Diamond electron emission cathode, electron emission source, electron microscope, and electron beam exposure device
    61.
    发明授权
    Diamond electron emission cathode, electron emission source, electron microscope, and electron beam exposure device 失效
    金刚石电子发射阴极,电子发射源,电子显微镜和电子束曝光装置

    公开(公告)号:US07863805B2

    公开(公告)日:2011-01-04

    申请号:US11665472

    申请日:2006-06-19

    摘要: It is possible to provide an electron emission cathode, an electron emission source having a high-luminance and narrow energy width by using diamond and an electronic device using them. The diamond electron discharge cathode has a monocrystal diamond at least at a part of it. The diamond electron emission cathode has a columnar shape including a sharpened section and a heating section. The sharpened section has an electron emission section. The electron emission section and the heating section are formed by diamond semiconductor, which is formed by a p-type semiconductor containing 2×1015 cm−3 of p-type impurities or above. The electron emission section has the semiconductor. A metal layer is formed on the surface of the electron emission cathode. The metal layer exists at least at a part of the heating section. The distance from the electron emission section to the position nearest to the end of the metal layer is 500 μm. A pair of current introduction terminals supplies current to the heating section to heat the heating section. A part of the introduced electrons is emitted from the electron emission section.

    摘要翻译: 可以通过使用金刚石和使用它们的电子装置来提供电子发射阴极,具有高亮度和窄能量宽度的电子发射源。 金刚石电子放电阴极至少在其一部分具有单晶金刚石。 金刚石电子发射阴极具有包括锐化部分和加热部分的柱状。 锐化部分具有电子发射部分。 电子发射部分和加热部分由金刚石半导体形成,其由含有2×10 15 cm -3的p型杂质或以上的p型半导体形成。 电子发射部分具有半导体。 在电子发射阴极的表面上形成金属层。 金属层至少存在于加热部的一部分。 从电子发射部到最接近金属层末端的位置的距离为500μm。 一对电流引入端子向加热部分供电以加热加热部分。 引入的电子的一部分从电子发射部分发射。

    Single crystal diamond
    62.
    发明授权
    Single crystal diamond 有权
    单晶钻石

    公开(公告)号:US07615203B2

    公开(公告)日:2009-11-10

    申请号:US10584927

    申请日:2005-05-26

    摘要: A single crystal diamond grown by vapor phase synthesis, wherein when one main surface is irradiated with a linearly polarized light considered to be the synthesis of two mutually perpendicular linearly polarized light beams, the phase difference between the two mutually perpendicular linearly polarized light beams exiting another main surface on the opposite side is, at a maximum, not more than 50 nm per 100 μm of crystal thickness over the entire crystal. This single crystal diamond is of a large size and high quality unattainable up to now, and has characteristics that are extremely desirable in semiconductor device substrates and are applied to optical components of which low strain is required.

    摘要翻译: 通过气相合成生长的单晶金刚石,其中当被认为是两个相互垂直的线偏振光的合成的线偏振光照射一个主表面时,两个相互垂直的线偏振光束离开另一个的相位差 在整个晶体上,相对侧的主表面最大为每100微米的晶体厚度不大于50nm。 这种单晶金刚石迄今为止不具有大尺寸和高质量,并且具有在半导体器件基板中非常需要的特性,并且被应用于需要低应变的光学部件。

    Single Crystal Diamond
    63.
    发明申请
    Single Crystal Diamond 有权
    单晶钻石

    公开(公告)号:US20080311023A1

    公开(公告)日:2008-12-18

    申请号:US10584927

    申请日:2005-05-26

    IPC分类号: C01B31/06

    摘要: A single crystal diamond grown by vapor phase synthesis, wherein when one main surface is irradiated with a linearly polarized light considered to be the synthesis of two mutually perpendicular linearly polarized light beams, the phase difference between the two mutually perpendicular linearly polarized light beams exiting another main surface on the opposite side is, at a maximum, not more than 50 nm per 100 μm of crystal thickness over the entire crystal. This single crystal diamond is of a large size and high quality unattainable up to now, and has characteristics that are extremely desirable in semiconductor device substrates and are applied to optical components of which low strain is required.

    摘要翻译: 通过气相合成生长的单晶金刚石,其中当被认为是两个相互垂直的线偏振光的合成的线偏振光照射一个主表面时,两个相互垂直的线偏振光束离开另一个的相位差 在整个晶体上,相对侧的主表面最大为每100微米的晶体厚度不大于50nm。 这种单晶金刚石迄今为止不具有大尺寸和高质量,并且具有在半导体器件基板中非常需要的特性,并且被应用于需要低应变的光学部件。

    Diamond single crystal composite substrate and method for manufacturing the same
    65.
    发明授权
    Diamond single crystal composite substrate and method for manufacturing the same 有权
    金刚石单晶复合基板及其制造方法

    公开(公告)号:US07407549B2

    公开(公告)日:2008-08-05

    申请号:US10980152

    申请日:2004-11-04

    IPC分类号: C30B29/02

    CPC分类号: C30B29/04 C30B25/20

    摘要: A diamond single crystal composite substrate which are constructed from a plurality of diamond single crystal substrates with uniform plane orientations disposed side by side and integrated overall by growing diamond single crystals thereon by vapor phase synthesis, in which the deviation of the plane orientation of the main plane of each of said plurality of diamond single crystal substrates, excluding one diamond single crystal substrate, from the {100} plane is less than 1 degree, the deviation of the plane orientation of the main plane of the excluded one substrate from the {100} plane is 1 to 8 degrees, said one diamond single crystal substrate is disposed in the outermost circumferential part when the diamond single crystal substrates are disposed side by side, and is disposed so that the direction in the main plane of said one substrate faces in the outer circumferential direction of the disposed substrates, and diamond single crystals are then grown by vapor phase synthesis so that the diamond single crystal grown from said one diamond single substrate is caused to cover the diamond single crystals grown on the other substrates, to achieve an overall integration.

    摘要翻译: 一种金刚石单晶复合基板,其由具有均匀平面取向的多个金刚石单晶基板构成,并且通过气相合成在其上生长金刚石单晶整体并入,其中主体的平面取向偏离 从{100}平面除去一个金刚石单晶衬底的所述多个金刚石单晶衬底中的每一个的平面的面积小于1度,排除的一个衬底的主平面的平面取向与{100 }平面为1〜8度,当金刚石单晶基板并排配置时,所述一个金刚石单晶基板配置在最外周部,并且配置成使得在所述一个的主平面中的<100>方向 衬底在所设置的衬底的外周方向上面对,然后通过气相合成生长金刚石单晶 使得从所述一个金刚石单个衬底生长的金刚石单晶被覆盖在其它衬底上生长的金刚石单晶,以实现整体的整合。

    Analytical model producing method and analytical model producing apparatus
    66.
    发明授权
    Analytical model producing method and analytical model producing apparatus 有权
    分析模型制作方法和分析模型制作装置

    公开(公告)号:US07395190B2

    公开(公告)日:2008-07-01

    申请号:US10073008

    申请日:2002-02-12

    IPC分类号: G06G7/64

    CPC分类号: G06F17/5018

    摘要: The present invention provides an analytical model preparing apparatus which reduces the user's labor of template selecting operation by selecting and presenting an appropriate template from among a plurality of already prepared templates. The analytical model preparing apparatus of the invention comprises means for entering a shape model to be analyzed; a database which associates at least one already prepared shape model with the analytical model prepared for such an already prepared shape model, and registers the same; means for collating the above-mentioned shape model to be analyzed with at least one already prepared shape model; analytical model preparing means for preparing at least one analytical model corresponding to the shape model to be analyzed, by use of analytical model preparing information prepared for the above-mentioned already prepared shape model, in accordance with the result of collation; and mesh quality evaluating means for calculating a mesh quality evaluation value for the analytical model corresponding to at least one prepared shape model to be analyzed.

    摘要翻译: 本发明提供了一种分析模型制备装置,其通过从多个已经准备好的模板中选择和呈现适当的模板来减少用户对模板选择操作的劳动。 本发明的分析模型制备装置包括用于输入要分析的形状模型的装置; 将至少一个已经准备好的形状模型与为这种已经准备好的形状模型准备的分析模型相关联的数据库,并将其注册; 用于将上述具有至少一个已经准备好的形状模型进行分析的形状模型整理的装置; 分析模型制备装置,用于根据对照结果,通过使用为上述已经制备的形状模型制备的准备信息的分析模型来制备对应于待分析的形状模型的至少一个分析模型; 以及用于计算与要分析的至少一个准备形状模型相对应的分析模型的网格质量评估值的网格质量评估装置。

    Single crystalline diamond and producing method thereof
    69.
    发明申请
    Single crystalline diamond and producing method thereof 有权
    单晶金刚石及其制造方法

    公开(公告)号:US20060231015A1

    公开(公告)日:2006-10-19

    申请号:US11402062

    申请日:2006-04-12

    CPC分类号: C30B29/04 C30B25/20

    摘要: The object of the present invention is to obtain a high quality single crystalline diamond that has less distortion and large area suitable for semiconductor device substrates or an optical component material. The present invention is a single crystalline diamond produced by chemical vapor deposition, wherein, when a linear polarized light which is composed of two linear polarized lights perpendicular to each other is introduced into one main face of the single crystalline diamond, a maximum value of a retardation between the two linear polarized lights perpendicular to each other which come out from an opposite main face is not more than 50 μm at maximum per a thickness of 100 μm across an entire of the single crystalline diamond, and also a method for producing the diamond.

    摘要翻译: 本发明的目的是获得具有较小变形和大面积的高半导体器件衬底或光学组件材料的高质量单晶金刚石。 本发明是通过化学气相沉积法生产的单晶金刚石,其中当由彼此垂直的两个线性偏振光组成的线性偏振光被引入单晶金刚石的一个主面时,其最大值为 在整个单晶金刚石上,相对于从相对的主面出来的彼此垂直的两个线偏振光之间的延迟最大值不超过每100μm厚度100mum的最大50μm,并且还有一种用于制造金刚石的方法 。