Scanning exposure apparatus and method
    62.
    发明授权
    Scanning exposure apparatus and method 失效
    扫描曝光装置和方法

    公开(公告)号:US06674509B2

    公开(公告)日:2004-01-06

    申请号:US09965801

    申请日:2001-10-01

    申请人: Toru Suzuki

    发明人: Toru Suzuki

    IPC分类号: G03B2742

    摘要: A scanning exposure apparatus for transferring a pattern of a master onto each of a plurality of shot regions defined on a substrate, while synchronously scanning the master and the substrate. The apparatus includes a master stage for moving the master, a substrate stage for moving the substrate, and a controller for controlling movement of the substrate stage during scanning exposure of the plurality of shot regions so as to assure that a setting distance in which the substrate stage is moved guarantees that a synchronization error between the master stage and the substrate stage falls within an allowable range after the substrate stage is accelerated up to a scan speed for the scanning exposure. The controller controls the movement of the substrate stage such that a setting distance for first shot region, which is exposed first upon a change in a row to which a shot region to be exposed belongs, is set to be longer than a setting distance for other shot regions.

    摘要翻译: 一种扫描曝光装置,用于将母板的图案转印到限定在基板上的多个照射区域中的每一个上,同时扫描主板和基板。 该装置包括用于移动母版的主级,用于移动衬底的衬底台,以及控制器,用于控制在多个照射区域的扫描曝光期间衬底台的运动,以便确保衬底的设置距离 移动台被保证在基板台加速到用于扫描曝光的扫描速度之后,主台和基板台之间的同步误差落在容许范围内。 控制器控制衬底台的运动,使得首先在要曝光的拍摄区域所属的行中的改变时首先曝光的设置距离被设置为比其他设置距离长的设置距离 射击地区。

    Spectrometer with holographic and echelle gratings
    63.
    发明授权
    Spectrometer with holographic and echelle gratings 有权
    光谱仪具有全息和梯形光栅

    公开(公告)号:US06583874B1

    公开(公告)日:2003-06-24

    申请号:US09680932

    申请日:2000-10-10

    IPC分类号: G01J328

    摘要: A spectrometer has higher resolving power without enlarging a size of the apparatus. This spectrometer has a slit board, a mirror, a collimator lens, a holographic grating, an Echelle grating, a magnifier lens and a line sensor. The holographic grating is arranged to diffract parallel light incident from the collimator lens toward the Echelle grating. The Echelle grating is arranged to reflect the parallel light incident from the holographic grating toward the holographic grating.

    摘要翻译: 光谱仪具有更高的分辨能力,而不增加设备的尺寸。 该光谱仪具有狭缝板,反射镜,准直透镜,全息光栅,Echelle光栅,放大镜和行传感器。 全息光栅布置成将从准直透镜入射的平行光衍射到Echelle光栅。 Echelle光栅布置成将从全息光栅入射的平行光反射到全息光栅。

    Wavelength detector
    64.
    发明授权
    Wavelength detector 有权
    波长检测器

    公开(公告)号:US06243163B1

    公开(公告)日:2001-06-05

    申请号:US09398191

    申请日:1999-09-17

    IPC分类号: G01J328

    CPC分类号: G01J9/00 G01J3/28

    摘要: The present invention can accurately detect a wavelength of a light to be detected, which is output from a source of light to be detected, without an error even if there is a change in the characteristic of a spectroscope due to an individual difference among the spectroscopes or a change in the measuring environment. The device according to the invention emits at least two reference lights (Ln, La) having different wavelengths (&lgr;n, &lgr;a) as the reference lights by reference light source. And, actual characteristic value (D) of spectroscope is calculated on the basis of detection positions (Sn, Sa) of the at least two reference lights (Ln, La) on a sensor and the known wavelengths (&lgr;n, &lgr;a) of the at least two reference lights (Ln, La) (D=(&lgr;a−&lgr;n)/(Sa−Sn)). And, on the basis of the detection positions (Sn, SO) of the reference light (Ln) and the light to be detected (LO) on the sensor (10), the calculated actual characteristic value (D) of the spectroscope and the known wavelength (&lgr;n) of the reference light (Ln), wavelength (&lgr;O) of the light to be detected (LO) is calculated (&lgr;O=&lgr;n+(SO−Sn)·D).

    摘要翻译: 即使由于各分光器之间的个体差异而导致的分光器的特性发生变化,本发明也能够准确地检测从被检测光源输出的被检测光的波长 或测量环境的变化。 根据本发明的装置通过参考光源发射具有不同波长(lambdn,λ))的至少两个参考光(Ln,La)作为参考光。 并且,基于传感器上的至少两个参考光(Ln,La)的检测位置(Sn,Sa)以及在传感器上的已知波长(lambdn,λ)来计算分光计的实际特征值(D) 至少两个参考光(Ln,La)(D =(λ-lambdn)/(Sa-Sn)))。 并且,基于传感器(10)上的基准光(Ln)和被检测光(LO)的检测位置(Sn,SO),计算出的分光器的实际特性值(D)和 计算参考光(Ln)的已知波长(lambdn),待检测光(LO)的波长(lambd0)(lambdO = lambdn +(SO-Sn).D)。

    Multi-layer structure for II-VI group compound semiconductor on an InP
substrate and method for forming the same
    66.
    发明授权
    Multi-layer structure for II-VI group compound semiconductor on an InP substrate and method for forming the same 失效
    InP基板上的II-VI族化合物半导体的多层结构及其形成方法

    公开(公告)号:US5834361A

    公开(公告)日:1998-11-10

    申请号:US630126

    申请日:1996-04-10

    摘要: In a method of forming a II-VI compound semiconductor thin film on an InP substrate, a layer of III-V compound semiconductor mixed crystal is first formed on the InP substrate. The desorption rate of a group V element constituting the III-V compound semiconductor mixed crystal at a decomposition temperature of a native oxide layer formed on a surface of the III-V compound semiconductor mixed crystal layer is lower than a desorption rate of P of the InP substrate at a decomposition temperature of a native oxide layer formed on a surface of the InP substrate. A II-VI compound semiconductor thin film layer is formed on the first III-V compound semiconductor mixed crystal layer.

    摘要翻译: 在InP衬底上形成II-VI化合物半导体薄膜的方法中,首先在InP衬底上形成III-V族化合物半导体混晶层。 在III-V族化合物半导体混晶层的表面形成的自然氧化物层的分解温度下构成III-V族化合物半导体混晶的V族元素的解吸速度低于 InP衬底在形成在InP衬底的表面上的天然氧化物层的分解温度下。 在第一III-V族化合物半导体混晶层上形成II-VI族化合物半导体薄膜层。

    Three-dimensional image measuring device
    67.
    发明授权
    Three-dimensional image measuring device 失效
    三维图像测量装置

    公开(公告)号:US5629773A

    公开(公告)日:1997-05-13

    申请号:US492146

    申请日:1995-06-07

    摘要: A three-dimensional image measuring device which comprises a light source; a plane image forming unit for forming a plane image in a space in its depth direction on the basis of light emitted from the light source; a scanning unit for moving and scanning the plane image formed by the plane image forming unit in its depth direction; an object to be measured disposed in the space where the plane image is formed; a light receiving unit for measuring the strength of light scattered on a surface of the object as the plane image is moved and scanned and; a distance measuring unit for measuring the distance to the object on the basis of the output of the light receiving unit, whereby a three-dimensional image with least reduced invisible area is easily and accurately measured in a short time without using the principle of triangulation.

    摘要翻译: 一种三维图像测量装置,包括光源; 平面图像形成单元,用于基于从光源发射的光在其深度方向上的空间中形成平面图像; 扫描单元,用于在其深度方向上移动和扫描由平面图像形成单元形成的平面图像; 要被测量的物体设置在形成平面图像的空间中; 光接收单元,用于当移动和扫描平面图像时,测量在物体的表面上散射的光的强度; 距离测量单元,用于基于光接收单元的输出来测量到物体的距离,由此在不使用三角测量原理的情况下,在短时间内容易且精确地测量具有最小降低的不可见区域的三维图像。

    Three-dimensional image measuring device
    69.
    发明授权
    Three-dimensional image measuring device 失效
    三维图像测量装置

    公开(公告)号:US5448360A

    公开(公告)日:1995-09-05

    申请号:US165418

    申请日:1993-12-13

    摘要: A three-dimensional image measuring device which comprises a light source; a plane image forming unit for forming a plane image in a space in its depth direction .on the basis of light emitted from the light source; a scanning unit for moving and scanning the plane image formed by the plane image forming means in its depth direction; an object to be measured disposed in the space where the plane image is formed; a light receiving unit for measuring a strength of light scattered on a surface of the object as the plane image is moved and scanned and; a distance measuring unit for measuring the distance to the object on the basis of the output of the light receiving unit, whereby a three-dimensional image with least reduced invisible area is easily and accurately measured in a short time without using the principle of triangulation.

    摘要翻译: 一种三维图像测量装置,包括光源; 平面图像形成单元,用于基于从光源发射的光在其深度方向上的空间中形成平面图像; 扫描单元,用于在其深度方向上移动和扫描由平面图像形成装置形成的平面图像; 要被测量的物体设置在形成平面图像的空间中; 光接收单元,用于当平面图像被移动和扫描时,测量在物体的表面上散射的光的强度; 距离测量单元,用于基于光接收单元的输出来测量到物体的距离,由此在不使用三角测量原理的情况下,在短时间内容易且精确地测量具有最小降低的不可见区域的三维图像。

    Call selective receiver built in with vibrator
    70.
    发明授权
    Call selective receiver built in with vibrator 失效
    呼叫选择接收机内置振动器

    公开(公告)号:US5353017A

    公开(公告)日:1994-10-04

    申请号:US894772

    申请日:1992-06-05

    摘要: A call selective receiver body includes a built-in rechargeable small battery and a small vibrator, and a belt clip for receiving the receiver body includes a built-in dry battery having an electric capacity significantly greater than that of the small battery in the receiver body and a relatively large built-in vibrator. When the receiver body is put into the belt clip, a vibrator control signal output terminal of the receiver body is connected with a vibrator control signal input terminal of the belt clip, and electric power input terminals of the receiving body are connected with electric power output terminals of the belt clip, whereby the electric power source for the receiver is switched from the smaller battery in the receiver body to the greater battery in the belt clip; the rechargeable small battery in the receiver body starts being recharged; and the vibrator in the belt clip is made in action.

    摘要翻译: 呼叫选择接收机主体包括内置的可充电小电池和小型振动器,并且用于接收接收器主体的皮带夹包括内置的干电池,其电容量显着大于接收器主体中的小电池的电容量 和一个相对较大的内置振动器。 当接收体被放入皮带夹中时,接收体的振子控制信号输出端与带夹的振子控制信号输入端连接,接收体的电力输入端与电力输出 带夹的端子,其中用于接收器的电源从接收器主体中的较小电池切换到带夹中的较大电池; 接收体内的可充电小电池开始充电; 并且制动带夹中的振动器。