摘要:
Provided are a microbolometer having a cantilever structure and a method of manufacturing the same, and more particularly, a microbolometer having a three-dimensional cantilever structure, which is improved from a conventional two-dimensional cantilever structure, and a method of manufacturing the same. The method includes providing a substrate including a read-out integrated circuit and a reflective layer for forming an absorption structure, forming a sacrificial layer on the substrate, forming a cantilever structure having an uneven cross-section in the sacrificial layer, forming a sensor part isolated from the substrate by the cantilever structure, and removing the sacrificial layer.
摘要:
Disclosed is a coin type vibrating motor including: a rotor provided with an upper base including at least one wound coil placed on the upper surface thereof; a stator including a pair of brushes placed on the upper surface of a lower base, on which a magnet is mounted corresponding to the wound coil; and a shafting unit including a bearing member formed integrally with the upper base to surround the wound coil and the weight, and a shaft, of which the bearing member is installed on the outer periphery, wherein an oil scattering-preventing portion, which exposes an assembling region, and has an inner surface extended downwardly to a designated length while being spaced from the inner surface of the shaft, is formed integrally with the lower surface of an insulator exposed to the outside through an opening of the upper base.
摘要:
The present invention relates to a capacitive micro-electro-mechanical switch and method of manufacturing the same. In the capacitive micro-electro-mechanical switch for use in the radio frequency (RF) and the microwave driven by the electrostatic force, a capacitor of a 3-dimensional structure is formed on a signal transmission line. An ON capacitance is increased without increasing an capacitor area while preventing an increase in an OFF capacitance using the capacitor. Thus, an ON/OFF capacitance ratio of the capacitive micro-electro-mechanical switch can be increased and insertion loss and isolation characteristic could be improved.