摘要:
A method of forming a polycrystalline silicon layer and an atomic layer deposition apparatus used for the same. The method includes forming an amorphous silicon layer on a substrate, exposing the substrate having the amorphous silicon layer to a hydrophilic or hydrophobic gas atmosphere, placing a mask having at least one open and at least one closed portion over the amorphous silicon layer, irradiating UV light toward the amorphous silicon layer and the mask using a UV lamp, depositing a crystallization-inducing metal on the amorphous silicon layer, and annealing the substrate to crystallize the amorphous silicon layer into a polycrystalline silicon layer. This method and apparatus provide for controlling the seed position and grain size in the formation of a polycrystalline silicon layer.
摘要:
A method and apparatus are provided for recognizing characters in a portable terminal with a scan module. Scanned image data is generated by the scan module by scanning a scan target through a scanning-light input/output panel provided on an external surface of the portable terminal as the portable terminal moves across the scan target. Part of the scanned image data is deleted when a current moving speed of the portable terminal is less than a lower limit of an optimal scan speed range, and character recognition is performed on remaining scanned image data. Image data most similar to the scanned image data is detected from a previously stored correction image database when the current moving speed is greater than an upper limit of the optimal scan speed range, and characters corresponding to the detected image data are output as character recognition results.
摘要:
A pulse width modulator includes a discrete time oscillator, a data storage device, a data processing block, a counter, and a comparator. The discrete time oscillator generates a first address of bits used by the data processing block for reading first data from the data storage device. The data processing block generates second data from the first data and at least one bit of the first address bits. The comparator generates a pulse width modulation signal by comparing the second data and a digital count generated by the counter.
摘要:
Disclosed is a spacer of a windshield wiper for a vehicle including an upper panel, a pair of side panels extending downwardly from opposite lateral ends of the upper panel while defining a receiving space therebetween, the side panels being centrally formed with through holes, respectively, and annular protrusions protruded, toward each other, from the side panels around the through holes, and adapted to be fitted in through holes formed at an element of the windshield wiper to be assembled with the spacer, respectively. Each of the protrusions has a tapered structure having a diameter gradually reduced toward a free end of the protrusion, while having an annular step formed at the free end of each of the protrusions, and a plurality of slits formed at the annular step. In accordance with this structure, it is possible to prevent the spacer from being separated from an associated element of the windshield wiper upon assembling the elements of the windshield, while increasing the clamping force of the spacer, thereby minimizing the clearance defined between the spacer and the associated element.
摘要:
An improved common-channel message conversion method for a communication network interface between exchange systems which is capable of directly interfacing a DCN network and AMPS network by converting different message formats of a common-channel signalling method of a DCN network and AMPS network in one exchange system and coinciding different parameter values and operation between hierarchical structures.
摘要:
A thin film transistor including a first polycrystalline semiconductor layer disposed on a substrate, a second polycrystalline semiconductor layer disposed on the first polycrystalline semiconductor layer, and metal catalysts configured to adjoin the first polycrystalline semiconductor layer and spaced apart from one another at specific intervals.
摘要:
A thin film transistor, a method of fabricating the same, and an organic light emitting diode (OLED) display device including the same. The thin film transistor includes a substrate; a semiconductor layer disposed on the substrate and including a channel region; source/drain regions including ions and an offset region; a gate insulating layer disposed on the semiconductor layer; a gate electrode disposed on the gate insulating layer; a first insulating layer disposed on the gate electrode; a second insulating layer disposed on the first insulating layer; and source/drain electrodes disposed on the second insulating layer, and electrically connected to the source/drain regions of the semiconductor layer, respectively. The sum of thicknesses of the gate insulating layer and the first insulating layer that are on the source/drain regions is less than the vertical dispersion depth of the ions included in the source/drain regions.
摘要:
A method of fabricating an organic light emitting diode (OLED) display device having a thin film transistor including a polysilicon layer. The method of fabricating a polysilicon layer includes forming a buffer layer on a substrate, forming a metal catalyst layer on the buffer layer, diffusing a metal catalyst into the metal catalyst layer to the buffer layer, removing the metal catalyst layer, forming an amorphous silicon layer on the buffer layer, and annealing the substrate to crystallize the amorphous silicon layer into a polysilicon layer. The thin film transistor includes a substrate, a buffer layer disposed on the substrate, a semiconductor layer disposed on the buffer layer, a gate insulating layer disposed above the substrate and on the semiconductor layer, a gate electrode disposed on the gate insulating layer, a source electrode and a drain electrode both electrically connected to the semiconductor layer, and a metal silicide disposed between the buffer layer and the semiconductor layer.
摘要:
Provided is a sputtering apparatus which deposits a metal catalyst on an amorphous silicon layer at an extremely low concentration in order to crystallize amorphous silicon, and particularly minimizes non-uniformity of the metal catalyst caused by a pre-sputtering process without reducing process efficiency. This sputtering apparatus improves the uniformity of the metal catalyst deposited on the amorphous silicon layer at an extremely low concentration. The sputtering apparatus includes a process chamber having first and second regions, a metal target located inside the process chamber, a target transfer unit moving the metal target and having a first shield for controlling a traveling direction of a metal catalyst discharged from the metal target, and a substrate holder disposed in the second region to be capable of facing the metal target. A distance difference between a linear distance, which is a distance between a substrate loaded on the substrate holder and the metal target, and a length of the first shield is less than 3 cm.
摘要:
Provided is a sputtering apparatus which deposits a metal catalyst on an amorphous silicon layer at an extremely low concentration in order to crystallize amorphous silicon, and particularly minimizes non-uniformity of the metal catalyst caused by a pre-sputtering process without reducing process efficiency. This sputtering apparatus improves the uniformity of the metal catalyst deposited on the amorphous silicon layer at an extremely low concentration. The sputtering apparatus includes a process chamber having first and second regions, a metal target located inside the process chamber, a target transfer unit moving the metal target and having a first shield for controlling a traveling direction of a metal catalyst discharged from the metal target, and a substrate holder disposed in the second region to be capable of facing the metal target. A distance difference between a linear distance, which is a distance between a substrate loaded on the substrate holder and the metal target, and a length of the first shield is less than 3 cm.