摘要:
A sample transfer device is provided which can insert to a charged particle beam apparatus a sample to be observed and analyzed under irradiation of a charged particle beam while suppressing to a minimum the time to expose the sample to the atmospheric environment. The sample transfer device for transferring the sample to be observed and analyzed by irradiating the charged particle beam comprises an expansible hollow member capable of accommodating a sample holder mounting the sample, a fixing member for fixing the sample holder within the expansible hollow member, and a sealing member communicating with the interior of the expansible hollow member to open/close an opening through which the sample holder passes.
摘要:
A pickup and a drive, in a small size, having a spherical aberration correction device capable of correcting various spherical aberration, and coma aberration and/or astigmatism with a low power consumption. A variable-focus lens actuator can correct spherical aberration such that a transparent deformation film warps into a parabolic shape when a magnetic field is applied thereto, thereby changing the light intensity distribution of transmitted light. Further, the variable-focus lens actuator can correct coma aberration and/or astigmatism by arbitrarily tilting the transparent film to change the proceeding direction of the transmitted light.
摘要:
An evaluation method and print wire method which includes (a) fitting a modulation characteristic formula M,m=Msat (1−(Pws−Pasy)/(Pw,m−Pasy)) having a saturated modulation Msat, write start power Pws, and asymptotic power Pasy as parameters to a relation between a plurality of kinds of write power Pw,m and a modulation M,m which is obtained from a signal amplitude of a trial-written signal, and finding an index value of an error; and (b) evaluating whether or not the relation between the write power and the modulation is valid for write power adjustment by using the index value of the error and a predetermined value the print write method further including (c) setting the write power based upon the result of evaluating and executing a write power process with the set write power.
摘要:
A write power adjustment method makes it possible to set optimum write power with high precision. Trial writing is conducted by using write power Pw,m (where m is an integer) of a plurality of kinds, and a modulation M,m associated with each write power is calculated. Optimum asymptotic power Pasy-opt is calculated by performing predetermined computation by using reference asymptotic power Pasy-ref and reference write start power Pws-ref which are previously determined for each medium. An evaluated value S,m=M,m×(Pw,m−Pasy-opt) is calculated by using the optimum asymptotic power Pasy-opt. Write power Pw that makes the evaluated value S equal to zero when applying straight line approximation to a relation between the write power Pw,m and the evaluated value S,m is calculated as optimum write start power Pws-opt. And optimum write power Pw-opt is found by performing predetermined computation on the optimum write start power Pws-opt.
摘要:
A sample transfer device is provided which can insert to a charged particle beam apparatus a sample to be observed and analyzed under irradiation of a charged particle beam while suppressing to a minimum the time to expose the sample to the atmospheric environment. The sample transfer device for transferring the sample to be observed and analyzed by irradiating the charged particle beam comprises an expansible hollow member capable of accommodating a sample holder mounting the sample, a fixing member for fixing the sample holder within the expansible hollow member, and a sealing member communicating with the interior of the expansible hollow member to open/close an opening through which the sample holder passes.
摘要:
A pickup and a drive, in a small size, having a spherical aberration correction device capable of correcting various spherical aberration, and coma aberration and/or astigmatism with a low power consumption. A variable-focus lens actuator can correct spherical aberration such that a transparent deformation film warps into a parabolic shape when a magnetic field is applied thereto, thereby changing the light intensity distribution of transmitted light. Further, the variable-focus lens actuator can correct coma aberration and/or astigmatism by arbitrarily tilting the transparent film to change the proceeding direction of the transmitted light.
摘要:
The present invention achieves an optical recording and regenerating apparatus focusing two opposed beams of light at a same place in an optical recording medium to record a standing wave generated by interference of the two beams of light. In the apparatus, phase information is recorded in the optical recording medium by a phase modulating means for modulating phase of one of the two beams of light. The generation reference light generated from a light source is allowed to interfere with regenerated light generated by projecting one of the two beams of light onto the optical recording medium to generate three or more beams of interfering light having different interference phases are simultaneously generated. The three or more beams of interfering light are then detected, and the phase modulated by the phase modulating means is demodulated from an output of the detector.
摘要:
The objects of the present invention are to facilitate the driving of the recording energy source, and to secure sufficient cooling time of the recording medium to promote the high-speed formation of high-precision marks and to provide high-speed and large-capacity information recording apparatuses at a low cost. To achieve the above objects, at the time of information recording, p is chosen as the integer constant for marks natural number k times long of the detection window width by referring to the mark length in the recording data sequence, the recording data sequence is discriminated according to the quotient obtained by and the remainder remaining after dividing k+p by two or more integer constants, and the energy generating means is driven according to different procedures based on the result of discrimination obtained thereby.
摘要:
A method of manufacturing a tungsten sputtering target includes pressing a high purity tungsten powder to form a pressed compact, first sintering the pressed compact at a temperature of 1450-1700° C. for one hour or longer after the pressed compact is heated at a heating-up rate of 2-5° C./min on the way to a maximum sintering temperature, second sintering the pressed compact to form a sintered body at a temperature of 1900° C. or higher for 5 hours or longer, working the sintered body to obtain a shape of a target, subjecting the target to a grinding work of at least one of rotary grinding and polishing, and subjecting the target to a finishing work of at least one of etching and reverse sputtering.