摘要:
Disclosed is a precursor composition comprising: a compound selected from a compound represented by the formula: Si(OR1)4 and a compound represented by the formula Ra(Si)(OR2)4−a (in the formulas R1 represents a monovalent organic group; R represents a hydrogen atom, a fluorine atom or a monovalent organic group; R2 represents a monovalent organic group; and a is an integer ranging from 1 to 3, provided that R, R1 and R2 may be the same or different from one another) a thermally degradable organic compound; an element having a catalyst activity; urea; and the like. A porous thin film produced from the precursor composition is irradiated with ultraviolet ray, and then subjected to gas-phase reaction with a hydrophobic compound. A porous thin film thus prepared can be used for the manufacture of a semiconductor device.
摘要:
A process for manufacturing a hydrophobized microporous film includes: forming an organic silica insulating film 2 on a substrate 1; supplying a gaseous mixture 3 composed of a silylation gas and an inert gas in an apparatus having the substrate 1 disposed therein at a temperature of the substrate 1, the substrate 1 having the organic silica insulating film 2 formed thereon, and the temperature being equal to or higher than a dew point temperature of the silylation gas and equal to or lower than a vaporizing temperature of the silylation gas; stopping the supply of the gaseous mixture 3 into the apparatus; and heating the substrate having the organic silica insulating film 2 formed thereon, so that a hydrophobizing organic silica insulating film, in which the surface of the organic silica insulating film 2 and the surfaces of the pores are hydrophobized, can be obtained with reduced increase in the specific dielectric constant.
摘要:
An exposure apparatus which projects exposure light from a pattern of an illuminated original onto a substrate, comprises a projection system including an optical element and configured to project the exposure light onto the substrate, an enclosure configured to enclose the projection system, and a cleaning mechanism configured to clean the optical element by irradiating the optical element with ultraviolet light under an environment in which oxygen is present within the enclosure, the cleaning mechanism including a light source configured to generate ultraviolet light, a tubular member including an exit window and configured to partially enclose an optical path between the light source and the optical element, and a regulating device configured to regulate an environment of a space inside the tubular member so that a partial pressure of oxygen becomes lower in the space inside the tubular member than in a space which is outside the tubular member.
摘要:
In an embedded magnet motor, radial magnets and first inclined magnets form north poles. The radial magnets and second inclined magnets form south poles. Core sheets each include preformed radial accommodating slots the number of which is expressed by P/2. Some of the preformed radial accommodating slots are short slots and the rest are long slots. The short slots are located at some parts of each radial accommodating slot along the axial direction. Radially inner ends of the short slots restrict the radial magnets from moving radially inward.
摘要:
A liquid crystal panel 11 with built-in sensors includes, in a pixel array 18, a plurality of pixel circuits and a plurality of optical sensors arranged two-dimensionally. When the liquid crystal panel 11 is formed of CG silicon, the light receiving sensitivity of the optical sensor is high for blue light but becomes low for red or green light. A display data processing unit 12 corrects a gradation having a value that is less than or equal to a predetermined value, to high for a blue component contained in display data D1. The display data processing unit 12 corrects only data displayed in a recognition area set in a display screen out of the blue component. Thus, even when the display image is dark, it can be converted to an image easy to recognize, a touch position can be detected properly irrespective of the display image, and a change of the display image by correction can be limited to the change of a specific color in a specific area.
摘要:
A rotor of an embedded magnet type motor is disclosed. A rotor core of the motor includes first accommodation holes and V-shaped accommodation holes. The first accommodation holes extend in radial directions, and the V-shaped accommodation holes protrude radially outward. The rotor core has grooves at positions corresponding to the first accommodation holes on the outer periphery of the rotor core. Each groove has a width as a dimension in the circumferential direction when viewed from the axial direction. Each first magnet has a width as a dimension in the circumferential direction when viewed from the axial direction. The width of the grooves is larger than the width of the first magnets.
摘要:
Disclosed is a precursor composition comprising: a compound selected from a compound represented by the formula: Si(OR1)4 and a compound represented by the formula Ra(Si) (OR2)4-a (in the formulas represents a monovalent organic group; R represents a hydrogen atom, a fluorine atom or a monovalent organic group; R2 represents a monovalent organic group; and a is an integer ranging from 1 to 3, provided that R, R1 and R2 may be the same or different from one another) a thermally degradable organic compound; an element having a catalyst activity; urea; and the like. A porous thin film produced from the precursor composition is irradiated with ultraviolet ray, and then subjected to gas-phase reaction with a hydrophobic compound. A porous thin film thus prepared can be used for the manufacture of a semiconductor device.
摘要:
In an organic EL panel for enhancing luminous efficiency and utilization efficiency of light, monochromatic RGB lights emitted from the organic EL panel in which organic EL elements optimum for three monochromatic primary RGB colors are patterned in a stripe-like manner, are adjusted by a liquid crystal panel so as to obtain monochromatic RGB output lights. In addition, the three monochromatic RGB lights are led through color filters with black matrices in order to enhance the color purities and visibilities of the adjusted lights.
摘要:
In an electroluminescence element including light emitting layers emitting light by applying AC voltages thereto the light emitting layer consists of a light emitting layer emitting red light and a light emitting layer emitting bluish green light and a blue filter transmitting blue light and a green filter transmitting green light are disposed on the light emitting surface side of the bluish green light emitting layer. In this way it is possible to take out red, blue and green lights at an approximately equal brightness level and to realize full color.
摘要:
An integrated device with high insulation tolerance is provided. A groove having an inclined side surface is provided between adjacent devices. When a side where an electronic circuit or MEMS device is mounted is a front surface, the groove becomes narrower from the front surface to a back surface because of the inclined surface. A mold material (insulating material) is disposed inside the groove, so that the plurality of devices are mechanically joined together, being electrically insulated from one another. A line member that establishes an electrical conduction between the adjacent devices is formed to lie along the side surface and the bottom surface of the groove. To lead the line out to the backside, the bottom surface of the groove has a hole, so that the line member is exposed to the backside from the hole.