MICROBOLOMETER WITH IMPROVED MECHANICAL STABILITY AND METHOD OF MANUFACTURING THE SAME
    51.
    发明申请
    MICROBOLOMETER WITH IMPROVED MECHANICAL STABILITY AND METHOD OF MANUFACTURING THE SAME 失效
    具有改进的机械稳定性的微型测量仪及其制造方法

    公开(公告)号:US20090152466A1

    公开(公告)日:2009-06-18

    申请号:US12181871

    申请日:2008-07-29

    IPC分类号: H01L27/14

    摘要: Provided are a microbolometer having a cantilever structure and a method of manufacturing the same, and more particularly, a microbolometer having a three-dimensional cantilever structure, which is improved from a conventional two-dimensional cantilever structure, and a method of manufacturing the same. The method includes providing a substrate including a read-out integrated circuit and a reflective layer for forming an absorption structure, forming a sacrificial layer on the substrate, forming a cantilever structure having an uneven cross-section in the sacrificial layer, forming a sensor part isolated from the substrate by the cantilever structure, and removing the sacrificial layer.

    摘要翻译: 本发明提供一种具有悬臂结构的微电热计及其制造方法,特别是具有三维悬臂结构的微电热计,其从传统的二维悬臂结构得到改进,及其制造方法。 该方法包括提供包括读出集成电路和用于形成吸收结构的反射层的衬底,在衬底上形成牺牲层,在牺牲层中形成具有不均匀横截面的悬臂结构,形成传感器部分 通过悬臂结构从衬底隔离,并去除牺牲层。

    Coin type vibrating motor
    52.
    发明授权
    Coin type vibrating motor 有权
    硬币型振动电机

    公开(公告)号:US07157824B2

    公开(公告)日:2007-01-02

    申请号:US10947147

    申请日:2004-09-23

    IPC分类号: H02K7/06

    摘要: Disclosed is a coin type vibrating motor including: a rotor provided with an upper base including at least one wound coil placed on the upper surface thereof; a stator including a pair of brushes placed on the upper surface of a lower base, on which a magnet is mounted corresponding to the wound coil; and a shafting unit including a bearing member formed integrally with the upper base to surround the wound coil and the weight, and a shaft, of which the bearing member is installed on the outer periphery, wherein an oil scattering-preventing portion, which exposes an assembling region, and has an inner surface extended downwardly to a designated length while being spaced from the inner surface of the shaft, is formed integrally with the lower surface of an insulator exposed to the outside through an opening of the upper base.

    摘要翻译: 公开了一种硬币式振动电动机,其包括:转子,其具有设置在其上表面上的至少一个缠绕线圈的上基部; 定子,其包括放置在下基座的上表面上的一对电刷,对应于所述卷绕的线圈安装有磁体; 以及轴承部件,其包括与所述上基部一体形成以包围所述缠绕线圈和所述重物的轴承部件,以及轴,所述轴承部件安装在所述外周上,其中,防油部分, 并且具有从轴的内表面间隔开的向下延伸到指定长度的内表面,通过上基座的开口与暴露于外部的绝缘体的下表面一体地形成。

    Capacitive micro-electro-mechanical switch and method of manufacturing the same
    53.
    发明授权
    Capacitive micro-electro-mechanical switch and method of manufacturing the same 失效
    电容式微机电开关及其制造方法

    公开(公告)号:US06867467B2

    公开(公告)日:2005-03-15

    申请号:US10329390

    申请日:2002-12-27

    IPC分类号: H01H59/00 H01P1/12 H01L29/82

    摘要: The present invention relates to a capacitive micro-electro-mechanical switch and method of manufacturing the same. In the capacitive micro-electro-mechanical switch for use in the radio frequency (RF) and the microwave driven by the electrostatic force, a capacitor of a 3-dimensional structure is formed on a signal transmission line. An ON capacitance is increased without increasing an capacitor area while preventing an increase in an OFF capacitance using the capacitor. Thus, an ON/OFF capacitance ratio of the capacitive micro-electro-mechanical switch can be increased and insertion loss and isolation characteristic could be improved.

    摘要翻译: 本发明涉及一种电容式微机电开关及其制造方法。 在用于射频(RF)的电容微机电开关和由静电力驱动的微波中,在信号传输线上形成三维结构的电容器。 在不增加电容器面积的同时增加ON电容,同时防止使用电容器的OFF电容的增加。 因此,可以提高电容式微机电开关的导通/截止电容比,并且可以提高插入损耗和隔离特性。