利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

64 条记录 (耗时 0.025 秒)

    Apparatus and method for supporting a substrate
    61.
    发明授权
    Apparatus and method for supporting a substrate 失效
    用于支撑衬底的装置和方法

    公开(公告)号：US5471279A

    公开(公告)日：1995-11-28

    申请号：US378878

    申请日：1995-01-26

    申请人： Takeshi Takizawa

    发明人： Takeshi Takizawa

    IPC分类号： B23Q3/18 ,  G03F7/20 ,  G12B5/00 ,  H01L21/027 ,  H01L21/30 ,  H01L21/68 ,  H01L21/687 ,  G03B27/42

    CPC分类号： G03F7/7075 ,  G03F7/70691 ,  H01L21/68728 ,  H01L21/68735 ,  H01L21/6875

    摘要： A substrate supporting apparatus designed so that a substrate received and delivered by the apparatus can be positioned easily with improved accuracy. For this positioning, pressurized air is supplied between a float chuck and a base chuck of the substrate supporting apparatus to float the float chuck, and peripheral end surfaces of the float chuck are supported by cylinder pins and fixing pins. In this state, a substrate is received from a transport hand and is attracted to a surface of the float chuck. Thereafter, the cylinder pins are caused to recede, and the float chuck is moved together with the substrate by pressing forces of pressing springs to abut reference pins. As a result, a changeover valve is operated by output signals from photosensors to attract the float chuck to the base chuck.

    摘要翻译： 一种基板支撑装置，其设计成使得由设备接收和传送的基板能够以提高的精度容易地定位。 为了定位，在基板支撑装置的浮子卡盘和基座卡盘之间供给加压空气以浮动浮动卡盘，并且浮子卡盘的周边端面由气缸销和固定销支撑。 在这种状态下，从运送手接收基板并被吸引到浮动卡盘的表面。 此后，使气缸销倒退，并通过按压弹簧的压力使浮子卡盘与基板一起移动以抵靠基准销。 结果，转换阀由来自光电传感器的输出信号操作，以将浮动卡盘吸引到基座卡盘。