Low-k dielectric material system for IC application
    52.
    发明授权
    Low-k dielectric material system for IC application 失效
    低k介质材料系统用于IC应用

    公开(公告)号:US06878616B1

    公开(公告)日:2005-04-12

    申请号:US10719704

    申请日:2003-11-21

    摘要: A low-k dielectric for use as an interlayer for an interconnect structure is provided. The dielectric of the present invention is an alkaline boron silicate glass which when formulated in certain compositional ranges can undergo spinodal decomposition when processed using certain thermal profiles. Spinodal decomposition is a chemical and physical separation of the silicate glass into a distinct interpenetrating microstructure which contains a substantially pure silicon dioxide network and a boron-rich network. The dimension (i.e., scale), and the amount of separation can be controlled through compositional and thermal control during the processing of the silicate glass.

    摘要翻译: 提供了用作互连结构的中间层的低k电介质。 本发明的电介质是碱性硼硅酸盐玻璃,当在某些组成范围内配制时,当使用某些热分布进行加工时,可以发生旋节分解。 晶间分解是将硅酸盐玻璃化学和物理分离成独特的互穿微结构,其包含基本上纯的二氧化硅网络和富含硼的网络。 通过在硅酸盐玻璃的加工过程中的组合和热控制可以控制尺寸(即刻度)和分离量。

    Controlled porosity for ceramic contact sheets and setter tiles
    54.
    发明授权
    Controlled porosity for ceramic contact sheets and setter tiles 失效
    陶瓷接触片和固定器瓷砖的控制孔隙率

    公开(公告)号:US6015517A

    公开(公告)日:2000-01-18

    申请号:US057306

    申请日:1998-04-08

    申请人: Jon A. Casey

    发明人: Jon A. Casey

    摘要: A ceramic contact sheet and setter tile with controlled porosity is introduced, along with the method for making the same. The amount of porosity is controlled by the volume percentage, particle size, and particle shape of a fugitive phase which can be added to the original refractory material slurry used to fabricate setter tiles and contact sheets. The fugitive phase can be used independently to introduce porosity in setter tiles and contact sheets or in conjunction with partial densification. Since porosity is not solely dependent upon partial sintering, higher porosity levels can be achieved with less impact on subsequent mechanical properties of the resultant refractory material.

    摘要翻译: 引入了具有受控孔隙率的陶瓷接触片和固定器片及其制造方法。 孔隙度的量由易位相的体积百分比,粒度和颗粒形状控制,这可以添加到用于制造安装器瓦片和接触片材的原始耐火材料浆料中。 逸散相可以独立地用于在固化剂砖和接触片中引入孔隙率,或与部分致密化相结合。 由于孔隙度不仅仅取决于部分烧结,所以可以实现较高的孔隙率水平,而对所得到的耐火材料的随后的机械性能的影响较小。