公开(公告)号：US07192879B2

公开(公告)日：2007-03-20

申请号：US11207871

申请日：2005-08-22

申请人： Norinao Kouma ,  Osamu Tsuboi ,  Hisao Okuda ,  Hiromitsu Soneda ,  Mi Xiaoyu ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

发明人： Norinao Kouma ,  Osamu Tsuboi ,  Hisao Okuda ,  Hiromitsu Soneda ,  Mi Xiaoyu ,  Satoshi Ueda ,  Ippei Sawaki ,  Yoshitaka Nakamura

IPC分类号： H01L21/302

CPC分类号： B81C1/00626 ,  B81B2201/0235 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/04

摘要： A method for manufacturing a micro-structural unit is provided. By the method, micro-machining is performed on a material substrate including first through third conductive layers and two insulating layers, one of which is interposed between the first and the second conductive layers, and the other between the second and the third conductive layers. The method includes several etching steps performed on the layers of the material substrate that are different in thickness.

摘要翻译： 提供一种微结构单元的制造方法。 通过该方法，在包括第一至第三导电层和两个绝缘层的材料基板上进行微加工，其中一个绝缘层介于第一和第二导电层之间，另一个位于第二和第三导电层之间。 该方法包括在不同厚度的材料基底的层上执行的几个蚀刻步骤。

公开(公告)号：US20060057761A1

公开(公告)日：2006-03-16

申请号：US11256959

申请日：2005-10-25

申请人： Xiaoyu Mi ,  Norinao Kouma ,  Osamu Tsuboi ,  Masafumi Iwaki ,  Hisao Okuda ,  Hiromitsu Soneda ,  Satoshi Ueda ,  Ippei Sawaki

发明人： Xiaoyu Mi ,  Norinao Kouma ,  Osamu Tsuboi ,  Masafumi Iwaki ,  Hisao Okuda ,  Hiromitsu Soneda ,  Satoshi Ueda ,  Ippei Sawaki

IPC分类号： H01L21/00

CPC分类号： B81C1/00547 ,  B81B2201/042 ,  B81B2203/0136 ,  B81C2201/0132 ,  B81C2201/0133 ,  G01P15/0802 ,  G02B26/0841

摘要： A method of making a microstructure with thin wall portions (T1-T3) includes a step of performing a first etching process to a material substrate having a laminate structure including a first conductive layer (11) and a second conductive layer (12) having a thickness of the thin wall portions (T1-T3), where the etching is performed from the side of the first conductive layer (11) thereby forming in the second conductive layer (12) pre thin wall portions (T1′-T3′) which has a pair of side surfaces apart from each other in an in-plane direction of the second conductive layer (12) and contact the first conductive layer (11). The method also includes a step of performing a second etching process from the side of the first conductive layer (11) for removing part of the first conductive layer (11) contacting the pre thin wall portions (T1′-T3′) to form the thin wall portions.

摘要翻译： 制造具有薄壁部分（T 1 -T 3）的微结构的方法包括对具有包括第一导电层（11）和第二导电层（12）的层压结构的材料基板进行第一蚀刻工艺的步骤， 具有薄壁部分（T 1 -T 3）的厚度，其中从第一导电层（11）的侧面进行蚀刻，从而在第二导电层（12）中形成预薄壁部分（T 1' -T 3'），其在第二导电层（12）的面内方向上具有彼此分离的一对侧表面，并与第一导电层（11）接触。 该方法还包括从第一导电层（11）侧进行第二蚀刻处理以去除与预薄壁部分（T 1'-T 3'）接触的第一导电层（11）的一部分的步骤 形成薄壁部分。

公开(公告)号：US06881649B2

公开(公告)日：2005-04-19

申请号：US10352001

申请日：2003-01-28

申请人： Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Ippei Sawaki ,  Osamu Tsuboi ,  Yoshitaka Nakamura

发明人： Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Ippei Sawaki ,  Osamu Tsuboi ,  Yoshitaka Nakamura

IPC分类号： B81C1/00 ,  G02B26/08 ,  H01L21/301 ,  H01L21/46 ,  H01L21/78

CPC分类号： G02B26/0841 ,  Y10S359/90

摘要： A plurality of micromirror chips are collectively made from a common substrate. Each of the micromirror chips is formed with a micromirror unit including a frame, a mirror-forming portion separate from the frame via spaces, and torsion bars connecting the mirror-forming portion to the frame. The common substrate is subjected to etching to provide the spaces and make division grooves for dividing the common substrate into the individual micromirror chips. The etching for the spaces and the etching for the division grooves are performed in parallel with each other.

摘要翻译： 多个微镜芯片由共同的基板共同制成。 每个微镜芯片由微镜单元形成，该微镜单元包括框架，通过空间与框架分离的镜形成部分以及将镜子形成部分连接到框架的扭杆。 对公共基板进行蚀刻以提供空间，并且制成用于将公共基板分成单个微镜芯片的划分凹槽。 空间的蚀刻和分割槽的蚀刻彼此并行地进行。

公开(公告)号：US06891650B2

公开(公告)日：2005-05-10

申请号：US10755339

申请日：2004-01-13

申请人： Yoshihiro Mizuno ,  Satoshi Ueda ,  Osamu Tsuboi ,  Ippei Sawaki ,  Hisao Okuda ,  Fumio Yamagishi ,  Norinao Kouma

发明人： Yoshihiro Mizuno ,  Satoshi Ueda ,  Osamu Tsuboi ,  Ippei Sawaki ,  Hisao Okuda ,  Fumio Yamagishi ,  Norinao Kouma

IPC分类号： B01D53/88 ,  B01J8/04 ,  B81B3/00 ,  B81C1/00 ,  C01B3/16 ,  G02B26/08

CPC分类号： G02B26/0841 ,  B01D53/885 ,  B01J8/0453 ,  B01J8/0496 ,  B01J2208/00212 ,  B01J2208/00309 ,  B01J2208/025 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C1/00142 ,  B81C1/00626 ,  B81C2201/0142 ,  C01B3/16 ,  C01B2203/0288 ,  C01B2203/045 ,  C01B2203/0485 ,  Y10S359/904

摘要： A method of making a micromirror unit is provided. In accordance with the method, a micromirror unit is made from a material substrate having a multi-layer structure composed of silicon layers and at least one intermediate layer. The resulting micromirror unit includes a mirror forming base, a frame and a torsion bar. The method includes the following steps. First, a pre-torsion bar is formed by subjecting one of the silicon layers to etching. The obtained pre-torsion bar is rendered smaller in thickness than the mirror forming base and is held in contact with the intermediate layer. Then, the desired torsion bar is obtained by removing the intermediate layer contacting with the pre-torsion bar.

摘要翻译： 提供了制造微镜单元的方法。 根据该方法，微镜单元由具有由硅层和至少一个中间层构成的多层结构的材料基板制成。 所得到的微镜单元包括反射镜形成基座，框架和扭杆。 该方法包括以下步骤。 首先，通过使一个硅层进行蚀刻来形成预扭杆。 所获得的预扭杆的厚度比反射镜形成基座的厚度小，并与中间层保持接触。 然后，通过去除与预扭杆接触的中间层来获得所需的扭力杆。

公开(公告)号：US06723659B2

公开(公告)日：2004-04-20

申请号：US09995588

申请日：2001-11-29

申请人： Yoshihiro Mizuno ,  Satoshi Ueda ,  Osamu Tsuboi ,  Ippei Sawaki ,  Hisao Okuda ,  Fumio Yamagishi ,  Norinao Kouma

发明人： Yoshihiro Mizuno ,  Satoshi Ueda ,  Osamu Tsuboi ,  Ippei Sawaki ,  Hisao Okuda ,  Fumio Yamagishi ,  Norinao Kouma

IPC分类号： H01L21302

CPC分类号： G02B26/0841 ,  B01D53/885 ,  B01J8/0453 ,  B01J8/0496 ,  B01J2208/00212 ,  B01J2208/00309 ,  B01J2208/025 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C1/00142 ,  B81C1/00626 ,  B81C2201/0142 ,  C01B3/16 ,  C01B2203/0288 ,  C01B2203/045 ,  C01B2203/0485 ,  Y10S359/904

摘要： A method of making a micromirror unit is provided. In accordance with the method, a micromirror unit is made from a material substrate having a multi-layer structure composed of silicon layers and at least one intermediate layer. The resulting micromirror unit includes a mirror forming base, a frame and a torsion bar. The method includes the following steps. First, a pre-torsion bar is formed by subjecting one of the silicon layers to etching. The obtained pre-torsion bar is rendered smaller in thickness than the mirror forming base and is held in contact with the intermediate layer. Then, the desired torsion bar is obtained by removing the intermediate layer contacting with the pre-torsion bar.

摘要翻译： 提供了制造微镜单元的方法。 根据该方法，微镜单元由具有由硅层和至少一个中间层构成的多层结构的材料基板制成。 所得到的微镜单元包括反射镜形成基座，框架和扭杆。 该方法包括以下步骤。 首先，通过使一个硅层进行蚀刻来形成预扭杆。 所获得的预扭杆的厚度比反射镜形成基座的厚度小，并与中间层保持接触。 然后，通过去除与预扭杆接触的中间层来获得所需的扭力杆。

公开(公告)号：US07551054B2

公开(公告)日：2009-06-23

申请号：US11288142

申请日：2005-11-29

申请人： Yoshihiro Mizuno ,  Xiaoyu Mi ,  Hisao Okuda ,  Hiromitsu Soneda ,  Satoshi Ueda ,  Takeo Takahashi

发明人： Yoshihiro Mizuno ,  Xiaoyu Mi ,  Hisao Okuda ,  Hiromitsu Soneda ,  Satoshi Ueda ,  Takeo Takahashi

IPC分类号： H01F5/00

CPC分类号： H01L23/5227 ,  H01F17/0006 ,  H01F27/40 ,  H01L21/84 ,  H01L23/5223 ,  H01L27/016 ,  H01L27/13 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/19011 ,  H01L2924/00

摘要： An electronic device includes: an insulating substrate; at least one capacitor and an inductor that are formed directly on the insulating substrate; a line that connects the capacitor and the inductor from the above; and an external connecting pad unit that is made of the same conductor as the line and is disposed on the insulating substrate.

摘要翻译： 电子设备包括：绝缘基板; 至少一个直接形成在所述绝缘基板上的电容器和电感器; 从上述连接电容器和电感器的线路; 以及外部连接焊盘单元，其由与该线路相同的导体制成并且设置在绝缘基板上。

公开(公告)号：US20060114077A1

公开(公告)日：2006-06-01

申请号：US11288142

申请日：2005-11-29

申请人： Yoshihiro Mizuno ,  Xiaoyu Mi ,  Hisao Okuda ,  Hiromitsu Soneda ,  Satoshi Ueda ,  Takeo Takahashi

发明人： Yoshihiro Mizuno ,  Xiaoyu Mi ,  Hisao Okuda ,  Hiromitsu Soneda ,  Satoshi Ueda ,  Takeo Takahashi

IPC分类号： H03H7/38

CPC分类号： H01L23/5227 ,  H01F17/0006 ,  H01F27/40 ,  H01L21/84 ,  H01L23/5223 ,  H01L27/016 ,  H01L27/13 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/19011 ,  H01L2924/00

摘要： An electronic device includes: an insulating substrate; at least one capacitor and an inductor that are formed directly on the insulating substrate; a line that connects the capacitor and the inductor from the above; and an external connecting pad unit that is made of the same conductor as the line and is disposed on the insulating substrate.

公开(公告)号：US07755824B2

公开(公告)日：2010-07-13

申请号：US12219010

申请日：2008-07-15

申请人： Osamu Tsuboi ,  Satoshi Ueda ,  Yoshihiro Mizuno ,  Ippei Sawaki ,  Hisao Okuda

发明人： Osamu Tsuboi ,  Satoshi Ueda ,  Yoshihiro Mizuno ,  Ippei Sawaki ,  Hisao Okuda

IPC分类号： G02B26/08

CPC分类号： G02B26/085 ,  G02B26/0841 ,  Y10S359/904

摘要： A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.

摘要翻译： 提供了一种微镜单元，其包括框架，形成有镜面的反射镜形成基座以及连接到反射镜形成基座的第一端和连接到框架的第二端的扭转连接器。 扭转连接器限定了旋转轴线，镜子形成基座围绕该轴线相对于框架旋转。 扭转连接器具有在与镜面平行且垂直于旋转轴线的方向上测量的宽度。 第一端扭转连接器的宽度相对较大。 宽度从第一端朝向第二端逐渐变小。

公开(公告)号：US07411714B2

公开(公告)日：2008-08-12

申请号：US11544726

申请日：2006-10-10

申请人： Osamu Tsuboi ,  Satoshi Ueda ,  Yoshihiro Mizuno ,  Ippei Sawaki ,  Hisao Okuda

发明人： Osamu Tsuboi ,  Satoshi Ueda ,  Yoshihiro Mizuno ,  Ippei Sawaki ,  Hisao Okuda

IPC分类号： G02B26/08

CPC分类号： G02B26/085 ,  G02B26/0841 ,  Y10S359/904

摘要： A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.

摘要翻译： 提供了一种微镜单元，其包括框架，形成有镜面的反射镜形成基座以及连接到反射镜形成基座的第一端和连接到框架的第二端的扭转连接器。 扭转连接器限定了旋转轴线，镜子形成基座围绕该轴线相对于框架旋转。 扭转连接器具有在与镜面平行且垂直于旋转轴线的方向上测量的宽度。 第一端扭转连接器的宽度相对较大。 宽度从第一端朝向第二端逐渐变小。

公开(公告)号：US06795225B2

公开(公告)日：2004-09-21

申请号：US09984814

申请日：2001-10-31

申请人： Osamu Tsuboi ,  Satoshi Ueda ,  Yoshihiro Mizuno ,  Ippei Sawaki ,  Hisao Okuda

发明人： Osamu Tsuboi ,  Satoshi Ueda ,  Yoshihiro Mizuno ,  Ippei Sawaki ,  Hisao Okuda

IPC分类号： G00B2608

CPC分类号： G02B26/085 ,  G02B26/0841 ,  Y10S359/904

摘要： A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.

摘要翻译： 提供了一种微镜单元，其包括框架，形成有镜面的反射镜形成基座以及连接到反射镜形成基座的第一端和连接到框架的第二端的扭转连接器。 扭转连接器限定了旋转轴线，镜子形成基座围绕该轴线相对于框架旋转。 扭转连接器具有在与镜面平行且垂直于旋转轴线的方向上测量的宽度。 第一端扭转连接器的宽度相对较大。 宽度从第一端朝向第二端逐渐变小。