译： 单个压力感测胶囊具有移动到硅感测裸片的后侧的参考压力。 硅感测模具的前侧在另一端口处接收主压力。 主压力和参考压力之间的差异导致传感器提供差压输出。 参考压力或主要压力可以从正被监控的泵压力导出。 泵压力输出受到泵波动或正弦变化的压力。 为了补偿泵浦波动，可以使用包括螺旋入口管和体积腔的盘管或可调节的减振室。 选择管长度以抑制应用于传感器管芯的泵波动。 以这种方式，泵波动不会引起共振，这将导致压力放大，哪个压力放大会破坏传感器。

公开(公告)号：US20110239772A1

公开(公告)日：2011-10-06

申请号：US12751482

申请日：2010-03-31

申请人： Anthony D. Kurtz ,  Alexander A. Ned ,  Sorin Stefanescu ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Alexander A. Ned ,  Sorin Stefanescu ,  Nora Kurtz

IPC分类号： G01L9/06 ,  B23P11/00

CPC分类号： G01L9/0055 ,  G01L13/025 ,  G01L15/00 ,  G01L19/04 ,  Y10T29/49002

摘要： A dual diaphragm pressure transducer, or sensor, with compensation for non-pressure effects is disclosed. The pressure sensor can include two pressure transducers located on separate portions of a chip. The first pressure transducer can be a differential pressure transducer, which produces a signal proportional to one or more applied pressures and includes other non-pressure effects. The second pressure transducer can be sealed in a hermetic chamber and thus can produce a signal proportional only to non-pressure effects. The signals can be combined to produce a signal proportional to the applied pressures with no non-pressure effects. The first and second pressure transducers can be physically and/or electrically isolated to improve sealing between the two pressure transducers and prevent pressure leaks therebetween.

摘要翻译： 公开了一种具有非压力效应补偿的双隔膜压力传感器或传感器。 压力传感器可以包括位于芯片的分开部分上的两个压力传感器。 第一压力传感器可以是差压传感器，其产生与一个或多个施加压力成比例的信号，并且包括其它非压力效应。 第二压力传感器可以密封在密封室中，因此可以产生仅与非压力效应成比例的信号。 信号可以组合以产生与所施加的压力成比例的信号，而没有非压力效应。 第一和第二压力传感器可以物理和/或电隔离以改善两个压力传感器之间的密封并防止它们之间的压力泄漏。

公开(公告)号：US20110169497A1

公开(公告)日：2011-07-14

申请号：US13031549

申请日：2011-02-21

申请人： Anthony D. Kurtz ,  Nora Kurtz ,  Wolf Landmann

发明人： Anthony D. Kurtz ,  Nora Kurtz ,  Wolf Landmann

IPC分类号： G01R31/08

CPC分类号： G01L9/06 ,  G01L27/007

摘要： Disclosed herein is an electronic switch that comprises a pressure sensitive bridge array adapted to monitor pressure and activate an indicator when the monitored pressure exceeds a predetermined value indicative of a dangerous condition. The electronic switch further comprises a monitoring circuit adapted to test the overall operability of the pressure sensitive bridge array and its accompanying electronics control circuitry.

摘要翻译： 本文公开了一种电子开关，其包括压敏桥阵列，其适于在监视的压力超过表示危险状况的预定值时监测压力并激活指示器。 电子开关还包括适于测试压敏桥阵列及其伴随的电子控制电路的整体可操作性的监视电路。

公开(公告)号：US20100251825A1

公开(公告)日：2010-10-07

申请号：US12819958

申请日：2010-06-21

申请人： Anthony D. Kurtz ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Nora Kurtz

IPC分类号： G01L9/06

CPC分类号： G01L19/0645 ,  G01L15/00 ,  G01L19/0038

摘要： A combined wet-wet differential transducer and a gage pressure transducer located in the same housing, comprising a semiconductor chip which comprises a gage sensor chip on one section and a differential sensor chip on a second section. Each sensor chip has a Wheatstone bridge comprising piezoresistors and is responsive to an applied pressure. The gage chip and the differential chip are placed in a header having a front section and a back section adapted to receive a first and second pressure, respectively. The sensors are in communication with first and second pressure ports such that the absolute sensor provides an output indicative of a pressure applied to a first port and the differential sensor provides an output indicative of the pressure difference between the first and second pressure ports.

摘要翻译： 一种组合的湿湿差压换能器和位于同一壳体中的量规压力传感器，包括半导体芯片，其包括一个部分上的量规传感器芯片和在第二部分上的差分传感器芯片。 每个传感器芯片具有包括压敏电阻器的惠斯通电桥，并且响应所施加的压力。 计量芯片和差分芯片被放置在具有分别适于接收第一和第二压力的前部分和后部部分的集管中。 传感器与第一和第二压力端口连通，使得绝对传感器提供指示施加到第一端口的压力的输出，并且差动传感器提供指示第一和第二压力端口之间的压力差的输出。

公开(公告)号：US09127993B2

公开(公告)日：2015-09-08

申请号：US14076835

申请日：2013-11-11

申请人： Nora Kurtz ,  KULITE SEMICONDUCTOR PRODUCTS, INC.

发明人： Anthony D. Kurtz ,  Alexander A. Ned ,  Joseph R. VanDeWeert

IPC分类号： G01L19/04 ,  G01L9/00 ,  G01L15/00 ,  G01M9/06 ,  G01L9/06

CPC分类号： G01L9/00 ,  G01L9/065 ,  G01L15/00 ,  G01M9/06

摘要： A method, device and system are provided for measuring multiple pressures under severe conditions. In one embodiment, a method comprises receiving, by a processor, from a first sensor, a first pressure signal; receiving, by the processor, from a second sensor, a second pressure signal; receiving, by the processor, from a first memory, a first correction coefficient for the first sensor; receiving, by the processor, from a second memory, a second correction coefficient for the second sensor; modifying, by the processor, the first pressure signal using the first correction coefficient to generate a first corrected pressure signal; modifying, by the processor, the second pressure signal using the second correction coefficient to generate a second corrected pressure signal; and outputting, by the processor, the first corrected pressure signal and the second corrected pressure signal.

摘要翻译： 提供了一种用于在恶劣条件下测量多种压力的方法，装置和系统。 在一个实施例中，一种方法包括由处理器从第一传感器接收第一压力信号; 由处理器从第二传感器接收第二压力信号; 由处理器从第一存储器接收第一传感器的第一校正系数; 由所述处理器从第二存储器接收所述第二传感器的第二校正系数; 由所述处理器修改所述第一压力信号，使用所述第一校正系数来生成第一校正压力信号; 通过处理器修改第二压力信号，使用第二校正系数来产生第二校正压力信号; 并且由处理器输出第一校正压力信号和第二校正压力信号。

公开(公告)号：US08988184B2

公开(公告)日：2015-03-24

申请号：US13936915

申请日：2013-07-08

申请人： Nora Kurtz

发明人： Anthony D. Kurtz ,  Alexander A. Ned

IPC分类号： G01L1/22

CPC分类号： G01L1/18 ,  C03C27/044 ,  G01L1/2287 ,  G01L9/0042 ,  G01L9/0054 ,  G01L19/0069 ,  G01L19/0084 ,  Y10T156/10

摘要： A piezoresistive sensor device and a method for making a piezoresistive device are disclosed. The sensor device comprises a silicon wafer having piezoresistive elements and contacts in electrical communication with the elements. The sensor device further comprises a contact glass coupled to the silicon wafer and having apertures aligned with the contacts. The sensor device also comprises a non-conductive frit for mounting the contact glass to a header glass, and a conductive non-lead glass frit disposed in the apertures and in electrical communication with the contacts. The method for making a piezoresistive sensor device, comprises bonding a contact glass to a silicon wafer such that apertures in the glass line up with contacts on the wafer, and filling the apertures with a non-lead glass frit such that the frit is in electrical communication with the contacts. The use of a lead free glass frit prevents catastrophic failure of the piezoresistive sensor and associated transducer in ultra high temperature applications.

摘要翻译： 公开了压阻传感器装置和制造压阻器件的方法。 传感器装置包括具有压阻元件和与元件电连通的触点的硅晶片。 所述传感器装置还包括接触玻璃，所述接触玻璃联接到所述硅晶片并且具有与所述触点对准的孔。 传感器装置还包括用于将接触玻璃安装到集管玻璃的非导电玻璃料，以及设置在孔中并与触头电连通的导电非铅玻璃料。 用于制造压阻传感器装置的方法包括将接触玻璃接合到硅晶片，使得玻璃中的孔与晶片上的触点对齐，并用非铅玻璃料填充孔，使得玻璃料处于电 与联系人沟通。 使用无铅玻璃料防止压敏传感器和相关传感器在超高温应用中的灾难性故障。

公开(公告)号：US08723635B2

公开(公告)日：2014-05-13

申请号：US13953465

申请日：2013-07-29

申请人： Nora Kurtz

发明人： Anthony D. Kurtz

IPC分类号： G01L1/22

CPC分类号： G01L9/04 ,  G01L9/0055 ,  G01L9/06

摘要： A pressure transducer comprising a corrosion resistant metal diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a piezoresistive silicon-on-insulator sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate.

摘要翻译： 一种压力传感器，包括具有有源区域的耐腐蚀金属隔膜，并且当向隔膜施加力时能够偏转; 以及设置在单个衬底上的压电硅绝缘体上传感器阵列，所述衬底固定到所述隔膜上，所述传感器阵列在第一位置处和所述有源区域上具有靠近所述隔膜的边缘的第一外部传感器，所述第二外部传感器阵列 在第二位置和有源区域附近的隔膜的边缘附近的传感器以及基本上覆盖隔膜的中心的至少一个中心传感器，所述传感器以桥式阵列连接以提供与施加到所述隔膜的力成比例的输出电压 隔膜 传感器与基板介电隔离。

公开(公告)号：US20140123771A1

公开(公告)日：2014-05-08

申请号：US14157603

申请日：2014-01-17

申请人： Nora Kurtz

发明人： Alexander A. Ned ,  Anthony D. Kurtz

IPC分类号： G01L1/18

CPC分类号： G01L1/18 ,  C03C27/044 ,  G01L1/2287 ,  G01L9/0042 ,  G01L9/0054 ,  G01L19/0069 ,  G01L19/0084 ,  Y10T156/10

摘要： A piezoresistive sensor device and a method for making a piezoresistive device are disclosed. In one example, a method may comprise receiving, by a sensor device having a contact, a pressure; measuring, by the sensor device, the pressure to generate a pressure signal; outputting, by the sensor device, to the contact, the pressure signal; and receiving, by a header pin, from the contact, the pressure signal, wherein the header pin and the contact are electrically coupled using a conductive, non-lead containing frit and are aligned using a contact cover that is coupled to the sensor device using a non-conductive, non-lead containing frit.

摘要翻译： 公开了压阻传感器装置和制造压阻器件的方法。 在一个示例中，方法可以包括通过具有接触的传感器装置接收压力; 通过传感器装置测量产生压力信号的压力; 由传感器装置输出压力信号; 以及通过头部接头从所述接触件接收所述压力信号，其中所述头部销和所述接触器使用导电的非引线含有的玻璃料进行电耦合，并且使用接触盖对准，所述接触盖使用接触盖与所述传感器装置连接，所述接触盖使用 不导电，不含铅的玻璃料。

公开(公告)号：US20140102209A1

公开(公告)日：2014-04-17

申请号：US14133632

申请日：2013-12-18

申请人： Nora Kurtz

发明人： Anthony D. Kurtz ,  Boaz Kochman ,  Adam Hurst

IPC分类号： G01L19/00

CPC分类号： G01L19/00 ,  G01L9/0052 ,  G01L15/00 ,  G01L19/0609

摘要： This disclosure provides example methods, devices and systems associated with filter structures employed with sensors. In one embodiment, a method comprises receiving, at a first filter having a plurality of pores, a pressure, wherein the pressure includes a static pressure component and a dynamic pressure component; filtering, by the first filter, at least a portion of the dynamic pressure component of the pressure; outputting, from the first filter, a filtered pressure; and wherein the filtered pressure is used to determine the dynamic pressure component.

摘要翻译： 本公开提供与传感器一起使用的过滤器结构相关联的示例性方法，设备和系统。 在一个实施例中，一种方法包括在具有多个孔的第一过滤器处接收压力，其中所述压力包括静压分量和动压分量; 通过第一过滤器过滤压力的动压分量的至少一部分; 从第一过滤器输出过滤压力; 并且其中使用过滤的压力来确定动态压力分量。

公开(公告)号：US08497759B2

公开(公告)日：2013-07-30

申请号：US12731427

申请日：2010-03-25

申请人： Alexander Ned ,  Vikram Patil ,  Joseph VanDeWeert ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Alexander Ned ,  Vikram Patil ,  Joseph VanDeWeert

IPC分类号： H01C3/04

CPC分类号： G01K7/183

摘要： The RTD device of the present invention is comprised of a semiconductor substrate and a substantially thin conductive metal layer disposed upon the semiconductor substrate, wherein the conductive metal has a substantially linear temperature-resistance relationship. The conductive layer is etched into a convoluted RTD pattern, which consequently increases the overall resistance and minimizes the overall mass of the RTD assembly. A contact glass cover and a conductive metal-glass frit are placed over the RTD assembly to hermetically seal the RTD. The resultant structure can be “upside-down” mounted onto a header or a flat shim so that the bottom surface of the semiconductor substrate is exposed to the external environment, thus shielding the RTD from external forces. The resultant structure is a low mass, highly conductive, leadless, and hermetically sealed RTD that accurately measures the temperature of liquids and gases and maintains fast response time in high temperatures and harsh environments.

摘要翻译： 本发明的RTD器件包括半导体衬底和设置在半导体衬底上的基本上薄的导电金属层，其中导电金属具有基本上线性的耐温性关系。 导电层被蚀刻成卷积的RTD图案，因此增加了整体电阻并使RTD组件的整体质量最小化。 将接触玻璃盖和导电金属玻璃料放置在RTD组件上以气密地密封RTD。 所得到的结构可以“倒置”安装在集管或平面垫片上，使得半导体衬底的底表面暴露于外部环境，从而屏蔽RTD免受外力的影响。 所得结构是低质量，高导电性，无引线和密封的RTD，可精确测量液体和气体的温度，并在高温和恶劣环境中保持快速响应时间。