摘要:
A small volume resist dispenser includes a suck-back capable pressure operated valve, connectable to a nozzle of a spin coater and to a controller output arranged to open and close the valve to control liquid supply to the spin-coater. The dispenser comprises a holder for a bottle and arranged to pressurize a fluid in the bottle by applying gas pressure. The dispenser is suitable for use with, for example, pre-filled resist sample bottles containing resist samples of 100 ml to 300 ml resist solution.
摘要:
A double patterning process for printing dense lines is provided. In a first step, a first semi dense pattern of lines is printed in a first resist material layer overlaying a substrate provided with a bottom anti-reflection coating. In a second step, a second semi dense pattern of lines is printed in a second resist material layer provided over the cleared area. The first and second semi dense line patterns are positioned in interleaved position, to provide a desired dense pattern of lines and spaces. After development of the first resist material and before providing the second resist material to the substrate, a surface conditioning of the bottom anti-reflection coating is applied to the cleared area between lines of first resist material. The surface conditioning step is arranged to improve adhesion of a feature of second resist material to the surface of the cleared area.
摘要:
An immersion lithographic apparatus provides an immersion liquid including photosensitive material(s) configured to form a patterned film on the surface of a substrate on exposure to a radiation beam. Irradiation through the immersion liquid onto a substrate leads to deposition of a film on the substrate. Film formation occurs only in the photoirradiated region, so that the film formed has a pattern corresponding to the pattern of the radiation.
摘要:
An immersion lithographic apparatus provides an immersion liquid including photosensitive material(s) configured to form a patterned film on the surface of a substrate on exposure to a radiation beam. Irradiation through the immersion liquid onto a substrate leads to deposition of a film on the substrate. Film formation occurs only in the photoirradiated region, so that the film formed has a pattern corresponding to the pattern of the radiation.
摘要:
A microprojection array having at least first and second microprojections, the first and second microprojections having inner and outer faces, the first microprojection inner face being disposed substantially parallel to the second microprojection inner face; and a biocompatible coating disposed on the first and second microprojection inner faces, the first and second microprojections being adapted to substantially restrict contact of the coating with biological tissue during insertion of the first and second microprojections into the tissue.
摘要:
The present invention includes a dosage form configured to provide the controlled release of an active agent formulation. A dosage form according to the present invention includes a reservoir containing an active agent formulation and an engine positioned at least partially within the reservoir. In order to reduce the possibility that the engine included in a dosage form of the present invention will separate from the reservoir either during or after fabrication, the dosage form of the present invention includes a band that binds the engine to the reservoir. The band is provided over an outside surface of the both the engine and the reservoir at or near the interface formed where the engine enters the opening provided in the reservoir. The present invention also includes a method of fabricating controlled release dosage forms having banded engine.
摘要:
A complex comprised of iron and a transport moiety, such as a fatty acid, is described. The complex has an enhanced absorption in the gastrointestinal tract, particularly the lower gastrointestinal tract. The complex, and compositions and dosage forms prepared using the complex, provide for absorption by the body of iron through a period of ten to twenty-four hours, thus enabling a true once-daily dosage form for iron.
摘要:
A mobile telephone for displaying graphically enhanced images. The mobile station has a display for displaying images as directed by a processor. At the user's request a displayed image will be graphically enhanced using an algorithm that takes into account audio inputs being received by the mobile station, either though its normal voice microphone or though another dedicated to this function. The audio input may also be input received previously and stored, and may have been received from another device for the purpose of sharing the visualization experience. The graphically enhanced image is displayed for the user's entertainment and changes as the audio input changes. The image itself may have been captured by the mobile station if it is capable of doing so, or it may have been received over the Internet or another network, or selected from a collection stored on the mobile station itself.