Semiconductor device fabrication method and semiconductor device
    41.
    发明授权
    Semiconductor device fabrication method and semiconductor device 有权
    半导体器件制造方法和半导体器件

    公开(公告)号:US07208423B2

    公开(公告)日:2007-04-24

    申请号:US10107298

    申请日:2002-03-28

    IPC分类号: H01L21/302 G03C5/00 B44C1/22

    摘要: A resist pattern (5) is formed in a dimension of a limitation of an exposure resolution over a hard mask material film (4) over a work film (3). The material film (4) is processed using the resist pattern (5) as a mask. A hard mask pattern (6) is thereby formed. Thereby a resist pattern (7), over a non-selected region (6b), having an opening (7a) through which a selection region (6a) in the mask pattern is exposed is formed. Only the mask pattern (6a) exposed through the opening (7a) is slimmed by performing a selection etching, the work film (3) is etched by using the mask pattern (6). A work film pattern (8) is thereby formed, which include a wide pattern section (8a) of a dimension width of the limitation of the exposure resolution and a slimmed pattern section (8a) of a dimension that is not more than the limitation of the exposure resolution.

    摘要翻译: 在工作薄膜(3)上的硬掩模材料膜(4)上的曝光分辨率的限制的尺寸形成抗蚀剂图案(5)。 使用抗蚀剂图案(5)作为掩模来处理材料膜(4)。 由此形成硬掩模图案(6)。 由此,在非选择区域(6b)上形成具有开口(7a)的抗蚀剂图案(7),掩模图案中的选择区域(6a)通过该开口暴露。 仅通过开口(7a)暴露的掩模图案(6a)通过进行选择蚀刻而变薄,通过使用掩模图案(6)蚀刻工作膜(3)。 由此形成工作胶片图案(8),其包括具有限制曝光分辨率的尺寸宽度的宽图案部分(8a)和尺寸不大于该尺寸的尺寸的纤薄图案部分(8a) 曝光分辨率的限制。

    Constant voltage control device
    42.
    发明申请
    Constant voltage control device 失效
    恒压控制装置

    公开(公告)号:US20070057657A1

    公开(公告)日:2007-03-15

    申请号:US11331017

    申请日:2006-01-13

    IPC分类号: G05F1/00

    摘要: A first output voltage Vcc is obtained via a first switching element from an external power supply, and a second output voltage Vme via a second switching element cascade-connected to the first switching element. The first switching element has a base current continuously controlled by a first comparator/amplifier to maintain the voltage Vcc at a predetermined value. The second switching element has a base current continuously controlled by a second comparator/amplifier to maintain the voltage Vme at a predetermined value. A third switching element connected in parallel to the first switching element and controlled by a duty-factor control circuit makes a bypass power supply to maintain a current flowing through the first switching element not more than a predetermined value. Thus, a constant voltage control device obtaining two types of stabilized voltages from external power supply of large voltage variation can reduce power consumption and improve voltage control accuracy.

    摘要翻译: 经由第一开关元件从外部电源获得第一输出电压Vcc,并且经由与第一开关元件级联连接的第二开关元件获得第二输出电压Vme。 第一开关元件具有由第一比较器/放大器连续控制的基极电流,以将电压Vcc保持在预定值。 第二开关元件具有由第二比较器/放大器连续控制的基极电流,以将电压Vme保持在预定值。 与第一开关元件并联并由占空比控制电路控制的第三开关元件使得旁路电源将流过第一开关元件的电流维持在不超过预定值。 因此,从具有大电压变化的外部电源获得两种类型的稳定电压的恒压控制装置可以降低功耗并提高电压控制精度。

    Pattern verification method, program thereof, and manufacturing method of semiconductor device
    43.
    发明申请
    Pattern verification method, program thereof, and manufacturing method of semiconductor device 审中-公开
    模式验证方法,程序以及半导体器件的制造方法

    公开(公告)号:US20070050741A1

    公开(公告)日:2007-03-01

    申请号:US11505917

    申请日:2006-08-18

    IPC分类号: G06F17/50

    CPC分类号: G03F1/36

    摘要: A verification method of an integrated circuit pattern includes extracting a pattern which is not greater than a preset pattern size, extracting a pattern edge as a target of lithography simulation from the extracted pattern, and performing the lithography simulation on the extracted pattern edge to verify the integrated circuit pattern.

    摘要翻译: 集成电路图案的验证方法包括提取不大于预设图案尺寸的图案,从提取的图案中提取作为光刻仿真的目标的图案边缘,以及对提取的图案边缘进行光刻模拟以验证 集成电路图案。

    Fabrication method of a nonvolatile semiconductor memory
    46.
    发明授权
    Fabrication method of a nonvolatile semiconductor memory 有权
    非易失性半导体存储器的制造方法

    公开(公告)号:US07141474B2

    公开(公告)日:2006-11-28

    申请号:US11008531

    申请日:2004-12-10

    IPC分类号: H01L21/336

    摘要: A method of fabricating a nonvolatile semiconductor memory including the steps of: sequentially forming a gate insulating layer and a first conductive layer of a floating gate on a semiconductor substrate; depositing an inter-gate insulating layer; forming an opening in a part of the inter-gate insulating layer; depositing a control gate electrode on the inter-gate insulating layer and an exposed portion of the first conductive layer by the opening; and forming the gate electrodes of the memory cell transistors and the gate electrodes of the select transistors by utilizing the etching processes of the control gate electrode, the inter-gate insulating layer and the first conductive layer, wherein the select transistors include at least a part of the exposed portion of the first conductive layer.

    摘要翻译: 一种制造非易失性半导体存储器的方法,包括以下步骤:在半导体衬底上依次形成栅极绝缘层和浮置栅极的第一导电层; 沉积栅极间绝缘层; 在所述栅极绝缘层的一部分中形成开口; 通过所述开口在所述栅极间绝缘层上沉积控制栅极电极和所述第一导电层的暴露部分; 以及通过利用所述控制栅电极,所述栅极间绝缘层和所述第一导电层的蚀刻工艺,形成所述存储单元晶体管的栅电极和所述选择晶体管的栅电极,其中所述选择晶体管至少包括一部分 的第一导电层的暴露部分。

    Electrophotographic image forming apparatus
    47.
    发明申请
    Electrophotographic image forming apparatus 有权
    电子照相成像设备

    公开(公告)号:US20060233560A1

    公开(公告)日:2006-10-19

    申请号:US11398726

    申请日:2006-04-06

    IPC分类号: G03G15/08

    摘要: An image forming apparatus includes an image bearing member on which an electrostatic latent image is capable of being formed; a developer accommodating container for accommodating a developer for developing the electrostatic latent image; a detecting device for detecting a remaining amount of the developer in the developer accommodating container, wherein the detecting device detects the remaining amount during a period in which no image forming operation is performed; a developer feeding member for feeding and stirring the developer in the developer accommodating container, the developer stirring member being rotatable at a speed which is lower during detection of the remaining amount than when an image forming operation is performed, wherein the detecting device detects first, second and third developer remaining amounts in first, second and third remaining amount detecting periods, respectively, in the order named, and wherein an interval between the second detection period and the third detection period is changed on the basis of the first and second remaining amounts.

    摘要翻译: 图像形成装置包括能够形成静电潜像的图像承载部件; 用于容纳用于显影静电潜像的显影剂的显影剂容纳容器; 用于检测显影剂容纳容器中的显影剂剩余量的检测装置,其中检测装置在不执行图像形成操作的时段期间检测剩余量; 用于在显影剂容纳容器中供给和搅拌显影剂的显影剂供给构件,显影剂搅拌构件可以在检测剩余量时比在执行图像形成操作时低的速度旋转,其中检测装置首先检测, 第二和第三显影剂剩余量分别按照所述的顺序分配在第一,第二和第三剩余量检测周期中,并且其中基于第一和第二剩余量改变第二检测周期和第三检测周期之间的间隔 。

    Process cartridge and electrophotographic image forming apparatus
    49.
    发明授权
    Process cartridge and electrophotographic image forming apparatus 有权
    处理盒和电子照相成像设备

    公开(公告)号:US07058337B2

    公开(公告)日:2006-06-06

    申请号:US10840263

    申请日:2004-05-07

    IPC分类号: G03G21/18

    摘要: A process cartridge is detachably mountable to a main assembly of an electrophotographic image forming apparatus that includes a cam movable between first and second positions. The cartridge includes an electrophotographic photosensitive drum, a developing roller developing an electrostatic latent image formed on the drum, a first frame for supporting the drum, a second frame for supporting the roller and connected with the first frame for relative rotation about a shaft disposed downstream of the roller with respect to a cartridge mounting direction, an entering portion at one end of the second frame with respect to a drum longitudinal direction and downstream of the shaft with respect to the mounting direction, permitting at least a part of the cam to enter when the process cartridge is mounted to the apparatus, and a cam engaging portion engaging the cam to receive a force for spacing the drum and the roller from each other.

    摘要翻译: 处理盒可拆卸地安装到电子照相成像设备的主组件上,该电子照相成像设备包括可在第一和第二位置之间移动的凸轮。 盒包括电子照相感光鼓,显影辊,其形成在鼓上形成的静电潜像,用于支撑滚筒的第一框架,用于支撑滚筒并与第一框架连接的第二框架,用于围绕设置在下游的轴线相对旋转 相对于盒安装方向的辊子,相对于鼓纵向方向的第二框架的一端处的进入部分和相对于安装方向在轴的下游的进入部分,允许凸轮的至少一部分进入 当处理盒安装到设备上时,凸轮接合部分与凸轮接合以接收用于将滚筒和滚子彼此间隔开的力。

    Method of detecting target nucleotide sequence, structure and preparation of the detection target used for working the detection method, and assay kit for detecting the target nucleotide sequence
    50.
    发明申请
    Method of detecting target nucleotide sequence, structure and preparation of the detection target used for working the detection method, and assay kit for detecting the target nucleotide sequence 审中-公开
    检测目标核苷酸序列的方法,用于检测方法的检测对象的结构和制备方法以及检测靶核苷酸序列的检测试剂盒

    公开(公告)号:US20060099615A1

    公开(公告)日:2006-05-11

    申请号:US11230627

    申请日:2005-09-21

    IPC分类号: C12Q1/68 C12P19/34

    摘要: The present invention provides a method of preparing a detection target structure useful for detecting a target nucleotide sequence. For example, provided is a method of preparing a detection target structure from a target nucleic acid (1). The target nucleic acid includes a target nucleotide sequence 2 in a part. According to the method of the present invention, a nucleic acid is elongated by using a primer so as to permit the target nucleic acid to have a double strand structure in the portion other than the target nucleotide sequence 2, thereby affording a detection target structure 4. The present invention also provides the detection target structure thus prepared a detection method of the target nucleotide sequence by using the detection target structure, a kit for preparing the detection target structure, and an assay kit for detecting the target nucleotide sequence.

    摘要翻译: 本发明提供了制备用于检测靶核苷酸序列的检测靶结构的方法。 例如,提供从靶核酸(1)制备检测靶结构的方法。 靶核酸部分包含靶核苷酸序列2。 根据本发明的方法,通过使用引物使核酸伸长,以使靶核酸在靶核苷酸序列2以外的部分具有双链结构,由此提供检测目标结构4 本发明还提供了通过使用检测对象结构制备靶核苷酸序列的检测方法的检测对象结构,用于制备检测对象结构的试剂盒和检测靶核苷酸序列的检测试剂盒。