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公开(公告)号:US07248340B2
公开(公告)日:2007-07-24
申请号:US10874690
申请日:2004-06-24
申请人: Erik Leonardus Ham , Robert Gabriël Maria Lansbergen , Ellart Alexander Meijer , Hendricus Johannes Maria Meijer , Hans Meiling , Bastiaan Matthias Mertens , Johannes Hubertus Josephina Moors , Gert-Jan Heerens
发明人: Erik Leonardus Ham , Robert Gabriël Maria Lansbergen , Ellart Alexander Meijer , Hendricus Johannes Maria Meijer , Hans Meiling , Bastiaan Matthias Mertens , Johannes Hubertus Josephina Moors , Gert-Jan Heerens
CPC分类号: G03B27/52 , G03F7/70741
摘要: A transport box for transporting a lithographic patterning device and a lithographic apparatus adapted to cooperate with the transport box are presented. The transport box is provided with a container part having an inner space with a storing position for storing the patterning device and an opening for the transfer of the patterning device. The box also includes a closure part for closing the opening, and a channel system for evacuating and/or feeding gasses from/to the inner space the box.
摘要翻译: 提出了用于传送平版印刷图案形成装置的传送箱和适于与传送箱配合的光刻设备。 输送箱设置有具有用于存储图案形成装置的存储位置的内部空间和用于传送图案形成装置的开口的容器部分。 该箱还包括用于封闭开口的封闭部分,以及用于将气体从箱体内部空间排出和/或送入箱体的内部空间的通道系统。
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公开(公告)号:US07151589B2
公开(公告)日:2006-12-19
申请号:US10972755
申请日:2004-10-26
申请人: Erik Leonardus Ham , Gert-Jan Heerens , Robert Gabriël Maria Lansbergen , Ellard Alexander Meijer , Hendricus Johannes Maria Meijer , Hans Meiling , Bastiaan Matthias Mertens , Johannes Hubertus Josephina Moors
发明人: Erik Leonardus Ham , Gert-Jan Heerens , Robert Gabriël Maria Lansbergen , Ellard Alexander Meijer , Hendricus Johannes Maria Meijer , Hans Meiling , Bastiaan Matthias Mertens , Johannes Hubertus Josephina Moors
CPC分类号: G03B27/52 , G03F7/70741
摘要: According to an embodiment, a box for transporting a lithographic patterning device is arranged to cooperate with a lithographic apparatus. The transport box may be provided with a container part having an inner space with a storing position for storing the patterning device and an opening for the transfer of the patterning device. Prior to transfer of the patterning device from the inner space to the apparatus, the inner space is pressurized. The box may also comprise a closure part for closing the opening, and/or a channel system for evacuating and/or feeding gasses from/to the inner space of the box. Other embodiments include a lithographic apparatus comprising and/or configured to cooperate with such a box.
摘要翻译: 根据实施例,用于传送平版印刷图案形成装置的盒被布置成与光刻设备配合。 运输箱可以设置有具有内部空间的容器部分,该内部空间具有用于存储图案形成装置的存储位置和用于图案形成装置的传送的开口。 在将图案形成装置从内部空间传送到装置之前,内部空间被加压。 箱子还可以包括用于关闭开口的封闭部分和/或用于将气体从箱体的内部空间排出和/或进气的通道系统。 其他实施例包括包括和/或配置为与这种盒配合的光刻设备。
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43.
公开(公告)号:US07119886B2
公开(公告)日:2006-10-10
申请号:US10833340
申请日:2004-04-28
申请人: Martinus Hendrikus Antonius Leenders , Hendricus Johannes Maria Meijer , Engelbertus Antonius Fransiscus Van Der Pasch , Michael Jozef Mathijs Renkens , Theo Anjes Maria Ruijl
发明人: Martinus Hendrikus Antonius Leenders , Hendricus Johannes Maria Meijer , Engelbertus Antonius Fransiscus Van Der Pasch , Michael Jozef Mathijs Renkens , Theo Anjes Maria Ruijl
CPC分类号: G03F7/70258 , G03F7/7085
摘要: In a lithographic projection apparatus, a measuring system configured to measure the position of the projection system relative to a reference frame includes sensors rigidly mounted in relation to counterpart sensors of a measuring system measuring the substrate table position. An angular encoder which sends light from a target down two optical paths having opposite sensitivities to tilt is used to measure rotation of the projection system about its optical axis.
摘要翻译: 在光刻投影设备中,被配置为测量投影系统相对于参考框架的位置的测量系统包括相对于测量衬底台位置的测量系统的对应传感器刚性地安装的传感器。 使用角度编码器,其从目标向下发射具有相对于倾斜的灵敏度的两个光路的光,以测量投影系统绕其光轴的旋转。
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