公开(公告)号：US5305074A

公开(公告)日：1994-04-19

申请号：US914345

申请日：1992-07-17

申请人： Mark Feldman

发明人： Mark Feldman

IPC分类号： G01B9/02

CPC分类号： G01J9/02 ,  G01J2009/002

摘要： A self-referencing Mach-Zehnder interferometer for accurately measuring laser wavefronts over a broad wavelength range (for example, 600 nm to 900 nm). The apparatus directs a reference portion of an input beam to a reference arm and a measurement portion of the input beam to a measurement arm, recombines the output beams from the reference and measurement arms, and registers the resulting interference pattern ("first" interferogram) at a first detector. Optionally, subportions of the measurement portion are diverted to second and third detectors, which respectively register intensity and interferogram signals which can be processed to reduce the first interferogram's sensitivity to input noise. The reference arm includes a spatial filter producing a high quality spherical beam from the reference portion, a tilted wedge plate compensating for off-axis aberrations in the spatial filter output, and mirror collimating the radiation transmitted through the tilted wedge plate. The apparatus includes a thermally and mechanically stable baseplate which supports all reference arm optics, or at least the spatial filter, tilted wedge plate, and the collimator. The tilted wedge plate is mounted adjustably with respect to the spatial filter and collimator, so that it can be maintained in an orientation in which it does not introduce significant wave front errors into the beam propagating through the reference arm. The apparatus is polarization insensitive and has an equal path length configuration enabling measurement of radiation from broadband as well as closely spaced laser line sources.

摘要翻译： 一种自参考马赫 - 曾德干涉仪，用于在宽波长范围（例如600 nm至900 nm）内精确测量激光波前。 该装置将输入光束的参考部分引导到参考臂和输入光束的测量部分到测量臂，将来自参考和测量臂的输出光束复合，并将所得到的干涉图案（“第一”干涉图） 在第一检测器。 可选地，测量部分的子部分被转移到第二和第三检测器，其分别记录可以被处理的强度和干涉图信号，以减少第一干涉图对输入噪声的敏感度。 参考臂包括产生来自参考部分的高质量球形光束的空间滤光器，补偿空间滤光器输出中的离轴像差的倾斜楔形板，以及对通过倾斜的楔形板传播的辐射进行镜子准直。 该装置包括热和机械稳定的基板，其支撑所有参考臂光学元件，或至少空间滤光片，倾斜楔形板和准直器。 倾斜的楔形板相对于空间滤波器和准直器可调节地安装，使得其可以保持在其不会在传播通过参考臂的光束中引入显着的波前误差的取向。 该装置是极化不敏感的并且具有相等的路径长度配置，使得能够测量来自宽带以及紧密间隔的激光线源的辐射。