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41.发明授权Vibration generating device, driving method therefor, foreign substance removing device, and optical device 有权振动发生装置及其驱动方法，异物去除装置及光学装置公开(公告)号：US08884493B2
公开(公告)日：2014-11-11
申请号：US13176649
申请日：2011-07-05
申请人： Tatsuo Furuta , Kenichi Takeda , Toshihiro Ifuku , Makoto Kubota , Hiroshi Saito
发明人： Tatsuo Furuta , Kenichi Takeda , Toshihiro Ifuku , Makoto Kubota , Hiroshi Saito
CPC分类号： H02N2/008 , B06B1/0284 , B08B7/02 , G02B27/0006 , G03B2205/0061 , H01L41/187 , H01L41/43 , H02N2/0015
摘要： Provided is a vibration generating device in which more improvement of drive efficiency can be realized than conventional ones. The vibration generating device includes: a piezoelectric element including a piezoelectric material interposed between electrodes; a vibration member; a power source for applying an alternating voltage to the piezoelectric element; and a control section for controlling a frequency of the alternating voltage applied by the power source, in which the control section controls the frequency of the alternating voltage applied to the piezoelectric element so that the resonance frequency of the piezoelectric element is successively changed from low frequency side to high frequency side in a frequency range including a change range of a resonance frequency of the piezoelectric element.
摘要翻译： 提供了一种振动产生装置，其中可以实现比常规驱动效率更高的驱动效率的提高。 振动产生装置包括：压电元件，其包括介于电极之间的压电材料; 振动件; 用于向压电元件施加交流电压的电源; 以及控制部分，用于控制由电源施加的交流电压的频率，其中控制部分控制施加到压电元件的交流电压的频率，使得压电元件的谐振频率从低频 在包括压电元件的谐振频率的变化范围的频率范围内的高频侧。
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公开(公告)号：US20100225712A1
公开(公告)日：2010-09-09
申请号：US12781218
申请日：2010-05-17
IPC分类号： B41J2/045
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1626 , Y10T29/42 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49401
摘要： A method for manufacturing an inkjet head includes providing a piezoelectric substrate having a porous structure, a diaphragm on the porous structure, and a piezoelectric substance layer on the diaphragm, and forming a cavity by etching out the porous structure from the piezoelectric substrate.
摘要翻译： 一种制造喷墨头的方法包括：提供具有多孔结构的压电基片，多孔结构上的光阑以及隔膜上的压电物质层，通过从压电基片上蚀刻出多孔结构而形成空腔。
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43.发明授权Actuator and liquid discharge head, and method for manufacturing liquid discharge head 有权执行器和排液头，以及液体排出头的制造方法公开(公告)号：US07045935B2
公开(公告)日：2006-05-16
申请号：US10632913
申请日：2003-08-04
IPC分类号： H01L41/047
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2202/03 , B41J2202/11 , H01L41/0478 , H01L41/0973 , H01L41/1875 , H01L41/314
摘要： An actuator comprises a laminated structure having a vibration plate, a lower electrode, a piezoelectric element, and an upper electrode laminated sequentially on a basic element, and then, at least the lower electrode of the two electrodes is a thin oxide film doped with La of single orientated crystal or monocrystal that contains Sr and Ti. Thus, it is made possible to materialize the micro miniaturized actuator having a strong structure of lamination with high adhesion, which is capable of obtaining large displacement with sufficient durability without spoiling the piezo-electrostrictive property thereof even with the small thickness of the piezoelectric element. With the micro miniaturized actuator thus structured, it is made possible to make a liquid discharge head more precisely.
摘要翻译： 致动器包括具有振动板，下电极，压电元件和上电极的层压结构，其顺序层压在基本元件上，然后至少两个电极的下电极是掺杂有La的薄氧化膜 的单取向晶体或含有Sr和Ti的单晶。 因此，可以实现具有高粘合性的具有强的层叠结构的微小型致动器，其能够以足够的耐久性获得大的位移，而不会破坏其压电元件的较小厚度的压电电致伸缩性能。 通过这样构造的微小型致动器，可以更精确地制造液体排出头。
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公开(公告)号：US20060049135A1
公开(公告)日：2006-03-09
申请号：US11215974
申请日：2005-09-01
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1626 , Y10T29/42 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49401
摘要： A method for manufacturing an inkjet head includes providing a piezoelectric substrate having a porous structure, a diaphragm on the porous structure, and a piezoelectric substance layer on the diaphragm, and forming a cavity by etching out the porous structure from the piezoelectric substrate.
摘要翻译： 一种制造喷墨头的方法包括：提供具有多孔结构的压电基片，多孔结构上的光阑以及隔膜上的压电物质层，通过从压电基片上蚀刻出多孔结构而形成空腔。
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公开(公告)号：US20110120494A1
公开(公告)日：2011-05-26
申请号：US12945523
申请日：2010-11-12
申请人： Toshihiro Ifuku , Tatsuo Furuta , Hiroshi Saito , Kenichi Takeda
发明人： Toshihiro Ifuku , Tatsuo Furuta , Hiroshi Saito , Kenichi Takeda
IPC分类号： F28G7/00
CPC分类号： G02B27/0006 , B06B1/0648 , B08B7/02 , G03B11/00 , G03B17/02 , G03B17/14 , H04N5/2171 , H04N5/2254
摘要： In a piezoelectric device, a first electrode and a second electrode are disposed to be opposed to each other on plate surfaces of the piezoelectric device, a first electrode plane of the piezoelectric device is fixedly bonded to a plate surface of a vibrating plate, a piezoelectric material forming the piezoelectric device is polarized in a direction parallel to the first electrode plane, the piezoelectric device is fixed to a base through a second electrode plane of the piezoelectric device, and the piezoelectric device generates a thickness-shear vibration with the fixed second electrode plane being a reference plane. The piezoelectric vibration generated by the piezoelectric device generates a flexural vibration in the vibrating plate, to thereby remove dust adhering to a surface of the vibrating plate.
摘要翻译： 在压电元件中，第一电极和第二电极在压电元件的板面彼此相对配置，压电元件的第一电极面与振动板的板面固定接合，压电 形成压电元件的材料在平行于第一电极平面的方向上极化，压电器件通过压电器件的第二电极平面固定到基底，并且压电器件产生与固定的第二电极的厚度 - 剪切振动 飞机是参考平面。 由压电装置产生的压电振动在振动板中产生弯曲振动，从而除去附着在振动板表面的灰尘。
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公开(公告)号：US07636993B2
公开(公告)日：2009-12-29
申请号：US11218515
申请日：2005-09-06
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1646 , H01L41/1876 , H01L41/332 , Y10T29/42 , Y10T29/435 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49155
摘要： A method for producing a piezoelectric film actuator is provided. This method includes the steps of preparing an intermediate transfer member having a porous layer formed thereon, with a vibrating plate and a piezoelectric layer being provided on the porous layer; bonding the vibrating plate to a nozzle substrate to form a composite structure; and separating the intermediate transfer member from the composite structure at the porous layer to transfer the vibrating plate and the piezoelectric layer to the nozzle substrate.
摘要翻译： 提供了一种制造压电膜致动器的方法。 该方法包括以下步骤：制备其上形成有多孔层的中间转印部件，其中振动板和压电层设置在多孔层上; 将振动板接合到喷嘴基板以形成复合结构; 并在所述多孔层处从所述复合结构分离所述中间转印部件，以将所述振动板和所述压电层转印到所述喷嘴基板。
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47.发明申请Dielectric element, piezoelectric element, ink jet head and ink jet recording apparatus and manufacturing method of same 有权电介质元件，压电元件，喷墨头和喷墨记录设备及其制造方法公开(公告)号：US20050189849A1
公开(公告)日：2005-09-01
申请号：US11062619
申请日：2005-02-23
IPC分类号： B41J2/045 , B41J2/01 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , H01G4/12 , H01G4/33 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/316 , H02N2/00
CPC分类号： B41J2/14233 , B41J2202/03 , H01L41/1875 , H01L41/316 , H01L41/319
摘要： A dielectric element having a dielectric layer provided between an upper electrode layer and a lower electrode layer, wherein the dielectric layer has a first dielectric layer and a second dielectric layer mutually different in composition, and composition of at least one component of the first dielectric layer changes as to a thickness direction of the first dielectric layer in proximity to a boundary between the first dielectric layer and the second dielectric layer.
摘要翻译： 一种电介质元件，其具有设置在上电极层和下电极层之间的电介质层，其中所述电介质层具有第一介电层和第二介电层，所述第一电介质层和第二电介质层的组成相互不同，并且所述第一介电层的至少一个部件的组成 在第一介电层和第二介电层之间的边界附近的第一介电层的厚度方向的变化。
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48.发明申请公开(公告)号：US20080012909A1
公开(公告)日：2008-01-17
申请号：US11773009
申请日：2007-07-03
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1634 , B41J2/1642 , B41J2/1646 , H01L41/0973 , H01L41/1876 , H01L41/314 , Y10T29/42
摘要： A method of manufacturing a piezoelectric body, formed from a film made of an ABO3 perovskite oxide crystal epitaxially grown on a substrate, comprises forming a film containing an AOx crystal by using an oxide containing an A element and a B element by heating the substrate to a temperature which is equal to or higher than a temperature at which the AOx crystal is formed, and which is lower than a temperature at which the ABO3 perovskite oxide crystal is formed and changing the film containing the AOx crystal into a film made of the ABO3 perovskite oxide crystal by heating the substrate to a temperature which exceeds a temperature at which the AOx crystal can be present, and which is equal to or higher than a temperature at which the ABO3 perovskite oxide crystal is formed.
摘要翻译： 制造由在衬底上外延生长的由ABO 3钙钛矿氧化物晶体制成的膜形成的压电体的方法包括通过以下步骤形成包含AO xS晶体的膜： 使用含有A元素和B元素的氧化物，通过将基板加热到等于或高于形成AO xS晶体的温度，并且低于温度 在其上形成ABO 3钙钛矿氧化物晶体，并将含有AO 结晶的膜改变为由ABO 3钙钛矿氧化物制成的膜 通过将衬底加热到超过可能存在AO xS晶体的温度的温度，并且其等于或高于ABO 3 形成了钙钛矿型氧化物晶体。
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49.发明申请Method for producing piezoelectric film actuator, and composite structure having piezoelectric layer 失效用于制造压电薄膜致动器的方法和具有压电层的复合结构公开(公告)号：US20060049723A1
公开(公告)日：2006-03-09
申请号：US11218515
申请日：2005-09-06
IPC分类号： H01L41/08
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1646 , H01L41/1876 , H01L41/332 , Y10T29/42 , Y10T29/435 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49155
摘要： A method for producing a piezoelectric film actuator is provided. This method includes the steps of preparing an intermediate transfer member having a porous layer formed thereon, with a vibrating plate and a piezoelectric layer being provided on the porous layer; bonding the vibrating plate to a nozzle substrate to form a composite structure; and separating the intermediate transfer member from the composite structure at the porous layer to transfer the vibrating plate and the piezoelectric layer to the nozzle substrate.
摘要翻译： 提供了一种制造压电膜致动器的方法。 该方法包括以下步骤：制备其上形成有多孔层的中间转印部件，其中振动板和压电层设置在多孔层上; 将振动板接合到喷嘴基板以形成复合结构; 并在所述多孔层处从所述复合结构分离所述中间转印部件，以将所述振动板和所述压电层转印到所述喷嘴基板。
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公开(公告)号：US08966704B2
公开(公告)日：2015-03-03
申请号：US12945523
申请日：2010-11-12
申请人： Toshihiro Ifuku , Tatsuo Furuta , Hiroshi Saito , Kenichi Takeda
发明人： Toshihiro Ifuku , Tatsuo Furuta , Hiroshi Saito , Kenichi Takeda
IPC分类号： H01L41/09 , B06B1/06 , B08B7/02 , H04N5/225 , G03B17/00 , G03B11/00 , H04N5/217 , G02B27/00 , G03B17/02 , G03B17/14
CPC分类号： G02B27/0006 , B06B1/0648 , B08B7/02 , G03B11/00 , G03B17/02 , G03B17/14 , H04N5/2171 , H04N5/2254
摘要： In a piezoelectric device, a first electrode and a second electrode are disposed to be opposed to each other on plate surfaces of the piezoelectric device, a first electrode plane of the piezoelectric device is fixedly bonded to a plate surface of a vibrating plate, a piezoelectric material forming the piezoelectric device is polarized in a direction parallel to the first electrode plane, the piezoelectric device is fixed to a base through a second electrode plane of the piezoelectric device, and the piezoelectric device generates a thickness-shear vibration with the fixed second electrode plane being a reference plane. The piezoelectric vibration generated by the piezoelectric device generates a flexural vibration in the vibrating plate, to thereby remove dust adhering to a surface of the vibrating plate.
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