公开(公告)号：US20070243709A1

公开(公告)日：2007-10-18

申请号：US11404524

申请日：2006-04-14

申请人： Alain Duboust ,  Wei-Yung Hsu ,  Feng Liu ,  Yan Wang ,  Zhihong Wang

发明人： Alain Duboust ,  Wei-Yung Hsu ,  Feng Liu ,  Yan Wang ,  Zhihong Wang

IPC分类号： H01L21/461 ,  B23H9/00

CPC分类号： B23H5/08 ,  B24B37/042 ,  C25D11/34 ,  C25F1/04 ,  H01L21/32125

摘要： A method and apparatus for removing conductive material from a substrate surface are provided. In one embodiment, a method is provided for electrochemical mechanical polishing of a substrate. A substrate comprising dielectric feature definitions, a barrier material disposed on the feature definitions, and a bulk conductive material in an amount sufficient to fill the feature definitions is provided. The substrate is exposed to an electrolyte solution. A passivation layer is formed on the conductive material. The passivation strength of the passivation layer is increased by polishing the substrate with a first voltage for a first time period. The substrate is polished with a second voltage higher than the first voltage for a second time period. Conductive material is removed from at least a portion of the substrate surface by anodic dissolution.

摘要翻译： 提供了用于从基板表面去除导电材料的方法和装置。 在一个实施例中，提供了一种用于衬底的电化学机械抛光的方法。 提供了包括介电特征定义的基板，设置在特征定义上的阻挡材料以及足以填充特征定义的量的体导电材料。 将基底暴露于电解质溶液。 在导电材料上形成钝化层。 通过用第一时间段的第一电压抛光衬底来增加钝化层的钝化强度。 在第二时间段内以比第一电压高的第二电压来抛光衬底。 通过阳极溶解从导电材料的至少一部分去除导电材料。

公开(公告)号：US20080277787A1

公开(公告)日：2008-11-13

申请号：US11746135

申请日：2007-05-09

申请人： Feng Q. Liu ,  Alain Duboust ,  Yan Wang ,  Wei-Yung Hsu ,  Tianbo Du

发明人： Feng Q. Liu ,  Alain Duboust ,  Yan Wang ,  Wei-Yung Hsu ,  Tianbo Du

IPC分类号： H01L23/485 ,  H01L21/4763

CPC分类号： B23H5/08 ,  H01L21/32125

摘要： A method and apparatus for processing barrier and metals disposed on a substrate in an electrochemical mechanical planarizing system are provided. In certain embodiments a method for electroprocessing a substrate is provided. The method comprises contacting the substrate with the non-conductive surface of a polishing pad assembly, establishing a first electrically conductive path through an electrolyte between an exposed layer of barrier material and a first electrode, establishing a second electrically conductive path through the electrolyte between the exposed layer of barrier material and a second electrode, applying a voltage to the first electrode to cause a voltage drop between the substrate and the second electrode, and removing the barrier material from the substrate.

摘要翻译： 提供了一种用于在电化学机械平面化系统中处理设置在基板上的屏障和金属的方法和装置。 在某些实施例中，提供了一种用于对基底进行电处理的方法。 该方法包括使衬底与抛光垫组件的非导电表面接触，建立穿过暴露的阻挡材料层和第一电极之间的电解质的第一导电路径，建立通过电解质之间的第二导电路径 暴露的阻挡材料层和第二电极，向第一电极施加电压以在衬底和第二电极之间引起电压降，以及从衬底去除阻挡材料。

公开(公告)号：US20090061741A1

公开(公告)日：2009-03-05

申请号：US11849724

申请日：2007-09-04

申请人： Zhihong Wang ,  Alain Duboust ,  Wei-Yung Hsu ,  Yan Wang

发明人： Zhihong Wang ,  Alain Duboust ,  Wei-Yung Hsu ,  Yan Wang

IPC分类号： B24B7/04

CPC分类号： B24B37/042 ,  H01L21/67219

摘要： A method for processing a substrate having a conductive layer disposed thereon is provided. The substrate is coupled with a planarizing head. The planarizing head is moved to a position above a polishing pad assembly. The planarizing pad is positioned relative to the polishing pad assembly without applying a voltage to the substrate. A first voltage is applied to the substrate for a first time period. A second voltage is applied to the substrate for a second time period in order to remove a portion of the conductive layer, wherein the second voltage is greater than the first voltage. In certain embodiments, applying a first voltage to the substrate further comprises forming a uniform passivation layer on the conductive layer.

摘要翻译： 提供一种处理其上设置有导电层的基板的方法。 衬底与平坦化头结合。 平坦化头移动到抛光垫组件上方的位置。 平面化焊盘相对于抛光垫组件定位，而不向衬底施加电压。 第一次施加第一电压到基板。 向基板施加第二电压第二时间段，以便去除导电层的一部分，其中第二电压大于第一电压。 在某些实施例中，向衬底施加第一电压还包括在导电层上形成均匀的钝化层。

公开(公告)号：US07344432B2

公开(公告)日：2008-03-18

申请号：US11555145

申请日：2006-10-31

申请人： Liang-Yun Chen ,  Yuchun Wang ,  Yan Wang ,  Alain Duboust ,  Daniel A. Carl ,  Ralph Wadensweiler ,  Manoocher Birang ,  Paul D. Butterfield ,  Rashid A. Mavliev ,  Stan D. Tsai ,  You Wang ,  Jie Diao ,  Renhe Jia ,  Lakshmanan Karuppiah ,  Robert Ewald

发明人： Liang-Yun Chen ,  Yuchun Wang ,  Yan Wang ,  Alain Duboust ,  Daniel A. Carl ,  Ralph Wadensweiler ,  Manoocher Birang ,  Paul D. Butterfield ,  Rashid A. Mavliev ,  Stan D. Tsai ,  You Wang ,  Jie Diao ,  Renhe Jia ,  Lakshmanan Karuppiah ,  Robert Ewald

IPC分类号： B23H5/06 ,  B23H3/00 ,  B24D11/02 ,  C25F3/30 ,  B24B49/00 ,  H05K3/07

CPC分类号： B24B37/046 ,  B24B27/0023 ,  B24B37/24 ,  B24B37/26 ,  B24D3/34 ,  B82Y30/00

摘要： An article of manufacture and apparatus are provided for processing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including polishing article comprising a body having at least a partially conductive polishing surface. An electrode is disposed below the polishing surface having a dielectric material therebetween. A plurality of apertures may be formed in the polishing surface and the dielectric material to at least partially expose the electrode to the polishing surface. A membrane may be disposed between the electrode and the polishing surface that is permeable to ions and current to promote continuity between the electrode and the polishing surface.

摘要翻译： 提供了一种用于处理基板表面的制造和设备。 在一个方面，提供了一种用于抛光衬底的制品，所述衬底包括具有至少部分导电的抛光表面的主体的抛光制品。 电极设置在其间具有介电材料的抛光表面下方。 可以在抛光表面和电介质材料中形成多个孔，以至少部分地将电极暴露于抛光表面。 可以在电极和抛光表面之间设置膜，其可透过离子和电流，以促进电极和抛光表面之间的连续性。

公开(公告)号：USD985153S1

公开(公告)日：2023-05-02

申请号：US29770167

申请日：2021-02-10

申请人： Yan Wang

设计人： Yan Wang

公开(公告)号：US11579086B2

公开(公告)日：2023-02-14

申请号：US17496262

申请日：2021-10-07

申请人： Yan Wang ,  Cory McCluskey

发明人： Yan Wang ,  Cory McCluskey

IPC分类号： C12Q1/686 ,  G01N21/64 ,  B01L9/00

摘要： Provided is a fluorescence reader that uses two excitation channels and can read up to seven different fluorescent dyes in a single run. Each excitation channel has one light source and one single excitation filter and one dichroic mirror. One excitation channel is capable of exciting multiple fluorescent dyes and can be used to distinguish multiple dyes in combination with multiple emission filters. The excitation channels are driven by a motor that can automatically switch the two excitation channels for taking images of up to seven different fluorescent dyes. An algorithm to calibrate the crosstalk between different fluorescent dyes is also provided. Also provided is a method for analyzing digital PCR data using a ratio of two fluorescence emission readings.

公开(公告)号：US20220026363A1

公开(公告)日：2022-01-27

申请号：US17496285

申请日：2021-10-07

申请人： Yan Wang ,  Cory McCluskey

发明人： Yan Wang ,  Cory McCluskey

IPC分类号： G01N21/64 ,  B01L9/00 ,  C12Q1/686

摘要： Provided is a fluorescence reader that uses two excitation channels and can read up to seven different fluorescent dyes in a single run. Each excitation channel has one light source and one single excitation filter and one dichroic mirror. One excitation channel is capable of exciting multiple fluorescent dyes and can be used to distinguish multiple dyes in combination with multiple emission filters. The excitation channels are driven by a motor that can automatically switch the two excitation channels for taking images of up to seven different fluorescent dyes. An algorithm to calibrate the crosstalk between different fluorescent dyes is also provided. Also provided is a method for analyzing digital PCR data using a ratio of two fluorescence emission readings.

公开(公告)号：US20220026362A1

公开(公告)日：2022-01-27

申请号：US17496262

申请日：2021-10-07

申请人： Yan Wang ,  Cory McCluskey

发明人： Yan Wang ,  Cory McCluskey

IPC分类号： G01N21/64 ,  B01L9/00 ,  C12Q1/686

摘要： Provided is a fluorescence reader that uses two excitation channels and can read up to seven different fluorescent dyes in a single run. Each excitation channel has one light source and one single excitation filter and one dichroic mirror. One excitation channel is capable of exciting multiple fluorescent dyes and can be used to distinguish multiple dyes in combination with multiple emission filters. The excitation channels are driven by a motor that can automatically switch the two excitation channels for taking images of up to seven different fluorescent dyes. An algorithm to calibrate the crosstalk between different fluorescent dyes is also provided. Also provided is a method for analyzing digital PCR data using a ratio of two fluorescence emission readings.

公开(公告)号：USD933383S1

公开(公告)日：2021-10-19

申请号：US29780385

申请日：2021-04-23

申请人： Yan Wang

设计人： Yan Wang

公开(公告)号：US10993305B2

公开(公告)日：2021-04-27

申请号：US16722070

申请日：2019-12-20

申请人： Yan Wang

发明人： Yan Wang

IPC分类号： H05B47/19 ,  H04W4/00 ,  H04W4/80

摘要： A wireless receiving circuit and a wireless control device. The wireless receiving circuit includes a signal receiving module, a Bluetooth signal processing module, a voltage stabilization module, and an output control module. An output end of the signal receiving module is connected with an input end of the Bluetooth signal processing module, and a voltage end of the Bluetooth signal processing module is connected with an output end of the voltage stabilization module. An output end of the Bluetooth signal processing module is connected with an input end of the output control module. The signal receiving module is to receive an external Bluetooth signal and is to transmit the signal to the Bluetooth signal processing module. The Bluetooth signal processing module is to process the external Bluetooth signal and is to transmit a control signal to the output control module.