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公开(公告)号：US06584864B2
公开(公告)日：2003-07-01
申请号：US10183225
申请日：2002-06-26
IPC分类号： G01L110
CPC分类号： G01P15/123 , G01L1/106 , G01L1/183 , G01L9/0016 , G01L9/0019 , G01P15/097
摘要： A resonant sensor comprises a support structure comprising two support points; a laminar resonator suspended between said two support points of said support structure and comprising a plurality of substantially parallel flexural members which are responsive to relative movement of said support points; means for exciting said resonator into a balanced mode of oscillation and means for sensing motion of said resonator. Said means for sensing motion of said resonator is or are spaced from, and linked to, said flexible area of said resonator by means of levers. Said support points are preferably adapted to move relative to each other in response to a difference in pressure, force or acceleration.
摘要翻译： 谐振传感器包括包括两个支撑点的支撑结构; 悬挂在所述支撑结构的所述两个支撑点之间的层状谐振器，并且包括响应于所述支撑点的相对运动的多个基本平行的弯曲构件; 用于将所述谐振器激发成平衡振荡模式的装置和用于感测所述谐振器的运动的装置。用于感测所述谐振器的运动的所述装置借助于杠杆与所述谐振器的所述柔性区域间隔开并与所述谐振器连接。 支撑点优选地适于响应于压力，力或加速度的差异而相对于彼此移动。
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62.发明申请Resonant sensor and method of making a pressure sensor comprising a resonant beam structure 审中-公开谐振传感器和制造包括谐振梁结构的压力传感器的方法公开(公告)号：US20020157473A1
公开(公告)日：2002-10-31
申请号：US09733944
申请日：2001-01-12
发明人： Goeran Stemme , Edvard Kaelvesten
IPC分类号： G01L011/00
CPC分类号： G01L9/0016 , G01L9/0017 , G01L9/0042
摘要： A resonant microbeam pressure sensor is disclosed, comprising a microbeam suspended in a diaphragm in at least one point by suspension elements. Pressure applied to the diaphragm will cause the resonance frequency of the beam to shift. This shift is detectable and proportional to the pressure, The device is manufactured by surface micromachining.
摘要翻译： 公开了一种共振微束压力传感器，其包括通过悬架元件至少悬挂在隔膜中的微束。 施加到隔膜上的压力将导致梁的共振频率偏移。 该变化是可检测的并且与压力成比例。该装置通过表面微加工制造。
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公开(公告)号：US4644804A
公开(公告)日：1987-02-24
申请号：US631811
申请日：1984-07-17
申请人： A. Jurgen Ramm , Jerome Formaz
发明人： A. Jurgen Ramm , Jerome Formaz
CPC分类号： G01L9/0022 , G01L1/162 , G01L9/0016
摘要： A thin, piezoelectric membrane provided on both surfaces with electrodes, which may be disc-shaped or ring-shaped, is made to oscillate in the piezoelectric manner and the membrane is arranged to have some exterior force or pressure applied thereto, whereby changes in the frequency of oscillation are in response to the size of the force exerted on the membrane.
摘要翻译： 设置在两个表面上的具有可以是圆盘形或环形的电极的薄的压电膜被制成以压电方式振荡，并且膜被布置成具有施加到其上的一些外力或压力，由此， 振荡频率响应于施加在膜上的力的大小。
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公开(公告)号：US3745384A
公开(公告)日：1973-07-10
申请号：US3745384D
申请日：1972-01-07
申请人： BENDIX CORP
发明人： BLANCHARD W
CPC分类号： G01L9/0022 , G01L9/0016
摘要： A pressure responsive diaphragm or capsule having a variable self-resonant frequency characteristic is excited to vibrate in a mode other than the fundamental or f01 mode, that is, vibration occurs in a mode wherein at least first and second portions of the diaphragm are simultaneously moving 180* out of phase with respect to one another. This is accomplished by suitably coupling first and second electromechanical transducers to the first and second diaphragm portions respectively. A feedback amplifier whose output frequency is determined by the frequency at which the first transducer is vibrating is connected to drive the second transducer.
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公开(公告)号：US09915576B2
公开(公告)日：2018-03-13
申请号：US15031574
申请日：2014-09-29
CPC分类号： G01L9/0016
摘要： A pressure sensor includes: a fixed part; a ring-like oscillator that is supported on the fixed part by a plurality of support beams; a plurality of electrodes that are provided on the fixed part and arranged in an oscillating direction of the ring-like oscillator with a gap; electret films that are formed on either one of opposite surfaces of the ring-like oscillator and the electrodes.
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公开(公告)号：US09383283B2
公开(公告)日：2016-07-05
申请号：US14157235
申请日：2014-01-16
申请人： Kavlico Corporation
CPC分类号： G01L9/12 , G01L1/148 , G01L9/0016 , G01L9/0072 , H01G5/16 , Y10T29/41
摘要： A capacitive pressure transducer of an embodiment of the present invention capacitively couples two electrodes on a substrate with a diaphragm electrode to form a transducing circuit without the need for a physical connection between the electrodes. Embodiments of the present invention have a substrate with a coupling electrode and a sensing electrode and an attached diaphragm with a diaphragm electrode. A spacer positioned between the substrate and the diaphragm provides for a cavity that defines a gap between the sensing electrode and the diaphragm electrode. A dielectric spacer may be positioned over the coupling electrode to increase the capacitance between the coupling electrode and the diaphragm electrode. The capacitive pressure transducer has similar electrical characteristics as existing capacitive pressure transducers, is easier to manufacture, and has long-term reliability and durability improvements brought about by the elimination of mechanical interconnects and additional conductive materials.
摘要翻译： 本发明实施例的电容式压力换能器将衬底上的两个电极与隔膜电极电容耦合以形成转换电路，而不需要电极之间的物理连接。 本发明的实施例具有具有耦合电极和感测电极的基板以及具有隔膜电极的附接膜片。 位于基板和隔膜之间的间隔件提供限定感测电极和隔膜电极之间的间隙的空腔。 电介质间隔物可以位于耦合电极上方，以增加耦合电极和隔膜电极之间的电容。 电容式压力传感器具有与现有的电容式压力传感器相似的电特性，易于制造，并且通过消除机械互连和附加的导电材料而带来长期的可靠性和耐久性改善。
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公开(公告)号：US09146164B2
公开(公告)日：2015-09-29
申请号：US13788255
申请日：2013-03-07
CPC分类号： G01L1/146 , G01L1/2243 , G01L7/08 , G01L7/082 , G01L9/0016 , G01L9/0042 , G01L9/0044 , G01L9/0047 , G01L9/0054 , G01L9/0072 , G01L9/0073 , G01L9/0075
摘要： In an embodiment, an apparatus includes a first substrate. The first substrate may have a first side for accommodating a first diaphragm. The first substrate may also have a second side. The second side may include a polygonal-shaped depression that is sized to accommodate a second diaphragm associated with a second substrate. The first substrate and first diaphragm may be included in a first assembly and the second substrate and second diaphragm may be included in a second assembly. The first assembly and the second assembly may be included in a stack where at least a portion of the second diaphragm is positioned to fit inside the polygonal-shaped depression in the stack.
摘要翻译： 在一个实施例中，装置包括第一基板。 第一基板可以具有用于容纳第一隔膜的第一侧。 第一衬底也可以具有第二面。 第二侧可以包括多边形凹陷，其尺寸适于容纳与第二基底相关联的第二隔膜。 第一基板和第一隔膜可以包括在第一组件中，并且第二基板和第二隔膜可以包括在第二组件中。 第一组件和第二组件可以包括在堆叠中，其中第二膜片的至少一部分被定位成装配在堆叠体的多边形凹陷部内。
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68.发明授权Method and apparatus for damping diaphragm vibration in capacitance diaphragm gauges 有权用于阻尼电容隔膜计的隔膜振动的方法和装置公开(公告)号：US08997575B2
公开(公告)日：2015-04-07
申请号：US14106700
申请日：2013-12-13
发明人： Robert J. Ferran
IPC分类号： G01L9/12
CPC分类号： G01L9/0072 , G01L9/0016 , G01L9/12 , G01L27/005
摘要： A system and method mitigate the effects of these external vibrations on a capacitance diaphragm gauge by sensing the motion of the diaphragm at the first natural frequency of the diaphragm of the CDG. The presence of the natural frequency signals superimposed on the pressure signal is determined by sensing variations in the output of a sensor at or near the known natural frequency of the diaphragm and filtering that known low frequency from the output. The filtered signal is used in a feedback circuit to impose electrostatic forces on the diaphragm. The imposed electrostatic forces oppose the motion created by the external vibration to suppress the effects of the vibration on the pressure measured by the CDG.
摘要翻译： 系统和方法通过在CDG的隔膜的第一固有频率处感测隔膜的运动来减轻这些外部振动对电容隔膜计的影响。 叠加在压力信号上的固有频率信号的存在是通过感测传感器在等离子体的已知固有频率处或附近的输出的变化来确定的，并且从输出中滤出已知的低频。 滤波后的信号用于反馈电路，以对隔膜施加静电力。 施加的静电力与外部振动产生的运动相反，以抑制振动对CDG测量压力的影响。
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公开(公告)号：US20140251030A1
公开(公告)日：2014-09-11
申请号：US13788255
申请日：2013-03-07
IPC分类号： G01L1/14
CPC分类号： G01L1/146 , G01L1/2243 , G01L7/08 , G01L7/082 , G01L9/0016 , G01L9/0042 , G01L9/0044 , G01L9/0047 , G01L9/0054 , G01L9/0072 , G01L9/0073 , G01L9/0075
摘要： In an embodiment, an apparatus includes a first substrate. The first substrate may have a first side for accommodating a first diaphragm. The first substrate may also have a second side. The second side may include a polygonal-shaped depression that is sized to accommodate a second diaphragm associated with a second substrate. The first substrate and first diaphragm may be included in a first assembly and the second substrate and second diaphragm may be included in a second assembly. The first assembly and the second assembly may be included in a stack where at least a portion of the second diaphragm is positioned to fit inside the polygonal-shaped depression in the stack.
摘要翻译： 在一个实施例中，装置包括第一基板。 第一基板可以具有用于容纳第一隔膜的第一侧。 第一衬底也可以具有第二面。 第二侧可以包括多边形凹陷，其尺寸适于容纳与第二基底相关联的第二隔膜。 第一基板和第一隔膜可以包括在第一组件中，并且第二基板和第二隔膜可以包括在第二组件中。 第一组件和第二组件可以包括在堆叠中，其中第二膜片的至少一部分被定位成装配在堆叠体的多边形凹陷部内。
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公开(公告)号：US20120324998A1
公开(公告)日：2012-12-27
申请号：US13532331
申请日：2012-06-25
IPC分类号： G01D11/24
CPC分类号： G01L13/025 , G01L9/0008 , G01L9/0016 , G01L9/0048 , G01L13/00 , G01L19/0627 , G01L19/0645 , G01L19/142 , G01L19/147 , H01L2224/48091 , H01L2924/00014
摘要： A sensor unit may include a ceramic member including a first face and a second face opposite to each other with a predetermined interval, a sensor part mounted on the first face, a plurality of metal pins fixed to the second face, a plurality of internal wirings passing through the ceramic member, each of the plurality of internal wirings connecting the sensor part with one of the plurality of metal pins, and a metal member formed on a circumferential end of the second face and joined with a housing by welding.
摘要翻译： 传感器单元可以包括陶瓷构件，其包括以预定间隔彼此相对的第一面和第二面，安装在第一面上的传感器部分，固定到第二面的多个金属销，多个内部布线 穿过陶瓷构件，将传感器部分与多个金属销中的一个连接的多个内部布线中的每一个以及形成在第二面的周向端部上并通过焊接与壳体接合的金属构件。
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