公开(公告)号：US20110261485A1

公开(公告)日：2011-10-27

申请号：US12766764

申请日：2010-04-23

申请人： Aron Pentek ,  Yi Zheng

发明人： Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/187

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/23 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： A magnetic write head having a magnetic write pole with a wrap around magnetic trailing shield. The wrap around magnetic trailing shield is separated by a first non-magnetic side gap at a first side of the write pole and by a second non-magnetic side gap at a second side of the write pole. The first second non-magnetic side gap is larger than the first non-magnetic side gap and is preferably at least twice the thickness of the first non-magnetic side gap. This design provides additional protection adjacent track interference at one side of the write pole and additional protection against magnetic write field loss at the other side of the write pole.

摘要翻译： 一种具有磁性写磁极的磁性写头，其具有围绕磁性后屏蔽的环绕。 绕磁屏蔽的缠绕由写磁极的第一侧的第一非磁性侧隙和写极的第二侧的第二非磁性侧间隙分开。 第一第二非磁性侧间隙大于第一非磁性侧间隙，优选为第一非磁性侧间隙的厚度的至少两倍。 该设计提供了额外的保护，在写入极的一侧附近有跟踪干扰，并且在写入极的另一侧具有额外的防磁磁场损耗的保护。

公开(公告)号：US20110135962A1

公开(公告)日：2011-06-09

申请号：US12634480

申请日：2009-12-09

申请人： LIUBO HONG ,  Aron Pentek ,  Yi Zheng

发明人： LIUBO HONG ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/33

CPC分类号： G11B5/1278 ,  G11B5/23 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T428/1171

摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a tapered surface at or near and air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on the tapered surface of the magnetic pole and away from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.

摘要翻译： 用非磁性前凸块层制造锥形磁极的方法。 磁极可以在空气轴承表面（ABS）处或附近具有锥形表面，其中写入极的厚度在远离ABS的方向上增加。 可以在磁极的锥形表面上远离ABS形成非磁性前凸块层。 前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

公开(公告)号：US07818875B2

公开(公告)日：2010-10-26

申请号：US11297228

申请日：2005-12-07

申请人： Hamid Balamame ,  Daniel Wayne Bedell ,  Mary Kathryn Gutberlet ,  Clarence Kai-Sheng Hsieh ,  Aron Pentek ,  Yi Zheng

发明人： Hamid Balamame ,  Daniel Wayne Bedell ,  Mary Kathryn Gutberlet ,  Clarence Kai-Sheng Hsieh ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/187

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method of manufacturing a magnetic write head that provides improved pole critical dimension control, such as improved track width control (improved sigma) and improved flare point control. The method involves a combination of several process improvements, such as photolithographically patterning a P2 pole tip defining photoresist frame using a zero print bias and also using a small flash field. The method also involves the use of a non-reactive ion etch to notch the first pole (P1) using the second pole (P2) as a mask.

摘要翻译： 一种制造磁写头的方法，其提供改进的极关键尺寸控制，例如改进的轨道宽度控制（改进的σ）和改进的闪点控制。 该方法涉及几个工艺改进的组合，例如使用零印刷偏压光刻地图案化限定光致抗蚀剂框架的P2极尖端并且还使用小的闪光场。 该方法还涉及使用非反应性离子蚀刻来使用第二极（P2）作为掩模来切割第一极（P1）。

公开(公告)号：US20100155367A1

公开(公告)日：2010-06-24

申请号：US12343720

申请日：2008-12-24

申请人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： B44C1/22

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head having a write pole with a tapered trailing edge step. The resulting tapered trailing edge step maximizes write field at very small bit sizes by preventing the magnetic saturation of the write pole at the pole tip. The method includes depositing a magnetic write pole material and then depositing a magnetic material over the magnetic write pole material. A RIE mask and hard mask are deposited over the magnetic bump material. A resist mask is formed over the RIE mask and hard mask, and a reactive ion etching is performed to transfer the pattern of the resist mask onto the underlying hard mask. Then an ion milling is performed to form a the magnetic step layer with a tapered edge that defines a tapered trailing edge step structure of the write pole.

摘要翻译： 一种用于制造具有具有锥形后缘台阶的写极的磁写头的方法。 所产生的锥形后沿步骤通过防止磁极尖端的写极的磁饱和而使非常小的位尺寸的写入场最大化。 该方法包括沉积磁性写入磁极材料，然后在磁性写入磁极材料上沉积磁性材料。 RIE掩模和硬掩模沉积在磁性凸块材料上。 在RIE掩模和硬掩模上形成抗蚀剂掩模，并且执行反应离子蚀刻以将抗蚀剂掩模的图案转移到下面的硬掩模上。 然后执行离子铣削以形成具有锥形边缘的磁性阶梯层，其限定了写入极的锥形后缘阶梯结构。

公开(公告)号：US07576951B2

公开(公告)日：2009-08-18

申请号：US11411556

申请日：2006-04-25

申请人： Donald G. Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Yinshi Liu ,  Aaron Neuhaus ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

发明人： Donald G. Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Yinshi Liu ,  Aaron Neuhaus ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/1871 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： A magnetic write head for perpendicular magnetic recording having a write pole with a concave trailing edge. The magnetic write pole can have a trapezoidal shape with first and second laterally opposed sides that are further apart at the trailing edge than at the leading edge. The write head may or may not include a magnetic trailing shield, and if a trailing shield is included it is separated from the trailing edge by a non-magnetic write gap layer. The concave trailing edge improves magnetic performance such as by improving the transition curvature. A method for constructing the write head includes forming a magnetic write pole by forming a mask structure over a deposited write pole material, the mask structure having an alumina hard mask and an image transfer layer such as DURAMIDE®. An alumina fill layer is then deposited and a chemical mechanical polish is performed to open up the image transfer layer. A reactive on etch is performed to remove the image transfer layer and a reactive ion mill or reactive ion etch is performed to remove the alumina hard mask and form a concave surface on the write pole.

摘要翻译： 用于垂直磁记录的磁写头，具有带有凹后缘的写极。 磁性写入极可以具有梯形形状，其中第一和第二横向相对侧在后缘处比在前缘处更远地分开。 写头可以包括或可以不包括磁性后屏蔽，并且如果包括后屏蔽，则其通过非磁性写间隙层与后缘分离。 凹形后边缘提高磁性能，例如通过改善转变曲率。 构成写入头的方法包括通过在沉积的写入极材料上形成掩模结构来形成磁性写入极，掩模结构具有氧化铝硬掩模和诸如DURAMIDE的图像转移层。 然后沉积氧化铝填充层，并执行化学机械抛光以打开图像转印层。 执行反应性蚀刻以去除图像转印层，并且执行反应性离子磨或反应离子蚀刻以除去氧化铝硬掩模并在写入极上形成凹面。

公开(公告)号：US20090117407A1

公开(公告)日：2009-05-07

申请号：US11934687

申请日：2007-11-02

申请人： Yi Zheng ,  Yimin Hsu ,  Wen-Chien David Hsiao ,  Ming Jiang ,  Aron Pentek ,  Sue Siyang Zhang ,  Edward Hin Pong Lee ,  Hung-Chin Guthrie ,  Ning Shi ,  Vladimir Nikitin ,  Prabodh Ratnaparkhi ,  Yinshi Liu

发明人： Yi Zheng ,  Yimin Hsu ,  Wen-Chien David Hsiao ,  Ming Jiang ,  Aron Pentek ,  Sue Siyang Zhang ,  Edward Hin Pong Lee ,  Hung-Chin Guthrie ,  Ning Shi ,  Vladimir Nikitin ,  Prabodh Ratnaparkhi ,  Yinshi Liu

IPC分类号： B05D5/12 ,  G11B5/33

CPC分类号： G11B5/3166 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T428/11 ,  Y10T428/1186

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method includes forming a write pole, and then depositing a refill layer. A mask structure can be formed over the writ pole and refill layer, the mask structure being configured to define a stitched pole. An ion milling or reactive ion milling can then be performed to remove portions of the refill layer that are not protected by the mask structure. Then a magnetic material can be deposited to form a stitched write pole that defines a secondary flare point. The stitched pole can also be self aligned with an electrical lapping guide in order to accurately locate the front edge of the secondary flare point relative to the air bearing surface of the write head.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法包括形成写极，然后沉积补充层。 掩模结构可以形成在写极和再填充层上，掩模结构被配置为限定缝合极。 然后可以执行离子铣或反应离子研磨以去除未被掩模结构保护的部分填充层。 然后可以沉积磁性材料以形成限定二次闪光点的缝合写入极。 缝合的杆也可以与电动研磨引导件自对准，以便相对于写入头的空气轴承表面精确地定位二次扩张点的前边缘。

公开(公告)号：US20080148552A1

公开(公告)日：2008-06-26

申请号：US11615818

申请日：2006-12-22

申请人： Aron Pentek ,  Yi Zheng ,  Howard Gordon Zolla

发明人： Aron Pentek ,  Yi Zheng ,  Howard Gordon Zolla

IPC分类号： G11B5/127 ,  G11B5/33

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write pole and trailing wrap around magnetic shield for use in a perpendicular magnetic data recording system. The method includes the use of a hard mask structure with end point detection material embedded in a hard mask material. The novel hard mask structure provides the mill resistance of a hard mask, with the end point detection advantages of an end point detection layer.

摘要翻译： 用于制造用于垂直磁数据记录系统的磁性写入磁极和磁性屏蔽的尾部缠绕的方法。 该方法包括使用具有嵌入硬掩模材料中的端点检测材料的硬掩模结构。 新颖的硬掩模结构提供了硬掩模的磨机电阻，具有终点检测层的终点检测优点。

公开(公告)号：US07380330B2

公开(公告)日：2008-06-03

申请号：US11186174

申请日：2005-07-21

申请人： Daniel Wayne Bedell ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

发明人： Daniel Wayne Bedell ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49052

摘要： After defining the P2 pole of a magnetic read head, alumina is deposited over it and planarized by CMP, with the portion of the alumina overlaying the ABS region of the P2 pole subsequently being masked by a photoresist layer and with the portions of the alumina overlaying the flare area, back gap region, and center tap regions of the P2 pole not being masked. A reactive ion mill is performed to expose the flare area, back gap region, and center tap regions of the P2 pole by removing the alumina over these portions, so that subsequent steps such as forming a layer of coiled conductors, forming a return pole, and forming stud connections along with removing the respective seed layers can be executed with the ABS region protected by the alumina and with the flare area, back gap region, and center tap region exposed.

摘要翻译： 在定义磁读头的P2极之后，将氧化铝沉积在其上并通过CMP平坦化，其中覆盖P2极的ABS区域的氧化铝的部分随后被光致抗蚀剂层掩蔽，并且氧化铝的部分覆盖 P2极的光斑区域，背隙区域和中心抽头区域不被掩蔽。 通过在这些部分上除去氧化铝，进行反应离子磨，以暴露P2极的火炬区域，后隙区域和中心抽头区域，从而形成后续步骤，例如形成线圈导体层，形成返回极， 并且可以利用由氧化铝保护的ABS区域和暴露的火炬区域，后隙区域和中心抽头区域来执行形成螺柱连接以及移除相应的种子层。

公开(公告)号：US20080112088A1

公开(公告)日：2008-05-15

申请号：US11598417

申请日：2006-11-13

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Edward Hin Pong Lee ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Edward Hin Pong Lee ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/33

CPC分类号： G11B5/1278 ,  G11B5/11

摘要： A magnetic write head for perpendicular magnetic recording that has write pole, a return pole and a trailing shield that is magnetically connected with magnetic return pole. The write head includes a magnetic pedestal and first and second magnetic studs that connect the trailing shield with the pedestal. The studs are laterally spaced a distance that is not greater than 5 um from the nearest side of the write pole. In other words, the studs are spaced from each other a distance that is no greater than the width of the leading edge of the write pole plus 10 um. This spacing of the studs prevents saturation of the trailing shield, maximizing field gradient and ensuring optimal magnetic write performance.

摘要翻译： 用于垂直磁记录的磁头，具有写磁极，与磁返回极磁性连接的返回极和后屏蔽。 写头包括一个磁性基座和将尾部屏蔽与基座相连的第一和第二磁性螺柱。 螺柱横向间隔开距离写柱最近侧不超过5um的距离。 换句话说，螺柱彼此间隔开不大于写入极的前缘的宽度加上10um的距离。 螺栓的这种间距防止后挡板的饱和，使场梯度最大化并确保最佳磁写性能。

公开(公告)号：US07217666B2

公开(公告)日：2007-05-15

申请号：US10792330

申请日：2004-03-02

申请人： Hung-Chin Guthrie ,  Ming Jiang ,  Jerry Lo ,  Aron Pentek ,  Yi Zheng

发明人： Hung-Chin Guthrie ,  Ming Jiang ,  Jerry Lo ,  Aron Pentek ,  Yi Zheng

IPC分类号： H01L21/461

CPC分类号： B24B1/00 ,  G11B5/00 ,  G11B5/3116 ,  G11B5/3163 ,  H01L21/00 ,  Y10T29/49032 ,  Y10T29/49044 ,  Y10T29/49048

摘要： A method for forming a high aspect ratio magnetic structure in a magnetic write head using a combination of chemical mechanical polishing and reactive ion etching.

摘要翻译： 使用化学机械抛光和反应离子蚀刻的组合在磁写头中形成高纵横比磁结构的方法。