公开(公告)号：US20140120634A1

公开(公告)日：2014-05-01

申请号：US13767616

申请日：2013-02-14

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Hyun-Sung Bang ,  Won-Jong Kim ,  Ji-Young Choung ,  Joon-Gu Lee ,  Jin-Baek Choi ,  Yeon-Hwa Lee ,  Young-Woo Song ,  Jong-Hyuk Lee

IPC: H01L43/12

CPC classification number: G06F3/046 ,  G06F2203/04103 ,  H01L27/22

Abstract: A method of manufacturing a touch sensing panel includes providing a substrate, forming a plurality of first electrodes arranged on the substrate, the first electrodes being separated from each other, forming a photoresist layer on the plurality of first electrodes, forming a plurality of photoresist removing regions positioned to intersect the first electrodes and to be separated from each other on the photoresist layer, and forming a tunneling magnetoresistance (TMR) element layer and a second electrode layer comprising a plurality of second electrodes on the photoresist layer. The method provides a touch sensing panel capable of being driven at high speed and reduces manufacturing cost and time.

Abstract translation: 一种制造触摸感测面板的方法包括提供基板，形成布置在基板上的多个第一电极，第一电极彼此分离，在多个第一电极上形成光致抗蚀剂层，形成多个光致抗蚀剂去除 定位成与第一电极相交并在光致抗蚀剂层上彼此分离的区域，以及在光致抗蚀剂层上形成隧道磁阻（TMR）元件层和包括多个第二电极的第二电极层。 该方法提供了能够高速驱动并降低制造成本和时间的触摸感测面板。