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公开(公告)号：US20100214695A1
公开(公告)日：2010-08-26
申请号：US12705490
申请日：2010-02-12
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist by means of a first etching gas, etching the second hard mask by means of the first etching gas using the patterned resist as a mask to transfer the patterns to the second hard mask, etching the first hard mask by means of a second etching gas different from the first etching gas using the second hard mask as a mask to transfer the patterns to the first hard mask, and performing ion beam etching in order to deactivate the magnetic recording layer exposed in the recesses and to remove the second hard mask.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模和抗蚀剂，将压模压印到抗蚀剂上，以将凹凸图案转印到抗蚀剂上， 通过第一蚀刻气体去除残留在图案化抗蚀剂的凹部中的残留物，利用第一蚀刻气体，使用图案化抗蚀剂作为掩模蚀刻第二硬掩模，以将图案转移到第二硬掩模，蚀刻第一 通过不同于使用第二硬掩模的第一蚀刻气体作为掩模的第二蚀刻气体将硬掩模转印到第一硬掩模，并且执行离子束蚀刻以使暴露在凹部中的磁记录层失活 并移除第二个硬掩模。
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公开(公告)号：US07782562B2
公开(公告)日：2010-08-24
申请号：US11527458
申请日：2006-09-27
IPC分类号： G11B15/18
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/65 , G11B5/66 , G11B5/667 , G11B5/743 , G11B5/855 , G11B2005/0029
摘要： According to one embodiment, a magnetic recording media includes a magnetic recording layer formed on a substrate, in which recording tracks and servo areas are prescribed as patterns of protrusions and recesses formed on the magnetic recording layer so that thin film portions of the magnetic recording layer are formed under the recesses, a thickness of magnetic recording layer at the thin film portion is smaller than a thickness of magnetic recording layer at the protrusion in the servo area, and a magnetization direction of the protrusion is antiparallel to a magnetization direction of the thin film in the servo area.
摘要翻译： 根据一个实施例，磁记录介质包括形成在基板上的磁记录层，其中记录轨道和伺服区被指定为在磁记录层上形成的突起和凹槽的图案，使得磁记录层的薄膜部分 形成在凹部下方，薄膜部分处的磁记录层的厚度小于伺服区域中的突起处的磁记录层的厚度，并且突起的磁化方向与薄的磁化方向反平行 电影在伺服区。
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公开(公告)号：US20100148095A1
公开(公告)日：2010-06-17
申请号：US12538638
申请日：2009-08-10
申请人： Kazuyo Umezawa , Seiji Morita , Masatoshi Sakurai
发明人： Kazuyo Umezawa , Seiji Morita , Masatoshi Sakurai
CPC分类号： G11B5/855
摘要： According to one embodiment, a stamper has a data area and servo area, and has concentric or spiral grooves formed in the data area. Phases αE and αH at which differential signal levels of the E- and H-polarized light are maximum when the data area is irradiated with a laser beam have a relationship represented by (αE+αH)≦270°
摘要翻译： 根据一个实施例，压模具有数据区域和伺服区域，并且在数据区域中形成有同心或螺旋形凹槽。 当用激光束照射数据区时，E-偏振光和H偏振光的差分信号电平最大的相位αE和αH具有由（αE+αH）＆nlE表示的关系; 270°
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公开(公告)号：US20100143517A1
公开(公告)日：2010-06-10
申请号：US12538718
申请日：2009-08-10
申请人： Kazuyo Umezawa , Seiji Morita , Masatoshi Sakurai
发明人： Kazuyo Umezawa , Seiji Morita , Masatoshi Sakurai
IPC分类号： B29D17/00
摘要： According to one embodiment, a stamper has three-dimensional patterns in a dummy region. The three-dimensional patterns have a repeatable run out of 1 nm or less between the 15th and 40th orders when the rotational frequency is the first order as a reference.
摘要翻译： 根据一个实施例，压模在虚拟区域中具有三维图案。 当旋转频率是第一级作为参考时，三维图案在15和40次之间具有1nm或更小的可重复运行。
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公开(公告)号：US07662264B2
公开(公告)日：2010-02-16
申请号：US11406502
申请日：2006-04-19
IPC分类号： C23C14/34
CPC分类号： G11B5/855
摘要： A method for producing a magnetic recording medium, includes: forming an SOG film on a surface of a magnetic layer; forming a concavo-convex structure in the SOG film comprising one selected from a group consisting of silica glass, alkylsiloxane polymer, methyl silsesquioxane polymer, hydrogen silsesquioxane polymer and hydro alkylsiloxane polymer; etching the SOG film to expose the surface of the magnetic layer; etching the exposed surface of the magnetic layer by ion milling; and forming a filling layer on the surface of the magnetic layer while leaving a portion of the magnetic layer having been subjected to the ion milling.
摘要翻译： 一种制造磁记录介质的方法，包括：在磁性层的表面上形成SOG膜; 在SOG膜中形成凹凸结构，其包含选自二氧化硅玻璃，烷基硅氧烷聚合物，甲基倍半硅氧烷聚合物，氢倍半硅氧烷聚合物和氢烷基硅氧烷聚合物的一种; 蚀刻SOG膜以暴露磁性层的表面; 通过离子研磨蚀刻磁性层的暴露表面; 并且在磁性层的表面上形成填充层，同时留下已经进行离子铣削的磁性层的一部分。
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66.发明授权Method for manufacturing a magnetic recording medium utilizing first and second imprint stampers 失效利用第一和第二压印机制造磁记录介质的方法公开(公告)号：US07575705B2
公开(公告)日：2009-08-18
申请号：US11691774
申请日：2007-03-27
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/865 , G11B2005/0002 , Y10S977/887 , Y10T29/49069
摘要： An imprint stamper for manufacturing a recording medium includes a first transfer region which corresponds to a servo region of a recording medium using a sector servo system and has a pattern with a plurality of quadrilateral recess or protrusion portions formed in a surface thereof, and a second transfer region which corresponds to a data region of the recording medium and has a pattern with a plurality of dots of recess or protrusion portions arrayed in a form of a hexagonal lattice in a surface thereof.
摘要翻译： 用于制造记录介质的压印模具包括对应于使用扇区伺服系统的记录介质的伺服区域的第一传送区域，并且具有形成在其表面中的多个四边形凹部或突出部分的图案，第二传送区域 转印区域对应于记录介质的数据区域，并且具有在其表面上排列成六角形格子形状的多个凹点或突起部分的图案。
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公开(公告)号：US20090202865A1
公开(公告)日：2009-08-13
申请号：US12431671
申请日：2009-04-28
CPC分类号： G11B5/855
摘要： According to one embodiment, a magnetic recording medium includes magnetic patterns made of a ferromagnetic recording layer containing Co, and a nonmagnetic layer which separates the magnetic patterns and has a lower Co concentration than the magnetic patterns.
摘要翻译： 根据一个实施例，磁记录介质包括由包含Co的铁磁记录层制成的磁图案和分离磁图案并且具有比磁图案低的Co浓度的非磁性层。
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公开(公告)号：US20090166323A1
公开(公告)日：2009-07-02
申请号：US12400288
申请日：2009-03-09
IPC分类号： B44C1/22
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes depositing a magnetic recording layer and a sacrifice layer on a substrate, patterning the sacrifice layer and magnetic recording layer to form protruded magnetic patterns and sacrifice patterns, depositing a nonmagnetic material in recesses between the magnetic patterns and sacrifice patterns and on the sacrifice patterns, and etching back the nonmagnetic material.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在基片上沉积磁记录层和牺牲层，图案化牺牲层和磁记录层以形成突出的磁图并牺牲图案，将非磁性材料沉积在凹陷中 在磁图案和牺牲图案之间以及牺牲图案上，并且蚀刻非磁性材料。
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69.发明申请公开(公告)号：US20090162704A1
公开(公告)日：2009-06-25
申请号：US12400224
申请日：2009-03-09
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming protruded magnetic patterns on a substrate, depositing a nonmagnetic material in recesses between the magnetic patterns and on the magnetic patterns, and etching back the nonmagnetic material using an oxygen-containing etching gas while reforming a surface of the nonmagnetic material.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括在基片上形成突出的磁图案，在非磁性材料之间的磁性图案之间的凹槽中和非磁性材料上沉积非磁性材料，并使用含氧蚀刻 气体同时重整非磁性材料的表面。
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公开(公告)号：US20090042112A1
公开(公告)日：2009-02-12
申请号：US12285401
申请日：2008-10-03
IPC分类号： G03F1/00
CPC分类号： G11B5/59688 , B82Y10/00 , G11B5/59655 , G11B5/743 , G11B5/855
摘要： A magnetic recording media has a substrate and a magnetic recording layer containing ferromagnatic patterns on the substrate, the magnetic recording layer including a data zone to constitute a recording track and a servo zone to constitute a preamble region, an address region and a burst region, in which the address region and the burst region are separated by a part of the recording track.
摘要翻译： 磁记录介质具有衬底和在衬底上含有铁磁图案的磁记录层，磁记录层包括构成记录磁道的数据区和构成前导区的伺服区，地址区和突发区， 其中地址区域和突发区域被记录轨道的一部分分隔开。
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