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423 条记录 (耗时 0.032 秒)

    Laminated film for head applications
    41.
    发明申请
    Laminated film for head applications 有权
    用于头部应用的层压膜

    公开(公告)号：US20090009907A1

    公开(公告)日：2009-01-08

    申请号：US11825034

    申请日：2007-07-03

    申请人： Kunliang Zhang ,  Min Zheng ,  Min Li ,  Chen-Jung Chien ,  Cherng-Chyi Han

    发明人： Kunliang Zhang ,  Min Zheng ,  Min Li ,  Chen-Jung Chien ,  Cherng-Chyi Han

    IPC分类号： G11B5/127 ,  G11B5/147

    CPC分类号： G11B5/3116 ,  G11B5/1278

    摘要： A laminated main pole layer is disclosed in which a non-AFC scheme is used to break the magnetic coupling between adjacent high moment layers and reduce remanence in a hard axis direction while maintaining a high magnetic moment and achieving low values for Hch, Hce, and Hk. An amorphous material layer with a thickness of 3 to 20 Angstroms and made of an oxide, nitride, or oxynitride of one or more of Hf, Zr, Ta, Al, Mg, Zn, or Si is inserted between adjacent high moment stacks. The laminated structure also includes an alignment layer below each high moment layer within each stack. In one embodiment, a Ru coupling layer is inserted between two high moment layers in each stack to introduce an AFC scheme. An uppermost Ru layer is used as a CMP stop layer. A post annealing process may be employed to further reduce the anisotropy field (Hk).

    摘要翻译： 公开了一种层叠主极层，其中使用非AFC方案来破坏相邻的高力矩层之间的磁耦合，并且在保持高磁矩的同时降低硬轴方向的剩磁，并实现Hch，Hce和 Hk。 由Hf，Zr，Ta，Al，Mg，Zn或Si中的一种或多种的氧化物，氮化物或氧氮化物形成的厚度为3〜20埃的无定形材料层插入相邻的高强度叠层之间。 层叠结构还包括在每个堆叠内的每个高力矩层下面的对准层。 在一个实施例中，Ru耦合层插入每个堆叠中的两个高矩层之间以引入AFC方案。 使用最上层的Ru层作为CMP停止层。 可以采用后退火工艺来进一步降低各向异性场（Hk）。

    Perpendicular magnetic recording head with a bottom side shield
    42.
    发明授权
    Perpendicular magnetic recording head with a bottom side shield 有权
    垂直磁记录头带底侧屏蔽

    公开(公告)号：US08189295B2

    公开(公告)日：2012-05-29

    申请号：US13135276

    申请日：2011-06-30

    申请人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

    发明人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  Y10T29/49032 ,  Y10T29/49052

    摘要： A perpendicular magnetic recording (PMR) head has a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form a wedge-shaped trench in which the pole tip has been formed by a self-aligned plating process. A write gap layer and an upper shield is formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.

    摘要翻译： 垂直磁记录（PMR）头具有通过分离的一对底侧屏蔽横向屏蔽的极尖，并由上屏蔽从上方屏蔽。 底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。 底部屏蔽层和非磁性层形成楔形沟槽，其中极尖已经通过自对准电镀工艺形成。 写入间隙层和上屏蔽形成在侧屏蔽和极上。 所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。

    Perpendicular magnetic recording head with a bottom side shield
    43.
    发明申请
    Perpendicular magnetic recording head with a bottom side shield 有权
    垂直磁记录头带底侧屏蔽

    公开(公告)号：US20110261486A1

    公开(公告)日：2011-10-27

    申请号：US13135276

    申请日：2011-06-30

    申请人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

    发明人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

    IPC分类号： G11B5/187

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  Y10T29/49032 ,  Y10T29/49052

    摘要： A perpendicular magnetic recording (PMR) head has a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form a wedge-shaped trench in which the pole tip has been formed by a self-aligned plating process. A write gap layer and an upper shield is formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.

    摘要翻译： 垂直磁记录（PMR）头具有由分离的一对底侧屏蔽物侧向屏蔽的极尖，并由上屏蔽从上方屏蔽。 底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。 底部屏蔽层和非磁性层形成楔形沟槽，其中极尖已经通过自对准电镀工艺形成。 写入间隙层和上屏蔽形成在侧屏蔽和极上。 所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。

    Method to make a perpendicular magnetic recording head with a bottom side shield
    46.
    发明授权
    Method to make a perpendicular magnetic recording head with a bottom side shield 有权
    制造具有底侧屏蔽的垂直磁记录头的方法

    公开(公告)号：US07978431B2

    公开(公告)日：2011-07-12

    申请号：US11809346

    申请日：2007-05-31

    申请人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

    发明人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  Y10T29/49032 ,  Y10T29/49052

    摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form wedge-shaped trench in which the pole tip is formed by a self-aligned plating process. The wedge shape is formed by a RIE process using specific gases applied through a masking layer formed of material that has a slower etch rate than the non-magnetic material or the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a non-magnetic layer of alumina that is formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. A write gap layer and an upper shield is then formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.

    摘要翻译： 垂直磁记录（PMR）头被制造成具有通过分离的一对底侧屏蔽横向屏蔽的极尖，并由上屏蔽从上面屏蔽。 底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。 底部屏蔽层和非磁性层形成楔形沟槽，其中极尖通过自对准电镀工艺形成。 楔形形状通过RIE工艺形成，其使用通过由比非磁性材料或屏蔽材料具有较慢蚀刻速率的材料形成的掩模层施加的特定气体。 形成在NiFe的屏蔽层上并使用CH 3 OH，CO或NH 3的RIE气体或其组合的形成在氧化铝的非磁性层上的Ta，Ru / Ta，TaN或Ti的掩蔽层产生期望的结果 。 然后在侧屏和极上方形成写间隙层和上屏蔽。 所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。

    Method to make a perpendicular magnetic recording head with a side write shield
    48.
    发明申请
    Method to make a perpendicular magnetic recording head with a side write shield 有权
    制作具有侧面写入屏蔽层的垂直磁记录头的方法

    公开(公告)号：US20070177301A1

    公开(公告)日：2007-08-02

    申请号：US11345892

    申请日：2006-02-02

    申请人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Jiun-Ting Lee

    发明人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Jiun-Ting Lee

    IPC分类号： G11B5/147

    CPC分类号： G11B5/3163 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  Y10T29/49032 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of side shields and shielded from above by an upper shield. The side shields are formed by a RIE process using specific gases applied to a shield layer through a masking layer formed of material that has a slower etch rate than the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. The differential in etch rates maintains the opening dimension within the mask and allows the formation of a wedge-shaped trench within the shield layer that separates the layer into two shields. The pole tip is then plated within the trench and, being aligned by the trench, acquires the wedge-shaped cross-section of the trench. An upper shield is then formed above the side shields and pole.

    摘要翻译： 垂直磁记录（PMR）头被制造成具有通过分离的一对侧屏蔽横向屏蔽的极尖并且被上屏蔽从上面屏蔽。 侧面屏蔽是通过RIE工艺形成的，其使用通过掩模层施加到屏蔽层上的特定气体，该屏蔽层由具有比屏蔽材料更慢的蚀刻速率的材料形成。 在NiFe的屏蔽层上形成的Ta，Ru / Ta，TaN或Ti的掩蔽层，并使用CH 3 3 OH，CO或NH 3的RIE气体或它们的 组合，产生所需的结果。 蚀刻速率的差异保持了掩模内的开口尺寸，并且允许在屏蔽层内形成将该层分成两个屏蔽层的楔形沟槽。 然后将磁极尖端电镀在沟槽内，并且通过沟槽对准，获得沟槽的楔形横截面。 然后在侧屏和极上方形成上屏蔽。