公开(公告)号：US06307184B1

公开(公告)日：2001-10-23

申请号：US09351586

申请日：1999-07-12

Applicant: Jeffrey D. Womack ,  Vuong P. Nguyen ,  Devendra Kumar ,  Jack S. Kasahara ,  Sokol Ibrani

Inventor： Jeffrey D. Womack ,  Vuong P. Nguyen ,  Devendra Kumar ,  Jack S. Kasahara ,  Sokol Ibrani

IPC: F27B514

CPC classification number: H01L21/67109

Abstract: A processing chamber and methods for employing this processing chamber to thermally treat wafer-like objects. The chamber comprises a double walled shell, a pedestal style heater, internal passages for the transport of cooling gases and removal of exhaust gases, independently variable gas introduction patterns, and a movable door for sealing the chamber. The chamber is designed to permit in situ cooling of wafer-like objects and to provide means for precise optimization of this cooling. The methods provide for the processing of the wafer-like object in an environment where the temperature, rate of change of the temperature, composition of gases and the relative timings of changes to these variables may be controlled to achieve the desired material properties in the wafer-like object or in films contained on this wafer-like object.

Abstract translation: 一种处理室和使用该处理室来热处理晶片状物体的方法。 该室包括双壁壳体，基座式加热器，用于输送冷却气体和排出废气的内部通道，独立可变的气体引入模式和用于密封腔室的可移动门。 该室被设计成允许对晶片状物体进行原位冷却，并提供用于精确优化该冷却的装置。 这些方法提供了在可以控制温度，温度变化率，气体成分和这些变量的变化的相对定时的环境中处理晶片状物体以实现晶片期望的材料性质的环境 样的物体或包含在该晶片状物体上的膜中。

公开(公告)号：US4748263A

公开(公告)日：1988-05-31

申请号：US924467

申请日：1986-10-29

Applicant: Devendra Kumar ,  George M. Fohlen ,  John A. Parker

Inventor： Devendra Kumar ,  George M. Fohlen ,  John A. Parker

IPC: C07F9/6593 ,  C08G73/12 ,  C07F9/00

CPC classification number: C08G73/128 ,  C07F9/65815

Abstract: 4-Aminophenoxy cyclotriphosphazenes are reacted with maleic anhydride to produce maleamic acids which are converted to the maleimides. The maleimides are polymerized. By selection of starting materials (e.g. hexakis amino or trisaminophenoxy-trisphenoxy-cyclotriphosphazenes), selection of molar proportions of reactants, use of mixtures of anhydrides and use of dianhydrides as bridging groups a variety of maleimides and polymers are produced. The polymers have high limiting oxygen indices, high char yields and other useful heat and fire resistant properties making them useful as, for example, impregnants of fabrics.

Abstract translation: 4-氨基苯氧基环三磷腈与马来酸酐反应产生马来酰亚胺酸，转化成马来酰亚胺。 马来酰亚胺被聚合。 通过选择起始材料（例如六氨基或三氨基苯氧基 - 三苯氧基 - 环三磷腈），选择反应物的摩尔比例，使用酸酐的混合物和使用二酸酐作为桥连基团，制备各种马来酰亚胺和聚合物。 聚合物具有高限制氧指数，高焦炭产率和其它有用的耐热和耐火性质，使得它们可用作例如织物浸渍剂。

公开(公告)号：US4634759A

公开(公告)日：1987-01-06

申请号：US760374

申请日：1985-07-30

Applicant: Devendra Kumar ,  George M. Fohlen ,  John A. Parker

Inventor： Devendra Kumar ,  George M. Fohlen ,  John A. Parker

IPC: C07F9/6593 ,  C08G73/12 ,  C08G73/10 ,  C08G79/02

CPC classification number: C07F9/65815 ,  C08G73/128 ,  Y10T428/3154 ,  Y10T428/31721 ,  Y10T428/31855

Abstract: 4-Aminophenoxy cyclotriphosphazenes are reacted with maleic anhydride to produce maleamic acids which are converted to the maleimides. The maleimides are polymerized. By selection of starting materials (e.g. hexakis amino or trisaminophenoxy-trisphenoxy-cyclotriphosphazenes), selection of molar proportions of reactants, use of mixtures of anhydrides and use of dianhydrides as bridging groups a variety of maleimides and polymers are produced. The polymers have high limiting oxygen indices, high char yeilds and other useful heat and fire resistant properties making them useful as, for example, impregnants of fabrics.

Abstract translation: 4-氨基苯氧基环三磷腈与马来酸酐反应产生马来酰亚胺酸，转化成马来酰亚胺。 马来酰亚胺被聚合。 通过选择起始材料（例如六氨基或三氨基苯氧基 - 三苯氧基 - 环三磷腈），选择反应物的摩尔比例，使用酸酐的混合物和使用二酸酐作为桥连基团，制备各种马来酰亚胺和聚合物。 聚合物具有高限制氧指数，高焦度和其他有用的耐热和耐火性能，使得它们可用作例如织物浸渍剂。

公开(公告)号：US20060151002A1

公开(公告)日：2006-07-13

申请号：US11022083

申请日：2004-12-22

Applicant: Devendra Kumar

Inventor： Devendra Kumar

IPC: B08B6/00 ,  B08B9/00 ,  H05H1/24

CPC classification number: C23C16/4405 ,  B08B7/0035 ,  H01J37/32862

Abstract: A method for cleaning a plasma CVD reactor includes, during a cleaning cycle, (i) providing cleaning active species derived from a cleaning gas in the plasma CVD reactor, and (ii) generating a hydrogen plasma in an interior of the plasma CVD reactor to clean the interior of the reactor.

Abstract translation: 一种用于清洗等离子体CVD反应器的方法包括在清洁循环期间，（i）提供源自等离子体CVD反应器中的清洁气体的清洁活性物质，和（ii）在等离子体CVD反应器内部产生氢等离子体 清洁反应堆的内部。

公开(公告)号：US06423947B1

公开(公告)日：2002-07-23

申请号：US09896525

申请日：2001-06-29

Applicant: Jeffrey D. Womack ,  Vuong P. Nguyen ,  Devendra Kumar ,  Jack S. Kasahara ,  Sokol Ibrani

Inventor： Jeffrey D. Womack ,  Vuong P. Nguyen ,  Devendra Kumar ,  Jack S. Kasahara ,  Sokol Ibrani

IPC: H05B514

Abstract: A processing chamber and methods for employing this processing chamber to thermally treat wafer-like objects. The chamber comprises a double walled shell, a pedestal style heater, internal passages for the transport of cooling gases and removal of exhaust gases, independently variable gas introduction patterns, and a movable door for sealing the chamber. The chamber is designed to permit in situ cooling of wafer-like objects and to provide means for precise optimization of this cooling. The methods provide for the processing of the wafer-like object in an environment where the temperature, rate of change of the temperature, composition of gases and the relative timings of changes to these variables may be controlled to achieve the desired material properties in the wafer-like object or in films contained on this wafer-like object.

公开(公告)号：US4550177A

公开(公告)日：1985-10-29

申请号：US599126

申请日：1984-04-11

Applicant: Devendra Kumar ,  George M. Fohlen ,  John A. Parker

Inventor： Devendra Kumar ,  George M. Fohlen ,  John A. Parker

IPC: C07F9/6593 ,  C08G73/12 ,  C07F9/65

CPC classification number: C08G73/128 ,  C07F9/65815 ,  Y10T428/315

Abstract: 4-Aminophenoxy cyclotriphosphazenes are reacted with maleic anhydride to produce maleamic acids which are converted to the maleimides. The maleimides are polymerized. By selection of starting materials (e.g. hexakis amino or trisaminophenoxy-trisphenoxy-cyclotriphosphazenes), selection of molar proportions of reactants, use of mixtures of anhydrides and use of dianhydrides as bridging groups a variety of maleimides and polymers are produced. The polymers have high limiting oxygen indices, high char yields and other useful heat and fire resistant properties making them useful as, for example, impregnants of fabrics.

Abstract translation: 4-氨基苯氧基环三磷腈与马来酸酐反应产生马来酰亚胺酸，转化成马来酰亚胺。 马来酰亚胺被聚合。 通过选择起始材料（例如六氨基或三氨基苯氧基 - 三苯氧基 - 环三磷腈），选择反应物的摩尔比例，使用酸酐的混合物和使用二酸酐作为桥连基团，制备各种马来酰亚胺和聚合物。 聚合物具有高限制氧指数，高焦炭产率和其它有用的耐热和耐火性质，使得它们可用作例如织物浸渍剂。