公开(公告)号：US20110192635A1

公开(公告)日：2011-08-11

申请号：US13091728

申请日：2011-04-21

申请人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

发明人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

IPC分类号： H05K1/00 ,  H01B13/06

CPC分类号： B81C1/00698 ,  Y10T29/49117

摘要： A microstructure comprises a laminate structure having a first conductor, a second conductor, and an intervening insulator located between the first and the second conductors. The first conductor includes opposite faces in relation to the second conductor, side faces, and edge parts which form the boundaries of the aforementioned opposite faces and side faces. The second conductor includes an extended face extending beyond the edge parts exceeding the first conductor. The insulation film includes an area covering at least part of an edge part and/or at least part of a side face.

摘要翻译： 微结构包括具有第一导体，第二导​​体和位于第一和第二导体之间的中间绝缘体的层压结构。 第一导体包括相对于第二导体的相对面，侧面和形成上述相对面和侧面的边界的边缘部分。 第二导体包括延伸超过超过第一导体的边缘部分的延伸面。 绝缘膜包括覆盖边缘部分的至少一部分和/或侧面的至少一部分的区域。

公开(公告)号：US20100092130A1

公开(公告)日：2010-04-15

申请号：US12573393

申请日：2009-10-05

申请人： Hiromitsu SONEDA ,  Tsuyoshi Matsumoto ,  Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Osamu Tsuboi

发明人： Hiromitsu SONEDA ,  Tsuyoshi Matsumoto ,  Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Osamu Tsuboi

IPC分类号： G02B6/26 ,  H02N1/00 ,  G02B26/08

CPC分类号： G02B26/0841 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  B81C3/001 ,  G01D5/285 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  H02N1/006

摘要： A micro movable device includes: a micro movable substrate in which a micro movable unit is formed, the micro movable unit including a frame, a movable part, and a coupling part for coupling the frame and the movable part to define an axial center of rotation of the movable part; a supporting substrate; and a reinforced fixed part provided between the frame and the supporting substrate, and including a first spacer that joins the frame to the supporting substrate and an adhesive part that covers the first spacer and joins the frame to the supporting substrate, wherein the frame includes a first area facing the movable part in a direction of extent of the axial center, and a second area different from the first area, and the reinforced fixed part is bonded to the second area of the frame.

摘要翻译： 微型移动装置包括：微型可移动基板，其中形成有微型可动单元，微型可移动单元包括框架，可移动部件和用于联接框架和可动部件的联接部件，以限定轴向旋转中心 的可动部分; 支撑基板; 以及设置在所述框架和所述支撑基板之间的加强固定部，并且包括将所述框架连接到所述支撑基板的第一间隔件和覆盖所述第一间隔件并将所述框架连接到所述支撑基板的粘合部，其中，所述框架包括 所述第一区域与所述第一区域不同的第二区域，所述加强固定部分接合到所述框架的第二区域。

公开(公告)号：US20090001487A1

公开(公告)日：2009-01-01

申请号：US12164670

申请日：2008-06-30

申请人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

发明人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

IPC分类号： H01L29/84 ,  H01L21/52

CPC分类号： H01L23/055 ,  B81B7/0038 ,  B81B2201/0235 ,  G01P1/023 ,  G01P15/0802 ,  H01L23/564 ,  H01L24/05 ,  H01L24/16 ,  H01L24/48 ,  H01L24/49 ,  H01L24/73 ,  H01L25/0657 ,  H01L2224/0401 ,  H01L2224/05553 ,  H01L2224/05554 ,  H01L2224/16 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48235 ,  H01L2224/484 ,  H01L2224/49175 ,  H01L2224/73257 ,  H01L2224/8192 ,  H01L2224/8592 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01014 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01075 ,  H01L2924/10161 ,  H01L2924/1461 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/16195 ,  H01L2924/06 ,  H01L2924/00 ,  H01L2224/45099 ,  H01L2224/05599

摘要： A packaged device includes a package having an inner surface defining a closed internal space, a device chip fixed to the package in the internal space, and a parylene film covering at least a part of the inner surface of the package and/or at least a part of a surface of the device chip.

摘要翻译： 封装装置包括具有限定封闭内部空间的内表面的封装，固定在内部空间中的封装的器件芯片和覆盖封装的内表面的至少一部分的聚对二甲苯膜和/或至少一个 器件芯片表面的一部分。

公开(公告)号：US20110124143A1

公开(公告)日：2011-05-26

申请号：US13020101

申请日：2011-02-03

申请人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

发明人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

IPC分类号： H01L21/52

CPC分类号： H01L23/055 ,  B81B7/0038 ,  B81B2201/0235 ,  G01P1/023 ,  G01P15/0802 ,  H01L23/564 ,  H01L24/05 ,  H01L24/16 ,  H01L24/48 ,  H01L24/49 ,  H01L24/73 ,  H01L25/0657 ,  H01L2224/0401 ,  H01L2224/05553 ,  H01L2224/05554 ,  H01L2224/16 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48235 ,  H01L2224/484 ,  H01L2224/49175 ,  H01L2224/73257 ,  H01L2224/8192 ,  H01L2224/8592 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01014 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01075 ,  H01L2924/10161 ,  H01L2924/1461 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/16195 ,  H01L2924/06 ,  H01L2924/00 ,  H01L2224/45099 ,  H01L2224/05599

摘要： A packaged device includes a package having an inner surface defining a closed internal space, a device chip fixed to the package in the internal space, and a parylene film covering at least a part of the inner surface of the package and/or at least a part of a surface of the device chip.

摘要翻译： 封装装置包括具有限定封闭内部空间的内表面的封装，固定在内部空间中的封装的器件芯片和覆盖封装的内表面的至少一部分的聚对二甲苯膜和/或至少一个 器件芯片表面的一部分。

公开(公告)号：US07880951B2

公开(公告)日：2011-02-01

申请号：US12059859

申请日：2008-03-31

申请人： Osamu Tsuboi ,  Norinao Kouma ,  Hiromitsu Soneda ,  Hisao Okuda ,  Yoshihiro Mizuno ,  Tsuyoshi Matsumoto

发明人： Osamu Tsuboi ,  Norinao Kouma ,  Hiromitsu Soneda ,  Hisao Okuda ,  Yoshihiro Mizuno ,  Tsuyoshi Matsumoto

IPC分类号： G02B26/00

CPC分类号： G02B26/0841 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2201/047

摘要： A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.

摘要翻译： 微振荡装置包括框架，包括用于施加参考电位的第一驱动电极的振荡部分和用于将框架和振荡部分彼此连接的连接部分，其中连接部分限定摆动轴线 摆动部分的运动。 第二驱动电极固定到框架以与第一驱动电极协作以产生用于振荡运动的驱动力。 第一驱动电极包括彼此分离并沿与轴线交叉的方向延伸的第一端部延伸部和第二端部延伸部。 第二驱动电极在第一和第二端部延伸部之间的间隔距离内。

公开(公告)号：US20100194235A1

公开(公告)日：2010-08-05

申请号：US12761123

申请日：2010-04-15

申请人： Osamu TSUBOI ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

发明人： Osamu TSUBOI ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

IPC分类号： H02N11/00

CPC分类号： B81B3/0086 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  G02B26/0841

摘要： A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X1) of the present invention includes a movable portion including a first driving electrode, a second driving electrode for generating electrostatic attraction between the first driving electrode and the second driving electrode, a first conductor portion (22c) electrically connected to the first driving electrode, a second conductor portion (22b) electrically connected to the second driving electrode, and a third conductor portion (21a) which is not electrically connected to the first and the second driving electrodes and which is bonded to the first conductor portion (22c) via an insulating film (23) and bonded to the second conductor portion (22b) via the insulating film (23).

摘要翻译： 提供一种适用于抑制驱动特性的劣化的微型可移动装置，以及包括这种微型可移动装置的微型可移动装置阵列。 本发明的微型可移动装置（X1）包括可动部，包括第一驱动电极，用于在第一驱动电极和第二驱动电极之间产生静电吸引力的第二驱动电极，第一导体部分（22c），电连接到 第一驱动电极，与第二驱动电极电连接的第二导体部分（22b）和不与第一和第二驱动电极电连接并且连接到第一导体部分的第三导体部分（21a） （22c）经由绝缘膜（23）经由绝缘膜（23）与第二导体部（22b）接合。

公开(公告)号：US09348135B2

公开(公告)日：2016-05-24

申请号：US12555246

申请日：2009-09-08

申请人： Tsuyoshi Matsumoto ,  Norinao Kouma ,  Osamu Tsuboi

发明人： Tsuyoshi Matsumoto ,  Norinao Kouma ,  Osamu Tsuboi

IPC分类号： G02B26/08

CPC分类号： G02B26/0841 ,  B81B2201/042

摘要： A micro movable device includes: a micro movable substrate including a micro movable unit, the micro movable unit including a frame section, a movable section, and a coupling section which couples the frame section and the movable section to each other; a support base; a first spacer and a second spacer which are provided between the frame section of the micro movable substrate and the base, the first and second spacers joining the frame section and the base to each other; and a fixation member provided between the frame section of the micro movable substrate and the base, the fixation member including a spacer portion which joins the frame section and the base to each other and an adhesive portion which covers the spacer portion and joins the frame section and the base to each other, the fixation member being provided between the first and second spacers.

摘要翻译： 微型可移动装置包括：微型可移动基板，包括微型可移动单元，微型可移动单元包括框架部分，可移动部分和将框架部分和可移动部分彼此连接的联接部分; 支持基地 第一间隔件和第二间隔件，设置在微移动基板的框架部分和基座之间，第一和第二间隔件将框架部分和基座彼此接合; 以及固定构件，其设置在所述微动移动基板的框架部与所述基座之间，所述固定构件包括将所述框架部与所述基部连结的间隔部，以及覆盖所述间隔部的粘合部， 并且所述基座彼此相对，所述固定构件设置在所述第一和第二间隔件之间。

公开(公告)号：US20100208347A1

公开(公告)日：2010-08-19

申请号：US12614903

申请日：2009-11-09

申请人： Norinao Kouma ,  Osamu Tsuboi ,  Tsuyoshi Matsumoto

发明人： Norinao Kouma ,  Osamu Tsuboi ,  Tsuyoshi Matsumoto

IPC分类号： G02B27/00 ,  H02N1/00

CPC分类号： G02B26/0841 ,  G01J3/4535 ,  H02N1/006

摘要： A micro movable device includes a movable member, a stationary portion, and connecting portions each connected to the movable member and the stationary portion. The movable member includes a pair of electrodes. The stationary portion includes a pair of electrodes cooperating with the electrodes of the movable member to generate a driving force for translating the movable member in its thickness direction. The connection points at which the respective connecting portions are connected to the movable member are spaced from each other. The electrodes of the movable member are positioned between two mutually spaced connection points, as viewed along the spacing direction of the two connection points.

摘要翻译： 微型可移动装置包括可移动部件，固定部分和连接到可移动部件和固定部分的连接部分。 可动构件包括一对电极。 固定部分包括与可动构件的电极配合的一对电极，以产生用于在可移动构件的厚度方向上平移的驱动力。 各连接部分连接到可移动部件的连接点彼此间隔开。 当沿着两个连接点的间隔方向观察时，可动构件的电极位于两个相互间隔的连接点之间。

公开(公告)号：US08390911B2

公开(公告)日：2013-03-05

申请号：US13225097

申请日：2011-09-02

申请人： Osamu Tsuboi ,  Norinao Kouma ,  Tsuyoshi Matsumoto

发明人： Osamu Tsuboi ,  Norinao Kouma ,  Tsuyoshi Matsumoto

IPC分类号： G02B26/08 ,  G02B26/10 ,  G02B26/12

CPC分类号： G02B26/0841

摘要： A micro movable element array includes a first frame; a second frame; a first movable part row including plural first movable parts and a second movable part row including plural second movable parts. The first movable parts include first movable main parts. The second movable parts include second movable main parts. The first and second frames are stacked such that the first and second movable part rows are opposed to each other. In the first movable part row, the first movable parts are located such that the first movable main parts are arranged in a first direction and the first movable main parts and gaps are disposed alternately. In the second movable part row, the second movable parts are located such that the second movable main parts are arranged in the first direction and the second movable main parts are opposed to the corresponding gaps.

摘要翻译： 微型可移动元件阵列包括第一框架; 第二帧; 包括多个第一可移动部分的第一可移动部分行和包括多个第二可移动部分的第二可移动部分行。 第一可移动部件包括第一可移动主要部件。 第二可移动部件包括第二可移动主体部件。 第一和第二框架被堆叠成使得第一和第二可移动部件行彼此相对。 在第一可动部分行中，第一可移动部分被定位成使得第一可移动主体部分沿第一方向布置，并且第一可移动主体部分和间隙交替设置。 在第二可移动部分行中，第二可移动部分被定位成使得第二可移动主体部分沿第一方向布置，并且第二可移动主体部分与相应的间隙相对。

公开(公告)号：US08320035B2

公开(公告)日：2012-11-27

申请号：US12458601

申请日：2009-07-16

申请人： Osamu Tsuboi ,  Norinao Kouma ,  Tsuyoshi Matsumoto

发明人： Osamu Tsuboi ,  Norinao Kouma ,  Tsuyoshi Matsumoto

IPC分类号： G02B26/08

CPC分类号： G02B26/0841 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0831 ,  G02B6/3518

摘要： A micro-movable device includes a frame, a movable section including a body section, and a torsion coupling section for coupling the frame with the movable section to define an axis of oscillation of the movable section, wherein the frame includes a first extending portion and a second extending portion that are spaced apart from each other in a direction parallel to the axis and extend along the body section, and oppose the body section via a gap.

摘要翻译： 微型可移动装置包括框架，包括主体部分的可移动部分和用于将框架与可动部分联接以限定可动部分的振动轴线的扭转联接部分，其中框架包括第一延伸部分和 第二延伸部分，其在平行于轴线的方向上彼此间隔开并且沿着主体部分延伸，并且经由间隙与身体部分相对。