公开(公告)号：US07567345B1

公开(公告)日：2009-07-28

申请号：US11784750

申请日：2007-04-10

申请人： Martin M. Liphardt ,  Brooks A. Hitt ,  Jeffrey S. Hale ,  Ping He

发明人： Martin M. Liphardt ,  Brooks A. Hitt ,  Jeffrey S. Hale ,  Ping He

IPC分类号： G01J4/00

CPC分类号： G01N21/211 ,  G01J4/00

摘要： A reflectometer, ellipsometer, polarimeter or the like system with aperture, focusing means, sample and optionally detector planes oriented so that the Scheimpflug condition is substantially met on incident and/or, optionally, reflection sides of a sample. In addition beneficial aperture hole aspect ratio and aperture plane orientation is described.

摘要翻译： 具有孔径，聚焦装置，样品和可选的检测器平面的反射计，椭偏仪，偏振计等系统，使得在入射和/或可选的反射面上基本满足Scheimpflug条件。 此外，还描述了有利的孔径纵横比和孔平面取向。

公开(公告)号：US07317530B2

公开(公告)日：2008-01-08

申请号：US11085450

申请日：2005-03-22

申请人： Martin M. Liphardt ,  Ping He

发明人： Martin M. Liphardt ,  Ping He

IPC分类号： G01J4/00

CPC分类号： G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0243 ,  G01J4/00 ,  G01N21/211 ,  G02B17/008

摘要： Low aberration relay systems modified to perform as spatial filters in reflectometer, spectrophotometer, ellipsometer, polarimeter and the like systems.

摘要翻译： 低像差继电器系统被修改为在反射计，分光光度计，椭偏仪，偏振计等系统中作为空间滤光器。

公开(公告)号：US08587781B2

公开(公告)日：2013-11-19

申请号：US13573032

申请日：2012-08-15

申请人： Martin M Liphardt ,  Ping He

发明人： Martin M Liphardt ,  Ping He

IPC分类号： G01J4/00 ,  G01N21/00 ,  G01N21/55

CPC分类号： G01N21/211 ,  G02B26/0883 ,  G02B27/1073 ,  G02B27/143

摘要： A system for and method of allowing visual observation of a sample being subject to investigation by an electromagnetic beam, to identify where thereupon a beam of sample investigating electromagnetic radiation is caused to impinge, in combination with a data detector of the beam of sample investigating electromagnetic radiation after it interacts with the sample.

摘要翻译： 一种允许目视观察由电磁波束进行调查的样品的系统和方法，以便与检测电磁辐射的样本波束一起被引起撞击的样本，与检测电磁波的样本束的数据检测器结合 它与样品相互作用后的辐射。

公开(公告)号：US07623238B1

公开(公告)日：2009-11-24

申请号：US11809725

申请日：2007-06-02

申请人： Ping He ,  Martin M. Liphardt

发明人： Ping He ,  Martin M. Liphardt

IPC分类号： G01J4/00

CPC分类号： G01N21/211 ,  G01J2003/062

摘要： A system and method which reduces change in locus of a beam of electromagnetic radiation which otherwise result from vibrations caused by operation of a motor which controls the rotation of an element which affects the beam.

摘要翻译： 一种降低电磁辐射束的轨迹变化的系统和方法，否则这是由控制影响光束的元件的旋转的电机的操作引起的振动造成的。

公开(公告)号：US08059276B2

公开(公告)日：2011-11-15

申请号：US12315898

申请日：2008-12-08

申请人： James N. Hilfiker ,  Jianing Sun ,  Ping He ,  Martin M. Liphardt

发明人： James N. Hilfiker ,  Jianing Sun ,  Ping He ,  Martin M. Liphardt

IPC分类号： G01J4/00

CPC分类号： G01N21/211 ,  G01N2021/213

摘要： System for, and method of ellipsometric investigation of and analysis of samples which have, for instance, a non-random effectively “regular” textured surface, and/or a surface characterized by an irregular array of faceted structures.

摘要翻译： 具有例如非随机有效的“规则”织构表面的样品的椭圆测量和椭圆曲线研究和分析方法和/或由不规则阵列的小平面结构表征的表面的系统和方法。

公开(公告)号：US10247611B1

公开(公告)日：2019-04-02

申请号：US14757280

申请日：2015-12-14

申请人： Martin M. Liphardt ,  Ping He ,  Duane E. Meyer

发明人： Martin M. Liphardt ,  Ping He ,  Duane E. Meyer

IPC分类号： G01J4/04 ,  G01J3/447 ,  G01J3/10 ,  G01J3/02

摘要： Application of detectors of electromagnetic radiation and systems for enabling the optimization thereof for application over various specific wavelength ranges, involving functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics.

公开(公告)号：US08189193B1

公开(公告)日：2012-05-29

申请号：US12589076

申请日：2009-10-19

申请人： Martin M. Liphardt ,  Ping He ,  James D. Welch

发明人： Martin M. Liphardt ,  Ping He ,  James D. Welch

IPC分类号： G01J4/00

CPC分类号： G01J3/0224 ,  G01J3/021 ,  G01J3/10 ,  G01N21/21 ,  G01N21/211 ,  G01N2201/061 ,  G01N2201/0636

摘要： Control of the angle-of-incidence of a beam of electromagnetic radiation provided by a horizontally oriented arc-lamp in ellipsometer, polarimeter, spectrophotometer, reflectometer, Mueller matrix measuring, or the like systems.

摘要翻译： 由椭圆光度计，偏光计，分光光度计，反射计，米勒矩阵测量等系统中的水平取向的弧光灯提供的电磁辐射束的入射角的控制。

公开(公告)号：US07230699B1

公开(公告)日：2007-06-12

申请号：US10652696

申请日：2003-09-02

申请人： Martin M. Liphardt ,  Ping He

发明人： Martin M. Liphardt ,  Ping He

IPC分类号： G01J4/00

CPC分类号： G01N21/274 ,  G01N21/211

摘要： Disclosed is a system comprising a stage with “X”, “Y” and “Z” translation and “X”, “Y” and optionally “Z” axes rotation capability, in combination with interrogation and monitoring means which act in functional combination to orient the surface of a sample so as to set an intended oblique approach of an electromagnetic beam with respect to a sample surface at a monitored location thereon.

摘要翻译： 公开了一种包括具有“X”，“Y”和“Z”平移和“X”，“Y”和任选的“Z”轴旋转能力的平台的系统，其结合询问和监视装置，其功能组合 使样品的表面定向，以便在其上的监视位置处相对于样品表面设置电磁波束的预期倾斜接近。

公开(公告)号：US08570513B2

公开(公告)日：2013-10-29

申请号：US13373037

申请日：2011-11-03

申请人： James N. Hilfiker ,  Jianing Sun ,  Ping He ,  Martin M. Liphardt

发明人： James N. Hilfiker ,  Jianing Sun ,  Ping He ,  Martin M. Liphardt

IPC分类号： G01J4/00

CPC分类号： G01N21/211 ,  G01N2021/213

摘要： System for, and method of ellipsometric investigation of and analysis of samples which have, for instance, a non-random effectively “regular” textured surface, and/or a surface characterized by an irregular array of faceted structures.

公开(公告)号：US08339602B1

公开(公告)日：2012-12-25

申请号：US12584795

申请日：2009-09-12

申请人： Martin M. Liphardt ,  Ping He

发明人： Martin M. Liphardt ,  Ping He

IPC分类号： G01J4/00 ,  G01N21/00 ,  G01N21/55

CPC分类号： G01N21/211 ,  G01N21/55

摘要： A system for and method of allowing visual observation of a sample being subject to investigation by an electromagnetic beam, to identify where thereupon a beam of sample investigating electromagnetic radiation is caused to impinge, in combination with a data detector of the beam of sample investigating electromagnetic radiation after it interacts with the sample.