Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
    41.
    发明申请
    Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method 有权
    基板输送装置及基板输送方法,曝光装置及曝光方法,装置的制造方法

    公开(公告)号:US20070110916A1

    公开(公告)日:2007-05-17

    申请号:US11652015

    申请日:2007-01-11

    IPC分类号: B05C13/02 B05C3/00 B01J19/08

    摘要: A lithographic projection apparatus includes a substrate table configured to hold a substrate, a projection system arranged to project a patterned beam of radiation onto the substrate, a liquid supply system configured to supply liquid to a space between the projection system and the substrate, and a residual liquid detector configured to detect liquid remaining on the substrate and/or the substrate table after an exposure is completed. A device manufacturing method includes projecting, using a projection system of a lithographic apparatus, a patterned beam of radiation through a liquid onto a substrate, the substrate being held by a substrate table, and, after the projecting is complete, detecting residual liquid on the substrate and/or the substrate table.

    摘要翻译: 光刻投影装置包括:被配置为保持基板的基板台;布置成将图案化的辐射束投射到基板上的投影系统;配置成将液体供应到投影系统和基板之间的空间的液体供应系统;以及 剩余液体检测器被配置为在曝光完成之后检测残留在基板和/或基板台上的液体。 一种器件制造方法包括使用光刻设备的投影系统将图案化的辐射束通过液体投影到衬底上,衬底由衬底台保持,并且在突出完成之后,检测残留液体 衬底和/或衬底台。

    Image forming apparatus
    48.
    发明授权
    Image forming apparatus 有权
    图像形成装置

    公开(公告)号:US08660453B2

    公开(公告)日:2014-02-25

    申请号:US12955334

    申请日:2010-11-29

    IPC分类号: G03G15/00

    摘要: An image forming apparatus includes an image forming apparatus main body, and a replaceable part detachably attached to the image forming apparatus main body and movable in attaching-and-detaching direction to be attached to or detached from the image forming apparatus main body. The replaceable part includes a storage portion, the storage portion including a memory for storing information of the replaceable part and/or the image forming apparatus main body, and a first contact portion electrically connected to the memory. The image forming apparatus main body includes a second contact portion that electrically contacts the first contact portion. The first contact portion has an inclination at a predetermined angle with respect to the attaching-and-detaching direction.

    摘要翻译: 图像形成装置包括图像形成装置主体和可拆卸地附接到图像形成装置主体并且能够沿着安装和拆卸方向移动以便附接到图像形成装置主体或从图像形成装置主体拆卸的可更换部件。 可替换部分包括存储部分,存储部分包括用于存储可替换部件和/或图像形成装置主体的信息的存储器,以及电连接到存储器的第一接触部分。 图像形成装置主体包括与第一接触部分电接触的第二接触部分。 第一接触部分相对于安装和拆卸方向具有预定角度的倾斜度。

    Irradiating coil and magnetic resonance imaging apparatus using the same
    49.
    发明授权
    Irradiating coil and magnetic resonance imaging apparatus using the same 有权
    辐射线圈和使用其的磁共振成像装置

    公开(公告)号:US08358132B2

    公开(公告)日:2013-01-22

    申请号:US13231285

    申请日:2011-09-13

    IPC分类号: G01V3/00

    CPC分类号: G01R33/341

    摘要: An irradiating coil includes a first ring conductor located on a plane, a second ring conductor having a smaller diameter than a diameter of the first ring conductor and located substantially on the plane of the first ring conductor, a plurality of first line conductors connected the first ring conductor and to the second ring conductor, and an arrangement for making uniform a radio-frequency-pulse that is transmitted by the irradiating coil. The pulse uniforming arrangement includes a diverger which diverges a current flow of the first line conductors.

    摘要翻译: 辐射线圈包括位于平面上的第一环形导体,第二环形导体,其直径小于第一环形导体的直径,并且基本上位于第一环形导体的平面上;多个第一线路导体, 环形导体和第二环形导体,以及用于使由照射线圈透射的射频脉冲均匀的装置。 脉冲均匀装置包括分流器,其分流第一线路导体的电流。